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WO2001011347A3 - Humidity sensor - Google Patents

Humidity sensor Download PDF

Info

Publication number
WO2001011347A3
WO2001011347A3 PCT/EP2000/007804 EP0007804W WO0111347A3 WO 2001011347 A3 WO2001011347 A3 WO 2001011347A3 EP 0007804 W EP0007804 W EP 0007804W WO 0111347 A3 WO0111347 A3 WO 0111347A3
Authority
WO
WIPO (PCT)
Prior art keywords
gas atmosphere
humidity sensor
temperature
semiconductor sensor
sensitive surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/EP2000/007804
Other languages
German (de)
French (fr)
Other versions
WO2001011347A2 (en
Inventor
Manfred Greschitz
Klaus Gruber
Franz Helminger
Franz Wolf
Basse Paul-Werner Von
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Infineon Technologies AG
Original Assignee
Infineon Technologies AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Infineon Technologies AG filed Critical Infineon Technologies AG
Publication of WO2001011347A2 publication Critical patent/WO2001011347A2/en
Publication of WO2001011347A3 publication Critical patent/WO2001011347A3/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
    • G01N27/223—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance for determining moisture content, e.g. humidity

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)

Abstract

A semiconductor sensor (2) comprising a capacitively sensitive surface (3) is placed in the area of a gas atmosphere. The semiconductor sensor (2) can be cooled by a cooling device (5). The current temperature of the semiconductor sensor (2) is determined using a cooling temperature sensor (7) as liquid (14) condenses on the capacitively sensitive surface (3). The air humidity of the gas atmosphere is subsequently determined using said current temperature and the temperature of the gas atmosphere.
PCT/EP2000/007804 1999-08-10 2000-08-10 Humidity sensor Ceased WO2001011347A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE1999137744 DE19937744A1 (en) 1999-08-10 1999-08-10 Humidity sensor
DE19937744.8 1999-08-10

Publications (2)

Publication Number Publication Date
WO2001011347A2 WO2001011347A2 (en) 2001-02-15
WO2001011347A3 true WO2001011347A3 (en) 2001-11-01

Family

ID=7917855

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2000/007804 Ceased WO2001011347A2 (en) 1999-08-10 2000-08-10 Humidity sensor

Country Status (2)

Country Link
DE (1) DE19937744A1 (en)
WO (1) WO2001011347A2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2212656C1 (en) * 2002-03-04 2003-09-20 Омский государственный технический университет Gas humidity sensor

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DD208054A3 (en) * 1982-03-01 1984-03-21 Adl Inst Pflanzenschutz METHOD AND DEVICE FOR THE LOCAL DETERMINATION OF RADIATION FRAMES
GB2288465A (en) * 1994-04-15 1995-10-18 Vaisala Oy Method of measuring dewpoint or gas concentration and apparatus for prediction of icing

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4116322C2 (en) * 1991-05-16 1998-08-06 Ct Fuer Intelligente Sensorik Device for measuring dew point temperature and condensation

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DD208054A3 (en) * 1982-03-01 1984-03-21 Adl Inst Pflanzenschutz METHOD AND DEVICE FOR THE LOCAL DETERMINATION OF RADIATION FRAMES
GB2288465A (en) * 1994-04-15 1995-10-18 Vaisala Oy Method of measuring dewpoint or gas concentration and apparatus for prediction of icing

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
DATABASE WPI Derwent World Patents Index; XP002901399 *

Also Published As

Publication number Publication date
DE19937744A1 (en) 2001-03-22
WO2001011347A2 (en) 2001-02-15

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