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WO2003009662A1 - Board carrier - Google Patents

Board carrier Download PDF

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Publication number
WO2003009662A1
WO2003009662A1 PCT/JP2001/006068 JP0106068W WO03009662A1 WO 2003009662 A1 WO2003009662 A1 WO 2003009662A1 JP 0106068 W JP0106068 W JP 0106068W WO 03009662 A1 WO03009662 A1 WO 03009662A1
Authority
WO
WIPO (PCT)
Prior art keywords
support
support plate
substrate
rod
plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2001/006068
Other languages
French (fr)
Japanese (ja)
Inventor
Yoshimi Miura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hirose Electronic System Co Ltd
Original Assignee
Hirose Electronic System Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hirose Electronic System Co Ltd filed Critical Hirose Electronic System Co Ltd
Priority to PCT/JP2001/006068 priority Critical patent/WO2003009662A1/en
Priority to JP2003514863A priority patent/JPWO2003009662A1/en
Priority to CN01815492.1A priority patent/CN1456036A/en
Publication of WO2003009662A1 publication Critical patent/WO2003009662A1/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K13/00Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
    • H05K13/0061Tools for holding the circuit boards during processing; handling transport of printed circuit boards
    • H05K13/0069Holders for printed circuit boards

Definitions

  • the present invention relates to a printed wiring board (hereinafter referred to as a board) on which electronic components are mounted from one point on a manufacturing line of an electronic device or the like to another part, and further, from another manufacturing line to another manufacturing line.
  • a board a printed wiring board on which electronic components are mounted from one point on a manufacturing line of an electronic device or the like to another part, and further, from another manufacturing line to another manufacturing line.
  • the present invention relates to an improvement in a substrate transfer device that facilitates access from various aspects of the operation of a substrate, and can continuously cope with a difference in a width dimension for each type of substrate to be integrated and carried. . Background art
  • a conventional substrate transfer device of this type includes a plurality of locking grooves 1a formed on the upper surface of a rectangular flat support plate 1 and substantially parallel to a short side of the support plate. Are arranged so as to divide the long side of the support plate, and for each locking groove la, or for each of a plurality of locking grooves la according to the need of mounting width dimensions, the bottom of the substrate 2
  • a plurality of substrates are supported collectively in a posture leaning on the support plate 1a at intervals of the locking groove 1a, and 1 Integral with 1a, a worker who hooks and holds the appropriate hook hole 3 transfers it from one point on the production line to another point, and then to another production line or other production facility. It was something to be done.
  • the inventions according to claims 1 to 4 have been made in consideration of the problems of inefficiency of work space and work time and difficulty of work in the device of the background art, and Specifically, the position of a plurality of carrier plates is slidably adjusted on a support rod in a support frame assembled with support rods extending along the ridge line of each surface of a cube of 6 mm. Fixing, supporting a large number of substrates in a horizontal position in multiple stages in a vertical direction between a pair of support plates, and supporting the support frame itself so as to be relatively movable with respect to the floor surface.
  • the structure of the invention according to claim 1 is such that the support frame 10 is formed along the ridge line of each surface of the polyhedron so that each surface of the polyhedron is defined as an open surface.
  • the first support plate 1 1 force s, substantially horizontal so as to lock one side of the substrate 2 in a substantially horizontal posture as a supported body It is provided with a first support surface 11a in which the engraved locking grooves 1.1b are arranged in multiple stages in the vertical direction, and a second support plate 12tfi, substantially as a supported member.
  • a substantially horizontal locking groove 12b is provided in multiple stages in the vertical direction so as to lock the other side opposite to the above one side of the substrate 2 in the horizontal posture.
  • the first upper engaging member 20 is disposed on the first supporting plate 11 and substantially horizontally in the supporting frame 10.
  • At least one upper support extending The first lower engaging member 23 is slidably engaged with the rod 1 Ob 1 U in the longitudinal direction, and the first lower engaging member 23 is disposed on the first support plate 11 and the support frame Engages at least one lower support rod 10b IB extending substantially horizontally below the upper support rod 1Ob1U in the body 10 so as to be slidable in the longitudinal direction.
  • a second upper engaging member 14 is provided on the second support plate 12, and is disposed in a longitudinal direction with respect to the upper support rod 10 b 1 U in the support frame 10.
  • the second lower engaging member 15 is slidably engaged with the second support plate 12, and the lower support rod 10 b 1 in the support frame 10 is disposed on the second support plate 12.
  • the support frame support mechanism 13 supports the support frame 10 so as to be relatively movable with respect to the floor surface.
  • the second support surface 12 a of the plate 12 is arranged to face the second support surface 11 a, and the substrate 2 as a supported member is supported between the first and second support surfaces 11 a and 12 a.
  • the support frame 10 in which the caster 13a is disposed on the support rod 1Ob itself functions as a support frame support mechanism 13;
  • the entire body 10 acts so as to be movable relative to the floor.
  • the third support plate 17 further includes a third support surface 17a, and the third support plate 17a
  • the substrate 2 is provided integrally on the back surface of the second supporting surface 12 a and has a substantially horizontal posture as a supported member.
  • Locking grooves 1 ⁇ b which are engraved substantially horizontally, are provided in multiple stages in the vertical direction so as to lock one side of the second support plate.
  • the support plate 17 * It has the same structure, and is disposed on the third support plate 17 for the third upper engagement tool 21 1 s, and the support frame 10 It is slidably engaged with the upper support rod 1 O b 1 U in the longitudinal direction, and is disposed on the third support plate 17, the third lower engagement member 24 force s ′. Slidably engages with the lower support rod 1 Ob 1 B in the support frame! _ 0 in the longitudinal direction, the fourth upper engagement tool 22 force s, the fourth The fourth lower engaging member, which is disposed on the supporting plate 18 and slidably engages with the upper supporting rod 1 Ob 1 U in the supporting frame 10 in the longitudinal direction, is provided.
  • the support frame 10 And slidably engages in the longitudinal direction with respect to the support rods 1.0b1B, whereby the third support surface 17a of the third support plate 17 and the fourth support
  • the fourth supporting surface 18a of the supporting plate 18 is disposed so as to be opposed to the third supporting surface 18a, and the substrate 2 as a supported member is also provided between the third and fourth supporting surfaces 17a and 18a. It acts to carry
  • the structure of the invention according to claim 4 is that the upper engagement member restriction ⁇ 16 and the second upper engagement member i4 on the upper support rod 1Ob1U.
  • the second support plate 12 is easily and detachably and resiliently locked to the upper support bar on the opposite side of the second support surface 12a near the fixed portion.
  • the upper engaging member restricting member ⁇ 16 Force is applied to the upper engaging member 14 or the supporting plate 12 itself at that portion, and
  • the upper support rod 1Ob1U of the second plate 12 acts to regulate the sliding along the longitudinal direction.
  • FIG. 1 is a perspective view of a substrate transfer device including a pair of support frames 10.
  • FIG. 2 is a perspective view extracting and showing the upper engaging member 14 and the upper engaging member restrictor 16.
  • FIG. 3 shows an embodiment including a third support plate 17 and a fourth support plate 18.
  • FIG. 3 is a perspective view of the substrate transfer device.
  • FIG. 4 is a perspective view of the substrate transfer device in the embodiment including the support frame 10 having a regular pentagonal cross section when projected on a plane.
  • FIG. 5 relates to the background art, and is a perspective view of a conventional substrate transfer device.
  • the support frame 10 is, for example, one of the hexahedrons.'The six open faces 10a1, 10a2, 10a3, 10a4, 10a5, corresponding to the six faces of the psychomouth-shaped cube, It is assembled with support rods 10b made of aluminum or resin material extending along the ridges of the six surfaces so as to define 10a6.
  • the support rod 1 Ob extending along the upper ridge line of the four open surfaces 0 a, 10 a2, 10 a3, 10 a 4 facing the horizontal direction of the support rod 10 b, the upper support rod 1 Ob 1 U, 10b 2U, 10b3U, and 10b4U are configured.
  • the lower support rod 1 Ob 1 B is formed by the support rod 10 b extending along the lower ridges of the four open surfaces 10 a 1, 10 a2, 10 a3, and 10 a4 of the support rod 10 b. , 10b2B, 10b3B, and 10b4B.
  • any of the upper support rods 10b1U, 10b2U, 10b3U, 10b4U, e.g., 1 Ob iU and the lower support rods 10blB, 10b2B, 10b3B, 10b4B Arbitrary, for example, in a vertical position bridging between 10b 1B, a pair of second support plates 11, 12 forces 5 ', loaded and upper support rods 1 O b 1U
  • the lower support rod 1Ob1B is slidable along the longitudinal direction and can be fixed at any position in the longitudinal direction.
  • the first support surface 11a provided on the first support plate 11 so as to face the second support plate 12 includes an upper support rod 10b1U and a lower support rod 10b1B.
  • a plurality of locking grooves 11b which are formed so as to extend substantially horizontally in a depth direction orthogonal to the longitudinal direction, are arranged in multiple stages in the vertical direction.
  • a second support surface 12a provided on the second support plate 12 so as to face the first support plate 11 has an upper support rod 10b.
  • a plurality of locking grooves 1 2b that are engraved so as to extend substantially horizontally in the depth direction perpendicular to the longitudinal direction of the lower support rod 10b 1B are provided in multiple stages in the vertical direction,
