[go: up one dir, main page]

WO2001011347A3 - Feuchtigkeitssensor - Google Patents

Feuchtigkeitssensor Download PDF

Info

Publication number
WO2001011347A3
WO2001011347A3 PCT/EP2000/007804 EP0007804W WO0111347A3 WO 2001011347 A3 WO2001011347 A3 WO 2001011347A3 EP 0007804 W EP0007804 W EP 0007804W WO 0111347 A3 WO0111347 A3 WO 0111347A3
Authority
WO
WIPO (PCT)
Prior art keywords
gas atmosphere
humidity sensor
temperature
semiconductor sensor
sensitive surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/EP2000/007804
Other languages
English (en)
French (fr)
Other versions
WO2001011347A2 (de
Inventor
Manfred Greschitz
Klaus Gruber
Franz Helminger
Franz Wolf
Basse Paul-Werner Von
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Infineon Technologies AG
Original Assignee
Infineon Technologies AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Infineon Technologies AG filed Critical Infineon Technologies AG
Publication of WO2001011347A2 publication Critical patent/WO2001011347A2/de
Publication of WO2001011347A3 publication Critical patent/WO2001011347A3/de
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
    • G01N27/223—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance for determining moisture content, e.g. humidity

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)

Abstract

Ein Halbleitersensor (2) mit einer kapazitiv empfindlichen Oberfläche (3) ist im Bereich einer Gasatmosphäre vorgesehen. Der Halbleitersensor (2) ist durch eine Kühlvorrichtung (5) abkühlbar. Mit einem Kühltemperatursensor (7) wird die momentane Temperatur des Halbleitersensors (2) beim Auskondensieren von Flüssigkeit (14) auf der kapazitiv empfindlichen Oberfläche (3) bestimmt. Damit und mit der Temperatur der Gasatmosphäre wird anschliessend die Luftfeuchte der Gasatmosphäre bestimmt.
PCT/EP2000/007804 1999-08-10 2000-08-10 Feuchtigkeitssensor Ceased WO2001011347A2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19937744.8 1999-08-10
DE1999137744 DE19937744A1 (de) 1999-08-10 1999-08-10 Feuchtigkeitssensor

Publications (2)

Publication Number Publication Date
WO2001011347A2 WO2001011347A2 (de) 2001-02-15
WO2001011347A3 true WO2001011347A3 (de) 2001-11-01

Family

ID=7917855

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2000/007804 Ceased WO2001011347A2 (de) 1999-08-10 2000-08-10 Feuchtigkeitssensor

Country Status (2)

Country Link
DE (1) DE19937744A1 (de)
WO (1) WO2001011347A2 (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2212656C1 (ru) * 2002-03-04 2003-09-20 Омский государственный технический университет Датчик влажности газов

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DD208054A3 (de) * 1982-03-01 1984-03-21 Adl Inst Pflanzenschutz Verfahren und vorrichtung zur lokalen ermittlung von strahlungsfroesten
GB2288465A (en) * 1994-04-15 1995-10-18 Vaisala Oy Method of measuring dewpoint or gas concentration and apparatus for prediction of icing

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4116322C2 (de) * 1991-05-16 1998-08-06 Ct Fuer Intelligente Sensorik Vorrichtung zur Messung der Taupunkttemperatur und der Betauung

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DD208054A3 (de) * 1982-03-01 1984-03-21 Adl Inst Pflanzenschutz Verfahren und vorrichtung zur lokalen ermittlung von strahlungsfroesten
GB2288465A (en) * 1994-04-15 1995-10-18 Vaisala Oy Method of measuring dewpoint or gas concentration and apparatus for prediction of icing

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
DATABASE WPI Derwent World Patents Index; XP002901399 *

Also Published As

Publication number Publication date
WO2001011347A2 (de) 2001-02-15
DE19937744A1 (de) 2001-03-22

Similar Documents

Publication Publication Date Title
WO2004032187A3 (en) Multi-zone resitive heater
GB2305730A (en) Resistive gas sensing, especially for detection of ozone
WO2005000711A3 (en) Package with contaminate-reducing access element
CA2401966A1 (en) Ventilated bed
EP1406303A4 (de) Leistungsmodul und klimagerät
WO2000007536A3 (en) Adjustable supporting device, intended for a premature infant in an incubator
WO2002053079A3 (en) Humidity sensor for incubator
GB0201115D0 (en) Micro-bridge structure
WO2007041007A3 (en) Magnetic tunnel junction temperature sensors
WO2001093310A3 (fr) Dispositif semiconducteur a injection electronique verticale et son procede de fabrication
WO1999026460A8 (en) Cooling system for semiconductor die carrier
SG148024A1 (en) Method for two dimensional adaptive process control of critical dimensions during spin coating process
WO2002041007A3 (en) Thermal convection accelerometer with closed-loop heater control
WO2004048958A3 (en) Nanotube sensor
WO2003028996A1 (en) Soil-resisting film formed article
MX9401334A (es) Procedimiento y dispositivo para detectar un riesgo de condensacion de agua sobre una superficie quese encuentra en contacto con un volumen de aire humedo.
SE9902081D0 (sv) Low power sensor
WO2001011347A3 (de) Feuchtigkeitssensor
EP1261027A3 (de) Elektronikbauteil mit Kondensationsschutzstruktur
EP1100126A3 (de) Halbleiterbauelement vom Typ SOI und dessen Herstellungsverfahren
EP1098182A3 (de) Halbleiter-Druckwandler
WO2001080804A3 (en) Fail safe device for infant-support apparatus
USD497665S1 (en) Air freshener device
GB2381657B (en) Semiconductor device with borderless contact structure and method of manufacturing the same
TW200707634A (en) Semiconductor substrate and manufacturing method thereof

Legal Events

Date Code Title Description
AK Designated states

Kind code of ref document: A2

Designated state(s): BR CN IN JP KR MX RU UA US

AL Designated countries for regional patents

Kind code of ref document: A2

Designated state(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LU MC NL PT SE

121 Ep: the epo has been informed by wipo that ep was designated in this application
DFPE Request for preliminary examination filed prior to expiration of 19th month from priority date (pct application filed before 20040101)
AK Designated states

Kind code of ref document: A3

Designated state(s): BR CN IN JP KR MX RU UA US

AL Designated countries for regional patents

Kind code of ref document: A3

Designated state(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LU MC NL PT SE

122 Ep: pct application non-entry in european phase
NENP Non-entry into the national phase

Ref country code: JP