TWI852239B - Method and device for controlling cargo loss - Google Patents

Abstract

The present invention provides a method and device for controlling the loss of goods, which belongs to the field of semiconductor manufacturing technology. The method for controlling the loss of goods includes: obtaining first processing information sent by a processing device, the first processing information is the processing information of a wafer box loaded by the processing device; obtaining second processing information for a second wafer box sent by an MES client, the second processing information includes: the identification of the second wafer box, the processing recipe identification, the position information of the wafers stored in the second wafer box, and the identification of the processing device; comparing the first processing information and the second processing information; if the first processing information and the second processing information are consistent, sending a first instruction to the processing device, instructing the processing device to move the wafer box to the wafer box storage area; if the first processing information and the second processing information are inconsistent, sending a second instruction to the processing device, instructing the processing device to return the wafer box to the wafer box loading port.

Description

Method and device for controlling cargo loss

The present invention belongs to the field of semiconductor manufacturing technology, and in particular to a method and device for controlling lost goods.

In related semiconductor manufacturing processes, Equipment Automation Programming (EAP) applications are generally deployed on server hardware, and the EAP application controls the automated processing of all wafer boxes on the processing equipment.

In related technologies, when processing a wafer box, the EAP application sends a work instruction to the processing equipment, instructing the processing equipment to process the wafer box. However, if the processing information of the wafer box does not match the processing equipment, it will cause ineffective transportation of the wafer box in the processing equipment, reducing the equipment utilization rate.

In order to solve the above technical problems, the present invention provides a method and device for controlling cargo loss, which can improve the equipment utilization rate.

In order to achieve the above object, the technical solution adopted in the embodiment of the present invention is:

A method for controlling the running of goods, applied to an equipment automation control EAP device, comprises: Obtaining first processing information sent by a processing device, the first processing information being processing information of a first wafer box loaded by the processing device, the first processing information comprising: identification of the first wafer box, processing recipe identification, location information of wafers stored in the first wafer box, and identification of the processing device; Obtaining second processing information for a second wafer box sent by a manufacturing execution system MES client, the second processing information comprising: identification of the second wafer box, processing recipe identification, location information of wafers stored in the second wafer box, and identification of the processing device; Comparing the first processing information with the second processing information; If the first processing information and the second processing information are consistent, a first instruction is sent to the processing equipment to instruct the processing equipment to transport the first wafer box to the wafer box storage area; if the first processing information and the second processing information are inconsistent, a second instruction is sent to the processing equipment to instruct the processing equipment to return the first wafer box to the wafer box loading port.

In some embodiments, after sending the first instruction to the processing equipment, the method further includes: receiving a work instruction sent by the MES client, the work instruction indicating that the second wafer box is placed in the wafer box storage area; sending a processing instruction to the processing equipment, instructing the processing equipment to process the wafers in the first wafer box; if receiving a confirmation instruction sent by the processing equipment, sending a status update instruction to the MES client, indicating that the status of the second wafer box is waiting for processing; if receiving a denial instruction sent by the processing equipment, sending the second instruction to the processing equipment, instructing the processing equipment to return the first wafer box to the wafer box loading port.

In some embodiments, after receiving the confirmation instruction sent by the processing equipment, the method further includes: receiving the start processing instruction sent by the processing equipment, sending a status update instruction to the MES client, indicating that the status of the second wafer box is to start processing, and the start processing instruction is issued after the processing equipment starts processing the first wafer box.

In some embodiments, a status update instruction is sent to the MES client to indicate that the status of the second wafer box is to start processing. The method further includes: receiving a processing end instruction sent by the processing equipment, and sending a status update instruction to the MES client to indicate that the status of the second wafer box is to end processing. The processing end instruction is issued after the processing equipment completes processing of the first wafer box.

In some embodiments, after receiving the end-processing instruction sent by the processing equipment, the method further includes: Detecting the status of multiple wafer box loading ports of the processing equipment, determining the idle wafer box loading port, and sending a third instruction to the processing equipment, the third instruction carries the identification of the idle wafer box loading port, instructing the processing equipment to return the first wafer box to the idle wafer box loading port.