  • the locking grooves 12b are horizontally opposed to the plurality of locking grooves 11b on the first holding surface 11a of the first holding plate 11 facing each other.
  • the two support plates 11, 12 are In the longitudinal direction of the rod, the locking groove on the first supporting surface 11a of the first supporting plate i1 is separated from each other by the approximate width of the substrate 2 as the supported member.
  • one side 2 c of the substrate 2 in a substantially horizontal posture is locked by the force 5 , and at the same time, the lock opposing the locking lb on the second support surface 12 a of the second support plate 12.
  • the sliding groove is adjusted on the support rod so that the other opposite side 2 d of the substrate 2 is locked by the stop groove 12 b.
  • the substrate 2 can be supported between the two supporting plates 11 and 12.
  • the loading positions of the first and second support plates 11 and 12 on the support frame 10 are on the open surface 10a1 and the upper and lower support rods 10b1U and 1Ob1 along the lower ridges.
  • the lower support rods 10b 2U, 1 Ob 2B It may be between B and the open surface 10a3
  • the upper and lower support rods along the lower ridge line may be between 10 b 3 U and 10 b 3 B, or the upper and lower support rods along the upper and lower ridge lines of open surface 10 a 4 It may be between 10b4U and 10b4B. From any of these four open surfaces 10a1, 10a2, 10a3, and '10a4, which are arranged facing the entire circumference around the vertical center axis of the support frame 10, the first Work access to the substrate 2 between the second support plates 11 and 12 is easy.
  • the first and second support surfaces 11 a and 12 a In this case, for example, looking at the first and second support plates 11 1 and 12 loaded on one open surface 10 a 1, the first and second support surfaces 11 a and 12 a
  • one or more opposing sides 2 of one or more substrates 2 are provided for one or more pairs of locking grooves 1 1b and 12b, each of which is horizontally opposed to each other.
  • c and 2 d move from the outside of the open surface 10 a 1 Open surface.
  • An appropriate support frame support mechanism 13 is provided between the support frame 10 and the floor surface FL, and the support frame support mechanism is located at a height from the floor surface FL suitable for work.
  • the entire structure of the substrate transfer device including the support frame 10, the first and second support plates 11, 12, and the substrate 2 is placed on the floor FL. On the other hand, it is movably supported.
  • the entire structure of the substrate transfer device travels along the floor FL using the manual pushing of an operator or the propulsion of an appropriate drive power source, thereby producing a production line. It can be transported from one location above to another, or even to another production line or other production facility. In this case, for example, as shown in the configuration of FIG.
  • the structure itself equivalent to the support frame 10 typically, casters 13 as rolling mechanisms are provided at the lower four corners of the support rod 10 Ob.
  • the support frame supporting mechanism 13 to which a is attached may be used. Naturally, it is possible to load a plurality of support plates from the outside on the four open surfaces around the vertical center axis of the support frame in the support frame support mechanism 13 here. it can.
  • the top surface 12 c of the support plate 12 illustrated in FIG. 1 engages with the upper support rod 10 b 1 U of the support frame 10 slidably in the longitudinal direction.
  • An upper engaging member 14 is provided.
  • the upper engagement member 14 is made of a metal or resin block-like member 14a, and the bottom flange portion 14b is attached to the top surface 12G by an appropriate fastening means such as a tap screw. By being tightened, it is fixed on the top surface 12c.
  • An engagement hole 14c is formed in the center of the upper engagement member 14, and the upper support rod 10b1U force s' is inserted into the engagement hole 14c.
  • the upper engaging tool engages with the upper support rod 10b1U, whereby the entire support plate 12 is positioned at an arbitrary position in the longitudinal direction on the upper support rod 1Ob1U. Sliding adjustment becomes possible.
  • the lower engaging member 15 having the same structure as the above-described upper engaging member 14 is also provided on the bottom surface of the support plate 12. This allows the entire support plate 12 to be slidably adjusted to any position in the longitudinal direction even on the lower support rod 1 Ob 1 B.
  • the second support plate 12 has been illustratively extracted and described above, not only the above-described first support plate 11 but also the third and fourth plates described later.
  • the top and bottom surfaces of all the support plates loaded in the support frame 10 here, including the support plates 17 and 18 of the above, have upper engaging tools 20, 21 and 21 of the same structure. 22 and the lower engaging members 23, 24, 25 are arranged in the order described.
  • the upper engaging member regulation ⁇ 16 is provided which is easily and detachably locked to the support rod 10b1U on the opposite side of the support surface 12a.
  • the upper engaging member restriction ⁇ 16 is made of a resin material, has a substantially C-shaped cutout portion 16 a, and has a small-diameter semicircular cross-section on the opposite surface of the cutout portion 16 a.
  • the outer peripheral expansion of the restricting member 16 is changed by forming the upper engaging restricting ring.
  • a pile is placed on the elastic force acting in the center contraction direction to restore the shape, and the worker opens the leg to release the upper support rod 10 b 1 U from the open notch 16 a. In this way, the control ring 16 is separated from the upper support rod 1 Ob 1 U.
  • the upper engagement member restriction ⁇ 16 is used.
  • the present invention is not limited to this example, and it is optional to fix the positions of all the support plates on the upper support rods with the upper engagement member restricting ring 16.
  • only one of the one-to-two support plates fixed at an arbitrary position on one upper support rod is fixed semi-fixed by the upper engaging device restriction 16 that is easily removable.
  • the sliding adjustment work on the position of the support plate on the upper support bar can be performed only on the position of the support plate on one side.
  • it is sufficient that the upper engaging member 14 of the carrier plate that is firmly fixed is fixed to the engaged upper support rod by an appropriate fixing means such as adhesion or accumulation. .
  • the upper and lower support rods 10 0 bl U and 1 O b 1 B of the support frame 10 are The engagement between the engaging members 21 and 24 and the upper and lower supporting rods 10b1U and 1Ob1B causes the above-described second frame to be inserted into the supporting frame 10.
  • a third supporting plate 17 is loaded.
  • the third support plate 17 is provided with the above-described second support surface 12 a facing the i-th support surface 11 a of the first support plate 11, and further on the back surface thereof.
  • a third support surface 17a having the same structure as the above-described first support surface 11a is integrally provided.
  • the engagement between the upper and lower engagement members 22 and 25 and the upper and lower support rods 10b1U and 1ObIB causes the support frame 10 to have
  • the second supporting plate 12 is rotated 180 degrees around its own vertical center axis.
  • the fourth supporting plate 18 having the same structure is mounted in the same manner as the third supporting plate 17. .
  • a substrate 2 having a predetermined width is set between the first support surface 11a of the first support plate 11 and the second support surface 12a in the third support plate 17, a substrate 2 having a predetermined width is set.
  • the support grooves 1 1b in the support surface 11a of the first and the support grooves 1 2b in the second support surface i 2a are held by both sides 2c and 2d.
  • the pitch of the locking grooves 12 b formed in the vertical direction on the second supporting surface 12 a in the third supporting plate 17 The pitch of the locking grooves 17b formed in the third holding plate surface 17a in the vertical direction in multiple stages is selected to be the same value, but is not limited to this, and the pitches of both are different.
  • the third support plate has a vertical pitch different from the vertical pitch of the substrate 2 supported between the first support plate 11 and the third support plate 17. It is also possible to carry between the 17 and the fourth 'carrying plate 18 a different kind of substrate 2 than that between the first and third carrying plates 11> 17. In this case, the fourth support plate 18 has a different structure from the first support plate 11 at the pitch point of the locking groove 18b.
  • the supporting frame 10 has six open faces 10a1, 10a2, 1010 corresponding to the six faces of a cube having a square planar projection cross section. a3, 10 a4, 10 a5, 10 a6 3 ⁇ 4 Assembled with support rods 10b so as to define, but the plane projection cross section of the support frame 10 is not limited to a square or a square .
  • the support frame 10 has a regular pentagonal plane projection cross section, and has seven open surfaces 10 a5 corresponding to the seven surfaces of the cube.
  • the present invention increases the integrated carrying density of the substrate, facilitates the transfer of the substrate while maintaining the high integrated carrying density, facilitates access to the accumulated and carried substrate from various aspects in operation, and Since it is possible to continuously cope with the difference in the width dimension for each type of substrate to be carried, the industrial use value is enormous.

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Handcart (AREA)
  • Packaging Frangible Articles (AREA)

Abstract

A board carrier for carrying printed wiring boards each mounting electronic components from one position to another position collectively. A supporting frame (10) is assembled by supporting rods (10b) such that six faces of a regular cube define open faces (10a1-10a6). Between an upper supporting rod (10b1U) and a lower supporting rod (10b1B) defining one open face, a pair of carrying plates (11, 12) in facing attitude are secured semi-fixedly to arbitrary positions on the supporting rods through sliding adjustment on these supporting rods. Between the pair of carrying plates, a plurality of boards (2) in horizontal attitude are locked at the opposite sides (2c, 2d) thereof by horizontal locking grooves (11b, 12b) etched in the carrying planes (11a, 12a) and carried in multi-stage in the vertical direction. A mechanism (13) for carrying the supporting frame itself movably relative to the floor face (FL) is fixed to a lower part of the lower supporting rod.

