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WO2003098194A1 - Interferometre a diffraction de points utilisant une source lumineuse a fibre optique a section inclinee, et procede de mesure correspondant - Google Patents

Interferometre a diffraction de points utilisant une source lumineuse a fibre optique a section inclinee, et procede de mesure correspondant Download PDF

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Publication number
WO2003098194A1
WO2003098194A1 PCT/KR2002/001332 KR0201332W WO03098194A1 WO 2003098194 A1 WO2003098194 A1 WO 2003098194A1 KR 0201332 W KR0201332 W KR 0201332W WO 03098194 A1 WO03098194 A1 WO 03098194A1
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WO
WIPO (PCT)
Prior art keywords
optical fiber
measurement
phase
unit
reference beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/KR2002/001332
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English (en)
Inventor
Seung-Woo Kim
Hag-Yong Kim
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Korea Advanced Institute of Science and Technology KAIST
Original Assignee
Korea Advanced Institute of Science and Technology KAIST
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Korea Advanced Institute of Science and Technology KAIST filed Critical Korea Advanced Institute of Science and Technology KAIST
Priority to AU2002319926A priority Critical patent/AU2002319926A1/en
Publication of WO2003098194A1 publication Critical patent/WO2003098194A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/0207—Error reduction by correction of the measurement signal based on independently determined error sources, e.g. using a reference interferometer
    • G01B9/02072—Error reduction by correction of the measurement signal based on independently determined error sources, e.g. using a reference interferometer by calibration or testing of interferometer
    • G01B9/02074—Error reduction by correction of the measurement signal based on independently determined error sources, e.g. using a reference interferometer by calibration or testing of interferometer of the detector
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02012—Interferometers characterised by controlling or generating intrinsic radiation properties using temporal intensity variation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/266—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light by interferometric means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/35—Mechanical variable delay line