In some embodiments, the number of the first wafer boxes is multiple. The embodiments of the present invention also provide a method for controlling the running of goods, which is applied to processing equipment, including: Sending first processing information to the equipment automation control EAP device, the first processing information is the processing information of the first wafer box loaded by the processing equipment, and the first processing information includes: the identification of the first wafer box, the processing recipe identification, the position information of the wafers stored in the first wafer box, and the identification of the processing equipment; Receiving a first instruction or a second instruction sent by the EAP device, the first instruction instructing the processing equipment to transport the first wafer box to the wafer box storage area; the second instruction instructing the processing equipment to return the first wafer box to the wafer box loading port.

In some embodiments, after receiving the first instruction sent by the EAP device, the method further includes: receiving a processing instruction sent by the EAP device to instruct the processing equipment to process the wafer in the first wafer box; if the processing instruction is successfully received, sending a confirmation instruction to the EAP device; if the processing instruction is unsuccessful, sending a denial instruction to the EAP device.

In some embodiments, after sending a confirmation instruction to the EAP device, the method further includes: starting to process the first wafer box, and sending a start processing instruction to the EAP device to instruct to start processing the first wafer box.

In some embodiments, after sending a start processing instruction to the EAP device, the method further includes: Completing the processing of the first wafer box and sending an end processing instruction to the EAP device to indicate the end of processing the first wafer box.

In some embodiments, after sending the end-of-processing instruction to the EAP device, the method further includes: receiving a third instruction sent by the EAP device, instructing the processing equipment to return the first wafer box to an idle wafer box loading port.

The embodiment of the present invention also provides a device for controlling the running away of goods, which is applied to the equipment automation control EAP device, including a memory, a processor and a computer program stored in the memory and executable on the processor; when the processor executes the program, the method for controlling the running away of goods as described above is implemented.

The embodiment of the present invention also provides a device for controlling the loss of goods, which is applied to processing equipment, and includes a memory, a processor, and a computer program stored in the memory and executable on the processor; when the processor executes the program, the method for controlling the loss of goods as described above is implemented.

The beneficial effects of the present invention are:

In this embodiment, the EAP device obtains the first processing information of the processing equipment and the second processing information for the second wafer box from the MES client. By comparing the first processing information with the second processing information, it is determined whether the wafer box loaded by the processing equipment is the second wafer box and whether it can be transported to the wafer box storage area for processing, thereby avoiding transporting unmatched wafer boxes to the wafer box storage area, reducing the ineffective transportation of wafer boxes in the processing equipment, and improving the equipment utilization rate.

In order to make the purpose, technical solution and advantages of the embodiments of the present invention clearer, the technical solution of the embodiments of the present invention will be described clearly and completely in combination with the drawings of the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the described embodiments of the present invention, all other embodiments obtained by those with ordinary knowledge in the field are within the scope of protection of the present invention.

In the description of the present invention, it should be noted that the directions or positional relationships indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. are based on the directions or positional relationships shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the devices or components referred to must have a specific direction, be constructed and operated in a specific direction, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", and "third" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance.

FIG1 is a schematic diagram of an application scenario of an embodiment of the present invention, wherein the EAP device, i.e., the equipment automation control device, can realize real-time monitoring of the machines on the production line; the Manufacturing Execution System (MES) is a production information management system for the execution layer of the workshop of a manufacturing enterprise. It provides operators/managers with the execution and tracking of the plan and the current status information of all resources (people, equipment, materials, customer needs, etc.); the processing equipment can process the wafer, and the processing methods include but are not limited to high and low temperature annealing, etching, cleaning, etc.

Among them, the EAP device and the MES client can communicate through the Highway101 protocol; the EAP device and the processing equipment can communicate through the Semiconductor Equipment Communication Standard/Generic Equipment Model (SECS/GEM) protocol.

The present invention provides a method and device for controlling cargo loss, which can improve the utilization rate of equipment.

The embodiment of the present invention provides a method for controlling the running of goods, which is applied to the equipment automation control EAP device, as shown in FIG2, including: Step 101: obtaining the first processing information sent by the processing equipment, the first processing information is the processing information of the first wafer box loaded by the processing equipment, the first processing information includes: the identification of the first wafer box, the processing recipe identification, the position information of the wafers stored in the first wafer box, and the identification of the processing equipment; Step 102: obtaining the second processing information for the second wafer box sent by the manufacturing execution system MES client, the second processing information includes: the identification of the second wafer box, the processing recipe identification, the position information of the wafers stored in the second wafer box, and the identification of the processing equipment; Step 103: comparing the first processing information and the second processing information; Step 104: If the first processing information and the second processing information are consistent, a first instruction is sent to the processing equipment to instruct the processing equipment to move the first wafer box to the wafer box storage area; if the first processing information and the second processing information are inconsistent, a second instruction is sent to the processing equipment to instruct the processing equipment to return the first wafer box to the wafer box loading port.

