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WO2001097559A3 - Transducteurs ultrasonores, micro-usines, capacitifs - Google Patents

Transducteurs ultrasonores, micro-usines, capacitifs Download PDF

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Publication number
WO2001097559A3
WO2001097559A3 PCT/EP2001/006868 EP0106868W WO0197559A3 WO 2001097559 A3 WO2001097559 A3 WO 2001097559A3 EP 0106868 W EP0106868 W EP 0106868W WO 0197559 A3 WO0197559 A3 WO 0197559A3
Authority
WO
WIPO (PCT)
Prior art keywords
cells
diaphragm plate
base plate
fabricated
plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/EP2001/006868
Other languages
English (en)
Other versions
WO2001097559A2 (fr
Inventor
John D Fraser
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Koninklijke Philips Electronics NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US09/596,759 external-priority patent/US6443901B1/en
Application filed by Koninklijke Philips Electronics NV filed Critical Koninklijke Philips Electronics NV
Priority to JP2002511143A priority Critical patent/JP2004503312A/ja
Priority to EP01956480A priority patent/EP1294493A2/fr
Publication of WO2001097559A2 publication Critical patent/WO2001097559A2/fr
Publication of WO2001097559A3 publication Critical patent/WO2001097559A3/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/0292—Electrostatic transducers, e.g. electret-type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B33—ADDITIVE MANUFACTURING TECHNOLOGY
    • B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
    • B33Y80/00—Products made by additive manufacturing

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Ultra Sonic Daignosis Equipment (AREA)

Abstract

L'invention concerne un transducteur ultrasonore, formé au moyen de plusieurs cellules cMUT (transducteur ultrasonore micro-usiné, capacitif) chaque cellule comprenant une membrane métallique chargée, placée en opposition capacitive à une plaque de base chargée de façon opposée. La plaque de base comporte une portion centrale surélevée en direction du centre de la membrane métallique, de façon que la charge de la cellule possède une densité maximale au niveau du centre mobile de la membrane métallique. Pour le fonctionnement harmonique, les impulsions d'excitation appliquées sur les cellules sont préalablement déformées eu égard au fonctionnement non linéaire du dispositif, de manière à réduire la contamination du signal d'émission au niveau de la bande harmonique. Il est possible de fabriquer ces cellules cMUT à l'aide de processus classiques de semi-conducteurs, et donc de les intégrer au moyen de circuits transducteurs auxiliaires tels qu'un régulateur de charge de polarisation. Il est également possible de fabriquer ces cellules cMUT au moyen d'une technique de micro-stéréolithographie, afin de former ces cellules à l'aide d'une diversité de polymères et autres matériaux.
PCT/EP2001/006868 2000-06-15 2001-06-15 Transducteurs ultrasonores, micro-usines, capacitifs Ceased WO2001097559A2 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2002511143A JP2004503312A (ja) 2000-06-15 2001-06-15 容量性マイクロマシン超音波振動子
EP01956480A EP1294493A2 (fr) 2000-06-15 2001-06-15 Transducteurs ultrasonores, micro-usines, capacitifs

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US09/596,759 US6443901B1 (en) 2000-06-15 2000-06-15 Capacitive micromachined ultrasonic transducers
US09/596,759 2000-06-15
US09/698,232 2000-10-27
US09/698,232 US6328697B1 (en) 2000-06-15 2000-10-27 Capacitive micromachined ultrasonic transducers with improved capacitive response

Publications (2)

Publication Number Publication Date
WO2001097559A2 WO2001097559A2 (fr) 2001-12-20
WO2001097559A3 true WO2001097559A3 (fr) 2002-04-18

Family

ID=27082617

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2001/006868 Ceased WO2001097559A2 (fr) 2000-06-15 2001-06-15 Transducteurs ultrasonores, micro-usines, capacitifs

Country Status (3)

Country Link
EP (1) EP1294493A2 (fr)
JP (1) JP2004503312A (fr)
WO (1) WO2001097559A2 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7030536B2 (en) 2003-12-29 2006-04-18 General Electric Company Micromachined ultrasonic transducer cells having compliant support structure

