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WO2002072914A1 - Revetement de substrats - Google Patents

Revetement de substrats Download PDF

Info

Publication number
WO2002072914A1
WO2002072914A1 PCT/EP2002/002223 EP0202223W WO02072914A1 WO 2002072914 A1 WO2002072914 A1 WO 2002072914A1 EP 0202223 W EP0202223 W EP 0202223W WO 02072914 A1 WO02072914 A1 WO 02072914A1
Authority
WO
WIPO (PCT)
Prior art keywords
coating
substrates
vapor deposition
chemical vapor
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/EP2002/002223
Other languages
German (de)
English (en)
Inventor
Christoph Moelle
Rolf Meyer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Schott AG
Carl Zeiss AG
Original Assignee
Carl Zeiss AG
Schott Glaswerke AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Carl Zeiss AG, Schott Glaswerke AG filed Critical Carl Zeiss AG
Publication of WO2002072914A1 publication Critical patent/WO2002072914A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/22—Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
    • C03C17/23—Oxides
    • C03C17/245—Oxides by deposition from the vapour phase
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/001—General methods for coating; Devices therefor
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/02—Pretreatment of the material to be coated
    • C23C16/0209—Pretreatment of the material to be coated by heating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/54—Apparatus specially adapted for continuous coating

Definitions

  • the invention relates to a method and an apparatus for the coating of substrates, for. B. glass substrates.
  • the invention further relates to an object with a substrate and a coating.
  • Such an object can be, for example, a reflector of a headlight.
  • the coating of substrates is required in various technical fields.
  • the coating of reflectors may be mentioned.
  • Such reflectors are e.g. B. used in the automotive industry for headlights.
  • Such a reflector essentially consists of a mostly funnel-like base body, which is coated with a reflective coating on its inner surface.
  • This base body also called substrate, consists of the materials glass, metal or plastic. In general, other materials are also conceivable.
  • the substrates are provided with a coating, which can also comprise several layers. The number of layers or the choice of coating materials is determined on the basis of the required reflection properties.
  • Theater lighting area cold light coated reflectors made of glass substrates.
  • the cold light coating only reflects the visible radiation and transmits the heat radiation.
  • the invention has for its object to provide a method and an apparatus with which a particularly durable coating can be applied to substrates.
  • the production of the coating should be inexpensive.
  • an object with a substrate should be specified which has a particularly durable coating.
  • the inventors have recognized that the durability of the layers is significantly influenced by the layer thickness distribution. A particularly high durability of the layers on the substrate or on one another can be achieved by means of a particularly uniform layer thickness distribution. Furthermore, the inventors have recognized that the layer thickness distribution in turn depends on the homogeneity of the
  • Temperature distribution in the substrate during coating is dependent. By preheating the substrates, a particularly homogeneous temperature distribution and thus a great uniformity of the coating can be achieved, since the deposition rates in the coating process are temperature-dependent. This ensures a particularly high reliability of the coating in relation to the
  • the dwell time of the substrate in the coating chamber can be minimized.
  • a cycle time reduction or a reduction of the cycle times is possible.
  • a reduction in manufacturing costs can thereby be achieved.
  • substrate cleaning is achieved by additionally heating the substrates in the coating chamber before coating.
  • the method according to the invention can be used both for coating substrates with one layer and particularly advantageously for coating substrates with multiple layers.
  • the substrate is coated by means of a reactive coating method.
  • the coating chamber is a coating reactor.
  • PICVD Plasma-Impulse-Chemical-Vapor-Deposition
  • LPCVD Low-Pressure-Chemical-Vapor-Deposition
  • the device according to the invention for coating substrates comprises a preheating device in addition to a coating chamber.
  • the preheating device By means of the preheating device, the substrates can be preheated until a homogeneous
  • the coating chamber can particularly advantageously be designed as a coating reactor in order to enable the coating to be applied in a reactive process.
  • the coating chamber can be designed so that the application of several
  • Object guided which comprises a substrate with a coating that has a particularly high reliability with respect to the layer adhesion.
  • the coating can advantageously comprise several layers and can be applied particularly advantageously in a reactive process.
  • the object can advantageously comprise a cold light mirroring, so as to enable use in the theater lighting area.
  • the invention is particularly suitable for the coating of glass substrates.
  • substrates consisting of other materials can also be coated according to the invention.
  • metal or plastic may be mentioned here.
  • Figure 2 is a schematic diagram of a device according to the invention.
  • Figure 3 is a schematic diagram of an object according to the invention.
  • FIG. 1 shows a flow chart of the method according to the invention.
  • Step 1 the introduction of the substrate into a coating chamber (Step 2) and coating the substrate in the coating chamber (step 3).
  • the method according to the invention is suitable for the coating of a single substrate and also for the simultaneous coating of several substrates. Both one and several layers can be applied. Preheating is particularly advantageously carried out in a special
  • Preheating chamber and for example glass for the material of the substrate are Preheating chamber and for example glass for the material of the substrate.
  • the substrate can advantageously be cleaned by additional heating in the coating chamber.
  • Figure 2 shows an inventive device for coating substrates.
  • the coating chamber 1 and the preheating device 2 can be seen.
  • the substrate can be preheated until a homogeneous temperature distribution in the substrate is achieved.
  • FIG. 2a shows the device according to the invention in an operating state in which a substrate A ⁇
  • Preheater 2 is preheated and a second substrate A2 in the
  • FIG. 2b shows the device according to the invention in an operating state in which the preheated substrate A-j is introduced into the coating chamber
  • FIG. 3 shows an object of the invention with a substrate, for. B. a glass substrate A.
  • a coating B is applied to the glass substrate A.
  • the coating B has a particularly uniform layer thickness distribution. This is achieved according to the invention in that coating B was applied in a coating chamber after the substrate had previously been preheated externally.
  • the particularly uniform layer thickness distribution means that the coating is particularly reliable with regard to layer adhesion.

