TWI739360B - Negative photosensitive resin composition and use thereof - Google Patents
Negative photosensitive resin composition and use thereof Download PDFInfo
- Publication number
- TWI739360B TWI739360B TW109110179A TW109110179A TWI739360B TW I739360 B TWI739360 B TW I739360B TW 109110179 A TW109110179 A TW 109110179A TW 109110179 A TW109110179 A TW 109110179A TW I739360 B TWI739360 B TW I739360B
- Authority
- TW
- Taiwan
- Prior art keywords
- resin composition
- photosensitive resin
- negative photosensitive
- acid
- composition according
- Prior art date
Links
- 239000011342 resin composition Substances 0.000 title claims abstract description 35
- 239000000178 monomer Substances 0.000 claims abstract description 33
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 claims abstract description 24
- 239000003999 initiator Substances 0.000 claims abstract description 20
- 239000004925 Acrylic resin Substances 0.000 claims abstract description 19
- 229920000178 Acrylic resin Polymers 0.000 claims abstract description 19
- 239000004593 Epoxy Substances 0.000 claims abstract description 8
- 239000003960 organic solvent Substances 0.000 claims abstract description 5
- 239000002253 acid Substances 0.000 claims description 26
- CERQOIWHTDAKMF-UHFFFAOYSA-N Methacrylic acid Chemical compound CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 claims description 11
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 claims description 10
- -1 7-oxabicyclo[4.1.0]heptan-3-yl methyl Chemical group 0.000 claims description 9
- 238000004519 manufacturing process Methods 0.000 claims description 7
- FYYIUODUDSPAJQ-XVBQNVSMSA-N [(1S,6R)-7-oxabicyclo[4.1.0]heptan-3-yl]methyl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OCC1CC[C@H]2O[C@H]2C1 FYYIUODUDSPAJQ-XVBQNVSMSA-N 0.000 claims description 4
- 238000010494 dissociation reaction Methods 0.000 claims description 4
- 230000005593 dissociations Effects 0.000 claims description 4
- BPSIOYPQMFLKFR-UHFFFAOYSA-N trimethoxy-[3-(oxiran-2-ylmethoxy)propyl]silane Chemical compound CO[Si](OC)(OC)CCCOCC1CO1 BPSIOYPQMFLKFR-UHFFFAOYSA-N 0.000 claims description 4
- 125000003700 epoxy group Chemical group 0.000 claims description 3
- RIOOIQBUNJDFON-UHFFFAOYSA-N methyl 2-methylprop-2-enoate oxolane Chemical compound O1CCCC1.COC(C(=C)C)=O RIOOIQBUNJDFON-UHFFFAOYSA-N 0.000 claims description 3
- CERQOIWHTDAKMF-UHFFFAOYSA-M Methacrylate Chemical compound CC(=C)C([O-])=O CERQOIWHTDAKMF-UHFFFAOYSA-M 0.000 claims description 2
- 125000002091 cationic group Chemical group 0.000 claims description 2
- WNLRTRBMVRJNCN-UHFFFAOYSA-N adipic acid Chemical compound OC(=O)CCCCC(O)=O WNLRTRBMVRJNCN-UHFFFAOYSA-N 0.000 claims 2
- 229910018286 SbF 6 Inorganic materials 0.000 claims 1
- 235000011037 adipic acid Nutrition 0.000 claims 1
- 239000001361 adipic acid Substances 0.000 claims 1
- 238000000034 method Methods 0.000 abstract description 10
- 239000000758 substrate Substances 0.000 description 13
- 230000000052 comparative effect Effects 0.000 description 12
- 238000012360 testing method Methods 0.000 description 7
- 239000010408 film Substances 0.000 description 5
- 239000011521 glass Substances 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- LCXXNKZQVOXMEH-UHFFFAOYSA-N Tetrahydrofurfuryl methacrylate Chemical compound CC(=C)C(=O)OCC1CCCO1 LCXXNKZQVOXMEH-UHFFFAOYSA-N 0.000 description 3
- 238000011161 development Methods 0.000 description 3
- 229920002120 photoresistant polymer Polymers 0.000 description 3
- LLHKCFNBLRBOGN-UHFFFAOYSA-N propylene glycol methyl ether acetate Chemical compound COCC(C)OC(C)=O LLHKCFNBLRBOGN-UHFFFAOYSA-N 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 2
- SIBDQLNANFZINB-UHFFFAOYSA-N O1C2CC(CCC21)CC(C(=O)O)(CCCC(=O)O)CC2CC1C(CC2)O1.C(CCCCC(=O)OCC1CC2C(CC1)O2)(=O)OCC2CC1C(CC2)O1 Chemical compound O1C2CC(CCC21)CC(C(=O)O)(CCCC(=O)O)CC2CC1C(CC2)O1.C(CCCCC(=O)OCC1CC2C(CC1)O2)(=O)OCC2CC1C(CC2)O1 SIBDQLNANFZINB-UHFFFAOYSA-N 0.000 description 2
- 239000004642 Polyimide Substances 0.000 description 2
- 239000004743 Polypropylene Substances 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 239000010410 layer Substances 0.000 description 2