Definitions

  • the present invention relates to a point diffraction interferometer for analyzing a surface profile of an object having any shape, and more particularly, to a phase-shifting point diffraction interferometer using an inclined-section optical fiber light source, which is capable of minimizing a system error by directly using spherical waves emitted from a point light source as a reference wavefront to remove an error caused by a reference surface.
  • Background Art
  • a measurement wavefront 440 arriving from a target object to be measured is concentrated on an image surface where a spatial filter 420 exists, with a distorted form due to a profile of the object as indicated by reference numeral 430.
  • the spatial filter 420 has a small pinhole 400 for creating a spherical wave 450.
  • a part of a concentrated measurement wavefront 460 passing through the pinhole 400 becomes the spherical wave 450.
  • the concentrated measurement wavefront 460 passes through the spatial filter 420 and interferes with the spherical wave 450 created by a pinhole 410, thereby generating an interference pattern.
  • Information on a profile of the target object can be obtained by analyzing the interference pattern.
  • the above point diffraction interferometer does not coincide in starting points of the reference wavefront and measurement wavefront and they are apart from each other. This error of the measuring system must be removed in analyzing the interference pattern. Further, since an error in trimming the pinhole has an effect on the reference wavefront, it is necessary to check the pinhole before using it. Furthermore, the transmissivity of the spatial filter and the size of the pinhole should be adjusted in order to control the visibility of the interference pattern, and it is very complicated to correct the measuring system in measuring various objects having different reflectivities.
  • the present invention has been made in view of the above-mentioned problems of the point diffraction interferometer using a pinhole, and it is an object of the present invention to provide a point diffraction interferometer using an inclined-section optical fiber light source.
  • variable optical split phase shifting apparatus for increasing measurement accuracy and easily controlling the visibility of an interference pattern.
  • compensation principle which can remove an error of a point diffraction interferometer using an inclined-section optical fiber light source.
  • FIG. 1 illustrates a principle of a point diffraction interferometer using a pinhole
  • FIG. 2 illustrates a point diffraction interferometer using an inclined- section optical fiber light source according to a first embodiment of the present invention
  • FIG. 3A is a front view of an optical fiber chuck member illustrated in FIG. 2;
  • FIG. 3B illustrates optical fiber fixing tubes of the optical fiber chuck member of FIG. 3A
  • FIG. 3C illustrates paths of beams traveling through the optical fiber chuck member of FIG. 3A;
  • FIG. 4 illustrates a path of a beam traveling into the air from an optical fiber whose end is inclined
  • FIG. 5 illustrates a point diffraction interferometer using an inclined- section optical fiber light source according to a second embodiment of the present invention
  • FIG.6A illustrates a phase shifting unit applied to the point diffraction interferometer of FIG. 5;
  • FIG. 6B illustrates phase shifting in the phase shifting unit of FIG 6A
  • FIG. 7 illustrates a point diffraction interferometer using an inclined- section optical fiber light source according to a third embodiment of the present invention
  • FIG. 8 illustrates an image taken from a spatial filter, for describing a setup observer shown in FIG. 7; and
  • FIG. 9 is a block diagram of a point diffraction interferometer measuring system. Best Mode for Carrying Out the Invention
  • a reference beam traveling into the air from an optical fiber creates an interference pattern by interfering with a measurement beam reflected from a target object to be measured (hereinafter, referred to as measurement object" ).
  • measurement object a measurement beam reflected from a target object to be measured
  • the interference pattern includes profile information of the measurement object, it is difficult to obtain accurate profile information of the measurement object by only the interference pattern.
  • a variety of interference patterns should be acquired by varying the phase of a measurement beam or a reference beam. Many studies have already been made on analysis algorithms for obtaining the profile information of the measurement object using the various interference patterns.
  • FIG. 2 illustrates a point diffraction interferometer using an inclined- section optical fiber light source according to a first embodiment of the present invention.
  • a beam is irradiated from a light source unit 10
  • the beam is incident upon an optical splitting unit 16 via an optical quantity controlling unit 12, and a mirror 14 which is an optical path changing unit.
  • a typical square beam splitter or a half mirror is used as the optical splitting unit 16.
  • the optical splitting unit 16 splits the incident beam into a measurement beam and a reference beam.
  • the measurement beam is incident upon a measurement beam optical fiber 26 through a measurement beam optical connector 18.
  • the reference beam is incident upon a reference beam optical fiber 28 through an optical quantity controlling unit 22 and a reference beam optical connector 20.
  • the reference beam optical fiber 28 has a phase shifting unit 24 on a given section to control an optical path, and a cylindrical piezoelectric element is used as the phase shifting unit 24.
  • the measurement beam optical fiber 26 and the reference beam optical fiber 28 are fixed at an optical fiber chuck member 30.
  • a beam traveling into the air through the measurement beam optical fiber 26 is used as a measurement beam 46, and a beam traveling into the air through the reference beam optical fiber 28 is used as a reference beam 50.
  • a measurement beam 48 incident upon a measurement object 34 is reflected with the surface profile information of the measurement object 34 and further reflected by a reflective surface 31 installed at an end of the optical fiber chuck member 30.
  • an optical path compensating member 32 is installed between the measurement object 34 and the optical fiber chuck member 30, according to a profile or location of the measurement object 34.
  • the measurement beam reflected from the reflective surface 31 is combined with the reference beam.
  • the combined beam passes through a lens 36 and a spatial filter 38, and arrives at an image acquiring unit 42 via an image lens 40.
