TWM379164U - Sealing ring for the wafer-plating jig - Google Patents

Description

M379164 V. New description: [New technical field] The use of wafer curing tools This series is about a kind of sealing ring, especially the sealing ring. [Prior Art] Traditionally, in the semiconductor manufacturing process, sputtering operations belong to a kind of physical sinking and _sputtering is a new process of post-packaging, which is a new process of utilizing chemical processing and cashing. The plating solution penetrates into the area where the plating is not desired to be performed: and the sealing ring of the anti-circular plating fixture. — 亟 种 可 可 可 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 And the upper end has a center and extends inward; and the second anti-smashing member is disposed on the bottom surface of the bent portion at the center of the sealing ring. To prevent the electro-mineral liquid from passing through during the two wafer electric wheels of the sealing ring; [Embodiment] 1 f body 1 view _ —— —— —— —— —— —— —— —— —— —— 2: Figure 2 shows Side view of the seal ring 1 of Fig. 1 (four) Top view of the mountain seal ring 1 of Fig. 1. And Fig. 3 shows the details of the seal ring 1 of the creation of the Japanese. The head does not follow the figure of Figure 3 - Α line 斤 银 夕 夕 M M M M M M M M M M M M M M M M M M M M M M M M M M M M M M M M M M M M M M M M M M M M M M M M M M M M M M M M M M M M M M M M M M M M M M M M M M M M M M M M M M M M M The upper end of the sealing main body 3 has a second bent portion = extension, the first: the folded portion 32 and the center closest to the sealing ring 1. The innermost side of the anti-seepage member 5\, that is, the surface. When the bottom circle of the second folding portion 33 is subjected to the Japanese yen electric ore program, the sealing ring 1 can be sleeved, and the outer circumference and the side surface of the wafer can be densely sealed (not to be), thereby preventing electrical winding. The setting of the liquid, covering the crystal_minutes). When these stomach folds 3^ = 1 lean / I electric mine, the size of the circle is designed to correspond to the corresponding size. : Seal, body 3 can be made of engineering plastics ί ?i:y:ce TV ^W(PEEK'poIyether ^ : )l This stone (PPSU, p0lyphenylene sulf〇ne) (PAI ^ polyamide-ixnide) ^ ?^ #(PP , polypr〇pyle; e),,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,, Eight, a partial enlarged view of a portion B of the seal ring 1 of Fig. 4. As shown in Fig. 5, it is provided on the bottom surface of the second bent portion 33 to prevent the liquid from being electrolyzed in the region of plating. The anti-seepage member 5 can be made of fluoroelastomer: it has excellent chemical resistance and resistance to touch clothes, J: the seal ring main body 3 only shows the first bent portion 32; the hunting seal body 3 can be used visually Increase or decrease the number of bends in the case. A ί, ϋ 1 seal ring can still have the appearance of other shapes. For example: a plan view of a sealing ring 1〇0 of another embodiment of the drawing. The appearance of the Gentleman II U100 is a rectangle. Since the sealing ring 1〇0 has a surface structure similar to the sealing ring! And the material of the sealed ring brain is the same as the dense M379164 ring 1 and will not be described here. The accompanying drawings of this creation are for illustrative purposes only and are not within the scope of the patent. In addition, in order to facilitate the description of the implementation of the present invention, the size of the drawing is not a practical rule. If you are not familiar with the scope of this creation _ _, you can understand the changes in this creation in various modifications and changes' and these modifications and changes should fall into this creation [simple description of the schema] • Figure 1 shows one of the creations盘竑乜丨夕田^. The stereoscopic view of the ring;, the side view of the seal ring used for the seal of the electric device (2), and the seal ring of the seal of the figure 2; Sectional view; Figure 6 shows a top view of the seal ring in accordance with the present blade and the other embodiment. [Main component symbol description] 1 Sealing ring 3 Male 'sealing ring body 5 Impervious part 31 Base part 32 First bending part 33 Second bending part 100 Sealing ring

Claims (1)

Sixth, the scope of application for patents: L A sealing ring for wafer electroplating fixtures, comprising: a sealing ^^ sealing ring body ' at the lower end of the sealing ring body #•有-, and / the upper end of the body has more than one And at the center of the sealing ring toward the center of the sealing ring, and at least one of the surface of the sealing member is disposed at the bottom of the bending ring of the center of the sealing ring a sealing ring for a fixture, wherein the main system of the crystal hunting ring as described in claim 1 of the patent application is made of an engineering plastic 3. The ring, wherein the ring, wherein the 凊 patent 1 巳 * 2 The sealant king clay used in the wafer electroplating fixture is a polysulfide (PPS, p〇lyphenylenesulfidej. 4. The wafer electric clock is sealed according to the scope of claim 2, polyether ether Ketone) ° 5. As for the sealing ring for wafer wire according to item 2 of the patent application, the plastic knee is made of polycrystalline (PC). 6. The sealing ring for a wafer electroplating fixture according to claim 2, wherein the engineering plastic is polyvinylidene fluoride (PVDF), polyphenylene sulfone (PPSU), poly醯,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,, A sealing ring for a wafer plating fixture according to any one of the preceding claims, wherein the barrier member is made of a monofluorocarbon rubber 》 M379164 8. The wafer according to claim 7 A sealing ring for a plating fixture, wherein the sealing ring is circular. 9. The sealing ring for a wafer plating fixture according to claim 7, wherein the sealing ring is rectangular. .