In this embodiment, the EAP device obtains the first processing information of the processing equipment and the second processing information for the second wafer box from the MES client. By comparing the first processing information with the second processing information, it is determined whether the wafer box loaded by the processing equipment is the second wafer box and whether it can be transported to the wafer box storage area for processing, thereby avoiding transporting unmatched wafer boxes to the wafer box storage area, reducing the ineffective transportation of wafer boxes in the processing equipment, and improving the equipment utilization rate.

In this embodiment, if the first processing information and the second processing information are consistent, it can be determined that the first wafer box loaded by the processing equipment is the second wafer box, and the first wafer box can be transported to the wafer box storage area, and then transported to the wafer processing area for processing; if the first processing information and the second processing information are inconsistent, it can be determined that the first wafer box loaded by the processing equipment is not the second wafer box, and the first wafer box is returned to the wafer box loading port, and there is no need to transport the first wafer box to the wafer box storage area, thereby avoiding ineffective transportation of the first wafer box in the processing equipment.

Among them, the first processing information and the second processing information are consistent in that the identification of the first wafer box is consistent with the identification of the second wafer box, the processing formula identification in the first processing information is consistent with the processing formula identification in the second processing information, the position information of the wafers stored in the first wafer box is consistent with the position information of the wafers stored in the second wafer box, and the identification of the processing equipment in the first processing information is consistent with the identification of the processing equipment in the second processing information.

In some embodiments, after sending the first instruction to the processing equipment, the method further includes: receiving a work instruction sent by the MES client, the work instruction indicating that the second wafer box is placed in the wafer box storage area; sending a processing instruction to the processing equipment, instructing the processing equipment to process the wafers in the first wafer box; if receiving a confirmation instruction sent by the processing equipment, sending a status update instruction to the MES client, indicating that the status of the second wafer box is waiting for processing; if receiving a denial instruction sent by the processing equipment, sending the second instruction to the processing equipment, instructing the processing equipment to return the first wafer box to the wafer box loading port.

In this embodiment, the processing equipment includes a wafer box loading port, a wafer box storage area and a wafer processing area. The wafer box loading port is used to load the wafer box, the wafer box storage area is used to store the wafer box, and the wafer processing area is used to process the wafer box. If the wafer box is to be processed, the robotic arm of the processing equipment transports the wafer box to the wafer box loading port, the wafer box storage area and the wafer processing area in sequence.

If the processing equipment does not correctly receive the processing instruction, the EAP device instructs the processing equipment to return the first wafer box to the wafer box loading port, which can avoid ineffective transportation of the first wafer box in the processing equipment and improve the equipment utilization rate.

In some embodiments, after receiving the confirmation instruction sent by the processing equipment, the method further includes: receiving the start processing instruction sent by the processing equipment, sending a status update instruction to the MES client, indicating that the status of the second wafer box is to start processing, and the start processing instruction is issued after the processing equipment starts processing the first wafer box.

In this way, the EAP device can notify the MES client to update the status of the second wafer box according to the instructions sent by the processing equipment, so that the operator can know the status of the second wafer box in real time.

In some embodiments, a status update instruction is sent to the MES client to indicate that the status of the second wafer box is to start processing. The method further includes: receiving a processing end instruction sent by the processing equipment, and sending a status update instruction to the MES client to indicate that the status of the second wafer box is to end processing. The processing end instruction is issued after the processing equipment completes processing of the first wafer box.

In this way, the EAP device can notify the MES client to update the status of the second wafer box according to the instructions sent by the processing equipment, so that the operator can know the status of the second wafer box in real time.

In some embodiments, after receiving the end-processing instruction sent by the processing equipment, the method further includes: Detecting the status of multiple wafer box loading ports of the processing equipment, determining the idle wafer box loading port, and sending a third instruction to the processing equipment, the third instruction carries the identification of the idle wafer box loading port, instructing the processing equipment to return the first wafer box to the idle wafer box loading port.