  • a CCD (Charge-Coupled Device) camera is used as the image acquiring unit 42.
  • optical quantity controlling unit 12 and 22 are used in this measuring system.
  • the optical quantity controlling unit 12 in front of the light source unit 10 is used to control the strength of the entire light incident upon the measuring system
  • the optical quantity controlling unit 22 installed at the rear of the beam splitting unit 16 is used to control the strength of the reference beam according to reflectivity of the measurement object.
  • the strength of light reflected after being incident upon the measurement surface is not uniform because the measurement object does not have the same reflectivity. Therefore, the measurement beam and the reference beam are not equal to each other in strength of light. If a difference in strength between the measurement beam and the reference beam is large, measurement accuracy may be deteriorated. However, the difference can be compensated by the optical quantity controlling unit 22.
  • the optical quantity controlling unit 22 is installed on an optical path of the reference beam to control the strength of the reference beam, it may be installed on an optical path of the measurement beam to control the strength of the measurement beam.
  • the phase of the reference beam or the measurement beam should be shifted.
  • a certain section of the reference beam optical fiber 28 is wound on the outer circumference of the cylindrical piezoelectric element to be used as the phase shifting unit. If current is applied, the cylindrical piezoelectric element is extended in a radius direction, and the reference optical fiber 28 is also lengthened, thereby shifting the phase of the reference beam. Even though the cylindrical piezoelectric element installed on the reference beam optical fiber is installed on the measurement beam optical fiber, the same effect is obtained.
  • FIGs. 3A to 3C illustrate a detailed construction of the optical fiber chuck member 30.
  • FIG. 3A is a view in the direction of an arrow K in FIG. 2, illustrating the optical fiber chuck member 30.
  • Two optical fibers 80 and 84 are fixed at the interior of optical fiber fixing tubes 82 and 86.
  • the optical fiber fixing tubes 82 and 86 has a structure that ends of the optical fibers 80 and 84 are conveniently installed.
  • the optical fiber fixing tubes 82 and 86 have commercially been manufactured and have come onto the market. In the measuring system, a part of each of the optical fiber fixing tubes 82 and 86 is trimmed to form a united shape so that the ends of the two optical fibers 80 and 84 can be arranged as near as possible (refer to FIG. 3B).
  • FIG. 3C illustrates paths of beams traveling into the air through the optical fibers 80 and 84.
  • a beam transmitted through the optical fiber 84 travels into the air with one direction 85 and a beam transmitted through the optical fiber 80 travels into the air with another direction 81.
  • the beams traveling in the two directions one is used as the measurement beam and the other is used as the reference beam.
  • FIG. 4 illustrates a path of a beam traveling into the air from an optical fiber whose end is inclined.
  • a traveling direction of a beam emitted from an optical fiber whose end is inclined follows from Snelf s law on the assumption that a refractive index n co of a core constituting the optical fiber is approximately identical to a refractive index n c ⁇ of a cladding constituting the optical fiber. If an end of the optical fiber is tilted at an angle ⁇ t with a normal 69 of an inclined
  • the beam 66 traveling into the air returns back from the measurement object, the returning beam 67 is reflected by the inclined reflective surface 64.
  • the beam 66 traveling into the air from the optical fiber is at right angles with a beam 68 reflected from the inclined reflective surface 64 after returning back from the measurement object. Therefore, the overall arrangement of the measuring system can be minimized and the interference pattern can easily be obtained by the CCD camera.
  • FIG. 5 illustrates a point diffraction interferometer using an inclined- section optical fiber light source according to a second embodiment of the present invention.
  • the measuring system of FIG. 5 is similar to that of FIG. 2 but proposes a new phase shifting unit combined with a beam splitter phase shifting unit as the phase shifting unit for shifting the phase of a reference beam or a measurement beam.
  • a beam is irradiated from a light source unit 110, the beam is incident upon an optical splitting unit 113 via a mirror 1 1 1 which is an optical path changing unit.
  • the beam is split into a measurement beam and a reference beam by the optical splitting unit 113.
  • the measurement beam is incident upon a measurement beam optical fiber 126 via an optical quantity controlling unit 122 and an optical connector 118, and the reference beam is incident upon a reference beam optical fiber 128 via an optical connector 120.
  • An end of the measurement beam optical fiber 126 and an end of the reference beam optical fiber 128 are fixed at an optical fiber chuck member 130.
  • a beam 146 traveling into the air from the end of the measurement beam optical fiber 126 is reflected from the surface of a measurement object 134 and further reflected by a reflective surface 131 installed at the end of the optical fiber chuck member 130.
  • a reference beam traveling into the air from the end of the reference beam optical fiber 128 forms a beam 150 along with a measurement beam reflected from the reflective surface 131.
  • the beam 10 passes through a lens 136 and a spatial filter 138, and arrives at an image acquiring unit 142 via an image lens 140.
  • an optical path compensating member is not used between the measurement object 134 and the optical fiber chuck member 130 on the assumption that most of the measurement beam reflected from the measurement object 134 returns back to the optical fiber chuck member 130 due to the curvature of the measurement object 134.
  • a phase shifting unit 1 14 applied to the measuring system of FIG. 5 will be illustrated in detail in FIGs. 6A and 6B.
  • the phase shifting unit 114 is combined with the optical splitting unit 1 13.
  • the combined structure is similar to a general square beam splitter.
  • a sliding member 115 along which the phase shifting unit 114 can slide is diagonally installed.
  • the sliding member 1 15 adheres to the optical splitting unit 113.
  • a push unit 1 12 for moving the phase shifting unit 114 is installed at one side of the phase shifting unit 1 14 and a restoring unit 94 for restoring the phase shifting unit 1 14 is installed at the other side of the phase shifting unit 114, so that the phase shifting unit 114 can slide along with the sliding member 115.
