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WO2001097559A3 - Capacitive micromachined ultrasonic transducers. - Google Patents

Capacitive micromachined ultrasonic transducers. Download PDF

Info

Publication number
WO2001097559A3
WO2001097559A3 PCT/EP2001/006868 EP0106868W WO0197559A3 WO 2001097559 A3 WO2001097559 A3 WO 2001097559A3 EP 0106868 W EP0106868 W EP 0106868W WO 0197559 A3 WO0197559 A3 WO 0197559A3
Authority
WO
WIPO (PCT)
Prior art keywords
cells
diaphragm plate
base plate
fabricated
plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/EP2001/006868
Other languages
French (fr)
Other versions
WO2001097559A2 (en
Inventor
John D Fraser
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Koninklijke Philips Electronics NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US09/596,759 external-priority patent/US6443901B1/en
Application filed by Koninklijke Philips Electronics NV filed Critical Koninklijke Philips Electronics NV
Priority to JP2002511143A priority Critical patent/JP2004503312A/en
Priority to EP01956480A priority patent/EP1294493A2/en
Publication of WO2001097559A2 publication Critical patent/WO2001097559A2/en
Publication of WO2001097559A3 publication Critical patent/WO2001097559A3/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/0292—Electrostatic transducers, e.g. electret-type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B33—ADDITIVE MANUFACTURING TECHNOLOGY
    • B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
    • B33Y80/00—Products made by additive manufacturing

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Ultra Sonic Daignosis Equipment (AREA)

Abstract

An ultrasonic transducer is formed by a plurality of cMUT cells (10), each comprising a charged diaphragm plate (14) capacitively opposing an oppositely charged base plate (12). The diaphragm plate (14) is distended toward the base plate (12) by a bias charge. The base plate (12) includes a central portion (28) elevated toward the center of the diaphragm plate (14) to cause the charge of the cell to be of maximum density at the moving center of the diaphragm plate (14). For harmonic operation the drive pulses applied to the cells (10) are predistorted in consideration of the nonlinear operation of the device to reduce contamination of the transmit signal at the harmonic band. The cMUT cells (10) can be fabricated by conventional semiconductor processes and hence integrated with ancillary transducer circuitry such as a bias charge regulator (30). The cMUT cells (10) can also be fabricated by micro-stereolithography whereby the cells (10) can be formed using a variety of polymers and other materials.
PCT/EP2001/006868 2000-06-15 2001-06-15 Capacitive micromachined ultrasonic transducers. Ceased WO2001097559A2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2002511143A JP2004503312A (en) 2000-06-15 2001-06-15 Capacitive micromachined ultrasonic transducer
EP01956480A EP1294493A2 (en) 2000-06-15 2001-06-15 Capacitive micromachined ultrasonic transducers.

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US09/596,759 US6443901B1 (en) 2000-06-15 2000-06-15 Capacitive micromachined ultrasonic transducers
US09/596,759 2000-06-15
US09/698,232 2000-10-27
US09/698,232 US6328697B1 (en) 2000-06-15 2000-10-27 Capacitive micromachined ultrasonic transducers with improved capacitive response

Publications (2)

Publication Number Publication Date
WO2001097559A2 WO2001097559A2 (en) 2001-12-20
WO2001097559A3 true WO2001097559A3 (en) 2002-04-18

Family

ID=27082617

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2001/006868 Ceased WO2001097559A2 (en) 2000-06-15 2001-06-15 Capacitive micromachined ultrasonic transducers.

Country Status (3)

Country Link
EP (1) EP1294493A2 (en)
JP (1) JP2004503312A (en)
WO (1) WO2001097559A2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7030536B2 (en) 2003-12-29 2006-04-18 General Electric Company Micromachined ultrasonic transducer cells having compliant support structure

