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US20080034873A1 - Ultrasound probe and production method of the same - Google Patents

Ultrasound probe and production method of the same Download PDF

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Publication number
US20080034873A1
US20080034873A1 US11/888,580 US88858007A US2008034873A1 US 20080034873 A1 US20080034873 A1 US 20080034873A1 US 88858007 A US88858007 A US 88858007A US 2008034873 A1 US2008034873 A1 US 2008034873A1
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piezoelectric layer
receiving
ultrasound probe
layer
transmitting
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Inventor
Takeshi Habu
Takayuki Sasaki
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Konica Minolta Medical and Graphic Inc
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Konica Minolta Medical and Graphic Inc
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Assigned to KONICA MINOLTA MEDICAL & GRAPHIC, INC. reassignment KONICA MINOLTA MEDICAL & GRAPHIC, INC. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: HABU, TAKESHI, SASAKI, TAKAYUKI
Assigned to KONICA MINOLTA MEDICAL & GRAPHIC, INC. reassignment KONICA MINOLTA MEDICAL & GRAPHIC, INC. CHANGE OF ADDRESS Assignors: KONICA MINOLTA MEDICAL & GRAPHIC, INC.
Publication of US20080034873A1 publication Critical patent/US20080034873A1/en
Priority to US12/606,535 priority Critical patent/US8141216B2/en
Abandoned legal-status Critical Current

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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/04—Treatments to modify a piezoelectric or electrostrictive property, e.g. polarisation characteristics, vibration characteristics or mode tuning
    • H10N30/045—Treatments to modify a piezoelectric or electrostrictive property, e.g. polarisation characteristics, vibration characteristics or mode tuning by polarising
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/09—Forming piezoelectric or electrostrictive materials
    • H10N30/093—Forming inorganic materials
    • H10N30/097—Forming inorganic materials by sintering
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/42—Piezoelectric device making
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49005—Acoustic transducer
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49117—Conductor or circuit manufacturing
    • Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
    • Y10T29/49126—Assembling bases
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49117—Conductor or circuit manufacturing
    • Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
    • Y10T29/49128—Assembling formed circuit to base

Definitions

  • the present invention relates to ultrasound probes used for medical diagnosis and a production method of the same. More particularly, the present invention relates to an ultrasound probe incorporating an improved receiving piezoelectric layer and a production method of the same.
  • An ultrasonic diagnostic apparatus is a medical imaging equipment, which non-invasively obtains tomograms of in vivo soft tissue from the body surface using the ultrasonic pulse reflection method.
  • This ultrasonic diagnostic apparatus is characterized by being small-sized, inexpensive, and highly safe due to no need for exposure to X-rays, compared to other medical imaging equipment, and further, is characterized by enabling blood flow imaging via application of the Doppler effect.
  • Ultrasonic diagnostic apparatuses have been widely used in the circulatory system (coronary artery), the digestive system (stomach and intestines), internal medicine (liver, pancreas, and spleen), the urinary system (kidney and bladder), as well as obstetrics and gynecology.
  • ultrasound probes commonly used in such medical ultrasonic diagnostic apparatuses, transmit and receive ultrasonic waves of high sensitivity and high resolution, wherefore piezoelectric effects exhibited in piezoelectric inorganic materials are generally utilized.
  • single-type transducers being a monotype, or array-type transducer formed by positioning a plurality of transducers two-dimensionally are commonly employed to obtain vibration modes for transmitting piezoelectric elements.
  • the array-type transducers capable of obtaining highly detailed images have become widespread in medical imaging applied to diagnostic tests.
  • Harmonic imaging has many advantages in comparison with fundamental wave imaging, such as: high contrast resolution stemming from an excellent S/N ratio due to a low sidelobe level, high resolution in the horizontal direction stemming from a narrow beam-width due to high frequency, no occurrence of multiple reflection due to low sound pressure and small sound pressure fluctuation over a short distance, and realization of high depth-speed due to attenuation comparable to that of a fundamental wave at the focal point or deeper, compared to ultrasonic imaging methods using fundamental wave of a high harmonic frequency.