In the related art, after the processing equipment completes the processing, the robot arm of the processing equipment enters a waiting state; while in this embodiment, after the processing of the wafer box is completed, the state of multiple wafer box loading ports of the processing equipment is automatically detected, the idle wafer box loading port is determined, and the processing equipment is instructed to return the first wafer box to the idle wafer box loading port, so that the processed wafer box can be accurately returned from the wafer box storage area to the appropriate wafer box loading port, and the waiting time of the robot arm of the processing equipment can be reduced, and the utilization rate of the processing equipment can be improved. Among them, the third instruction can carry the identification of the idle wafer box loading port, so that the processing equipment can return the first wafer box to the idle wafer box loading port according to the identification of the idle wafer box loading port.

In some embodiments, the number of the first wafer boxes is multiple. In the related art, for each wafer box, the EAP application sends a work instruction to the processing equipment to instruct the wafer box to be processed. In this way, if there are multiple wafer boxes, the EAP application needs to send multiple work instructions to the processing equipment to complete the processing of multiple wafer boxes, and the processing efficiency is low; in the embodiment of the present invention, the number of wafer boxes is multiple, so the EAP device can use one instruction to let the processing equipment process multiple wafer boxes at the same time, thereby improving the processing efficiency, increasing the equipment utilization rate, and reducing the processing cost.

The embodiment of the present invention also provides a method for controlling the running of goods, which is applied to processing equipment, as shown in FIG3, and includes: Step 201: Sending first processing information to the equipment automation control EAP device, the first processing information is the processing information of the first wafer box loaded by the processing equipment, and the first processing information includes: the identification of the first wafer box, the processing recipe identification, the position information of the wafers stored in the first wafer box, and the identification of the processing equipment; Step 202: Receive the first instruction or the second instruction sent by the EAP device, the first instruction instructs the processing equipment to transport the first wafer box to the wafer box storage area; the second instruction instructs the processing equipment to return the first wafer box to the wafer box loading port.

In this embodiment, the processing equipment sends the second processing information to the EAP device so that the EAP device determines whether the wafer box loaded by the processing equipment is the second wafer box based on the second processing information.

In some embodiments, after receiving the first instruction sent by the EAP device, the method further includes: receiving a processing instruction sent by the EAP device to instruct the processing equipment to process the wafer in the first wafer box; if the processing instruction is successfully received, sending a confirmation instruction to the EAP device; if the processing instruction is unsuccessful, sending a denial instruction to the EAP device.

In this way, when the processing equipment does not correctly receive the processing instruction, the EAP device can be notified to avoid the EAP device instructing to continue processing the wafer box.

In some embodiments, after sending a confirmation instruction to the EAP device, the method further includes: Starting processing the first wafer box, and sending a start processing instruction to the EAP device to instruct the start of processing the first wafer box.

In this way, the EAP device can notify the MES client to update the status of the second wafer box according to the instructions sent by the processing equipment, so that the operator can know the status of the second wafer box in real time.

In some embodiments, after sending a start processing instruction to the EAP device, the method further includes: Completing the processing of the first wafer box, and sending an end processing instruction to the EAP device, indicating the end of processing the first wafer box. In this way, the EAP device can notify the MES client to update the status of the second wafer box according to the instruction sent by the processing equipment, so that the operator can immediately know the status of the second wafer box.

In some embodiments, after sending the end-of-processing instruction to the EAP device, the method further includes: receiving a third instruction sent by the EAP device, instructing the processing equipment to return the first wafer box to an idle wafer box loading port.

In the related art, after the processing equipment completes the processing, the robot arm of the processing equipment enters a waiting state; while in this embodiment, after the processing of the wafer box is completed, the state of multiple wafer box loading ports of the processing equipment is automatically detected, the idle wafer box loading port is determined, and the processing equipment is instructed to return the first wafer box to the idle wafer box loading port, so that the processed wafer box can be accurately returned from the wafer box storage area to the appropriate wafer box loading port, and the waiting time of the robot arm of the processing equipment can be reduced, and the utilization rate of the processing equipment can be improved. Among them, the third instruction can carry the identification of the idle wafer box loading port, so that the processing equipment can return the first wafer box to the idle wafer box loading port according to the identification of the idle wafer box loading port.