Description

技術分野 Technical field

この発明は、 電子部品が実装されたプリント配線基板 (以下基板.という) を電 子装置等の製造ライン上の 1つの箇明所から他の箇所へ、 さらには、 他の製造ライ ンゃ他の生産施設へと移動させる際に、 大量の基板を一纏めに担持して、 これら 細  The present invention relates to a printed wiring board (hereinafter referred to as a board) on which electronic components are mounted from one point on a manufacturing line of an electronic device or the like to another part, and further, from another manufacturing line to another manufacturing line. When transporting to a production facility, a large number of substrates are collectively carried

を床面沿いに搬送するようにした基板搬送装置に関連し、 特に、 基 の集積担持 密度を高め、 集積担持密度の高い状態のままでの基板の搬送を容易にし、 集積担 持された基板に対する作業上の多方面からのアクセスを容易にし、 集積担持され るべき基板の種類ごとの幅寸法上の相違に対して連続的に対処可能とするように した基板搬送装置の改良に関するものである。 背景技術 Related to a substrate transport device that transports substrates along the floor surface, and in particular, increases the base loading density, facilitates the transfer of substrates while maintaining the high loading status, and The present invention relates to an improvement in a substrate transfer device that facilitates access from various aspects of the operation of a substrate, and can continuously cope with a difference in a width dimension for each type of substrate to be integrated and carried. . Background art

従前のこの種の基板搬送装置は、 図 5に示されるように、 長方形平板状の担持 板 1上面で、 該担持板の短辺に略平行に刻設された係止溝 1 aの複数本が、 該担 持板の長辺を区切るように配設され おり、 係止溝 l aごとに、 或いは、 実装幅 寸法の必要性に応じて、 複数の係止溝 l aごとに、 基板 2の底部の 1辺 2 a力 S差 し込まれることで、 複数枚の基板が、 係止溝 1 a単位の間隔で、 担持板 1 a上に 立て掛けられた姿勢で、 一纏めに担持されて、 担持板 1 aと一体的に、 適宜の引 掛け穴 3を引掛け把持する作業員によって、 製造ライン上の 1つの箇所から他の 箇所へ、 さらには、 他の製造ラインや他の生産施設へと搬送されるものであつ た。  As shown in FIG. 5, a conventional substrate transfer device of this type includes a plurality of locking grooves 1a formed on the upper surface of a rectangular flat support plate 1 and substantially parallel to a short side of the support plate. Are arranged so as to divide the long side of the support plate, and for each locking groove la, or for each of a plurality of locking grooves la according to the need of mounting width dimensions, the bottom of the substrate 2 By inserting the force 2a into one side 2a, a plurality of substrates are supported collectively in a posture leaning on the support plate 1a at intervals of the locking groove 1a, and 1 Integral with 1a, a worker who hooks and holds the appropriate hook hole 3 transfers it from one point on the production line to another point, and then to another production line or other production facility. It was something to be done.

し しながら、 こうした背景技術の基板搬送装置にあっては、 複数枚の担持板 1を適宜の集積箇所に集積する際に、 担持板 1どうしゃ、 異なる担持板 1上の基 板 2どうしの干渉に阻まれて、 基板自体の集積担持密度が低く押さえられてしま い、 しかも、 そのような集積担持密度の低いままの状態で基板 2群を小口で繰り 返し搬送しなければならないことから、 総じて、 集積担持された基板 2群の嵩張 りの点で作業空間的に非効率であるばかりか、 小口搬送の点で作業時間的にも非 効率であるという問題点があつた。 However, in such a substrate transfer apparatus of the background art, when a plurality of carrier plates 1 are stacked at an appropriate accumulation location, the shape of the carrier plates 1 and the shape of the substrates 2 on different carrier plates 1 are different. Blocked by interference, the integrated carrying density of the substrate itself is kept low. Since it must be returned and transported, it is generally inefficient not only in terms of work space in terms of bulkiness of the two groups of integrated and loaded substrates, but also in terms of working time in terms of small-edge transport. There was a problem.

そのうえ、 担持板 1上に集積担持された基板 2群に対して作業者が基板 2群の差 込み ·取出し作業を行う際の担持板 1へのアクセスは、 担持板 1の上面からのも のに限られてしまい、 さらに、 集積担持されるべき基板の種類ごとの幅寸法の大 きな相違に対しては、 幅寸法の異なる複数種類の担持板 1を用意しておき、 幅寸 法の段階的区分に対応する種類の担持板 1の選択使用で対処しなければならない ことから、 上面のみからのアクセスの点では、 使い勝手が劣悪であり、 担持板 1 の種類の選択使用の点では、 段取り力 S煩瑣であり、 総じて、 作業がし難いという 問題点もあった。 発明の開示 In addition, when the operator inserts and removes the two groups of substrates from the two groups of substrates stacked and supported on the supporting plate 1, the operator accesses the supporting plate 1 from the upper surface of the supporting plate 1. In addition, for a large difference in the width of each type of substrate to be integrated and supported, a plurality of types of support plates 1 having different widths are prepared, and the width of the Since it must be dealt with by selectively using the type of support plate 1 corresponding to the stepwise classification, the usability is poor in terms of access only from the top surface, and in terms of the selective use of the type of support plate 1, Setup force S It was complicated, and there was also a problem that work was generally difficult. Disclosure of the invention

そこで、 このような問題点を解決し、 作業空間的にも、 作業時間的にも効率が よく、 担持板へのアクセスや担持板の段取りの点で作業のし易い基板搬送装置を 提供することが、 請求項 1〜4記載の発明の課題である。  In view of the above, it is an object of the present invention to provide a substrate transfer device which solves such problems and is efficient in terms of work space and work time, and is easy to work on in terms of access to the support plate and setup of the support plate. The object of the invention described in claims 1 to 4 is as follows.

かかる課題を解決するために、 請求項 1〜4記載の発明は、 上記背景技術の装 置における作業空間的、 作業時間的な非効率さや作業のし難さの問題点に鑑み、 多面体、 典型的には、 立方 6两体の各面の稜線に沿って延在する支持棒で組み立 てられた支持枠体中の支持棒上で、 複数枚の担持板を摺動自在に位置調整して固 定し、 1対の担持板間に水平姿勢の多数枚の基板を垂直方向に多段に担持し、 支 持枠体自体を床面に対して相対移動自在に担持することにより、 基板の集積担持 密度を高め、 集積密度の高い状態のままでの基板の搬送を容易にし、 集積担持さ れた基板に対する作業上の多方面からのアクセスを容易にし、 集積担持されるベ き基板の種類ごとの幅寸法上の相違に対して連続的に対処可能にした改良構成の 基板搬送装置を提供するものである。 それ故に、 下記請求項 1〜4記載の発明が 主張される。 請求項 1記載の発明の構成は、 図 1に示されるように、 支持枠体 1 0が、 多面 体の各面を開放面として画成するように、 該多面体の各面の稜線に沿って延在す る支持棒 1 O bで組み立てられており、 第 1の担持板 1 1力 s、 被担持体としての 略水平姿勢の基板 2の 1つの辺を係止するように、 略水平に刻設された係止溝 1 . 1 bが垂直方向に多段に配設されている第 1の担持面 1 1 aを備えており、 第 2 の担持板 1 2 tfi、 被担持体としての略水平姿勢の基板 2の上記 1つの辺に対向す るもう 1つの辺を係止するように、 略水平に刻設された係止溝 1 2 bが垂直方向 に多段に配設されている第 2の担持面 1 2 aを備え'ており、 第 1の上部係合具 2 0が、 上記第 1の担持板 1 1に配設されていて、 上記支持枠体 1 0中の略水平に 延在する少なくても 1つの上部支持棒 1 O b 1 Uに対して、 長手方向に摺動自在 に係合し、 第 1の下部係合具 2 3が、 上記第 1の担持板 1 1に配設されていて、 上記支持枠体 1 0中の上記上部支持棒 1 O b 1 Uの下方で略水平に延在する少な くても 1つの下部支持棒 1 0 b I Bに対して、 長手方向に摺動自在に係合し、 第 2の上部係合具 1 4が、 上記第 2の担持板 1 2に配設されていて、 上記支持枠体 1 0中の上記上部支持棒 1 0 b 1 Uに対して、 長手方向に摺動自在に係合し、 第 2の下部係合具 1 5 、 上記第 2の担持板 1 2に配設されていて、 上記支持枠体 1 0中の上記下部支持棒 1 0 b 1 Bに対して、 長手方向に摺動自在に係合し、 支 持枠体担持機構 1 3が、 上記支持枠体 1 0を床面に対して相対移動自在に担持し ており、 これにより、 上記第 1の担持板 1 1の上記第 1の担持面 1 1 aと上記第 2の担持板 1 2の上記第 2の担持面 1 2 aとが対向配置され、 該第 1、 第 2の担 持面 1 1 a、 1 2 a間に、 被担持体としての基板 2を担持するように作用する。 請求項 2記載の発明の構成は、 上記支持棒 1 O bにキャスタ一1 3 aが配設さ れている上記支持枠体 1 0自体が支持枠体担持機構 1 3として働き、 上記支持枠 体 1 0全体を床面に対して相対移動自在に担持するように作用する。 In order to solve such a problem, the inventions according to claims 1 to 4 have been made in consideration of the problems of inefficiency of work space and work time and difficulty of work in the device of the background art, and Specifically, the position of a plurality of carrier plates is slidably adjusted on a support rod in a support frame assembled with support rods extending along the ridge line of each surface of a cube of 6 mm. Fixing, supporting a large number of substrates in a horizontal position in multiple stages in a vertical direction between a pair of support plates, and supporting the support frame itself so as to be relatively movable with respect to the floor surface. Increasing the loading density, facilitating the transfer of substrates while maintaining the high integration density, facilitating access to the loaded and loaded substrates from various directions, and for each type of substrate to be loaded and loaded Board transfer device with improved structure that can continuously deal with differences in width It is intended to provide. Therefore, the following claims 1 to 4 are claimed. As shown in FIG. 1, the structure of the invention according to claim 1 is such that the support frame 10 is formed along the ridge line of each surface of the polyhedron so that each surface of the polyhedron is defined as an open surface. Assembled with the extending support rod 1 Ob, the first support plate 1 1 force s, substantially horizontal so as to lock one side of the substrate 2 in a substantially horizontal posture as a supported body It is provided with a first support surface 11a in which the engraved locking grooves 1.1b are arranged in multiple stages in the vertical direction, and a second support plate 12tfi, substantially as a supported member. A substantially horizontal locking groove 12b is provided in multiple stages in the vertical direction so as to lock the other side opposite to the above one side of the substrate 2 in the horizontal posture. 2, the first upper engaging member 20 is disposed on the first supporting plate 11 and substantially horizontally in the supporting frame 10. At least one upper support extending The first lower engaging member 23 is slidably engaged with the rod 1 Ob 1 U in the longitudinal direction, and the first lower engaging member 23 is disposed on the first support plate 11 and the support frame Engages at least one lower support rod 10b IB extending substantially horizontally below the upper support rod 1Ob1U in the body 10 so as to be slidable in the longitudinal direction. A second upper engaging member 14 is provided on the second support plate 12, and is disposed in a longitudinal direction with respect to the upper support rod 10 b 1 U in the support frame 10. The second lower engaging member 15 is slidably engaged with the second support plate 12, and the lower support rod 10 b 1 in the support frame 10 is disposed on the second support plate 12. B is slidably engaged in the longitudinal direction with respect to B, and the support frame support mechanism 13 supports the support frame 10 so as to be relatively movable with respect to the floor surface. The first support surface 11a of the first support plate 11 and the second support The second support surface 12 a of the plate 12 is arranged to face the second support surface 11 a, and the substrate 2 as a supported member is supported between the first and second support surfaces 11 a and 12 a. Act on. According to a second aspect of the present invention, the support frame 10 in which the caster 13a is disposed on the support rod 1Ob itself functions as a support frame support mechanism 13; The entire body 10 acts so as to be movable relative to the floor.