  • a piezoelectric vibrator is utilized as a specific structure of an array-type ultrasound probe for harmonic imaging, wherein each of the vibrator elements forming an array is broadband-monolithic.
  • a method of transmitting a fundamental wave in the frequency range on the low frequency side and of receiving a high harmonic wave in the frequency range on the high frequency side is commonly utilized, based on the broadband performance of the piezoelectric vibrator.
  • a narrow-band ultrasonic wave is utilized to prevent the overlap between the spectrums of an ultrasonic wave to transmit a fundamental wave and an ultrasonic wave to receive a high harmonic wave.
  • the narrow-band ultrasonic wave is normally an ultrasonic pulse signal with a long tail, resulting in negatively affecting the resolution in the depth direction.
  • transmitting sensitivity is increased by improving electric matching conditions of piezoelectric inorganic elements with the driving circuit by decreasing the apparent impedance using laminated piezoelectric inorganic elements; and by making large distortion by increasing the electric field intensity applied to the aforesaid elements (refer to Patent Document 5).
  • transmitting sensitivity in a laminated structure is increased according to the number of laminated layers
  • receiving sensitivity is inversely proportional to the number of the laminated layers, resulting in a disadvantage for harmonic imaging.
  • the composite vibrators described in above Patent Document 1 are prepared by forming a columnar structure by cutting an inorganic piezoelectric material using a cutter such as a dicer, followed by filling the cut grooves with an organic material such as an epoxy resin. Also in an array-type transducer, a cutter such as a dicer is employed to divide to form the channels.
  • Patent document 4 A method has been proposed in Patent document 4 to solve this problem, namely, the above organic porous material is sandwiched between dielectric substances, or dielectric oil is injected into the porous holes during polarization treatment of the organic material.
  • the breakdown of the organic material can be avoided by the protection by sandwiching the organic material using the dielectric substances, however, the aforesaid protection causes a decrease in efficiency during polarization treatment, resulting in decrease in sensitivity.
  • use of dielectric oil causes a problem in that it is necessary to wipe off the oil, in order not to cause failure in printing electrodes on the wiped surface during the electrode mounting process. In other words, there has been a problem of requiring extra cost for cleaning.
  • Patent Document 1 Japanese Patent Application Publication Open to Public Inspection (hereinafter referred to as JP-A) No. 63-252140
  • Patent Document 2 JP-A No. 8-187245
  • Patent Document 3 JP-A No. 11-276478
  • Patent Document 4 JP-A No. 6-342947
  • Patent Document 5 JP-A No. 2005-235878
  • An object of the present invention is to provide an ultrasound probe having a transmitting piezoelectric layer and a receiving piezoelectric layer in that order and exhibiting excellent sensitivity, which is obtained by highly, optimally, stably, and inexpensively polarization-treating a receiving piezoelectric layer, specifically, an organic receiving piezoelectric layer, without occurrence of dielectric breakdown, and to provide a method of manufacturing the same by which the ultrasound probe exhibiting excellent sensitivity is manufactured stably in performance, easily, at high yield, and inexpensively.
  • an ultrasound probe comprising a transmitting piezoelectric layer, an electrode layer and a receiving piezoelectric layer laminated in that order, the ultrasound probe transmitting and receiving an ultrasound, wherein a polarization treatment on the receiving piezoelectric layer is carried out by providing a peelable dielectric layer on the receiving piezoelectric layer.
  • FIG. 1 is a schematic view showing a polarization treatment in which direct or alternating current voltage is applied to a probe having a plurality of layers and provided with a dielectric layer.
  • FIG. 2 is a schematic view showing a polarization treatment in which corona discharge treatment is applied to a probe having a plurality of layers and provided with a dielectric layer.
