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USD708651S1 - Electrostatic chuck - Google Patents

Electrostatic chuck Download PDF

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Publication number
USD708651S1
USD708651S1 US29/407,085 US201129407085F USD708651S US D708651 S1 USD708651 S1 US D708651S1 US 201129407085 F US201129407085 F US 201129407085F US D708651 S USD708651 S US D708651S
Authority
US
United States
Prior art keywords
electrostatic chuck
view
color
perspective
enlarged partial
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
US29/407,085
Inventor
Daniel Martin
Monika Agarwal
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Applied Materials Inc
Original Assignee
Applied Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Applied Materials Inc filed Critical Applied Materials Inc
Priority to US29/407,085 priority Critical patent/USD708651S1/en
Assigned to APPLIED MATERIALS, INC. reassignment APPLIED MATERIALS, INC. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: MARTIN, DANIEL, AGARWAL, MONIKA
Priority to TW102300097F priority patent/TWD165013S/en
Application granted granted Critical
Publication of USD708651S1 publication Critical patent/USD708651S1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Description

The patent or application file contains at least one drawing executed in color. Copies of this patent or patent application publication with color drawing(s) will be provided by the Office upon request and payment of the necessary fee.
FIG. 1 is a perspective view of an electrostatic chuck.
FIG. 2 is a top plan view of the electrostatic chuck of FIG. 1.
FIG. 3 is a front side view of the electrostatic chuck of FIG. 1, the other sides being identical.
FIG. 4 is a bottom plan view of the electrostatic chuck of FIG. 1.
FIG. 5 is a cross-sectional view of the electrostatic chuck of FIG. 1 taken along section line 5-5 of FIG. 4.
FIG. 6 is an enlarged partial view of FIG. 5.
FIG. 7 is an enlarged partial view of FIG. 1.
FIG. 8 is a color photograph illustrating the electrostatic chuck of FIG. 2 from a top view; and,
FIG. 9 is color photograph illustrating the electrostatic chuck of FIG. 1 from a perspective view.
The broken lines in the figures form no part of the claimed design.
The drawings are lined for color. The pattern on the surface of the claimed design represents the color copper.

Claims (1)

    CLAIM
  1. The ornamental design for an electrostatic chuck, as shown and described.
US29/407,085 2011-11-22 2011-11-22 Electrostatic chuck Active USD708651S1 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
US29/407,085 USD708651S1 (en) 2011-11-22 2011-11-22 Electrostatic chuck
TW102300097F TWD165013S (en) 2011-11-22 2012-05-08 Portion of electrostatic chuck

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US29/407,085 USD708651S1 (en) 2011-11-22 2011-11-22 Electrostatic chuck

Publications (1)

Publication Number Publication Date
USD708651S1 true USD708651S1 (en) 2014-07-08

Family

ID=51032253

Family Applications (1)

Application Number Title Priority Date Filing Date
US29/407,085 Active USD708651S1 (en) 2011-11-22 2011-11-22 Electrostatic chuck

Country Status (2)

Country Link
US (1) USD708651S1 (en)
TW (1) TWD165013S (en)

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD845770S1 (en) 2017-01-10 2019-04-16 Rockwood & Hines Glass Group Co. Bottle
TWD213398S (en) 2019-07-30 2021-08-21 美商應用材料股份有限公司 Substrate support pedestal
USD936187S1 (en) 2020-02-12 2021-11-16 Applied Materials, Inc. Gas distribution assembly lid
USD947802S1 (en) 2020-05-20 2022-04-05 Applied Materials, Inc. Replaceable substrate carrier interfacing film
USD1037778S1 (en) 2022-07-19 2024-08-06 Applied Materials, Inc. Gas distribution plate
USD1054388S1 (en) * 2021-10-15 2024-12-17 Shin-Etsu Chemical Co., Ltd. Carrier substrate for handling
USD1066620S1 (en) 2021-02-12 2025-03-11 Applied Materials, Inc. Patterned heater pedestal with groove extensions
USD1071103S1 (en) 2022-04-11 2025-04-15 Applied Materials, Inc. Gas distribution plate
USD1085029S1 (en) 2022-07-19 2025-07-22 Applied Materials, Inc. Gas distribution plate
USD1092578S1 (en) * 2023-10-10 2025-09-09 Guangzhou Avison Trading Co., Ltd. Chuck set
USD1103948S1 (en) 2021-08-21 2025-12-02 Applied Materials, Inc. Gas distribution plate