  • a beam is irradiated from a Z direction, a part of the beam is reflected in an A direction and the other part of the beam is transmitted in a B direction, by the optical splitting unit 113.
  • the beam transmitted in the B direction passes through the phase shifting unit 114 by a traveling distance x.
  • the phase shifting unit 114 is pushed by the push unit 112 as illustrated in FIG. 6B, the phase shifting unit 1 14 moves along the sliding member and thus a traveling distance y of the beam passing through the phase shifting unit 114 is loner than x by d. That is, since the beam should pass through the phase shifting unit 114 having a larger refractive index than air, the traveling distance of the beam is increased and thus a phase is shifted.
  • FIG. 7 illustrates a point diffraction interferometer using an inclined- section optical fiber light source according to a third embodiment of the present invention.
  • FIG. 7 a compensation beam for compensating for an error of a measuring system is proposed and a setup observer for easily generating interference patterns is additionally provided.
  • This measuring system is almost equal to that shown in FIG. 5 and thus a description will be made of only the compensation beam and the setup observer.
  • the compensation beam is described.
  • a beam is split into a reference beam and a redundant beam by an optical splitting unit 213 and a phase shifting unit 214.
  • the reference beam is incident upon a reference beam optical fiber 225 via an optical quantity controlling unit 222 and an optical connector 118.
  • the redundant beam is connected to a compensation beam optical fiber 224 or a measurement beam optical fiber 228 by an optical switch 220 to serve as a compensation beam or a measurement beam.
  • the compensation beam optical fiber 224 and the measurement beam optical fiber 228 are fixed at an optical fiber chuck member 230.
  • the compensation beam traveling into the air from an end of the compensation beam optical fiber 224 is arranged to move toward a CCD camera 242, and the measurement beam traveling into the air from an end of the measurement beam optical fiber 228 is arranged to move toward a measurement object 234.
  • the compensation beam for compensating for the measuring system is used as follows.
  • the redundant beam is connected to the compensation beam optical fiber 224 by the optical switch 220.
  • the compensation beam traveling into the air from the end of the compensation beam optical fiber 224 moves to the CCD camera 242, and the reference beam traveling into the air from the end of the reference beam optical fiber 225 is incident upon the CCD camera 242 through a half mirror 260, thereby forming an interference pattern. Since the interference pattern is formed by the compensation beam and the reference beam both passing through only the measuring system, its information includes an error of the measuring system. Therefore, an error component of the measuring system can be extracted by analyzing the interference pattern. Next, a process of measuring a surface profile of a measurement object is described.
  • the optical switch 220 connects the redundant beam to the measurement beam optical fiber 228 to use the redundant beam as the measurement beam.
  • the measurement beam traveling into the air from the end of the measurement beam optical fiber 228 is incident upon the surface of the measurement object 234 and then reflected.
  • the reflected measurement beam is further reflected by a reflective surface 231 installed at the end of the optical fiber chuck member 230 and directs toward the CCD camera 242 through the half mirror 260.
  • the measurement beam is added to the reference beam to form an interference pattern.
  • the interference pattern includes an error of the measuring system together with information on the measuring surface. Since the error of the measuring system is previously extracted from the interference pattern obtained by the compensation beam and the reference beam, compensation for the error of the measuring system can be performed.
  • a process of compensating for the error of the measuring system can be summarized by the following steps of: ( 1) acquiring the interference pattern including the error of only the measuring system through the reference beam and the compensation beam, and extracting the error of the measuring system;
  • FIG. 8 illustrates an image of the bottom of a spatial filter 238, observed through the half mirror 260, an inclined mirror surface 233 installed at an end of an optical fiber chuck member 232, and a mirror 254.
  • the interference pattern in which the reference beam and the compensation beam are combined or the reference beam and the measurement beam are combined passes through a central hole 439 of the spatial filter 238 and is captured by the CCD camera 242 through an image lens 240.
  • the reference beam, compensation beam or measurement beam may not pass through the central hole 439 according to locations of the measurement object 234, half mirror 260 and optical fiber chuck members 230 and 232, and may be blocked at any portion 440 of the spatial filter 238, thus not to generate the interference pattern.
  • a location of the beam on the spatial filter 238, which does not pass through the central hole 439 of the spatial filter 238, can be observed by a setup observer 256.
  • the location of the beam can be shifted toward the central hole 439 by slightly modifying an angle of the measurement object or the optical fiber chuck members. If the measuring system is not equipped with the setup observer, it will be difficult to move the beam toward the central hole of the spatial filter.
  • FIG. 9 is a block diagram illustrating the role of a central controller in the measuring system of FIG. 7.
  • a central controller 344 is in charge of the overall measuring process and controls a phase shifting controller 350, an optical switch controller 348, and an operation and image processor 346.
  • a beam generated from a light source 310 is incident upon an optical splitter and phase shifter 314.
  • a part of the beam passes through an optical quantity controller 322 and an optical connector 318 so as to be used as a reference beam 333.
  • the other part of beam passes through an optical switch 320 and an optical connector 321 so as to be used as a measurement beam 330 and a compensation beam 331.
  • the interference pattern is captured by an image acquiring unit 342, passes through an image acquiring unit controller 343, and is subject to an operation process. A detailed description of the other parts of the measuring system is omitted.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