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004107963A2 (en) * 2003-06-03 2004-12-16 Allez Physionix Limited Non-invasive determination of intracranial pressure via acoustic transducers
US7052464B2 (en) * 2004-01-01 2006-05-30 General Electric Company Alignment method for fabrication of integrated ultrasonic transducer array
US8008835B2 (en) * 2004-02-27 2011-08-30 Georgia Tech Research Corporation Multiple element electrode cMUT devices and fabrication methods
JP4347885B2 (en) 2004-06-03 2009-10-21 オリンパス株式会社 Manufacturing method of capacitive ultrasonic transducer, ultrasonic endoscope apparatus including capacitive ultrasonic transducer manufactured by the manufacturing method, capacitive ultrasonic probe, and capacitive ultrasonic transducer Sonic transducer
WO2005120360A1 (en) * 2004-06-10 2005-12-22 Olympus Corporation Electrostatic capacity type ultrasonic probe device
JP4477631B2 (en) 2004-06-11 2010-06-09 オリンパス株式会社 Ultrasonic probe apparatus and ultrasonic diagnostic apparatus
US20060004289A1 (en) * 2004-06-30 2006-01-05 Wei-Cheng Tian High sensitivity capacitive micromachined ultrasound transducer
JP4503423B2 (en) * 2004-11-29 2010-07-14 富士フイルム株式会社 Capacitive micromachine ultrasonic transducer, method for manufacturing the same, and ultrasonic transducer array
EP1952767B1 (en) * 2005-11-18 2015-07-15 Hitachi Medical Corporation Ultrasound diagnostic apparatus and method of calibrating the same
US7721397B2 (en) * 2007-02-07 2010-05-25 Industrial Technology Research Institute Method for fabricating capacitive ultrasonic transducers
JP5260130B2 (en) 2007-08-10 2013-08-14 三菱重工業株式会社 Ultrasonic inspection apparatus, ultrasonic inspection method, and non-destructive inspection method for nuclear power plant
EP2750805B1 (en) * 2011-12-15 2022-06-01 Koninklijke Philips N.V. Ultrasound transducer with driver device and driving method
JP6102075B2 (en) * 2012-03-30 2017-03-29 セイコーエプソン株式会社 Ultrasonic transducer element chip and probe, electronic device and ultrasonic diagnostic apparatus
WO2016037912A1 (en) * 2014-09-11 2016-03-17 Koninklijke Philips N.V. Wide band through-body ultrasonic communication system
JP7208901B2 (en) * 2016-12-22 2023-01-19 コーニンクレッカ フィリップス エヌ ヴェ System and method of operation for capacitive high frequency micro-electromechanical switches
JP7553054B2 (en) * 2021-10-21 2024-09-18 硅系半導体科技有限公司 Acoustic induction type semiconductor device and acoustic device integrated circuit

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4262399A (en) * 1978-11-08 1981-04-21 General Electric Co. Ultrasonic transducer fabricated as an integral park of a monolithic integrated circuit
US4887248A (en) * 1988-07-07 1989-12-12 Cleveland Machine Controls, Inc. Electrostatic transducer and method of making and using same
US5619476A (en) * 1994-10-21 1997-04-08 The Board Of Trustees Of The Leland Stanford Jr. Univ. Electrostatic ultrasonic transducer
US5894452A (en) * 1994-10-21 1999-04-13 The Board Of Trustees Of The Leland Stanford Junior University Microfabricated ultrasonic immersion transducer

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01312485A (en) * 1988-06-13 1989-12-18 Agency Of Ind Science & Technol Electrostatic capacitor type ultrasonic wave transducer
JP3501845B2 (en) * 1994-06-10 2004-03-02 富士通株式会社 Vibration element and method of using vibration element
JP3469341B2 (en) * 1995-02-20 2003-11-25 株式会社東芝 Piezoelectric vibrator
US6605043B1 (en) * 1998-11-19 2003-08-12 Acuson Corp. Diagnostic medical ultrasound systems and transducers utilizing micro-mechanical components

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4262399A (en) * 1978-11-08 1981-04-21 General Electric Co. Ultrasonic transducer fabricated as an integral park of a monolithic integrated circuit
US4887248A (en) * 1988-07-07 1989-12-12 Cleveland Machine Controls, Inc. Electrostatic transducer and method of making and using same
US5619476A (en) * 1994-10-21 1997-04-08 The Board Of Trustees Of The Leland Stanford Jr. Univ. Electrostatic ultrasonic transducer
US5870351A (en) * 1994-10-21 1999-02-09 The Board Of Trustees Of The Leland Stanford Junior University Broadband microfabriated ultrasonic transducer and method of fabrication
US5894452A (en) * 1994-10-21 1999-04-13 The Board Of Trustees Of The Leland Stanford Junior University Microfabricated ultrasonic immersion transducer

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7030536B2 (en) 2003-12-29 2006-04-18 General Electric Company Micromachined ultrasonic transducer cells having compliant support structure

Also Published As

Publication number Publication date
WO2001097559A2 (en) 2001-12-20
EP1294493A2 (en) 2003-03-26
JP2004503312A (en) 2004-02-05

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