The embodiment of the present invention also provides a device for controlling the loss of goods, which is applied to the equipment automation control EAP device, as shown in FIG4 , including a memory 31, a processor 32, and a computer program stored in the memory 31 and executable on the processor 32; when the processor 32 executes the program, the method for controlling the loss of goods as described above is implemented.

In some embodiments, the processor 32 is used to obtain first processing information sent by the processing equipment, the first processing information is processing information of a first wafer box loaded by the processing equipment, the first processing information includes: identification of the first wafer box, processing recipe identification, location information of wafers stored in the first wafer box, and identification of the processing equipment; obtain second processing information for a second wafer box sent by the manufacturing execution system MES client, the second processing information includes: identification of the second wafer box, processing recipe identification, location information of wafers stored in the first wafer box, and identification of the processing equipment; The method comprises the steps of: detecting a process recipe identification, position information of the wafers stored in the second wafer box, and an identification of a processing equipment; comparing the first processing information and the second processing information; if the first processing information and the second processing information are consistent, sending a first instruction to the processing equipment, instructing the processing equipment to move the first wafer box to a wafer box storage area; if the first processing information and the second processing information are inconsistent, sending a second instruction to the processing equipment, instructing the processing equipment to return the first wafer box to a wafer box loading port.

In this embodiment, the EAP device obtains the first processing information of the processing equipment and the second processing information for the second wafer box from the MES client. By comparing the first processing information with the second processing information, it is determined whether the wafer box loaded by the processing equipment is the second wafer box and whether it can be transported to the wafer box storage area for processing, thereby avoiding transporting unmatched wafer boxes to the wafer box storage area, reducing the ineffective transportation of wafer boxes in the processing equipment, and improving the equipment utilization rate.

In some embodiments, the processor 32 is used to receive a work instruction sent by the MES client, wherein the work instruction indicates that the second wafer box is placed in the wafer box storage area; send a processing instruction to the processing equipment, instructing the processing equipment to process the wafers in the first wafer box; if a confirmation instruction is received from the processing equipment, send a status update instruction to the MES client, indicating that the status of the second wafer box is waiting for processing; if a denial instruction is received from the processing equipment, send the second instruction to the processing equipment, instructing the processing equipment to return the first wafer box to the wafer box loading port.

In some embodiments, the processor 32 is used to receive a start processing instruction sent by the processing equipment, and send a status update instruction to the MES client to indicate that the status of the second wafer box is to start processing.

In some embodiments, the processor 32 is used to receive a processing end instruction sent by the processing equipment, and send a status update instruction to the MES client to indicate that the status of the second wafer box is processing end.

In some embodiments, the processor 32 is used to detect the status of multiple wafer box loading ports of the processing equipment, determine the idle wafer box loading port therein, and send a third instruction to the processing equipment, wherein the third instruction carries the identification of the idle wafer box loading port and instructs the processing equipment to return the first wafer box to the idle wafer box loading port.

In some embodiments, there are multiple first wafer boxes.

In the related art, for each wafer box, the EAP application sends a work instruction to the processing equipment, instructing the processing of the wafer box. In this way, if there are multiple wafer boxes, the EAP application needs to send multiple work instructions to the processing equipment to complete the processing of multiple wafer boxes, and the processing efficiency is low. In the embodiment of the present invention, the number of wafer boxes is multiple, so the EAP device can use one instruction to let the processing equipment process multiple wafer boxes at the same time, thereby improving processing efficiency, increasing equipment utilization rate, and reducing processing costs.

The embodiment of the present invention also provides a device for controlling the loss of goods, which is applied to processing equipment, as shown in FIG5 , and includes a memory 41, a processor 42, and a computer program stored in the memory 41 and executable on the processor 42; when the processor 42 executes the program, the method for controlling the loss of goods as described above is implemented.

In some embodiments, the processor 42 is used to send first processing information to the equipment automation control EAP device, where the first processing information is processing information of a first wafer box loaded by the processing equipment, and the first processing information includes: an identification of the first wafer box, a processing recipe identification, location information of the wafers stored in the first wafer box, and an identification of the processing equipment; receive a first instruction or a second instruction sent by the EAP device, where the first instruction instructs the processing equipment to move the first wafer box to a wafer box storage area; and the second instruction instructs the processing equipment to return the first wafer box to a wafer box loading port.