  • An ultrasound probe comprising a transmitting piezoelectric layer, an electrode layer and a receiving piezoelectric layer laminated in that order, the ultrasound probe transmitting and receiving an ultrasound, wherein
  • a polarization treatment on the receiving piezoelectric layer is carried out by providing a peelable dielectric layer on the receiving piezoelectric layer.
  • a method of manufacturing an ultrasound probe comprising the sequential steps of:
  • the ultrasound probe transmitting and receiving an ultrasound.
  • an ultrasound probe having a transmitting piezoelectric layer and a receiving piezoelectric layer in that order, and exhibiting excellent sensitivity can be obtained by highly, optimally, stably, and inexpensively polarization-treating a receiving piezoelectric layer, specifically, an organic receiving piezoelectric layer, without occurrence of dielectric breakdown, and also obtained is a method of manufacturing the same by which the ultrasound probe exhibiting excellent sensitivity is manufactured stably in performance, easily, at high yield, and inexpensively.
  • One of the features of the ultrasound probe of the present invention is that it is an ultrasonic transmitting and receiving transducer incorporating a transmitting piezoelectric layer and a receiving piezoelectric layer in this order, wherein polarization treatment is conducted by mounting a peelable dielectric layer on the aforesaid receiving piezoelectric layer.
  • FIGS. 1 and 2 Preferred embodiments of the present invention are described below, referring to FIGS. 1 and 2 .
  • FIG. 1 A schematic view of polarization treatment conducted by applying direct current voltage or alternating current voltage to a multilayered transducer, incorporating a dielectric layer, is shown in FIG. 1 .
  • FIG. 2 A schematic view of polarization treatment conducted by applying corona discharge to a multilayered transducer, incorporating a dielectric layer, is shown in FIG. 2 .
  • FIG. 1 An example of production methods of ultrasound probes in preferred embodiments of the present invention is described below, referring to FIG. 1 .
  • a separate-type transmitting and receiving piezoelectric element has a laminated structure of receiving piezoelectric layer 1 and transmitting piezoelectric layer 3 having therebetween electrode 2 , as shown in FIG. 1 .
  • Transmitting piezoelectric layer 3 may be a laminated structure formed by a thin piezoelectric sheet and an electrode layer, as shown in FIG. 1 .
  • Such a structure may be prepared, for example, by laminating piezoelectric inorganic green sheets (a green sheet representing a sheet before calcination), on which an electrode has been printed using platinum paste prior to firing, followed by firing together. Examples of a material constituting the electrode layer include: gold, silver, platinum and palladium.
  • Organic receiving piezoelectric layer 1 may be prepared by laminating an organic polymer sheet in the same manner as for transmitting piezoelectric layer 3 . In this case, it is possible to form a part of receiving piezoelectric layer 1 by laminating only a polymer sheet without the printing process of the electrode layer using platinum paste, or, alternatively, it is also possible to insert the electrode layer into the laminate by pre-printing as shown in FIG. 1 .
  • Dielectric layer 4 is mounted on receiving piezoelectric layer 1 .
  • numeral “5” represents an electrode for applying voltage.
  • Dielectric substances employed in dielectric layers of the present invention may include various organic resins, fired inorganic materials, mica, and oil, those of which have a high dielectric constant and a wide band gap, and behave as direct current insulators.
  • the generation of dielectricity is due to the formation of electric dipoles in a dielectric substance, which causes the polarization of the substance.
  • Polarization is classified into electronic polarization, ionic polarization, orientation polarization, and space charge polarization, any of which is included in the present invention.
  • electrons Although it is impossible for electrons to move freely in a dielectric substance, atoms and molecules in the same are divided into a positively charged part and a negatively charged part by applying an electric field to the dielectric substance from outside of the same.
  • Orientation polarization occurs in cases in which molecules forming a dielectric substance exhibit polarity.