L’invention concerne un interféromètre à diffraction de points, utilisé pour analyser la surface d’un objet de forme prédéterminée. Ladite invention concerne un interféromètre à diffraction de points déphaseur, qui fait appel à une source lumineuse à fibre optique à section inclinée, apte à minimiser une erreur système par utilisation directe d’ondes sphériques émises depuis une source d’un faisceau de points comme front d’ondes de référence pour déplacer une erreur due à une surface de référence.
PCT/KR2002/001332 2002-05-03 2002-07-15 Interferometre a diffraction de points utilisant une source lumineuse a fibre optique a section inclinee, et procede de mesure correspondant Ceased WO2003098194A1 (fr)

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AU2002319926A AU2002319926A1 (en) 2002-05-03 2002-07-15 Point diffraction interferometer using inclined-section optical fiber light source and its measuring method

Applications Claiming Priority (2)

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KR2002-0024361 2002-05-03
KR10-2002-0024361A KR100465784B1 (ko) 2002-05-03 2002-05-03 경사단면 광섬유 광원을 이용한 점회절 간섭계 및 측정방법

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Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2915281A1 (fr) * 2007-04-20 2008-10-24 Commissariat Energie Atomique Procede de determination d'une perturbation d'une onde optique
DE102010022641A1 (de) * 2010-06-04 2011-12-08 Deutsches Zentrum für Luft- und Raumfahrt e.V. Messeinrichtung und Verfahren zur Vermessung optischer Weglängenänderungen
WO2013024229A1 (fr) * 2011-08-16 2013-02-21 Universite Joseph Fourier Dispositif optique d'analyse interferometrique de l'etat de surface interne d'un tube
CN104515466A (zh) * 2014-12-17 2015-04-15 中国科学院长春光学精密机械与物理研究所 一种能够提高光纤点衍射干涉仪检测范围的波面参考源
CN105066880A (zh) * 2015-08-03 2015-11-18 中国计量学院 基于粒子群解调点光源干涉的三维坐标快速测量方法
CN106247973A (zh) * 2015-12-29 2016-12-21 中国科学院长春光学精密机械与物理研究所 一种凸非球面镜面形检测系统及检测方法
CN109827523A (zh) * 2019-03-08 2019-05-31 中国科学院光电技术研究所 基于点衍射波的干涉测量系统的系统误差标定装置和方法
US11333487B2 (en) 2019-10-28 2022-05-17 Kla Corporation Common path mode fiber tip diffraction interferometer for wavefront measurement