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Chemical Vapour Deposition (AREA)

Abstract

La présente invention concerne un procédé pour appliquer un revêtement sur des substrats, tels que des substrats en verre. Ce procédé est caractérisé en ce que la première étape consiste à préchauffer les substrats, par exemple dans une enceinte de préchauffage, en ce que la seconde étape consiste à introduire les substrats dans une enceinte de revêtement et en ce que la troisième étape consiste à appliquer un revêtement sur les substrats, dans cette enceinte de revêtement.
PCT/EP2002/002223 2001-03-14 2002-03-01 Revetement de substrats Ceased WO2002072914A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10112731.6 2001-03-14
DE2001112731 DE10112731A1 (de) 2001-03-14 2001-03-14 Beschichtung von Substraten

Publications (1)

Publication Number Publication Date
WO2002072914A1 true WO2002072914A1 (fr) 2002-09-19

Family

ID=7677744

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2002/002223 Ceased WO2002072914A1 (fr) 2001-03-14 2002-03-01 Revetement de substrats

Country Status (2)

Country Link
DE (1) DE10112731A1 (fr)
WO (1) WO2002072914A1 (fr)

Cited By (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8128549B2 (en) 2007-02-20 2012-03-06 Neuronetics, Inc. Capacitor failure detection
US9272095B2 (en) 2011-04-01 2016-03-01 Sio2 Medical Products, Inc. Vessels, contact surfaces, and coating and inspection apparatus and methods
US9458536B2 (en) 2009-07-02 2016-10-04 Sio2 Medical Products, Inc. PECVD coating methods for capped syringes, cartridges and other articles
US9545360B2 (en) 2009-05-13 2017-01-17 Sio2 Medical Products, Inc. Saccharide protective coating for pharmaceutical package
US9554968B2 (en) 2013-03-11 2017-01-31 Sio2 Medical Products, Inc. Trilayer coated pharmaceutical packaging
US9572526B2 (en) 2009-05-13 2017-02-21 Sio2 Medical Products, Inc. Apparatus and method for transporting a vessel to and from a PECVD processing station
US9662450B2 (en) 2013-03-01 2017-05-30 Sio2 Medical Products, Inc. Plasma or CVD pre-treatment for lubricated pharmaceutical package, coating process and apparatus
US9664626B2 (en) 2012-11-01 2017-05-30 Sio2 Medical Products, Inc. Coating inspection method
US9764093B2 (en) 2012-11-30 2017-09-19 Sio2 Medical Products, Inc. Controlling the uniformity of PECVD deposition
US9863042B2 (en) 2013-03-15 2018-01-09 Sio2 Medical Products, Inc. PECVD lubricity vessel coating, coating process and apparatus providing different power levels in two phases
US9878101B2 (en) 2010-11-12 2018-01-30 Sio2 Medical Products, Inc. Cyclic olefin polymer vessels and vessel coating methods
US9903782B2 (en) 2012-11-16 2018-02-27 Sio2 Medical Products, Inc. Method and apparatus for detecting rapid barrier coating integrity characteristics
US9937099B2 (en) 2013-03-11 2018-04-10 Sio2 Medical Products, Inc. Trilayer coated pharmaceutical packaging with low oxygen transmission rate
CN108950514A (zh) * 2018-08-28 2018-12-07 洛阳尚德太阳能电力有限公司 晶硅太阳能电池管式pecvd预热储舟装置及镀膜方法
US10189603B2 (en) 2011-11-11 2019-01-29 Sio2 Medical Products, Inc. Passivation, pH protective or lubricity coating for pharmaceutical package, coating process and apparatus
US10201660B2 (en) 2012-11-30 2019-02-12 Sio2 Medical Products, Inc. Controlling the uniformity of PECVD deposition on medical syringes, cartridges, and the like
US11066745B2 (en) 2014-03-28 2021-07-20 Sio2 Medical Products, Inc. Antistatic coatings for plastic vessels
US11077233B2 (en) 2015-08-18 2021-08-03 Sio2 Medical Products, Inc. Pharmaceutical and other packaging with low oxygen transmission rate
US11116695B2 (en) 2011-11-11 2021-09-14 Sio2 Medical Products, Inc. Blood sample collection tube
US11624115B2 (en) 2010-05-12 2023-04-11 Sio2 Medical Products, Inc. Syringe with PECVD lubrication
US12257371B2 (en) 2012-07-03 2025-03-25 Sio2 Medical Products, Llc SiOx barrier for pharmaceutical package and coating process