請求項 3記載の発明の構成は、 図 3に示されるように、 第 3の担持板 1 7が、 第 3の担持面 1 7 aをさらに備えており、 該第 3の担持板 1 7 aは、 上記第 2の 担持面 1 2 aの背面に一体的に設けられ、 被担持体としての略水平姿勢の基板 2 の 1つの辺を係止するように、 略水平に刻設された係止溝 1 Ί bが垂直方向に多 段に配設されており、 第 4の担持板 1 8が、 上記第 2の担持板 1 7と反転 *同一 構造のものであり、 第 3の上部係合具 2 1力 s、 上記第 3の担持板 1 7に配設され ていて、 上記支持枠体 1 0中め上記上部支持棒 1 O b 1 Uに対して、 長手方向に 摺動自在に係合し、 第 3の下部係合具 2 4力 s'、 上記第 3の担持板 1 7に配設され ていて、 上記支持枠体 !_ 0中の上記下部支持棒 1 O b 1 Bに対して、 長手方向に 摺動自在に係合し、 第 4の上部係合具 2 2力 s、 上記第 4の担持板 1 8に配設され ていて、 上記支持枠体 1 0中の上記上部支持棒 1 O b 1 Uに対して、 長手方向に 摺動自在に係合し、 第 4の下部係合具 2 5が、 上記第 4の担持板 1 8に配設され ていて、 上記支持枠体 1 0中の上記下部支持棒 1· 0 b 1 Bに対して、 長手方向に 摺動自在に係合し、 これにより、 上記第 3の担持板 1 7の上記第 3の担持面 1 7 aと、 上記第 4の担持板 1 8の上記第 4の担持面 1 8 aとが対向配置されてい て、 該第 3、 第 4の担持面 1 7 a、 1 8 a間にも、 被担持体としての基板 2を担 持するように作用する。 As shown in FIG. 3, in the configuration of the invention according to claim 3, the third support plate 17 further includes a third support surface 17a, and the third support plate 17a The substrate 2 is provided integrally on the back surface of the second supporting surface 12 a and has a substantially horizontal posture as a supported member. Locking grooves 1 Ίb, which are engraved substantially horizontally, are provided in multiple stages in the vertical direction so as to lock one side of the second support plate. It is the same structure as the support plate 17 * It has the same structure, and is disposed on the third support plate 17 for the third upper engagement tool 21 1 s, and the support frame 10 It is slidably engaged with the upper support rod 1 O b 1 U in the longitudinal direction, and is disposed on the third support plate 17, the third lower engagement member 24 force s ′. Slidably engages with the lower support rod 1 Ob 1 B in the support frame! _ 0 in the longitudinal direction, the fourth upper engagement tool 22 force s, the fourth The fourth lower engaging member, which is disposed on the supporting plate 18 and slidably engages with the upper supporting rod 1 Ob 1 U in the supporting frame 10 in the longitudinal direction, is provided. 25 is disposed on the fourth support plate 18, and the support frame 10 And slidably engages in the longitudinal direction with respect to the support rods 1.0b1B, whereby the third support surface 17a of the third support plate 17 and the fourth support The fourth supporting surface 18a of the supporting plate 18 is disposed so as to be opposed to the third supporting surface 18a, and the substrate 2 as a supported member is also provided between the third and fourth supporting surfaces 17a and 18a. It acts to carry

請求項 4記載の発明の構成は、 図 2に示されるように、 上部係合具規制瑋 1 6 、 上記上部支持棒 1 O b 1 U上の上記第 2の上部係合具 i 4の係合、 固定され る部位付近の上記第 2の担持板 1 2の上記第 2の担持面 1 2 aの反対側で、 該上 部支持棒に対して、 着脱容易に弾発係止されていて、 該上部係合具規制璟 1 6 力 その部位で該上部係合具 1 4又は、 該担持板 1 2自体に当接して、 該担持板 As shown in FIG. 2, the structure of the invention according to claim 4 is that the upper engagement member restriction 瑋 16 and the second upper engagement member i4 on the upper support rod 1Ob1U. In this case, the second support plate 12 is easily and detachably and resiliently locked to the upper support bar on the opposite side of the second support surface 12a near the fixed portion. The upper engaging member restricting member 璟 16 Force is applied to the upper engaging member 14 or the supporting plate 12 itself at that portion, and

1 2の該上部支持棒 1 O b 1 Uの長手方向に沿う摺動を規制するように作用す る。 ' 図面の簡単な説明 The upper support rod 1Ob1U of the second plate 12 acts to regulate the sliding along the longitudinal direction. '' Brief description of the drawings

図 1〜図 4は、 この発明に関するものである。 1 to 4 relate to the present invention.

図 1は、 支持枠対 1 0を含む基板搬送装置の斜視図である。 FIG. 1 is a perspective view of a substrate transfer device including a pair of support frames 10.

図 2は、 上部係合具 1 4と上部係合具規制璟 1 6を抽出して示す斜視図である。 図 3は、 第 3の担持板 1 7と第 4の担持板 1 8を含むような実施の形態における 基板搬送装置の斜視図である。 FIG. 2 is a perspective view extracting and showing the upper engaging member 14 and the upper engaging member restrictor 16. FIG. 3 shows an embodiment including a third support plate 17 and a fourth support plate 18. FIG. 3 is a perspective view of the substrate transfer device.

図 4は、 平面投影断面が正五角形である支持枠体 10を含むような実施の形態に おける基板搬送装置の斜視図である。 FIG. 4 is a perspective view of the substrate transfer device in the embodiment including the support frame 10 having a regular pentagonal cross section when projected on a plane.

