TWI270759B - Method for shortening tool idle time and manufacturing system using the same - Google Patents

Abstract

A method for shortening tool idle time. An AMHS sends a first confirmation message to an MES according to an unloading request and the MES sends a second confirmation message to a TCS accordingly. The TCS sends a completely-unloaded message and a completely-loaded message to the MES and the MES moves a lot of work-in-process to a tool accordingly, in which the AMHS implements an unloading operation immediately after sending the first confirmation message.

Description

1270759 V. INSTRUCTION DESCRIPTION OF THE INVENTION (1) Technical Field of the Invention The present invention relates to a semiconductor manufacturing process, and more particularly to a method of shortening the idle time of a machine used in a semiconductor manufacturing process. [Prior Art] The Manufacturing Execution System (MES) assists the management personnel in collecting on-site data and controlling the on-site manufacturing process, and the board is used by enterprises to improve the process and improve the production efficiency. Manufacturing execution system is an information system that integrates the core business required for production, such as order, supplier, property management, production, maintenance, quality control, etc. It provides instant, multi-production type. Structure, cross-company production control information exchange; can flexibly adjust parameters with product, order type and delivery time, etc., can effectively assist enterprises to manage inventory, reduce procurement costs', - improve on-time delivery ability, enhance The production control ability of the enterprise. Taking wafer manufacturing as an example, the data for manufacturing the output of the execution system is quite complicated. In addition to the machine's value, there is still process data (Engineering Data).

Col lection, EDC). In addition, the basis for the raw material management system or the material management system to be updated in the same way is also correct. In today's factories, the capacity of the data is very substantial. Adding to the aforementioned complex data characteristics, it is possible to imagine the importance of immediate and stable transmission operations. Bay', automated material handling system (Automatic Materia

Handling System (AMHS) is a wafer cassette (Front 〇pening unified p〇d) used to carry a batch of bulk (1C) wafers.

1270759 i, invention description (2) F〇UP), transferred between fab process equipment. Traditionally, the wafer handling plant (Wa f er F ab ) uses a trolley system, but as the wafer size increases from six inches to eight turns, it is impossible to load manually. With the consideration of factors such as yield rate and cleanliness, automated material handling systems have become one of the necessary equipment for fabs or TFT plants in recent years. The manufacturing execution system used at the wafer fab is in compliance with the SEMI Equipment Communication Standard (J SECS) agreement, which processes and places the position of each batch (1 〇t) according to the information generated by the software of the monitoring machine. This is especially true for the event-driven Material Hand 1 i ng System. The automated material handling system should communicate the immediate delivery status and location change status to the manufacturing execution system so that the manufacturing execution system can update the most recent delivery information - and status. The above-described manufacturing execution system and automatic material handling system have been developed to reduce the burden of manpower, improve the quality of the process, and reduce the cost of manufacturing. However, in the case of a semiconductor process tool, it may not be carrying a wafer for a certain period of time and is idle, which would result in waste of manufacturing costs. For example, referring to FIG. 1 , it is a schematic diagram showing the architecture of a semiconductor manufacturing system, which includes a process tool (tool ) 100 , an output input port ( por t ) 150 , a machine control system ( Tool Control System (TCS) 200, a manufacturing execution system (MES) 300, a Real-Time Dispatching System (RTD) 400, and a handling control system (Material Control)

0532-A40381TWF(n2); PT.AP-342; ALEXCHEN.ptd Page 7 1270759 i, invention description (3)

System, MCS) 5 00, an automatic material handling system (AMHS) 6〇〇, a buffer storage (Stocker) 70 0, and 80 0. Next, the flow of semiconductor manufacturing will be explained. When the process machine 100 is in an idle state, that is, when no wafer is executed in the semiconductor process of the process machine 100, it returns a completion message. • Give the machine control system 200, and then control the machine. System 2 then transmits the load completion message to manufacturing execution system 3 to notify it that another batch of wafers can be transferred to process machine 100 for semiconductor processing. When the manufacturing execution system 300 receives the loading completion message, it will ask the instant dispatching system 4 to pick up which batch of wafers to be transported to the processing machine, and then immediately dispatch the system 400. A list of manufacturing execution systems will be provided, which lists the wafers for which the semiconductor process is to be performed. Then, after the manufacturing execution system 3 determines a batch of wafers, a handling request message is sent to the handling control system .500. Then, when the handling control system 5 receives the handling request message, it commands the automatic material handling system 60 to self-buffer the storage to the output of the processing machine 100 via the road 800.埠 (= 150 上.) Process machine 1 〇〇 After obtaining the batch of wafers, the return is completed and the gas is taken _ to the machine control system 20 0, and then the machine control system 200 returns the load " The production execution system 30 0 is provided. When the manufacturing execution system 3 〇〇 = to 〇 load completion message, it sends a control via the machine control system 2 to the process machine 1 0 0 to inform it what semiconductor process (s: Light process). Then, the processing machine 1 执行 executes the semiconductor process of the steam according to the control command, and returns an unloading after the execution is completed.