- NWAHZAIDMVNENC-UHFFFAOYSA-N octahydro-1h-4,7-methanoinden-5-yl methacrylate Chemical compound C12CCCC2C2CC(OC(=O)C(=C)C)C1C2 NWAHZAIDMVNENC-UHFFFAOYSA-N 0.000 description 2
- 229920000139 polyethylene terephthalate Polymers 0.000 description 2
- 239000005020 polyethylene terephthalate Substances 0.000 description 2
- 229920001721 polyimide Polymers 0.000 description 2
- 229920001155 polypropylene Polymers 0.000 description 2
- 239000011241 protective layer Substances 0.000 description 2
- 229910021642 ultra pure water Inorganic materials 0.000 description 2
- 239000012498 ultrapure water Substances 0.000 description 2
- LZEFLPFLUMQUPG-UHFFFAOYSA-N 1-(2-hydroxyethoxy)-2-methylbutan-2-ol Chemical compound CC(COCCO)(CC)O LZEFLPFLUMQUPG-UHFFFAOYSA-N 0.000 description 1
- OZAIFHULBGXAKX-UHFFFAOYSA-N 2-(2-cyanopropan-2-yldiazenyl)-2-methylpropanenitrile Chemical compound N#CC(C)(C)N=NC(C)(C)C#N OZAIFHULBGXAKX-UHFFFAOYSA-N 0.000 description 1
- OZAIFHULBGXAKX-VAWYXSNFSA-N AIBN Substances N#CC(C)(C)\N=N\C(C)(C)C#N OZAIFHULBGXAKX-VAWYXSNFSA-N 0.000 description 1
- HIBWGGKDGCBPTA-UHFFFAOYSA-N C=CC1=CC=CC=C1.C=CC1=CC=CC=C1 Chemical compound C=CC1=CC=CC=C1.C=CC1=CC=CC=C1 HIBWGGKDGCBPTA-UHFFFAOYSA-N 0.000 description 1
- 150000004645 aluminates Chemical class 0.000 description 1
- QZPSXPBJTPJTSZ-UHFFFAOYSA-N aqua regia Chemical compound Cl.O[N+]([O-])=O QZPSXPBJTPJTSZ-UHFFFAOYSA-N 0.000 description 1
- 239000008367 deionised water Substances 0.000 description 1
- 229910021641 deionized water Inorganic materials 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- WGCNASOHLSPBMP-UHFFFAOYSA-N hydroxyacetaldehyde Natural products OCC=O WGCNASOHLSPBMP-UHFFFAOYSA-N 0.000 description 1
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- IJGRMHOSHXDMSA-UHFFFAOYSA-N nitrogen Substances N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 239000002861 polymer material Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000010189 synthetic method Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Materials For Photolithography (AREA)
Abstract
Description
本揭露關於一種負型感光性樹脂組成物及其用途,尤指一種是用於捲對捲製程的負型感光性樹脂組成物及其用途。 The present disclosure relates to a negative photosensitive resin composition and its application, in particular to a negative photosensitive resin composition used in a roll-to-roll manufacturing process and its application.
舊有電子裝置(例如,顯示裝置、觸控裝置或觸控顯示裝置等)使用的基材為玻璃,不具可撓性,不適用含曲面設計或折疊功能之電子裝置。因此,目前業界已嘗試改以可撓式基材(例如,薄膜)取代玻璃。然而,以往用於玻璃製程上的光阻材料具有下列缺點。 Old electronic devices (for example, display devices, touch devices or touch display devices, etc.) use glass as a substrate, which is not flexible, and is not suitable for electronic devices with curved designs or folding functions. Therefore, the industry has tried to replace glass with flexible substrates (for example, thin films). However, the conventional photoresist materials used in the glass process have the following shortcomings.
首先,可撓式基材(例如,薄膜)往往無法承受高溫製程,溫度上限需在140℃以下。然而,使用傳統用於玻璃製程上的光阻材料時,若降低固烤溫度在140℃以下,反應溫度不足,將導致信賴性不佳。 First, flexible substrates (for example, films) are often unable to withstand high-temperature processes, and the upper limit of the temperature must be below 140°C. However, when using photoresist materials traditionally used in the glass process, if the curing temperature is lowered below 140°C, the reaction temperature is insufficient, which will lead to poor reliability.
此外,以可撓式基材(例如,薄膜)並使用捲對捲製程時,量產的成本可明顯降低。然而,使用目前已知可低溫固烤的光阻材料時,雖可在140℃以下反應並達到信賴性要求,但軟烤後卻有沾黏的問題,而無法收捲,不適用於捲對捲製程。 In addition, when a flexible substrate (for example, a film) is used and a roll-to-roll process is used, the cost of mass production can be significantly reduced. However, when using currently known photoresist materials that can be cured at low temperatures, although they can react below 140°C and meet the reliability requirements, they have sticking problems after soft baking and cannot be rewinded. They are not suitable for reeling. Volume process.
有鑑於此,目前亟需發展出一種感光性樹脂組成物,其可改善前述問題,以應用於捲對捲製程上。 In view of this, there is an urgent need to develop a photosensitive resin composition that can improve the aforementioned problems and be applied to the roll-to-roll process.