  • a dielectric substance has no electric dipoles as a whole since the molecules are oriented at random.
  • the dipoles are generated due to subsequent molecular orientation.
  • the electric dipoles are generated due to charge carrier movement in the dielectric substance.
  • numeral “6” represents an electrode for the corona discharge treatment.
  • thin piezoelectric films used in piezoelectric layers of the present invention thin films exhibiting excellent thermostability and voltage endurance.
  • examples thereof include resins prepared from polyvinyl butyral, polyolefin, polycycloolefin, polyacrylate, polyamide, polyimide, polyester, polysulfone, silicone, and derivatives thereof.
  • a typical example of polyvinyl butyral includes (6)-708 (CAS No. 63148-65-2) listed as an existing chemical substance under the Law Concerning the Examination and Regulation of Manufacturing, etc. of Chemical Substances.
  • polyamide examples include polyamide 6, polyamide 66, polyamide 610, polyamide 612, polyamide MXD6, polyamide 11, polyamide 12, polyamide 46, methoxylated polyamide (existing chemical substance (7)-383).
  • polyimide includes Existing Chemical Substance No. (7)-2211 (CAS No. 611-79-0) developed by NASA.
  • silicone examples include Existing Chemical Substance Nos. (7)-476, (7)-474, (7)-477, (7)-483, and (7)-485.
  • examples of epoxy compounds as the above materials include a polyphenyl type, a polyglycidyl amine type, an alcohol type, and an ester type, but an alicyclic type such as existing chemical substances Nos. 3-2452, 3-3453, 4-47, or 5-1052 is specifically preferable.
  • the alicyclic type may preferably be employed due to its excellent thermostability and adhesion force.
  • the above materials include thin films of olefin resins such as polyethylene, polypropylene, and ⁇ -polyolefin; thin films of synthetic resins such as polyester, polystyrene, polyfluorovinylidene, polycarbonate, tetrafluoroethylene, polyphenylene sulfide, polychlorovinyl, and polychlorovinylidene; copolymers and blended forming substances of at least two kinds thereof; and nonpolar glass sheets.
  • fine particles of inorganic dielectric materials may be incorporated. Materials used in inorganic piezoelectric elements, to be described below, are exemplified as such fine particles.
  • the used amount of these reins is appropriately selected in conjunction with specified sensitivity and frequency characteristics, but is in the range of 10 nm-200 ⁇ m in terms of film thickness, but is preferably in the range of 50-150 ⁇ m.
  • these resins may be utilized by dissolving them in solvents such as DMSO, DMF, DME, acetone, or methyl ethyl ketone, or mixed solvents thereof, and also by heat-melting bulk resins via heating them to their respective melting point without using any solvents.
  • solvents such as DMSO, DMF, DME, acetone, or methyl ethyl ketone, or mixed solvents thereof
  • a transmitting piezoelectric layer may be polarized by coating a receiving piezoelectric layer.
  • an adhesion structure wherein a laminated sheet, which has been coated, dried, and uniaxially stretched to form a sheet, is utilized as a receiving piezoelectric layer.
  • a thin polymer film which has been stretched uniaxially or biaxially, to achieve piezoelectric effects thereof, to be maximized in order to be used as a receiving piezoelectric layer.
  • PZT is frequently employed as a material for transmitting piezoelectric layers, lead-free materials have been preferred in recent years. Examples thereof include rock crystal, lithium niobate (LiNbO 3 ), potassium niobate tantalate (K(Ta,Nb)O 3 ), barium titanate (BaTiO 3 ), and lithium tantalate (LiTaO 3 ), or strontium titanate (SrTiO 3 ) and barium strontium titanate (BST). In addition, PZT is preferably Pb(Zrl-nTix)O 3 (0.47 ⁇ n ⁇ 1).
  • a preferred example of organic receiving piezoelectric layers includes a copolymer of fluorovinylidene/trifluoroethylene, being a polymer piezoelectric layer.