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CN104748946B (zh) * 2015-03-31 2018-07-27 中国科学院长春光学精密机械与物理研究所 光纤点衍射干涉仪光纤衍射参考波前偏差测量方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5355220A (en) * 1989-11-13 1994-10-11 Ricoh Company, Ltd. Optical movement measuring method and apparatus using interference fringes generated by overlapping spots of diffracted lights of different orders of diffraction from a line source
US5564832A (en) * 1993-01-29 1996-10-15 United Technologies Corporation Birefringent active fiber laser sensor

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01250803A (ja) * 1988-03-31 1989-10-05 Tokyo Seimitsu Co Ltd 干渉計
JPH0587530A (ja) * 1991-09-27 1993-04-06 Canon Inc 干渉計測装置
US5671050A (en) * 1994-11-07 1997-09-23 Zygo Corporation Method and apparatus for profiling surfaces using diffracative optics
US5548403A (en) * 1994-11-28 1996-08-20 The Regents Of The University Of California Phase shifting diffraction interferometer
JP3883145B2 (ja) * 1997-09-30 2007-02-21 フジノン株式会社 干渉計のアライメント装置
JP2000249525A (ja) * 1999-02-26 2000-09-14 Fuji Photo Optical Co Ltd 斜入射干渉計装置
KR100470933B1 (ko) * 2002-01-15 2005-03-08 (주) 인텍플러스 경사단면 광섬유 광원을 이용한 위상천이 점회절 간섭계

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5355220A (en) * 1989-11-13 1994-10-11 Ricoh Company, Ltd. Optical movement measuring method and apparatus using interference fringes generated by overlapping spots of diffracted lights of different orders of diffraction from a line source
US5564832A (en) * 1993-01-29 1996-10-15 United Technologies Corporation Birefringent active fiber laser sensor

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2915281A1 (fr) * 2007-04-20 2008-10-24 Commissariat Energie Atomique Procede de determination d'une perturbation d'une onde optique
WO2008135363A1 (fr) * 2007-04-20 2008-11-13 Commissariat A L'energie Atomique Procede de determination d'une perturbation d'une onde optique
DE102010022641A1 (de) * 2010-06-04 2011-12-08 Deutsches Zentrum für Luft- und Raumfahrt e.V. Messeinrichtung und Verfahren zur Vermessung optischer Weglängenänderungen
DE102010022641B4 (de) * 2010-06-04 2013-07-04 Deutsches Zentrum für Luft- und Raumfahrt e.V. Messeinrichtung und Verfahren zur Vermessung optischer Weglängenänderungen
WO2013024229A1 (fr) * 2011-08-16 2013-02-21 Universite Joseph Fourier Dispositif optique d'analyse interferometrique de l'etat de surface interne d'un tube
FR2979143A1 (fr) * 2011-08-16 2013-02-22 Univ Joseph Fourier Dispositif optique d'analyse interferometrique de l'etat de surface interne d'un tube
CN104515466A (zh) * 2014-12-17 2015-04-15 中国科学院长春光学精密机械与物理研究所 一种能够提高光纤点衍射干涉仪检测范围的波面参考源
CN105066880A (zh) * 2015-08-03 2015-11-18 中国计量学院 基于粒子群解调点光源干涉的三维坐标快速测量方法
CN106247973A (zh) * 2015-12-29 2016-12-21 中国科学院长春光学精密机械与物理研究所 一种凸非球面镜面形检测系统及检测方法
CN109827523A (zh) * 2019-03-08 2019-05-31 中国科学院光电技术研究所 基于点衍射波的干涉测量系统的系统误差标定装置和方法
US11333487B2 (en) 2019-10-28 2022-05-17 Kla Corporation Common path mode fiber tip diffraction interferometer for wavefront measurement

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