1270759 ^~ 丨·· i, invention description (4) 阜 3 ! : 20 0 ' Then the machine control system 2 〇〇 then the unloading is completed to send the i door: t · build the system 30 0 to notify The batch of wafers can be sent to the air: the machine is 1〇0. When the manufacturing execution system 30 0 receives the unloading completion, the system immediately moves the batch of wafers to the next stage. Ask the real-time dispatch system 4 〇〇 reply to the manufacturing two!枷00/ after, the manufacturing execution system 30 (3 transmits a handling request message to the standby system 500, and then the handling control system 5 〇〇 commands the automatic material handling ^ 00 00 the wafer self-made machine platform 100 Unloading and then moving to another > 壬, = or returning to the buffer storage 7000. At this time, the process machine 1 〇 0 is in the set state, so the machine control system 2000 returns a loading completion message. The manufacturing system 3 is configured to notify that it can transfer another batch of wafers to the processing machine 100 to perform another semiconductor process. It is known from the above process that the timing of the process machine in an idle state is - If the wafers are completed after the semiconductor process and the next batch of wafers arrives, if this time can be used to perform the semiconductor process, it will be of considerable benefit to reduce the manufacturing cost and improve the process efficiency. The invention discloses a method for shortening the idle time of the process machine. SUMMARY OF THE INVENTION Based on the above object, an embodiment of the invention discloses a method for shortening the idle time of a machine. An automatic material handling system is based on an unloading Requiring to issue a first confirmation message to a manufacturing execution system. The manufacturing execution system sends a second confirmation message to a machine control system according to the first confirmation message. The machine control system issues an unload according to the second confirmation message. Completion message and - loading completion message to the manufacturing execution system. The manufacturing execution system is based on

〇532-A4〇381TWF(n2);PT.AP-342;ALEXCHEN.ptd Page 9 1270759

The unloading message is sent with the handling of a batch of semiconductors in the handling system. After loading the completion message to notify the product to the first confirmation message of the processing machine, the automatic material handling system 'where the automatic material immediately performs an unloading operation [embodiment] for the above and other purposes of the present invention, ^ ^ ^ ^ ^ ^ It is easy to understand, the preferred embodiment is exemplified below, and the t-match: ^2 can be more clearly explained as follows. -a, the details of the present invention disclose a manufacturing system that shortens and uses the method. The method of idle time is to solve the problem of the idleness of the process machine, and the embodiment of the present invention utilizes the vehicle during the vehicle period. When the semiconductor process performs a 'period Ts—machine or system receive-command to perform an operation, 1 will choose, two $, , , , the first message or whether the system is successful. The structure of the semiconductor manufacturing system, such as the first! Figure, the flow chart. Cattle Conductor I made the manufacturing process of the handling control system 5 〇〇 Received system, yaw y, I 屯 自 r r r r D D D D 自 D D D D D D D D D D 60 60 60 60 60 60 60 60 60 60 Pots. When two::11...), it commands the automatic material handling system b UU so that it self-buffers the derby 7 η η攸丨I* & 〇 the wafer of the fingerprint is transported to the process machine via the 丨〇0 The output of the input is itchy 15. On (M〇veL〇f) Road = Machine 100 returns a load completion message after receiving the batch of wafers

1270759 '5. Description of the invention (6) (Load Comp 1 ete ) to the machine control system 200, and then the machine control system 200 returns the load completion message to the manufacturing execution system 30 0. When the manufacturing execution system 300 receives the load completion message, it issues a control command (not shown) to the process machine 1 via the machine control system 2000 to inform it of which semiconductor process parameters to perform. . Then, the process machine 1 0 0 executes a corresponding semiconductor process (ProcessStart) according to the control command, and returns a ReadyToUn load message to the machine control system 20 0 after the process is completed. The machine control system 200 then transmits the unloading completion message to the manufacturing system 300 to notify it that the batch of wafers can be transported away from the process station 100. When the manufacturing execution system 300 receives the unloading completion message, it will ask the immediate dispatching system 400 which next step the wafer is to be transported to. After the instant dispatch system 40 is replied to the manufacturing execution system 30 0, the manufacturing execution system 300 transmits a transport request message » (RemoveLotRequest) to the transport control system 500, and then the transport control system 5000 commands automatic material handling. The system 600 unloads the batch wafer self-made machine platform 100 and transports it to another processing machine or returns to the buffer storage 7 (RemoveLot & Un 1 oadComp 1 ete ) 0 Bijiri Temple, process machine i is still idle, and then returns a load completion message (ReadyToLoad) to the manufacturing execution system 30 0 via the machine control system 2 to inform it that another batch of wafers can be loaded into the process machine. Station 100 (LoadComplete). Eight As described above, the process machine 100 will issue an unload completion message (UnloadComplete) after the wafer is unloaded, and then issue a load completion message (ReadyToLoad) to the manufacturing execution system 30 0, and then wait for the next batch of crystals.