  • a slow cooling rate in the heat treatment process is preferably in the range of 1-50° C./minute. It is undesirable to be less than 1° C./minute, resulting in a productivity decrease, and to be at more than 50° C./minute, resulting in requirements of large cooling facilities.
  • the polymer generally becomes a piezoelectric layer exhibiting plasticity and flexibility according to the increase of the molecular weight.
  • thin films employed in piezoelectric layers exhibiting high sensitivity may be obtained by using polymer piezoelectric substances with a melt flow rate of at most 0.03 g/min at 230° C., preferably at most 0.02 g/min, and more preferably 0.01 g/min, wherein VDF represents fluorovinylidene, TrFE represents trifluoroethylene, and TeFE represents tetrafluoroethylene.
  • the copolymerization ratio of the former is preferably in the range of 60-99 mol %.
  • the optimal value varies depending on using methods of the organic adhesive medium used in laminating an inorganic transmitting piezoelectric layer and an organic receiving piezoelectric layer.
  • the most preferred copolymerization ratio of the former, as described above, is in the range of 85-99 mol %.
  • a polymer prepared from fluorovinylidene in the range of 85-99 mol %, and perfluoroalkyl vinyl ether, perfluoroalkoxy ethylene, or perfluorohexaethylene in the range of 1-15 mol % tends to increase sensitivity of high frequency reception due to control of the transmitted fundamental wave in combination of an inorganic transmitting piezoelectric layer and an organic receiving piezoelectric layer.
  • perfluoroalkyl vinyl ether (PFA), perfluoroalkoxy ethylene (PAE), and perfluorohexaethylene may be employed in composite elements of the present invention.
  • Synthesis of polymers for the organic receiving piezoelectric layer of the present invention are performed employing a radical polymerization method in which copolymerization is performed employing several kinds of monomers, a method which performs photopolymerization employing photo-sensitizers, or a vapor deposition polymerization method in which a thin layer is formed while vaporizing monomers at a relatively low temperature under a relatively low pressure ambience.
  • a radical polymerization method in which copolymerization is performed employing several kinds of monomers
  • a method which performs photopolymerization employing photo-sensitizers or a vapor deposition polymerization method in which a thin layer is formed while vaporizing monomers at a relatively low temperature under a relatively low pressure ambience.
  • polyurea which is employed in organic receiving piezoelectric layer as one of the preferable embodiments, it is preferable
  • Polymer structures for polyurea may be represented by Formula (—NH—R—CO) n wherein R may include an alkylene group, an phenylene group, a divalent heterocyclic group, and a heterocyclyl group, each of which may be substituted with any of the substituents.
  • Polyurea may be a copolymer of urea derivatives with other monomers.
  • Preferred polyurea may include aromatic polyurea which employs 4,4′-diaminophenylmethane (MDA) or 4,4′-diphenylmethane diisocyanate (MDI).
  • peelable means detachable later provided prior to a polarization treatment.
  • the dielectric layer is eventually not needed in the transducer.
  • Methods to bring the organic receiving piezo-electric layer (the polymer piezoelectric layer) into close contact with the dielectric layer (the dielectric film) include close pressurized contact and close contact via adhesives.
  • a method is available in which a highly peelable dielectric film is employed, or it is also possible to realize close contact in such a manner that the dielectric film is allowed to adhere, employing hot-melt crosslinking agents which are capable of being peeled.
  • close contact via pressure is preferred since thereby the surface of the dielectric film after peeling to be clean.
  • Applied pressure may be set in the range of 1 Pa-1 GPa.
  • Applied pressure is preferably at most 1 GPa in terms of facilities since no special pressing means is needed. Further, the pressure is preferably at least 11 Pa, since thereby sufficiently close contact is achieved. In terms of production, pressure is more preferably 1 kPa-1 MPa.