図 5は、 '背景技術に関するものであり、 従前の基板搬送装置の斜視図である。 発明を実施するための最良の形態 FIG. 5 relates to the background art, and is a perspective view of a conventional substrate transfer device. BEST MODE FOR CARRYING OUT THE INVENTION

この発明を実施するための最良の形態を図 1〜図 4を参照しつつ以下に説明す る。 支持枠体 10は、 例えば、 6面体の 1つである'サイコ口状の立方体の 6つの 面に対応する 6つの開放面 10 a 1、 10 a 2 , 10 a3、 10 a4、 10 a 5、 10 a 6を画成するように、 該 6つの面の稜線に沿って延在するアルミニゥ ム製ゃ樹脂製の官材などから成る支持棒 10 bで組み立てられている。 支持棒 10 bのうちの水平方向に臨む 4つの開放面 0 a、 10 a2、 10 a3、 10 a 4の上部稜線に沿って延在する支持棒 1 Obにより、 上部支持棒 1 Ob 1 U、 10b 2U、 10b3U、 10 b 4 Uが構成されている。 同様に、 支持棒 10 b のうちの、 該 4つの開放面 10 a 1、 10 a2、 10 a3, 10 a4の下部稜線 に沿つ Τ延在する支持棒 10bにより、 下部支持棒 1 Ob 1 B、 10b2B、 1 0b3B、 10 b 4 Bが構成されている。.上部支持棒 10 b 1 U、 10b2U、 10b3U、 10b4Uのうちの任意のもの、 例えば、 1 Ob i Uと、 下部支持 棒 10 b l B、 10b2B、 10 b 3 B, 10 b 4 Bのうちの任意のもの、 例え ば、 10b 1 Bとの間を橋絡するような垂直姿勢で、 1対の第 第 2の担持板 1 1、 12力5'、 装填され、 上部支持棒 1 O b 1U及び下部支持棒 1 O b 1 Bの長 手方向沿いに摺動自在に、 かつ、 該長手方向の任意の位置で固定可能になってい る。 第 1の担持板 1 1上で、 第 2の担持板 12に対面するように備えられた第 1 の担持面 1 1 aには、 上部支持棒 10 b 1 U及び下部支持棒 10 b 1 Bの長手方 向に直交する奥行き方向に略水平に延びるように刻設された複数の係止溝 1 1 b が垂直方向に多段に配設されている。 一方、 第 2の担持板 12上で、 第 1の担持 板 1 1に対面するように備えられた第 2の担持面 12 aには、 上部支持棒 10b l υ及び下部支持棒 10 b 1 Bの長手方向に直交する奥行き方向に略水平に延び るように刻設された複数の係止溝 1 2 bが垂直方向に多段に配設されていて、 該 係止溝 12 bの各々が対面する第 1の担持板 1 1の第 1の担持面 1 1 a上の複数 の係止溝 1 1 bの各々に対して水平に対向配置されている。 この場合、 上部支持 棒 10 b 1 U及び下部支持棒 1 Ob 1 B上での、 第 1、 第 2の担持板' 1 1、 12 の位置に関しては、 両担持板 1 1、 12が該支持棒の長手方向、 いに、 被担持体 としての基板 2の略々の幅寸法だけ相互に離隔していて、 第 1の担持板 i 1の第 1の担持面 1 1 a上の係止溝 1 1 bで、 略水平姿勢の基板 2の 1つの辺 2 c力 5係 止されると同時に、 第 2の担持板 12の第 2の担持面 12 a上で該係止 l b に対向する係止溝 1 2 bで、 基板 2のもう 1つの対向辺 2 dが係止されるよう に、 該支持棒上で摺動調整されるものである。 第 1、 第 2の担持板 1 1、 12 の、 こうした摺動調整により、 ここでの被担持体としての基板 2における種類ご との幅寸法上の相違に対して連続的に対処しながら、 両担持板 1 1、 12間に基 板 2を担持することができる。 第 1、 第 2の担持板 1 1、 12の支持枠体 10へ の装填箇所は、 開放面 10 a 1の上 '下両稜線沿いの上部 ·下部両支持棒 10 b 1 U、 1 Ob 1 B間に限られるものではなく、 開放面 10 a 2の上 ·下両稜線沿 いの上部♦下部両支持棒 10b 2U、 1 Ob 2 B間であってもよいし、 開放面 1 0 a 3の上 ·下両稜線沿いの上部 ·下部両支持棒 10 b 3 U、 10 b 3 B間であ つてもよいし、 開放面 10 a 4の上'下両稜線沿いの上部 ·下部両支持棒 10 b 4U、 10 b 4 B間であってもよい。 支持枠体 10の垂直中心軸回りの全周に面 して配置されるこれら 4つの開放面 10 a 1、 10 a2、 10 a3、 '10 a4の いずれからでも、 そこに装填される第 1、 第 2の担持板 1 1、 12間の基板 2に 対して作業上のアクセスが容易である。 この場合、 例えば、 1つの開放面 10 a 1に対して装填されている第 1、 第 2の担持板 1 1、 1 2について見ると、 第 1、 第 2の担持面 1 1 a、 12 a上で、 1つずつが互いに水平対置されている複 数対の係止溝 1 1 b、 12 bの 1対又は任意の複数対に対して、 1枚又は複数枚 の基板 2の対向両辺 2 c、 2 dが、 開放面 10 a 1の外方から、 内方に向けて該 開放面.1 0 a 1を通過して押し込まれるように揷人されて、 そこに係止され、 或 いは逆に、 該係止溝 l l—b、 1 2 bから、 基板 2の対向両辺 2 c、 2 d力 開放 面 1 0 a 1の外方に向けて、 該開放面 1 0 a 1を通過して引き出されるように除 去されて、 そこでの係止が解除されるものである。 The best mode for carrying out the present invention will be described below with reference to FIGS. The support frame 10 is, for example, one of the hexahedrons.'The six open faces 10a1, 10a2, 10a3, 10a4, 10a5, corresponding to the six faces of the psychomouth-shaped cube, It is assembled with support rods 10b made of aluminum or resin material extending along the ridges of the six surfaces so as to define 10a6. By the support rod 1 Ob extending along the upper ridge line of the four open surfaces 0 a, 10 a2, 10 a3, 10 a 4 facing the horizontal direction of the support rod 10 b, the upper support rod 1 Ob 1 U, 10b 2U, 10b3U, and 10b4U are configured. Similarly, the lower support rod 1 Ob 1 B is formed by the support rod 10 b extending along the lower ridges of the four open surfaces 10 a 1, 10 a2, 10 a3, and 10 a4 of the support rod 10 b. , 10b2B, 10b3B, and 10b4B. Any of the upper support rods 10b1U, 10b2U, 10b3U, 10b4U, e.g., 1 Ob iU and the lower support rods 10blB, 10b2B, 10b3B, 10b4B Arbitrary, for example, in a vertical position bridging between 10b 1B, a pair of second support plates 11, 12 forces 5 ', loaded and upper support rods 1 O b 1U And the lower support rod 1Ob1B is slidable along the longitudinal direction and can be fixed at any position in the longitudinal direction. The first support surface 11a provided on the first support plate 11 so as to face the second support plate 12 includes an upper support rod 10b1U and a lower support rod 10b1B. A plurality of locking grooves 11b, which are formed so as to extend substantially horizontally in a depth direction orthogonal to the longitudinal direction, are arranged in multiple stages in the vertical direction. On the other hand, a second support surface 12a provided on the second support plate 12 so as to face the first support plate 11 has an upper support rod 10b. l and a plurality of locking grooves 1 2b that are engraved so as to extend substantially horizontally in the depth direction perpendicular to the longitudinal direction of the lower support rod 10b 1B are provided in multiple stages in the vertical direction, The locking grooves 12b are horizontally opposed to the plurality of locking grooves 11b on the first holding surface 11a of the first holding plate 11 facing each other. In this case, regarding the positions of the first and second support plates '11, 12 on the upper support rod 10b1U and the lower support rod 1Ob1B, the two support plates 11, 12 are In the longitudinal direction of the rod, the locking groove on the first supporting surface 11a of the first supporting plate i1 is separated from each other by the approximate width of the substrate 2 as the supported member. At 1 1 b, one side 2 c of the substrate 2 in a substantially horizontal posture is locked by the force 5 , and at the same time, the lock opposing the locking lb on the second support surface 12 a of the second support plate 12. The sliding groove is adjusted on the support rod so that the other opposite side 2 d of the substrate 2 is locked by the stop groove 12 b. By such sliding adjustment of the first and second support plates 11 and 12, while continuously coping with the difference in the width dimension of each type of the substrate 2 as the supported member, The substrate 2 can be supported between the two supporting plates 11 and 12. The loading positions of the first and second support plates 11 and 12 on the support frame 10 are on the open surface 10a1 and the upper and lower support rods 10b1U and 1Ob1 along the lower ridges. It is not limited to between B, the upper surface along the upper and lower ridges of the open surface 10a2 ♦ The lower support rods 10b 2U, 1 Ob 2B It may be between B and the open surface 10a3 The upper and lower support rods along the lower ridge line may be between 10 b 3 U and 10 b 3 B, or the upper and lower support rods along the upper and lower ridge lines of open surface 10 a 4 It may be between 10b4U and 10b4B. From any of these four open surfaces 10a1, 10a2, 10a3, and '10a4, which are arranged facing the entire circumference around the vertical center axis of the support frame 10, the first Work access to the substrate 2 between the second support plates 11 and 12 is easy. In this case, for example, looking at the first and second support plates 11 1 and 12 loaded on one open surface 10 a 1, the first and second support surfaces 11 a and 12 a In the above, one or more opposing sides 2 of one or more substrates 2 are provided for one or more pairs of locking grooves 1 1b and 12b, each of which is horizontally opposed to each other. c and 2 d move from the outside of the open surface 10 a 1 Open surface. It is engaged so as to be pushed through through 10 a 1 and is locked there, or conversely, from the locking grooves ll-b and 12 b, both opposing sides of the substrate 2 2c, 2d force The outer surface of the open surface 10a1 is removed so as to be pulled out through the open surface 10a1 and is unlocked there. .