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10242752B4 (de) * 2002-09-13 2005-01-13 Schott Glas Vorrichtung und Verfahren zum automatischen Beschicken einer Vielzahl von Bearbeitungsstationen sowie Beschichtungsanlage mit einer derartigen Vorrichtung

Citations (5)

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Publication number Priority date Publication date Assignee Title
US5412274A (en) * 1992-12-17 1995-05-02 General Electric Company Diffusely reflecting optical interference filters and articles including lamps reflectors and lenses
WO1999045164A1 (fr) * 1998-03-03 1999-09-10 Applied Komatsu Technology, Inc. Procede de revetement et de recuisson de substrats de verre de grande superficie
US6107212A (en) * 1997-06-12 2000-08-22 Sony Corporation Method of and apparatus for manufacturing semiconductor devices
WO2001002622A2 (fr) * 1999-07-02 2001-01-11 Microcoating Technologies, Inc. Procede ccvd de revetement de ceramiques
US6193506B1 (en) * 1995-05-24 2001-02-27 Brooks Automation, Inc. Apparatus and method for batch thermal conditioning of substrates

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US3086882A (en) * 1958-07-02 1963-04-23 Libbey Owens Ford Glass Co Method and apparatus for filming articles by vacuum deposition
US3568632A (en) * 1969-03-24 1971-03-09 Gary F Cawthon Lens coating apparatus
JPS58197262A (ja) * 1982-05-13 1983-11-16 Canon Inc 量産型真空成膜装置及び真空成膜法
DE4008405C1 (fr) * 1990-03-16 1991-07-11 Schott Glaswerke, 6500 Mainz, De
US5976258A (en) * 1998-02-05 1999-11-02 Semiconductor Equipment Group, Llc High temperature substrate transfer module

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5412274A (en) * 1992-12-17 1995-05-02 General Electric Company Diffusely reflecting optical interference filters and articles including lamps reflectors and lenses
US6193506B1 (en) * 1995-05-24 2001-02-27 Brooks Automation, Inc. Apparatus and method for batch thermal conditioning of substrates
US6107212A (en) * 1997-06-12 2000-08-22 Sony Corporation Method of and apparatus for manufacturing semiconductor devices
WO1999045164A1 (fr) * 1998-03-03 1999-09-10 Applied Komatsu Technology, Inc. Procede de revetement et de recuisson de substrats de verre de grande superficie
WO2001002622A2 (fr) * 1999-07-02 2001-01-11 Microcoating Technologies, Inc. Procede ccvd de revetement de ceramiques