  • polarization treatment it is preferable to achieve it so that polarization achieves maximum. It is possible to result in polarization via a direct or alternating current voltage applying treatment or a corona discharge treatment. Efficient formation of such polarization distribution state differs depending on temperature.
  • the unit treatment rate is preferably 1-1,000 kW/m 2 .
  • the polarization treatment is affected and when it is at most 1,000 kW/m 2 , no dielectric breakdown results due to dielectric heating.
  • the above unit treatment rate is more preferably 50 W/m 2 -900 kW/m 2 , but is most preferably 100 W/m 2 -100 kW/m 2 .
  • Voltage is preferably 1 V/m-10 MV/m, but is more preferably 1 kV/m-1 MV/m.
  • Frequency of alternating current is preferably 10 Hz-100 MHz, is more preferably 100 Hz-40 MHz, but is still more preferably 1 kHz-30 MHz.
  • Current density is preferably 0.1 mA-100 A, but is more preferably 1 mA-10 A.
  • the rate of the direct or alternating current voltage application treatment and the corona discharge treatment is represented by value (Wp/(L ⁇ V)) which is obtained by dividing output Wp by the product of electrode length L of each apparatus by processing rate V m/minute.
  • Voltage of the organic receiving piezoelectric layer per unit length of direct or alternating current is preferably in the range of 1-1 G V/m, is more preferably in the range of 100 V/m-10 MV/m, but is still more preferably in the range of 1 kV/m-1 MV/m.
  • the voltage range is preferably at most the upper limit since no breakage occurs to the organic piezoelectric film even in the presence of dielectrics. Further, the voltage range is preferably at least the lower limit since polarization expression results. Polarization treatment duration is commonly 1 second-12 hours, while considering working processes, it is commonly 1 second-3 hours, is preferably within one hour, but is still more preferably within 10 minutes.
  • CaCO 3 , La 2 O 3 , Bi 2 O 3 , and TiO 2 as a component raw material, as well as MnO as a by-component raw material were prepared.
  • Each of the component raw materials was weighed so that the final composition became (Ca 0.97 La 0.03 )Bi 4.01 Ti 4 O 15 .
  • pure water was added and the resulting mixture was blended over 8 hours employing a ball mill using zirconia medium, followed by completely drying, whereby a mixed powder was prepared.
  • the resulting mixed powder was subjected to temporary molding, and temporary firing at 800° C. for two hours, whereby a temporary fired product was prepared.
  • pulverization was carried out employing a ball mill in which zirconia media were added in pure water, followed by drying, whereby a piezoelectric ceramics raw material powder was prepared.
  • the piezoelectric ceramics raw material powder having a diameter of 100 nm was prepared.
  • Added to the piezoelectric ceramics raw material powder was 6% by weight of pure water as a binder and the resulting mixture was press-molded to form a 100 ⁇ m thick temporary plate-like mold.
  • the resulting temporary plate-like mold was subjected to vacuum packing, and subsequently was press molded at a pressure of 235 Mpa. Subsequently, the above molded product was fired. A final fired product at a thickness of 20 ⁇ m was obtained. The firing temperatures was 1,100° C. A polarization treatment was carried out by applying an electric field of 1.5 (MV/m) or more for one minute.
  • PZT as employed in the present invention, is one in which components of lead, zirconium, and titanium are in the range specified by formula Pb(Zr 1-n Ti n )O 3 (0.47 ⁇ n ⁇ 1).
  • PZT at 0.2 n of was prepared.
  • Each of the oxides was weighed and then pure water was added.
  • the resulting mixture was blended for 8 hours in pure water employing a ball mill into which zirconia media were placed, followed by sufficient drying, whereby a mixed powder was prepared.
  • the resulting mixed powder was subjected to temporary molding and then to temporary firing in ambient air at 200° C. for two hours, whereby a temporary fired product was prepared. Subsequently, pure water was added to the resulting temporary fired product.