支持枠体 1 0と床面 F Lとの間には、 適宜の支持枠体担持機構 1 3が架設されて おり、 該支持枠体担持機構は、 作業に好適な床面 F Lからの高さ位置に、 支持枠 体 1 0を支持するとともに、 支持枠体 1 0、 第 1、 第 2の担持板 1 1、 1 2、 基 板 2などを含む基板搬送装置の構造物全体を床面 F Lに対して、 相対移動自在に 担持する。 こうした支持枠体担持機構 1 3の働きにより、 作業員の手押し又は、 適宜の駆動動力源の推進力を用いて、 基板搬送装置の構造物全体を床面 F L沿い に走行させることで、 製造ライン上の 1つの箇所から他の箇所へ、 さらには、 他 の製造ラインや他の生産施設へと搬送することができる。 この場合、 例えば、 図 1例示の構成のように、 支持枠体 1 0と同等の構造物自体、 典型的には、 支持棒 1 O bの下部の 4隅に転動機構としてのキャスタ 1 3 aを取り付けたものが支持 枠体担持機構 1 3であってもよい。 当然のことながら、 ここでの支持枠体担持機 構 1 3中の支持枠体の垂直中心軸回りの 4つの開放面にも、 外方からアクセス可 能に複数の担持板を装填することができる。 An appropriate support frame support mechanism 13 is provided between the support frame 10 and the floor surface FL, and the support frame support mechanism is located at a height from the floor surface FL suitable for work. In addition to supporting the support frame 10, the entire structure of the substrate transfer device, including the support frame 10, the first and second support plates 11, 12, and the substrate 2, is placed on the floor FL. On the other hand, it is movably supported. With the support frame support mechanism 13, the entire structure of the substrate transfer device travels along the floor FL using the manual pushing of an operator or the propulsion of an appropriate drive power source, thereby producing a production line. It can be transported from one location above to another, or even to another production line or other production facility. In this case, for example, as shown in the configuration of FIG. 1, the structure itself equivalent to the support frame 10, typically, casters 13 as rolling mechanisms are provided at the lower four corners of the support rod 10 Ob. The support frame supporting mechanism 13 to which a is attached may be used. Naturally, it is possible to load a plurality of support plates from the outside on the four open surfaces around the vertical center axis of the support frame in the support frame support mechanism 13 here. it can.

図 2に進んで、 図 1例示の担持板 1 2の頂面 1 2 cには、 支持枠体 1 0の上部支 持棒 1 0 b 1 Uに対して長手方向摺動自在に係合する上部係合具 1 4が配設され ている。 上部係合具 1 4は、 金属製又は樹脂製のブロック様部材 1 4 aから成 り、 底部の鍔部 1 4 bがタップスクリューなどの適宜の締結手段により、 該頂面 1 2 Gに対して締糸吉されることで、 該頂面 1 2 c上に固定されている。 上部係合 具 1 4の中央部には、 係合孔 1 4 cが穿設されており、 該係合孔 1 4 cに対して 上部支持棒 1 0 b 1 U力 s '挿入されることで、 該上部係合具が該上部支持棒 1 0 b 1 Uに係合し、 これにより、 支持板 1 2全体が、 該上部支持棒 1 O b 1 U上での 長手方向任意の位置に摺動調整可能となる。 図示中に省略されているが、 当然 に、 担持板 1 2の底面にも、 上述の上部係合具 1 4と同等構造の下部係合具 1 5 が配設されていて、 これにより、 担持板 1 2全体が下部支持棒 1 O b 1 B上で も、 長手方向任意の位置に摺動調整可能となる。 以上で、 第 2の担持板 1 2を例 示的に抽出して説明を行ったとごろであるが、 既述の第 1の担持板 1 1はもとよ り、 後述の第 3、 第 4の担持板 1 7、 1 8も含めて、 ここでの支持枠体 1 0に装 填されるすべての担持板の頂面と底面には、 同等構造の上部係合具 2 0、 2 1、 2 2と下部係合具 2 3、 2 4、 2 5カ それぞれ、 記載の順序で配設されている ものである。 Proceeding to FIG. 2, the top surface 12 c of the support plate 12 illustrated in FIG. 1 engages with the upper support rod 10 b 1 U of the support frame 10 slidably in the longitudinal direction. An upper engaging member 14 is provided. The upper engagement member 14 is made of a metal or resin block-like member 14a, and the bottom flange portion 14b is attached to the top surface 12G by an appropriate fastening means such as a tap screw. By being tightened, it is fixed on the top surface 12c. An engagement hole 14c is formed in the center of the upper engagement member 14, and the upper support rod 10b1U force s' is inserted into the engagement hole 14c. Then, the upper engaging tool engages with the upper support rod 10b1U, whereby the entire support plate 12 is positioned at an arbitrary position in the longitudinal direction on the upper support rod 1Ob1U. Sliding adjustment becomes possible. Although not shown in the figure, naturally, the lower engaging member 15 having the same structure as the above-described upper engaging member 14 is also provided on the bottom surface of the support plate 12. This allows the entire support plate 12 to be slidably adjusted to any position in the longitudinal direction even on the lower support rod 1 Ob 1 B. Although the second support plate 12 has been illustratively extracted and described above, not only the above-described first support plate 11 but also the third and fourth plates described later. The top and bottom surfaces of all the support plates loaded in the support frame 10 here, including the support plates 17 and 18 of the above, have upper engaging tools 20, 21 and 21 of the same structure. 22 and the lower engaging members 23, 24, 25 are arranged in the order described.

図 2にさらに現れているように、 上部支持棒 1 0 b 1 Uにおいて、 第 2の担持板 1 2の上部係合具 1 4が係合している部位付近の該担持板の第 2の支持面 1 2 a の反対側で該支持棒 1 0 b 1 Uに対して着脱容易に弾発係止される上部係合具規 制璟 1 6が用意されている。 上部係合具規制璟 1 6は、 樹脂材から成り、 略々断 面 C字形で切欠き部 1 6 aを備え、 該切欠部 1 6 aの対向面には、 断面小径半円 形の変形溜め 1 6 bを備え、 外周拡張方向の変形に対して中心収縮方向に復元す るようにフォーミングされており、 これにより、 上部支持棒 1 0 b 1 Uを把持す るように働く弾発力を生ずるものであり、 略々の璟状体に形成されている。 上部 係合具規制環 1 6の上部支持棒 1 O b 1 Uを把持するため内面には、 ビニールテ ープなどの柔軟で、 表面摩擦係数の高い帯状材 1 6 cが粘着されており、 上部支 持棒 1 O b 1 Uを把持する際に、 十分な摩擦係数をもって、 上部係合具規制環 1 6自体が上部支持棒 1 0 b 1 U上で実質的に半固定的に固定される。 上部係合具 規制璟 1 ら 、 第 2の担持板 1 2の上部係合具 1 4の係合している部位付近で上 部支持棒 1 0 b 1 U上に係合 ·固定されると、 そこに係合♦固定された着脱容易 な上部係合具規制環 1 6力 s、 第 2の担持板 1 2の上部係合具 1 4に当接すること で、 第 2の担持板 1 2が上部支持棒 1 0 b 1 U上のその位置に半固定的に固定さ れる。 この場合、 上部係合具規制環 1 6に、 外方張り出し部分の付加などの変形 を施すことで、 該上部係合具規制環 1 6を第 2の担持板 1 2自体に当接させても よい。 上部係合具規制環 1 6を、 把持状態の上部支持棒 1 0 b 1 Uから離脱させ るには、 該上部係合規制環のフォーミングにより、 該規制璟 1 6の外周拡張の変 形を復元するように中心収縮方向に働く弾発力に杭して、 作業員が、 これを開脚 することで、 開いた切欠き部 1 6 aから上部支持棒 1 0 b 1 Uを逃がすようにし て、 該規制環 1 6を上部支持棒 1 O b 1 Uから離脱させる。 図 2の例示では、 第 2の担持板 1 2の上部支持棒 1 0 b 1 U上での位置を半固定的に固定するのに、 上部係合具規制璟 1 6を使用しているが、 この例に限られず、 全ての担持板の上 部支持棒上での位置を上部係合具規制環 1 6で固定するのは随意である。 さらに は、 1つの上部支持棒上の任意の位置に固定される 1対 2枚の担持板のうちの一 方のみを着脱容易な上部係合具規制璋 1 6により、 半固定的に固定し、 他の一方 を堅固に固定することで、 上部支持棒上での担持板の位置に関する摺動調整作業 を片側の担持板の位置に関するものだけで済ますことができる。 その場合、 堅固 に固定される方の担持板の上部係合具 1 4自体を、 係合している上部支持棒に対 して、 接着、 累着などの適宜の固定手段により固定すれば足りる。 As further shown in FIG. 2, in the upper support rod 10 b 1 U, the second support plate 12 near the portion where the upper engagement tool 14 of the second support plate 12 is engaged An upper engaging member regulation 璟 16 is provided which is easily and detachably locked to the support rod 10b1U on the opposite side of the support surface 12a. The upper engaging member restriction 璟 16 is made of a resin material, has a substantially C-shaped cutout portion 16 a, and has a small-diameter semicircular cross-section on the opposite surface of the cutout portion 16 a. It has a reservoir 16b and is formed so that it is restored in the center contraction direction with respect to the deformation in the outer peripheral expansion direction, so that the elastic force acting to grip the upper support rod 10b1U And is formed in a substantially rectangular body. Upper A flexible strip with a high surface friction coefficient 16 c such as vinyl tape is adhered to the inner surface to hold the upper support rod 1 O b 1 U of the engagement device control ring 16. When gripping the support rod 1 O b 1 U, the upper engagement member regulating ring 16 itself is substantially semi-fixed on the upper support rod 10 b 1 U with a sufficient friction coefficient. . When the upper engaging member restriction 璟 1 is engaged and fixed on the upper support rod 10 b 1 U in the vicinity of the portion of the second support plate 12 where the upper engaging member 14 is engaged. ♦ The upper supporting member restricting ring 16 is fixed and easy to attach and detach. By contacting the upper engaging member 14 of the second supporting plate 12, the second supporting plate 12 Is semi-fixedly fixed at that position on the upper support rod 10b1U. In this case, by deforming the upper engaging member restricting ring 16 such as adding an outwardly projecting portion, the upper engaging member restricting ring 16 is brought into contact with the second support plate 12 itself. Is also good. In order to disengage the upper engaging member restricting ring 16 from the gripped upper support rod 10b1U, the outer peripheral expansion of the restricting member 16 is changed by forming the upper engaging restricting ring. A pile is placed on the elastic force acting in the center contraction direction to restore the shape, and the worker opens the leg to release the upper support rod 10 b 1 U from the open notch 16 a. In this way, the control ring 16 is separated from the upper support rod 1 Ob 1 U. In the example of FIG. 2, although the position of the second support plate 12 on the upper support rod 10 b 1 U is semi-fixed, the upper engagement member restriction 璟 16 is used. However, the present invention is not limited to this example, and it is optional to fix the positions of all the support plates on the upper support rods with the upper engagement member restricting ring 16. In addition, only one of the one-to-two support plates fixed at an arbitrary position on one upper support rod is fixed semi-fixed by the upper engaging device restriction 16 that is easily removable. By firmly fixing the other one, the sliding adjustment work on the position of the support plate on the upper support bar can be performed only on the position of the support plate on one side. In this case, it is sufficient that the upper engaging member 14 of the carrier plate that is firmly fixed is fixed to the engaged upper support rod by an appropriate fixing means such as adhesion or accumulation. .