Cited By (37)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8128549B2 (en) 2007-02-20 2012-03-06 Neuronetics, Inc. Capacitor failure detection
US9545360B2 (en) 2009-05-13 2017-01-17 Sio2 Medical Products, Inc. Saccharide protective coating for pharmaceutical package
US9572526B2 (en) 2009-05-13 2017-02-21 Sio2 Medical Products, Inc. Apparatus and method for transporting a vessel to and from a PECVD processing station
US10537273B2 (en) 2009-05-13 2020-01-21 Sio2 Medical Products, Inc. Syringe with PECVD lubricity layer
US10390744B2 (en) 2009-05-13 2019-08-27 Sio2 Medical Products, Inc. Syringe with PECVD lubricity layer, apparatus and method for transporting a vessel to and from a PECVD processing station, and double wall plastic vessel
US9458536B2 (en) 2009-07-02 2016-10-04 Sio2 Medical Products, Inc. PECVD coating methods for capped syringes, cartridges and other articles
US11624115B2 (en) 2010-05-12 2023-04-11 Sio2 Medical Products, Inc. Syringe with PECVD lubrication
US9878101B2 (en) 2010-11-12 2018-01-30 Sio2 Medical Products, Inc. Cyclic olefin polymer vessels and vessel coating methods
US11123491B2 (en) 2010-11-12 2021-09-21 Sio2 Medical Products, Inc. Cyclic olefin polymer vessels and vessel coating methods
US9272095B2 (en) 2011-04-01 2016-03-01 Sio2 Medical Products, Inc. Vessels, contact surfaces, and coating and inspection apparatus and methods
US11148856B2 (en) 2011-11-11 2021-10-19 Sio2 Medical Products, Inc. Passivation, pH protective or lubricity coating for pharmaceutical package, coating process and apparatus
US11884446B2 (en) 2011-11-11 2024-01-30 Sio2 Medical Products, Inc. Passivation, pH protective or lubricity coating for pharmaceutical package, coating process and apparatus
US11724860B2 (en) 2011-11-11 2023-08-15 Sio2 Medical Products, Inc. Passivation, pH protective or lubricity coating for pharmaceutical package, coating process and apparatus
US10189603B2 (en) 2011-11-11 2019-01-29 Sio2 Medical Products, Inc. Passivation, pH protective or lubricity coating for pharmaceutical package, coating process and apparatus
US11116695B2 (en) 2011-11-11 2021-09-14 Sio2 Medical Products, Inc. Blood sample collection tube
US10577154B2 (en) 2011-11-11 2020-03-03 Sio2 Medical Products, Inc. Passivation, pH protective or lubricity coating for pharmaceutical package, coating process and apparatus
US12257371B2 (en) 2012-07-03 2025-03-25 Sio2 Medical Products, Llc SiOx barrier for pharmaceutical package and coating process
US9664626B2 (en) 2012-11-01 2017-05-30 Sio2 Medical Products, Inc. Coating inspection method
US9903782B2 (en) 2012-11-16 2018-02-27 Sio2 Medical Products, Inc. Method and apparatus for detecting rapid barrier coating integrity characteristics
US10363370B2 (en) 2012-11-30 2019-07-30 Sio2 Medical Products, Inc. Controlling the uniformity of PECVD deposition
US9764093B2 (en) 2012-11-30 2017-09-19 Sio2 Medical Products, Inc. Controlling the uniformity of PECVD deposition
US11406765B2 (en) 2012-11-30 2022-08-09 Sio2 Medical Products, Inc. Controlling the uniformity of PECVD deposition
US10201660B2 (en) 2012-11-30 2019-02-12 Sio2 Medical Products, Inc. Controlling the uniformity of PECVD deposition on medical syringes, cartridges, and the like
US9662450B2 (en) 2013-03-01 2017-05-30 Sio2 Medical Products, Inc. Plasma or CVD pre-treatment for lubricated pharmaceutical package, coating process and apparatus
US11344473B2 (en) 2013-03-11 2022-05-31 SiO2Medical Products, Inc. Coated packaging
US10912714B2 (en) 2013-03-11 2021-02-09 Sio2 Medical Products, Inc. PECVD coated pharmaceutical packaging
US11298293B2 (en) 2013-03-11 2022-04-12 Sio2 Medical Products, Inc. PECVD coated pharmaceutical packaging
US10537494B2 (en) 2013-03-11 2020-01-21 Sio2 Medical Products, Inc. Trilayer coated blood collection tube with low oxygen transmission rate
US9554968B2 (en) 2013-03-11 2017-01-31 Sio2 Medical Products, Inc. Trilayer coated pharmaceutical packaging
US11684546B2 (en) 2013-03-11 2023-06-27 Sio2 Medical Products, Inc. PECVD coated pharmaceutical packaging
US10016338B2 (en) 2013-03-11 2018-07-10 Sio2 Medical Products, Inc. Trilayer coated pharmaceutical packaging
US12239606B2 (en) 2013-03-11 2025-03-04 Sio2 Medical Products, Llc PECVD coated pharmaceutical packaging
US9937099B2 (en) 2013-03-11 2018-04-10 Sio2 Medical Products, Inc. Trilayer coated pharmaceutical packaging with low oxygen transmission rate
US9863042B2 (en) 2013-03-15 2018-01-09 Sio2 Medical Products, Inc. PECVD lubricity vessel coating, coating process and apparatus providing different power levels in two phases
US11066745B2 (en) 2014-03-28 2021-07-20 Sio2 Medical Products, Inc. Antistatic coatings for plastic vessels
US11077233B2 (en) 2015-08-18 2021-08-03 Sio2 Medical Products, Inc. Pharmaceutical and other packaging with low oxygen transmission rate
CN108950514A (zh) * 2018-08-28 2018-12-07 洛阳尚德太阳能电力有限公司 晶硅太阳能电池管式pecvd预热储舟装置及镀膜方法

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