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004107963A2 (fr) * 2003-06-03 2004-12-16 Allez Physionix Limited Systemes et procedes permettant de determiner la pression intracranienne de façon non invasive et ensembles de transducteurs acoustiques destines a etre utilises dans ces systemes
US7052464B2 (en) * 2004-01-01 2006-05-30 General Electric Company Alignment method for fabrication of integrated ultrasonic transducer array
US8008835B2 (en) * 2004-02-27 2011-08-30 Georgia Tech Research Corporation Multiple element electrode cMUT devices and fabrication methods
JP4347885B2 (ja) 2004-06-03 2009-10-21 オリンパス株式会社 静電容量型超音波振動子の製造方法、当該製造方法によって製造された静電容量型超音波振動子を備えた超音波内視鏡装置、静電容量型超音波プローブおよび静電容量型超音波振動子
WO2005120360A1 (fr) * 2004-06-10 2005-12-22 Olympus Corporation Dispositif à sonde ultrasons de type capacitif électrostatique
JP4477631B2 (ja) 2004-06-11 2010-06-09 オリンパス株式会社 超音波プローブ装置及び超音波診断装置
US20060004289A1 (en) * 2004-06-30 2006-01-05 Wei-Cheng Tian High sensitivity capacitive micromachined ultrasound transducer
JP4503423B2 (ja) * 2004-11-29 2010-07-14 富士フイルム株式会社 容量性マイクロマシン超音波振動子及びその製造方法、並びに、超音波トランスデューサアレイ
EP1952767B1 (fr) * 2005-11-18 2015-07-15 Hitachi Medical Corporation Appareil de diagnostic à ultrasons et procédé de calibrage de celui-ci
US7721397B2 (en) * 2007-02-07 2010-05-25 Industrial Technology Research Institute Method for fabricating capacitive ultrasonic transducers
JP5260130B2 (ja) 2007-08-10 2013-08-14 三菱重工業株式会社 超音波検査装置、超音波検査方法および原子力プラントの非破壊検査方法
EP2750805B1 (fr) * 2011-12-15 2022-06-01 Koninklijke Philips N.V. Transducteur à ultrasons avec dispositif de commande et procédé de commande
JP6102075B2 (ja) * 2012-03-30 2017-03-29 セイコーエプソン株式会社 超音波トランスデューサー素子チップおよびプローブ並びに電子機器および超音波診断装置
WO2016037912A1 (fr) * 2014-09-11 2016-03-17 Koninklijke Philips N.V. Système de communication par ultrasons à large bande à travers un corps
JP7208901B2 (ja) * 2016-12-22 2023-01-19 コーニンクレッカ フィリップス エヌ ヴェ 容量性高周波微小電気機械スイッチのシステム及び動作方法
JP7553054B2 (ja) * 2021-10-21 2024-09-18 硅系半導体科技有限公司 音響誘導型半導体素子及び音響素子集積回路

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4262399A (en) * 1978-11-08 1981-04-21 General Electric Co. Ultrasonic transducer fabricated as an integral park of a monolithic integrated circuit
US4887248A (en) * 1988-07-07 1989-12-12 Cleveland Machine Controls, Inc. Electrostatic transducer and method of making and using same
US5619476A (en) * 1994-10-21 1997-04-08 The Board Of Trustees Of The Leland Stanford Jr. Univ. Electrostatic ultrasonic transducer
US5894452A (en) * 1994-10-21 1999-04-13 The Board Of Trustees Of The Leland Stanford Junior University Microfabricated ultrasonic immersion transducer

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01312485A (ja) * 1988-06-13 1989-12-18 Agency Of Ind Science & Technol 静電容量型超音波トランスデューサ
JP3501845B2 (ja) * 1994-06-10 2004-03-02 富士通株式会社 振動素子及び振動素子の使用方法
JP3469341B2 (ja) * 1995-02-20 2003-11-25 株式会社東芝 圧電振動子
US6605043B1 (en) * 1998-11-19 2003-08-12 Acuson Corp. Diagnostic medical ultrasound systems and transducers utilizing micro-mechanical components

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4262399A (en) * 1978-11-08 1981-04-21 General Electric Co. Ultrasonic transducer fabricated as an integral park of a monolithic integrated circuit
US4887248A (en) * 1988-07-07 1989-12-12 Cleveland Machine Controls, Inc. Electrostatic transducer and method of making and using same
US5619476A (en) * 1994-10-21 1997-04-08 The Board Of Trustees Of The Leland Stanford Jr. Univ. Electrostatic ultrasonic transducer
US5870351A (en) * 1994-10-21 1999-02-09 The Board Of Trustees Of The Leland Stanford Junior University Broadband microfabriated ultrasonic transducer and method of fabrication
US5894452A (en) * 1994-10-21 1999-04-13 The Board Of Trustees Of The Leland Stanford Junior University Microfabricated ultrasonic immersion transducer

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7030536B2 (en) 2003-12-29 2006-04-18 General Electric Company Micromachined ultrasonic transducer cells having compliant support structure

Also Published As

Publication number Publication date
WO2001097559A2 (fr) 2001-12-20
EP1294493A2 (fr) 2003-03-26
JP2004503312A (ja) 2004-02-05

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