図 3に例示されている変形例の実施の形態にあっては、 支持枠体 1 0の上下両支 持棒 1 0 b l U、 1 O b 1 B簡を橋絡するように、 上部'下部両係合具 2 1、 2 4と、 該上部 ·下部両支持棒 1 0 b 1 U、 1 O b 1 Bとの'係合により、 該支持枠 体 1 0中に、 既述の第 2担持板 1 4に代えて、 第 3の担持板 1 7力装填されてい る。 第 3の担持板 1 7には、 第 1の担持板 1 1の第 iの担持面 1 1 aに対面する 既述の第 2の担持面 1 2 aが設けられており、 さらにその背面に、 既述の第 1の 担持面 1 1 aと同一構造の第 3の担持面 1 7 aがー体的に設けられている。 同様 に、 上部 ·下部両係合具 2 2、 2 5と、 上部 ·下部両支持棒 1 0 b 1 U、 1 O b I Bとの係合により、 支持枠体 1 0中に、 既述の第 2の担持板 1 2を自己の垂直 中心軸回りに 1 8 0回転させて成る反転 ·同一構造の第 4の担持板 1 8力 該第 3の担持板 1 7と同様に装填されている。 第 1の担持板 1 1の第 1の担持面 1 1 aと第 3の担持板 1 7中の第 2の担持面 1 2 aとの間には、 所定の幅寸法の基板 2力 該第 1の担持面 1 1 a中の係止溝 1 1 bと該第 2の担持面 i 2 a中の係止 溝 1 2 bでの両辺 2 c、 2 d係止により担持されている。 一方、 第 3の担持板 1 7中の第 3の担持面 1 7 aと、 第 4の担持板 1 8の第 4の担持面 1 8 aとの間に は、 第 1、 第 2の担持面 1 1 a、 12 b間のものとは、 別の幅寸法の基板 2、 場 合により、 第 1、 第 2の担持面 1 1 a、 12 b間のものと同一の幅寸法の基板 2 が、 該第 3の担持面 17 a中の係止溝 17 bと該第 4の担持面 18 aの係止溝 1 813での両辺20、 2 d係止により担持されている。 図 3例示の構成では、 第 3 の担持板 17中の第 2の担持面 12 aに垂直方向多段に刻設されている係止溝 1 2 bのピッチと、 第 3の担持板 17中の第 3の持板面 17 aに垂直方向多段に刻 設されている係止溝 17 bのピッチとが同一の値に選定されているが、 これに限 られるものではなく、 両者のピッチを異なる値に選定することで、 第 1の担持板 1 1と第 3の担持板 17との間に担持される基板 2の垂直方向のピッチとは異な る垂直方向のピッチで、 第 3の担持板 17と第 4'の担持板 18との間に、 第 1、 第 3の担持板 1 1 > 1 7間のものとは別の種類の基板 2を担持することもでき る。 この場合、 第 4の担持板 18は、 係止溝 18bのピッチ 点で、 第 1の担持 板 1 1とは、 異なる構造のものとなる。 In the embodiment of the modification illustrated in FIG. 3, the upper and lower support rods 10 0 bl U and 1 O b 1 B of the support frame 10 are The engagement between the engaging members 21 and 24 and the upper and lower supporting rods 10b1U and 1Ob1B causes the above-described second frame to be inserted into the supporting frame 10. Instead of the supporting plate 14, a third supporting plate 17 is loaded. The third support plate 17 is provided with the above-described second support surface 12 a facing the i-th support surface 11 a of the first support plate 11, and further on the back surface thereof. A third support surface 17a having the same structure as the above-described first support surface 11a is integrally provided. Similarly, the engagement between the upper and lower engagement members 22 and 25 and the upper and lower support rods 10b1U and 1ObIB causes the support frame 10 to have The second supporting plate 12 is rotated 180 degrees around its own vertical center axis.The fourth supporting plate 18 having the same structure is mounted in the same manner as the third supporting plate 17. . Between the first support surface 11a of the first support plate 11 and the second support surface 12a in the third support plate 17, a substrate 2 having a predetermined width is set. The support grooves 1 1b in the support surface 11a of the first and the support grooves 1 2b in the second support surface i 2a are held by both sides 2c and 2d. On the other hand, between the third support surface 17a of the third support plate 17 and the fourth support surface 18a of the fourth support plate 18 Is between the first and second support surfaces 11a and 12b and the substrate 2 having a different width dimension, and in some cases, between the first and second support surfaces 11a and 12b. A substrate 2 having the same width dimension as that of the first and second holding surfaces 17a and 18a is locked by locking grooves 17b in the third supporting surface 17a and locking grooves 1813 of the fourth supporting surface 18a. It is carried by. In the example of FIG. 3, the pitch of the locking grooves 12 b formed in the vertical direction on the second supporting surface 12 a in the third supporting plate 17 The pitch of the locking grooves 17b formed in the third holding plate surface 17a in the vertical direction in multiple stages is selected to be the same value, but is not limited to this, and the pitches of both are different. Value, the third support plate has a vertical pitch different from the vertical pitch of the substrate 2 supported between the first support plate 11 and the third support plate 17. It is also possible to carry between the 17 and the fourth 'carrying plate 18 a different kind of substrate 2 than that between the first and third carrying plates 11> 17. In this case, the fourth support plate 18 has a different structure from the first support plate 11 at the pitch point of the locking groove 18b.

図 1、 図 3例示の実施の形態では、 支持枠体 10は、 平面投影断面が正方形であ るサイコロ状の立方体の 6つの面に対応する 6つの開放面 10 a 1、 10 a 2、 10 a3、 10 a4、 10 a5、 10 a 6 ¾画成するように、 支持棒 10bで組 み立てられているが、 支持枠体 10の平面投影断面は、 正方形や四角形に限られ るものではない。 図 4に示されている変形実施例の形態にあっては、 支持枠体 1 0は、 平面投影断面が正五角形のものであり、 立方体の 7つの面に対応する 7つ の開放面 10 a5 1、 10 a 52, 10 a53、 10 a54、 10 a55、 10 a 56 10 a57を画成するように、 該 7つの面の稜線に沿って延在する支持 棒 1 0 b 5で組み立てられている。 この場合、 支持枠体 10の垂直中心軸回りの 全周に面して配置される 5つの解放面 10 a51、 10 a 52, 10 a53、 1 0 a 54, 10 a 55のいずれからでも、 そこに装填されている担持板 1 1、 1 2、 1 7、 18間の基板 2に対して作業上のアクセス力容易である。 ここでの支 持枠体 10の平面投影断面の形状は、 一般に、 三角形以上の多角形であれば足り る。 産業上の利用可能性 In the illustrated embodiment, the supporting frame 10 has six open faces 10a1, 10a2, 1010 corresponding to the six faces of a cube having a square planar projection cross section. a3, 10 a4, 10 a5, 10 a6 ¾ Assembled with support rods 10b so as to define, but the plane projection cross section of the support frame 10 is not limited to a square or a square . In the form of the modified embodiment shown in FIG. 4, the support frame 10 has a regular pentagonal plane projection cross section, and has seven open surfaces 10 a5 corresponding to the seven surfaces of the cube. 1, 10a52, 10a53, 10a54, 10a55, 10a56 Assembled with support rods 10b5 extending along the ridges of the seven surfaces to define 10a57 . In this case, from any of the five open surfaces 10 a51, 10 a 52, 10 a53, 10 a 54, 10 a 55 that are arranged facing the entire circumference around the vertical center axis of the support frame 10, The work access force to the substrate 2 between the carrier plates 11, 12, 17, 18 which are loaded on the substrate is easy. In general, the shape of the cross-section of the support frame body 10 when projected on a plane is sufficient if it is a polygon having a shape of a triangle or more. Industrial applicability

この発明は、 基板の集積担持密度を高め、 集積担持密度の高い状態のままでの基 板の搬送を容易にし、 集積担持された基板に対する作業上の多方面からのァクセ スを容易にし、 集積担持されるべき基板の種類ごとの幅寸法上の相違に対して連 続的に対処可能にするものであるので、 産業上の利用価値が絶大である。 The present invention increases the integrated carrying density of the substrate, facilitates the transfer of the substrate while maintaining the high integrated carrying density, facilitates access to the accumulated and carried substrate from various aspects in operation, and Since it is possible to continuously cope with the difference in the width dimension for each type of substrate to be carried, the industrial use value is enormous.