In this embodiment, the processing equipment sends the second processing information to the EAP device so that the EAP device determines whether the wafer box loaded by the processing equipment is the second wafer box based on the second processing information.

In some embodiments, the processor 42 is used to receive a processing instruction sent by the EAP device to instruct the processing equipment to process the wafers in the first wafer box; if the processing instruction is successfully received, a confirmation instruction is sent to the EAP device; if the processing instruction is unsuccessful, a denial instruction is sent to the EAP device.

In some embodiments, the processor 42 is configured to start processing the first wafer box and send a start processing instruction to the EAP device to instruct the start of processing the first wafer box.

In some embodiments, the processor 42 is used to complete the processing of the first wafer box and send a processing end instruction to the EAP device to instruct to end the processing of the first wafer box.

In some embodiments, the processor 42 is configured to receive a third instruction sent by the EAP device, instructing the processing equipment to return the first wafer box to an empty wafer box loading port.

The embodiment of the present invention further provides a computer program/program product, which is stored in a storage medium. The computer program/program product is executed by at least one processor to implement the various processes of the above-mentioned embodiment of the method for controlling the running of goods, and can achieve the same technical effect. To avoid repetition, it will not be described here.

It should be noted that, in the present invention, the terms "comprise", "include" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, an element defined by the phrase "comprises a ..." does not exclude the presence of other identical elements in the process, method, article or device including the element. In addition, it should be pointed out that the scope of the methods and devices in the embodiments of the present invention is not limited to performing functions in the order shown or discussed, and may also include performing functions in a substantially simultaneous manner or in a reverse order according to the functions involved. For example, the described method may be performed in an order different from that described, and various steps may be added, omitted, or combined. Additionally, features described with reference to certain examples may be combined in other examples.

Through the description of the above implementation, the general knowledge in the field can clearly understand that the above implementation method can be implemented by means of software plus a necessary general hardware platform, and of course it can also be implemented by hardware, but in many cases the former is a better implementation. Based on this understanding, the technical solution of the present invention, or the part that contributes to the relevant technology, can be embodied in the form of a computer software product, which is stored in a storage medium (such as ROM/RAM, disk, optical disk), including a number of instructions for a terminal (which can be a mobile phone, computer, server, air conditioner, or network equipment, etc.) to execute the methods described in each embodiment of the present invention.

The embodiments of the present invention are described above in conjunction with the drawings, but the present invention is not limited to the above-mentioned specific embodiments. The above-mentioned specific embodiments are only illustrative and not restrictive. Under the inspiration of the present invention, a person skilled in the art can make many forms without departing from the scope protected by the purpose of the present invention and the scope of the patent application, all of which are protected by the present invention.

101,102,103,104,201,202: Steps 31,41: Memory 32,42: Processor

FIG1 is a schematic diagram of an application scenario of an embodiment of the present invention; FIG2 is a schematic diagram of a flow chart of a method for controlling the running of goods on the EAP device side of an embodiment of the present invention; FIG3 is a schematic diagram of a flow chart of a method for controlling the running of goods on the processing equipment side of an embodiment of the present invention; FIG4 is a schematic diagram of a structure of a device for controlling the running of goods on the EAP device side of an embodiment of the present invention; FIG5 is a schematic diagram of a structure of a device for controlling the running of goods on the processing equipment side of an embodiment of the present invention.

Claims (11)