  • the resulting mixture was pulverized in pure water employing a ball mill into which zirconia media were placed. Thereafter, drying was carried out, whereby a piezoelectric ceramic raw material powder was prepared.
  • Added as a binder was 6% by weight of pure water to the piezoelectric ceramic raw material powder, and the resulting mixture was subjected to press molding to form a 530 ⁇ m thick plate-like temporary molded product.
  • the resulting plate-like temporary molded product was subjected to vacuum-packing, followed by press molding at a pressure of 235 MPa. Subsequently, the resulting molded product was fired and as a final fired product, a 41 ⁇ m thick fired product was prepared.
  • the firing temperature was 780° C. Polarization was conducted via application of an electric field of 1.5 (MV/m) or more for one minute.
  • a DMF (dimethylformamide) solution of P(VDF-PFA) (at a mol ratio of VDF/perfluoroalkyl vinyl ether of 90/20) was cast into a film to result in a thickness of 100 ⁇ m, followed by crystallization at 140° C.
  • a DMF (dimethylformamide)/acetone solution of P(VDF-TrE) (at a mol ratio of VDF/trifluoroethylene of 75/25) was cast into a film to result in a thickness of 100 ⁇ m, followed by crystallization at 140° C.
  • a DMF (dimethylformamide) solution of P(VDF/HFP) (at a mol ratio of VDF/HFP (hexatrifluoropropylene of 86/12) was cast into a film to result in a thickness of 100 ⁇ m, followed by crystallization at 138° C.
  • a film of P(VDF-HFP) (at a mol ratio of VDF/HFP (hexafluoropropylene of 86/12) was dissolved in a DMF (dimethylformamide) solution and 3% by weight of carbon nanotube was further added. The resulting mixture was kneaded employing a blender and cast, whereby a 100 ⁇ m thick film was prepared.
  • MDA 4,4′-diaminophenylmethane
  • MDI 4,4′-diphenylmethanedisocyanate
  • Each of above transmitting piezoelectric layers (Films S1 and S2), which had been molded, was subjected to attachment of an electrode, followed by baking, and then subjected to a polarization treatment (at a voltage of 1 MV). Further, one of the above receiving piezoelectric layers (Films M1-M4) was laminated onto the above transmitting piezoelectric layer to result in the combination listed in Tables 1 and 2, and was allowed to adhere to each other by applying pressure, whereby a “composite sample which was prepared by applying the receiving piezoelectric layer onto a transmitting piezoelectric layer having therebetween a electrode layer (an ultrasound probe)” was prepared.
  • each of the power sources for a direct and alternating high voltage polarization treatment was each of the following power sources.
  • Namely employed as direct current high voltage power source was HDV-100 K1US (1-100 kV), produced by Pulse Electronic Engineering Co., Ltd., while employed as the alternating current power source was KAC 15-5 VA (0-15 kV and 5 mA), produced by Kasuga Electric Works Ltd.
  • PG-3K02 (at a voltage of 1-3 kV, a pulse width of 2-20 ⁇ S, and a repeat frequency of 10-100 Hz), and employed for the corona discharge treatment was CT-0112, (at an output of 1 kW, an employed frequency of 35 kHz, and a discharge exposure amount unit of W/(m 2 /min), produced by Kasuga Electric Works Ltd.
  • Ultrasound probe Samples 101-141 (listed in Tables 1 and 2) were prepared by arranging a metal electrode on the external surface of the organic piezoelectric layer via vapor deposition. Subsequently, basic frequency f1 at 7.5 MHz was transmitted, and a receiving relative sensitivity (which was obtained by multiplying a constant to the ratio of the transmitting voltage to the receiving voltage) at 15 MHz as receiving high harmonic wave f2, was obtained.
  • the receiving relative sensitivity was determined employing a sound intensity determining system Model 805 (1-50 MHz) a product of Sonora Medical System, Inc., 202 Miller Drive Longmont, Colo. 0501 U.S.A.