Claims

請求の範囲 The scope of the claims 1 . 多面体の各面を開放面として画成するように、 該多面体の各面め稜線に沿つ て延在する支持棒 1 0 bで組み立てられた支持枠体 1 0と、 1. a support frame 10 assembled with support rods 10 b extending along each ridge line of each face of the polyhedron so as to define each face of the polyhedron as an open face; 被担持体としての略水平姿勢の基板 2の 1つの辺 2 cを係止するように、 略水平 に刻設された係止溝 1 1 bが垂直方向に多段に配設されている第 1の担持面 1 1aを備えた第 1の担持板 1 1と、 ■ A first horizontally provided locking groove 11b is provided in multiple stages in the vertical direction so as to lock one side 2c of the substrate 2 in a substantially horizontal posture as a supported member. A first supporting plate 11 having a supporting surface 11a of 被担持体としての略水平姿勢の基板 2の上記 1つの辺 2 cに対向するもう 1つの 辺 2 dを係止するように、 略水平に刻設された係止溝 1 2 bが垂直方向に多段に 配設されている第 2の担持面 1 2 aを備えた第 2の担持板 1 2と、 A locking groove 1 2b that is formed substantially horizontally so as to lock the other side 2 d facing the above one side 2 c of the substrate 2 in a substantially horizontal posture as a supported member is in a vertical direction. A second support plate 12 having a second support surface 12 a provided in multiple stages in 上記第 1の担持板 1 1に配設され、 上記支持枠体 1 0中の略水平に延在する少な くても · 1つの上部支持棒 1 0 b 1 Uに対して、 長手方向に摺動自在に係合する第 1の上部係合具 2 0と、 At least one of the upper support rods 10b1U disposed on the first support plate 11 and extending substantially horizontally in the support frame 10 is slid in the longitudinal direction. A first upper engagement tool 20 movably engaged, 上記第 1の担持板 1 1に配設され、 上記支持枠体 1 0中の上記上部支持棒 1 0 bThe upper support rod 10 b disposed on the first support plate 11 and in the support frame 10. 1 Uの下方で略水平に延在する少なくても 1つの下部支持棒 1 0 b 1 Bに対し て、 長手方向に摺動自在に係合する第 1の下部係合具 2 3と、 A first lower engaging member 23 that slidably engages in a longitudinal direction with at least one lower supporting rod 10 b 1 B extending substantially horizontally below 1 U; 上記第 2の担持板 1 2に配設され、 上記支持枠体 1 0中の上記上部支持棒 1 0 bThe upper support rod 10 b disposed on the second support plate 12 and in the support frame 10. 1 Uに対して、 長手方向に摺動自在に係合する第 2の上部係合具 1 4と、 上記第 2の担持板 1 2に配設され、 上記支持枠体 1 0中の上記下部支持棒 1 0 b1 U, a second upper engaging member 14 slidably engaging in the longitudinal direction, and a lower portion of the support frame 10 provided on the second support plate 12. Support rod 1 0 b 1 Bに対して、 長手方向に摺動自在に係合する第 2の下部係合具 1 5と、 上記支持枠体 1 0を床面に対して相対移動自在に担持する支持枠体担持機構 1 3 とを A second lower engaging member 15 that slidably engages in the longitudinal direction with respect to 1B, and a support frame holding mechanism that holds the support frame 10 movably relative to the floor surface. 1 3 and 含んでおり、 上記第 1の担持板 1 1の上記第 1の担持面 i 1 aと上記第 2の担持 板 1 2の上記第 2の担持面 1 2 aとが対向配置され、 該第 1、 第 2の担持面 1 1 a、 1 2 a間に、 被担持体としての基板 2を担持することを特徴とする基板搬送 The first support surface i 1 a of the first support plate 11 and the second support surface 12 a of the second support plate 12 are disposed so as to face each other. A substrate carrier characterized in that the substrate 2 as a carrier is carried between the second carrying surfaces 11a and 12a. 2 . 上記支持枠体担持機構 1 3は、 上記支持棒 1 0 bにキャスター 1 3 aが配設 されている上記支持枠体 1 0自体である請求項 1記載の基板搬送装置。 2. The support frame support mechanism 13 is provided with casters 13a on the support rods 10b. 2. The substrate transfer device according to claim 1, wherein the support frame 10 is the same. 3 . 上記第 2の担持面 1 2 aの背面に一体的に設けられ、 被担持体としての略水 平姿勢の基板 2の 1つの辺 2 cを係止するように、 略水平に刻設された係止溝 1 2 bが垂直方向に多段に配設されている第 3の担持面 1 7 aをさらに備えた第 3 の担持板 1 7と、 3. Engraved substantially horizontally so that one side 2c of the substrate 2 which is provided integrally with the back surface of the second support surface 12a and has a substantially horizontal posture as a supported body is locked. A third support plate 17 further provided with a third support surface 17 a in which the formed locking grooves 1 2 b are arranged in multiple stages in the vertical direction; 上記第 2の担持板 1 2と反転 ·同一構造の第 4の担持板 1 8と、 A second support plate 18 having the same structure as the second support plate 12; 上記第 3の担持板 1 7に配設され、 上記支持枠体 1 0中の上記上部支持棒 1 0 bThe upper support rod 10 b disposed on the third support plate 17 and in the support frame 10. 1 Uに対して、 長手方向に摺動自在に係合する第 3の上部係合具 2 1と、 上記第 3の担持板 1 7に配設され、 上記支持枠体 1 0中の上記下部支持棒 1 0 bA third upper engaging member 21 that slidably engages in the longitudinal direction with respect to 1 U; and a lower portion of the support frame 10 that is disposed on the third support plate 17. Support rod 1 0 b 1 Bに対して、 長手方向に摺動自在に係合する第 3の下部係合具 2 4と、 上記第 4の担持板 1 8に配設され、 上記支持枠体 1 0中の上記上部支持棒 1 0 bA third lower engaging member 24 slidably engaging in a longitudinal direction with respect to 1B, and a third lower engaging member 24 disposed on the fourth support plate 18; Support rod 1 0 b 1 Uに対して、 長手方向に摺動自在に係合する第 4の上部係合具 2 2と、 上記第 4の担持板 1 8に配設され、 上記支持枠体 1 0中の上記下部支持棒 1 O bA fourth upper engaging member 22 slidably engaging in a longitudinal direction with respect to 1 U, and a fourth lower engaging member 22 disposed on the fourth supporting plate 18, and Support rod 1 O b 1 Bに対して、 長手方向に摺動自在に係合する第 4の下部係合具 2 5とをさらに 含んでおり、 A fourth lower engagement member 25 that slidably engages in the longitudinal direction with respect to 1B; 上記第 3の担持板 1 7の上記第 3の担持面 1 7 aと、 上記第 4の担持板 1 8の上 記第 4の担持面 1 8 aとが対向配置され、 該第 3、 第 4の担持面 1 7 a, , 1 8 a 間にも、 被担持体としての基板 2を担持することを特徴とする請求項 1又は請求 The third support surface 17a of the third support plate 17 and the fourth support surface 18a of the fourth support plate 18 are disposed so as to face each other. 4. The substrate 1 as claimed in claim 1 or claim 2, wherein the substrate 2 is supported also between the supporting surfaces 17a, 18a of the fourth member 4. 4 . 上記上部支持棒 1 O b 1 U上の上記第 2の上部係合具 1 4が係合、 固定され る部位付近の上記第 2の担持板 1 2の上記第 2の担持面 1 2 aの反対側で、 該上 部支持棒に対して、 着脱容易に弾発係止され、 該上部係合具 1 4又は、 該担持板 1 2自体に当接して、 該担持板 1 2の該上部支持棒 1 0 b 1 Uの長手方向に沿う 摺動を規制する上部係合具規制環 1 6をさらに備えている請求項 1又は請求項 2 4. The second support surface 12 of the second support plate 12 near the position where the second upper engagement member 14 on the upper support rod 1 O b 1 U is engaged and fixed. On the side opposite to a, it is easily and resiliently latched to the upper support rod, and comes into contact with the upper engaging member 14 or the support plate 12 itself to form the support plate 12. The upper engaging rod restricting ring 16 for restricting the sliding along the longitudinal direction of the upper supporting rod 10 b 1 U is further provided.
PCT/JP2001/006068 2001-07-12 2001-07-12 Board carrier Ceased WO2003009662A1 (en)

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PCT/JP2001/006068 WO2003009662A1 (en) 2001-07-12 2001-07-12 Board carrier
JP2003514863A JPWO2003009662A1 (en) 2001-07-12 2001-07-12 Substrate transfer device
CN01815492.1A CN1456036A (en) 2001-07-12 2001-07-12 Base-board conveying device

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