0532-A40381TWF(n2); PT.AP-342;ALEXCHEN.ptd Page 11 1270759

Round load (LoadComplete). Therefore, the process machine 1 is in an idle state during the process execution (ProcessEnd) to reload the other wafer (LoadComplete) (as indicated by the double arrow in Fig. 2). Next, a method of how to shorten the idle time of the machine in the embodiment of the present invention will be described. Referring to FIG. 3, it is a schematic diagram showing the workflow of the manufacturing process of the semiconductor manufacturing system of the embodiment of the present invention. The difference between the manufacturing process of the embodiment of the present invention and the conventional manufacturing process is mainly in the latter half, so Describe the manufacturing process in the first half to simplify the description). As described above, when the handling control system 500 receives the handling request message (MoveLotRequest) issued by the manufacturing execution system 300, it commands the automatic material handling system 60 0 to enable the self-buffering storage 70 to pass the designated wafer via the wafer. The road 800 is transported to the output port 15 of the process machine (MoveLot). After obtaining the batch of wafers, the process machine returns a load completion message (LoadComplete) to the machine control system 2, and then the machine control system 2000 returns the load completion message to the manufacturing execution system. 300. When the manufacturing execution system 30 0 receives the load completion message, it issues a control command (not shown) to the process machine 0 0 via the machine control system 2000 to inform it which semiconductor process parameters to perform. Then, the processing machine 1 executes a corresponding semiconductor process (ProcessStart) according to the control command, and returns a ReadyToUnload message to the machine control system 2000 after the execution (ProcessEnd), and then the machine The control system 2000 then transmits the uninstallation completion message to the manufacturing execution system 300 to notify the batch that the wafer can be

0532-A40381TlVF(n2); PT.AP-342;ALEXCHEN.ptd Page 12 1270759 V. Description of Invention (8) Shipped away from the process machine 100. When the manufacturing execution system 3 receives the unloading completion message, it will ask the immediate dispatching system 4 〇 〇 which batch of wafers will be transferred to which process machine. After the instant dispatch system is instructed to reply to the manufacturing system 300, the manufacturing execution system 300 transmits a transport request message (Remo veLot Request) to the transport control system 50. Next, the 'transport control system 5' sends a control command (not shown) to the automatic material handling system 6 according to the handling request message, so that the batch wafer self-made machine 1 is 〇〇 The circle is unloaded. During the period before the automatic material handling system 600 receives the control command and wants to perform the unloading operation, if no error condition occurs, it sends a confirmation message (Ack) to the handling control system 500, so that it It is known that the wafer on the current process machine 1000 can be successfully removed, and the uninstall operation is performed after the confirmation message is issued. After the delivery control system 5 receives the confirmation message, it sends a confirmation message (A c k ) to the manufacturing execution system 3 〇 . Similarly, after the manufacturing execution system 300 receives the confirmation message, it sends a confirmation message (Ack) to the machine control system 2〇〇. Then, when the machine control system 20 receives the confirmation message, it issues a completion message (UnloadComplete) and a completion message _ (ReadyToLoad) to the manufacturing execution system 3, informing it that it can carry the next batch. The wafer is loaded into the process machine 100 (LoadComplete) for another semiconductor process' and its operation flow is the same as described above. The purpose of the above method is to avoid that when the wafer on the current process machine table is not removed, the process machine i 〇〇 has issued a completion message to the manufacturing system 5 30, so that the automatic material handling system 6搬 move another batch of wafers