  • a matching layer was adhered onto an organic piezoelectric layer at a thickness of 1 ⁇ , employing an epoxy adhesive, while the backing layer was adhered to the inorganic piezoelectric layer at a thickness of 1 ⁇ , using the same adhesive.
  • the ultrasound probe which is a composite of an inorganic transmitting piezoelectric element and a receiving organic piezoelectric element, is subjected to a polarization treatment, it is possible to enhance sensitivity without insulation breakdown.
  • an ultrasound probe having thereon the transmitting piezoelectric layer and the receiving piezoelectric layer in the above order, which transmits and receives ultrasonic waves, by allowing the receiving piezoelectric layer, particularly an organic receiving piezoelectric layer, to undergo appropriate and stable polarization treatment and polarization at low cost without insulation breakdown, it is possible to provide an ultrasound probe which specifically exhibits excellent sensitivity. Further, it is found that it is possible to provide a production method of ultrasound probes of excellent sensitivity, which enables performance stability, easiness, high yield, and low cost.

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Ultra Sonic Daignosis Equipment (AREA)
  • Transducers For Ultrasonic Waves (AREA)
US11/888,580 2006-08-08 2007-08-01 Ultrasound probe and production method of the same Abandoned US20080034873A1 (en)

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US12/606,535 US8141216B2 (en) 2006-08-08 2009-10-27 Method of manufacturing ultrasound probe

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US20140191615A1 (en) * 2011-06-16 2014-07-10 Istvan Denes Surfaces that ease relative displacement in eap generators
US8866366B2 (en) 2011-06-15 2014-10-21 Seiko Epson Corporation Piezoelectric sensor device and piezoelectric sensor device drive method
US9112142B2 (en) 2011-06-15 2015-08-18 Seiko Epson Corporation Piezoelectric sensor device, and polarization method of piezoelectric body of piezoelectric sensor device
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US20080103395A1 (en) * 2006-06-13 2008-05-01 Konica Minolta Medical & Graphic, Inc. Array type ultrasound probe, manufacturing method and driving method of array type ultrasound probe
US20110021917A1 (en) * 2008-07-22 2011-01-27 Konica Minolta Medical & Graphic, Inc. Organic piezoelectric material film, method for production of the same, method for production of ultrasonic oscillator using the same, and ultrasonic medical imaging instrument
US20110021918A1 (en) * 2008-08-11 2011-01-27 Konica Minolta Medical & Graphic Inc. Organic piezoelectric material film, method for production of organic piezoelectric material film, method for production of ultrasonic oscillator, and ultrasonic medical imaging instrument
US8866366B2 (en) 2011-06-15 2014-10-21 Seiko Epson Corporation Piezoelectric sensor device and piezoelectric sensor device drive method
US9112142B2 (en) 2011-06-15 2015-08-18 Seiko Epson Corporation Piezoelectric sensor device, and polarization method of piezoelectric body of piezoelectric sensor device
US20140191615A1 (en) * 2011-06-16 2014-07-10 Istvan Denes Surfaces that ease relative displacement in eap generators
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US20140062261A1 (en) * 2012-08-28 2014-03-06 Toshiba Medical Systems Corporation Ultrasonic probe, piezoelectric transducer, method of manufacturing ultrasonic probe, and method of manufacturing piezoelectric transducer
US9966524B2 (en) * 2012-08-28 2018-05-08 Toshiba Medical Systems Corporation Ultrasonic probe, piezoelectric transducer, method of manufacturing ultrasonic probe, and method of manufacturing piezoelectric transducer
US20210320242A1 (en) * 2020-04-10 2021-10-14 Creating Nano Technologies, Inc. Method for polarizing piezoelectric film
US11864464B2 (en) * 2020-04-10 2024-01-02 Creating Nano Technologies, Inc. Method for polarizing piezoelectric film

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