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WO2002055990A8 - Processus de microfabrication pour emetteurs de spectrometrie de masse en mode electronebulisation (electrospray) - Google Patents

Processus de microfabrication pour emetteurs de spectrometrie de masse en mode electronebulisation (electrospray)

Info

Publication number
WO2002055990A8
WO2002055990A8 PCT/US2002/000705 US0200705W WO02055990A8 WO 2002055990 A8 WO2002055990 A8 WO 2002055990A8 US 0200705 W US0200705 W US 0200705W WO 02055990 A8 WO02055990 A8 WO 02055990A8
Authority
WO
WIPO (PCT)
Prior art keywords
layer
photo resist
radiation
wafer
resist material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/US2002/000705
Other languages
English (en)
Other versions
WO2002055990A3 (fr
WO2002055990A2 (fr
WO2002055990A9 (fr
Inventor
Daniel R Knapp
Jin-Sung Kim
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
MUSC Foundation for Research and Development
Original Assignee
MUSC Foundation for Research and Development
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by MUSC Foundation for Research and Development filed Critical MUSC Foundation for Research and Development
Priority to AU2002243506A priority Critical patent/AU2002243506A1/en
Publication of WO2002055990A2 publication Critical patent/WO2002055990A2/fr
Publication of WO2002055990A3 publication Critical patent/WO2002055990A3/fr
Publication of WO2002055990A9 publication Critical patent/WO2002055990A9/fr
Publication of WO2002055990A8 publication Critical patent/WO2002055990A8/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N30/00—Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography or field flow fractionation
    • G01N30/02—Column chromatography
    • G01N30/62—Detectors specially adapted therefor
    • G01N30/72—Mass spectrometers
    • G01N30/7233—Mass spectrometers interfaced to liquid or supercritical fluid chromatograph
    • G01N30/724—Nebulising, aerosol formation or ionisation
    • G01N30/7266—Nebulising, aerosol formation or ionisation by electric field, e.g. electrospray
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/0013—Miniaturised spectrometers, e.g. having smaller than usual scale, integrated conventional components
    • H01J49/0018—Microminiaturised spectrometers, e.g. chip-integrated devices, Micro-Electro-Mechanical Systems [MEMS]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H01J49/16—Ion sources; Ion guns using surface ionisation, e.g. field-, thermionic- or photo-emission
    • H01J49/165—Electrospray ionisation
    • H01J49/167—Capillaries and nozzles specially adapted therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N30/00—Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography or field flow fractionation
    • G01N30/02—Column chromatography
    • G01N30/60—Construction of the column
    • G01N30/6004—Construction of the column end pieces
    • G01N2030/6013—Construction of the column end pieces interfaces to detectors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N30/00—Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography or field flow fractionation
    • G01N30/02—Column chromatography
    • G01N30/60—Construction of the column
    • G01N30/6095—Micromachined or nanomachined, e.g. micro- or nanosize

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Plasma & Fusion (AREA)
  • Dispersion Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Materials For Photolithography (AREA)
  • Micromachines (AREA)

Abstract

La présente invention concerne des émetteurs microfabriqués destinés à la spectrographie de masse en mode électronébulisation (ESI-MS), qui sont produits par un processus de lithographie «douce». Un substrat est revêtu avec un matériau photorésine. On positionne un masque photographique sur ce matériau photorésine. Ce masque photographique permet ou empêche sélectivement l'exposition de ce matériau photorésine au rayonnement, tel que le rayonnement UV. La plaquette qui en résulte est développée de sorte que la partie de la photorésine qui n'a pas été exposée au rayonnement soit retirée, et cette plaquette forme un moule. On prépare un matériau adapté, tel que du polydiméthylsiloxane (PDMS) sous forme d'un matériau en deux parties, puis on le verse sur cette plaquette, qui agit comme un moule, de façon à former une couche de l'émetteur. On peut former la couche adjacente de la même manière, la couche supérieure et la couche de fond étant assemblées, par exemple par application de plasma d'oxygène. le substrat peut être revêtu avec une seconde couche de matériau photorésine, après exposition au rayonnement de la première couche, mais avant le développement de cette première couche de façon à obtenir une forme plus complexe.
PCT/US2002/000705 2001-01-11 2002-01-09 Processus de microfabrication pour emetteurs de spectrometrie de masse en mode electronebulisation (electrospray) Ceased WO2002055990A2 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AU2002243506A AU2002243506A1 (en) 2001-01-11 2002-01-09 Microfabrication process for electrospray ionization mass spectrometry emitters