A method for controlling the movement of goods, applied to an equipment automation control EAP device, comprises: obtaining first processing information sent by a processing device, the first processing information being processing information of a first wafer box loaded by the processing device, the first processing information comprising: identification of the first wafer box, processing recipe identification, location information of wafers stored in the first wafer box, and identification of the processing device; obtaining second processing information for a second wafer box sent by a manufacturing execution system MES client, the second processing information comprising: identification of the second wafer box, processing recipe identification, location information of wafers stored in the second wafer box, and identification of the processing device; comparing the first processing information and the second processing information; if the first processing information and the second processing information are consistent, sending a first instruction to the processing device, instructing the processing device to transport the first wafer box to the wafer box storage area; if the first processing information and the second processing information are inconsistent, send a second instruction to the processing equipment, instructing the processing equipment to return the first wafer box to the wafer box loading port; wherein, after sending the first instruction to the processing equipment, the method further includes: receiving a work instruction sent by the MES client, the work instruction instructing the second wafer box to be placed in the wafer box storage area; sending a processing instruction to the processing equipment, instructing the processing equipment to process the wafers in the first wafer box; if receiving a confirmation instruction sent by the processing equipment, sending a status update instruction to the MES client, indicating that the status of the second wafer box is waiting for processing; if receiving a denial instruction sent by the processing equipment, sending the second instruction to the processing equipment, instructing the processing equipment to return the first wafer box to the wafer box loading port. The method for controlling the running of goods as described in claim 1, wherein after receiving the confirmation instruction sent by the processing equipment, the method further comprises: receiving the start processing instruction sent by the processing equipment, sending a status update instruction to the MES client, indicating that the status of the second wafer box is to start processing, and the start processing instruction is issued after the processing equipment starts processing the first wafer box. The method for controlling the running of goods as described in claim 2, wherein a status update instruction is sent to the MES client to indicate that the status of the second wafer box is to start processing, and the method further includes: receiving an end processing instruction sent by the processing equipment, sending a status update instruction to the MES client to indicate that the status of the second wafer box is to end processing, and the end processing instruction is issued after the processing equipment completes processing of the first wafer box. As described in claim 3, the method for controlling the running away of goods, wherein, after receiving the end-processing instruction sent by the processing equipment, the method further comprises: detecting the status of multiple wafer box loading ports of the processing equipment, determining the idle wafer box loading port therein, and sending a third instruction to the processing equipment, wherein the third instruction carries the identification of the idle wafer box loading port, instructing the processing equipment to return the first wafer box to the idle wafer box loading port. A method for controlling the loss of goods as described in any one of claims 1 to 4, wherein the number of the first wafer boxes is multiple. A method for controlling the running of goods, applied to a processing equipment, comprises: sending first processing information to an equipment automation control EAP device, the first processing information being processing information of a first wafer box loaded by the processing equipment, the first processing information comprising: identification of the first wafer box, identification of a processing recipe, position information of wafers stored in the first wafer box, and identification of the processing equipment; the second processing information comprising: identification of the second wafer box, identification of a processing recipe, position information of wafers stored in the second wafer box, and identification of the processing equipment; receiving a first instruction or a second instruction sent by the EAP device, the first instruction instructing the processing equipment to transport the first wafer box to a wafer box storage area; the second instruction instructing the processing equipment to withdraw the first wafer box from the processing equipment; Return the first wafer box to the wafer box loading port; wherein, if the first processing information and the second processing information are inconsistent, send a second instruction to the processing equipment to instruct the processing equipment to return the first wafer box to the wafer box loading port; or, if a denial instruction sent by the processing equipment is received, send the second instruction to the processing equipment to instruct the processing equipment to return the first wafer box to the wafer box loading port; wherein, after receiving the first instruction sent by the EAP device, the method further includes: receiving a processing instruction sent by the EAP device, instructing the processing equipment to process the wafer in the first wafer box; if the processing instruction is successfully received, send a confirmation instruction to the EAP device; if the processing instruction is unsuccessful, send a denial instruction to the EAP device. The method for controlling the loss of goods as described in claim 6, wherein after sending a confirmation instruction to the EAP device, the method further includes: starting to process the first wafer box, and sending a start processing instruction to the EAP device to instruct to start processing the first wafer box. The method for controlling the loss of goods as described in claim 7, wherein after sending a start processing instruction to the EAP device, the method further includes: completing the processing of the first wafer box, and sending an end processing instruction to the EAP device to indicate the end of the processing of the first wafer box. The method for controlling the loss of goods as described in claim 8, wherein after sending a processing end instruction to the EAP device, the method further comprises: receiving a third instruction sent by the EAP device, instructing the processing equipment to return the first wafer box to an idle wafer box loading port. A device for controlling the loss of goods, applied to an equipment automation control EAP device, comprises a memory, a processor, and a computer program stored in the memory and executable on the processor; when the processor executes the program, the method for controlling the loss of goods as described in any one of claim items 1 to 5 is implemented. A device for controlling the loss of goods, applied to processing equipment, comprises a memory, a processor and a computer program stored in the memory and executable on the processor; when the processor executes the program, the method for controlling the loss of goods as described in any one of claim items 6 to 9 is implemented.