0532-A40381TWF(n2); PT.AP-342;ALEXCHEN.ptd Page 13 1270759

A condition that causes no idle machines to be available. As described above, when the automatic material handling system 60 〇 unloads and transports the wafer originally on the process machine 1 , , the process machine 1 〇 发出 will issue an unload completion message (UnloadCompiete). Since the process machine 1 is in an idle state, it returns a load completion message (ReadyT〇L〇ad) • to the manufacturing execution system 30 0. At this point, the manufacturing execution system 3 will ignore the above two messages, so as not to conflict with the aforementioned message and an error occurs. The automatic material handling system 6 on the wire does not start the unloading operation after issuing the confirmation message, and the machine control system 20 发出 issues the uninstallation completion message (UnloadComplete) and loading after receiving the confirmation message. The completion message (ReadyToLoad) is sent to the manufacturing execution system 300 so that the manufacturing execution system 30 0 can load another batch of wafers to the processing machine 1 for the next process. Therefore, another batch of wafers may be loaded into the process machine 100 before the unloading operation is completed, thus saving a lot of time. In addition, the embodiments of the present invention do not fully describe all the operation information in the semiconductor manufacturing process, and are for the purpose of simplifying the description, and are not limited thereto in practice. Figure 4 is a flow chart showing the steps of the method for shortening the idle time of the machine in the embodiment of the present invention. First, an automated material handling system issues a first confirmation message to a manufacturing execution system based on an unloading request (step S1). Then, the manufacturing execution unit sends a second confirmation message to a machine control system according to the first confirmation message (step S2). The machine control system issues an uninstall completion message and a load completion message to the manufacturing execution system based on the second confirmation message (step S3). The manufacturing execution system is based on the uninstallation completion message and the

1270759 V. Invention Description (10) ^ ---------------- J: Complete the message to inform the automatic material handling 1 to a processing machine (step S4), j: medium, After the first batch of confirmation messages are sent by the semiconductor, the automatic material handling system has been unloaded by the present invention. The invention is not limited to the scope of the invention, and is intended to be used in a variety of modifications and refinements, and the scope of the invention is defined by the scope of the patent application.

0532-A40381TWF(n2); PT.AP-342; ALEXCHEN.ptd Page 15 1270759 B-style simple description [Simplified illustration] Figure 1 shows the architecture of a traditional semiconductor manufacturing system. Figure 2 is a schematic diagram showing the workflow of the manufacturing process of a conventional semiconductor manufacturing system. Fig. 3 is a view showing the workflow of the manufacturing process of the semiconductor manufacturing system of the embodiment of the present invention. Figure 4 is a flow chart showing the method for shortening the idle time of the machine in the embodiment of the present invention. [Main component symbol description] ® 100~Processing machine 150~Output input埠2 0 0~Machine control system 3 0 0~Manufacturing execution system 4 0 0~Immediate dispatching system 5 0 0~Transportation control system 6 0 0 ~ Automatic material handling system 700 ~ buffer storage 80 0 ~ obsessive

0532-A40381TWF(n2); PT.AP-342; ALEXCHEN.ptd第16页

Claims (1)

1270759 1 . A method for shortening the inter-machine time, comprising the steps of: an automatic material handling system issuing a first confirmation message to a manufacturing execution system according to an unloading request; the manufacturing execution system issuing a first according to the first confirmation message a confirmation message is sent to a machine control system; • the machine control system issues an uninstall completion message and a load completion message to the manufacturing execution system according to the second confirmation message; and the manufacturing execution system is completed according to the uninstallation The message and the above loading completion message inform the above automatic material handling system to carry a conductor in the manufacture of the P product to a processing machine. 2, as in the method of patent application, wherein the above-mentioned automatic material message is followed by a manufacturing execution method that shortens the manufacturing process and shortens the above-mentioned confirmation message to the above confirmation message. The above-mentioned completion message, the above-mentioned manufacturing flow system, an idle time The above-mentioned manufacturing and manufacturing of the automatic material is performed to the above-mentioned machine control and a load-manufacturing execution-unloading system, and the method of the system-to-machine control system is performed by the root system control system root completion system. The material handling system that shortens the inter-machine time is issuing the first confirmation operation described above. For performing the use of a shortened machine idle, including an automatic material handling system, a system, and a processing machine, the above steps include: the first system is issued according to an unloading requirement; The message is sent to a second system; f the second confirmation message sends an unloading heart to the manufacturing execution system; and according to the unloading completion message and the loading 1270759 VI. Application for the completion of the patent scope completion notice ~ ~ Product to the skill machine animal handling system handling - batch of semiconductor after the interest rate: on the :::: transport system... the first confirmation message 4 · "species The storage medium, including a plurality of code codes, is directly used in a computer program, and the above computer program executes a method of borrowing 2 j ί people into a computer system and causing the method to include the following steps: · The method of idling idle time , the above-mentioned party confirms that the second two: j: according to the above-mentioned first-confirmation message - the second beer ";, the machine control system; the gentleman & i, the station control system sends a message according to the second confirmation message Unloading 70 ^ ^ ^ loading completion message to the above manufacturing execution system; and +7 - the manufacturing execution system notifies the automatic material handling system to carry a batch of semiconductor work-in-process to a process machine according to the above-mentioned uninstallation completion message and the above-mentioned loading completion message [5] The storage medium of claim 4, wherein the automatic material handling system after the first confirmation message is issued Perform the unloading operation on a 0532-A40381TWF (n2);. PT.AP-342; ALEXCHEN.ptd page 18