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US26065501P 2001-01-11 2001-01-11
US60/260,655 2001-01-11

Publications (4)

Publication Number Publication Date
WO2002055990A2 WO2002055990A2 (fr) 2002-07-18
WO2002055990A3 WO2002055990A3 (fr) 2002-11-07
WO2002055990A9 WO2002055990A9 (fr) 2002-12-27
WO2002055990A8 true WO2002055990A8 (fr) 2003-02-27

Family

ID=22990074

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2002/000705 Ceased WO2002055990A2 (fr) 2001-01-11 2002-01-09 Processus de microfabrication pour emetteurs de spectrometrie de masse en mode electronebulisation (electrospray)

Country Status (2)

Country Link
AU (1) AU2002243506A1 (fr)
WO (1) WO2002055990A2 (fr)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6803568B2 (en) 2001-09-19 2004-10-12 Predicant Biosciences, Inc. Multi-channel microfluidic chip for electrospray ionization
US7105810B2 (en) 2001-12-21 2006-09-12 Cornell Research Foundation, Inc. Electrospray emitter for microfluidic channel
US7007710B2 (en) 2003-04-21 2006-03-07 Predicant Biosciences, Inc. Microfluidic devices and methods
US7537807B2 (en) 2003-09-26 2009-05-26 Cornell University Scanned source oriented nanofiber formation
FR2862006B1 (fr) * 2003-11-12 2006-01-27 Univ Lille Sciences Tech Sources d'electronebulisation planaires sur le modele d'une plume de calligraphie et leur fabrication.
US20060060769A1 (en) 2004-09-21 2006-03-23 Predicant Biosciences, Inc. Electrospray apparatus with an integrated electrode
US7591883B2 (en) 2004-09-27 2009-09-22 Cornell Research Foundation, Inc. Microfiber supported nanofiber membrane
US10125052B2 (en) 2008-05-06 2018-11-13 Massachusetts Institute Of Technology Method of fabricating electrically conductive aerogels
US8785881B2 (en) 2008-05-06 2014-07-22 Massachusetts Institute Of Technology Method and apparatus for a porous electrospray emitter
US8207496B2 (en) * 2010-02-05 2012-06-26 Thermo Finnigan Llc Multi-needle multi-parallel nanospray ionization source for mass spectrometry
US10308377B2 (en) 2011-05-03 2019-06-04 Massachusetts Institute Of Technology Propellant tank and loading for electrospray thruster
US9669416B2 (en) 2013-05-28 2017-06-06 Massachusetts Institute Of Technology Electrospraying systems and associated methods
US10141855B2 (en) 2017-04-12 2018-11-27 Accion Systems, Inc. System and method for power conversion
WO2020236961A1 (fr) 2019-05-21 2020-11-26 Accion Systems, Inc. Appareil d'émission par électronébulisation
EP4200218A4 (fr) 2020-08-24 2024-08-07 Accion Systems, Inc. Appareil propulseur

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6087006A (en) * 1994-08-31 2000-07-11 Hitachi, Ltd. Surface-protecting film and resin-sealed semiconductor device having said film
US6033202A (en) * 1998-03-27 2000-03-07 Lucent Technologies Inc. Mold for non - photolithographic fabrication of microstructures
US6245227B1 (en) * 1998-09-17 2001-06-12 Kionix, Inc. Integrated monolithic microfabricated electrospray and liquid chromatography system and method
US6319634B1 (en) * 1999-03-12 2001-11-20 Corning Incorporated Projection lithography photomasks and methods of making

Also Published As

Publication number Publication date
WO2002055990A3 (fr) 2002-11-07
AU2002243506A1 (en) 2002-07-24
WO2002055990A2 (fr) 2002-07-18
WO2002055990A9 (fr) 2002-12-27

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