Citations (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4724510A (en) * 1986-12-12 1988-02-09 Tegal Corporation Electrostatic wafer clamp
US5055964A (en) * 1990-09-07 1991-10-08 International Business Machines Corporation Electrostatic chuck having tapered electrodes
US5213349A (en) * 1991-12-18 1993-05-25 Elliott Joe C Electrostatic chuck
US5350479A (en) * 1992-12-02 1994-09-27 Applied Materials, Inc. Electrostatic chuck for high power plasma processing
US5382311A (en) * 1992-12-17 1995-01-17 Tokyo Electron Limited Stage having electrostatic chuck and plasma processing apparatus using same
US5530616A (en) * 1993-11-29 1996-06-25 Toto Ltd. Electrostastic chuck
US5539609A (en) * 1992-12-02 1996-07-23 Applied Materials, Inc. Electrostatic chuck usable in high density plasma
US5671117A (en) * 1994-02-28 1997-09-23 Applied Materials Inc. Electrostatic chuck
US5822171A (en) 1994-02-22 1998-10-13 Applied Materials, Inc. Electrostatic chuck with improved erosion resistance
US5883778A (en) 1994-02-28 1999-03-16 Applied Materials, Inc. Electrostatic chuck with fluid flow regulator
US6028762A (en) * 1996-01-31 2000-02-22 Kyocera Corporation Electrostatic chuck
US6215642B1 (en) * 1999-03-11 2001-04-10 Nikon Corporation Of Japan Vacuum compatible, deformable electrostatic chuck with high thermal conductivity
US6583980B1 (en) * 2000-08-18 2003-06-24 Applied Materials Inc. Substrate support tolerant to thermal expansion stresses
US20030198004A1 (en) * 2000-05-10 2003-10-23 Ibiden Co., Ltd. Electrostatic chuck
USD490827S1 (en) * 2002-12-20 2004-06-01 Ngk Spark Plug Co., Ltd. Electrostatic chuck
USD497171S1 (en) * 2002-12-20 2004-10-12 Ngk Spark Plug Co., Ltd. Electrostatic chuck
US20040233609A1 (en) * 2002-12-26 2004-11-25 Kazuto Yoshida Electrostatic chuck and its manufacturing method
US20060221539A1 (en) * 2005-03-31 2006-10-05 Ngk Spark Plug Co., Ltd. Electrostatic chuck
USD534135S1 (en) * 2003-09-16 2006-12-26 Traad Monique Electromagnetic shield
USD561206S1 (en) * 2005-11-25 2008-02-05 Momentive Performance Materials Inc. Electrostatic chuck

Patent Citations (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4724510A (en) * 1986-12-12 1988-02-09 Tegal Corporation Electrostatic wafer clamp
US5055964A (en) * 1990-09-07 1991-10-08 International Business Machines Corporation Electrostatic chuck having tapered electrodes
US5213349A (en) * 1991-12-18 1993-05-25 Elliott Joe C Electrostatic chuck
US5350479A (en) * 1992-12-02 1994-09-27 Applied Materials, Inc. Electrostatic chuck for high power plasma processing
US5539609A (en) * 1992-12-02 1996-07-23 Applied Materials, Inc. Electrostatic chuck usable in high density plasma
US5382311A (en) * 1992-12-17 1995-01-17 Tokyo Electron Limited Stage having electrostatic chuck and plasma processing apparatus using same
US5530616A (en) * 1993-11-29 1996-06-25 Toto Ltd. Electrostastic chuck
US5822171A (en) 1994-02-22 1998-10-13 Applied Materials, Inc. Electrostatic chuck with improved erosion resistance
US5671117A (en) * 1994-02-28 1997-09-23 Applied Materials Inc. Electrostatic chuck
US5883778A (en) 1994-02-28 1999-03-16 Applied Materials, Inc. Electrostatic chuck with fluid flow regulator
US6028762A (en) * 1996-01-31 2000-02-22 Kyocera Corporation Electrostatic chuck
US6215642B1 (en) * 1999-03-11 2001-04-10 Nikon Corporation Of Japan Vacuum compatible, deformable electrostatic chuck with high thermal conductivity
US20030198004A1 (en) * 2000-05-10 2003-10-23 Ibiden Co., Ltd. Electrostatic chuck
US6583980B1 (en) * 2000-08-18 2003-06-24 Applied Materials Inc. Substrate support tolerant to thermal expansion stresses
USD490827S1 (en) * 2002-12-20 2004-06-01 Ngk Spark Plug Co., Ltd. Electrostatic chuck
USD497171S1 (en) * 2002-12-20 2004-10-12 Ngk Spark Plug Co., Ltd. Electrostatic chuck
US20040233609A1 (en) * 2002-12-26 2004-11-25 Kazuto Yoshida Electrostatic chuck and its manufacturing method
USD534135S1 (en) * 2003-09-16 2006-12-26 Traad Monique Electromagnetic shield
US20060221539A1 (en) * 2005-03-31 2006-10-05 Ngk Spark Plug Co., Ltd. Electrostatic chuck
USD561206S1 (en) * 2005-11-25 2008-02-05 Momentive Performance Materials Inc. Electrostatic chuck

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD845770S1 (en) 2017-01-10 2019-04-16 Rockwood & Hines Glass Group Co. Bottle
TWD213398S (en) 2019-07-30 2021-08-21 美商應用材料股份有限公司 Substrate support pedestal
USD931240S1 (en) * 2019-07-30 2021-09-21 Applied Materials, Inc. Substrate support pedestal
USD936187S1 (en) 2020-02-12 2021-11-16 Applied Materials, Inc. Gas distribution assembly lid
USD947802S1 (en) 2020-05-20 2022-04-05 Applied Materials, Inc. Replaceable substrate carrier interfacing film
USD1066620S1 (en) 2021-02-12 2025-03-11 Applied Materials, Inc. Patterned heater pedestal with groove extensions
USD1103948S1 (en) 2021-08-21 2025-12-02 Applied Materials, Inc. Gas distribution plate
USD1104086S1 (en) 2021-08-21 2025-12-02 Applied Materials, Inc. Gas distribution plate
USD1054388S1 (en) * 2021-10-15 2024-12-17 Shin-Etsu Chemical Co., Ltd. Carrier substrate for handling
USD1071103S1 (en) 2022-04-11 2025-04-15 Applied Materials, Inc. Gas distribution plate
USD1085029S1 (en) 2022-07-19 2025-07-22 Applied Materials, Inc. Gas distribution plate
USD1037778S1 (en) 2022-07-19 2024-08-06 Applied Materials, Inc. Gas distribution plate
USD1092578S1 (en) * 2023-10-10 2025-09-09 Guangzhou Avison Trading Co., Ltd. Chuck set

Also Published As

Publication number Publication date
TWD165013S (en) 2014-12-21

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