本揭露的主要目的在於提供一種負型感光性樹脂組成物,其所形成的膜具有不沾黏特性,而可應用於捲對捲製程上。 The main purpose of the present disclosure is to provide a negative photosensitive resin composition, the formed film has non-stick properties, and can be applied to a roll-to-roll process.
本揭露之負型感光性樹脂組成物,包括:(A)0.1至10重量百分比之丙烯酸單體或寡聚物;(B)0.2至30重量百分比之丙烯酸樹脂;(C)0.1至5重量百分比之光起始劑;(D)0.01至1重量百分比之熱酸起始劑;(E)0.1至5重量百分比之環氧單體;以及(F)餘量的有機溶劑;其中,丙烯酸單體或寡聚物的含量是佔丙烯酸單體或寡聚物與丙烯酸樹脂的重量和的25%至45%。 The negative photosensitive resin composition of the present disclosure includes: (A) 0.1 to 10 weight percent of acrylic monomer or oligomer; (B) 0.2 to 30 weight percent of acrylic resin; (C) 0.1 to 5 weight percent (D) 0.01 to 1 weight percent of hot acid initiator; (E) 0.1 to 5 weight percent of epoxy monomer; and (F) the remaining organic solvent; among them, acrylic monomer Or the content of oligomer is 25% to 45% of the total weight of acrylic monomer or oligomer and acrylic resin.
於本揭露的負型感光性樹脂組成物中,藉由控制丙烯酸單體或寡聚物的含量佔丙烯酸單體或寡聚物與丙烯酸樹脂的重量和的比例,使得所形成的膜除了保有該具備的顯影特性外,更具有不沾黏特性。因此,當本揭露的負型感光性樹脂組成物塗佈於軟性基材上時,可應用於捲對捲製程上,以製備可撓式電子裝置(例如,顯示裝置、觸控裝置、觸控顯示裝置等)的絕緣層或保護層。 In the negative photosensitive resin composition of the present disclosure, by controlling the ratio of the acrylic monomer or oligomer content to the total weight of the acrylic monomer or oligomer and the acrylic resin, the film formed will not only retain the In addition to the development characteristics, it also has non-stick characteristics. Therefore, when the negative photosensitive resin composition of the present disclosure is coated on a flexible substrate, it can be applied to a roll-to-roll process to prepare flexible electronic devices (for example, display devices, touch devices, touch devices). Display device, etc.) insulating layer or protective layer.
於本揭露的負型感光性樹脂組成物中,丙烯酸單體或寡聚物的含量是佔丙烯酸單體或寡聚物與丙烯酸樹脂的重量和的25%至45%,即25%≦(A)/(A)+(B)≦45%。當此比例過低時,則會有無法顯影或顯影不佳的問題;當此比例過高時,則會有軟烤後沾黏或顯影後易脫落的問題。於本揭露一實施例中,丙烯酸單體或寡聚物的含量是佔丙烯酸單體或寡聚物與丙烯酸樹脂的重量和的25%至33%,即25%≦(A)/(A)+(B)≦33%。 In the negative photosensitive resin composition of the present disclosure, the content of acrylic monomer or oligomer is 25% to 45% of the total weight of acrylic monomer or oligomer and acrylic resin, that is, 25%≦(A )/(A)+(B)≦45%. When the ratio is too low, there will be problems of inability to develop or poor development; when the ratio is too high, there will be problems of sticking after soft baking or easy to peel off after developing. In an embodiment of the present disclosure, the content of the acrylic monomer or oligomer is 25% to 33% of the total weight of the acrylic monomer or oligomer and the acrylic resin, that is, 25%≦(A)/(A) +(B)≦33%.
於本揭露的負型感光性樹脂組成物中,(A)丙烯酸單體或寡聚物可為丙烯酸單體、丙烯酸寡聚物或其組合。其中,丙烯酸寡聚物可含有2至10個丙烯酸單體。 In the negative photosensitive resin composition of the present disclosure, (A) acrylic monomer or oligomer may be acrylic monomer, acrylic oligomer or a combination thereof. Among them, the acrylic oligomer may contain 2 to 10 acrylic monomers.
於本揭露的負型感光性樹脂組成物中,(B)丙烯酸樹脂可包括一含環氧基的單體。於本揭露的一實施例中,丙烯酸樹脂可由甲基丙烯酸三環[5,2,1,02,6]癸-8-基酯(TCDMA)、甲基丙烯酸(MAA)、苯乙烯(Styrene)、甲基丙烯酸,7-氧雜二環[4.1.0]庚-3-基甲基酯(CYCLOMER M-100)及甲基丙烯酸四氫呋喃甲酯(THFMA)所形成。更具體而言,丙烯酸樹脂可由甲基丙烯酸三環[5,2,1,02,6]癸-8-基酯、甲基丙烯酸、苯乙烯、CYCLOMER M-100及甲基丙烯酸四氫呋喃甲酯所聚合而成。此外,丙烯酸樹脂的分子量可介於10,000克/莫耳至20,000克/莫耳之間。 In the negative photosensitive resin composition of the present disclosure, (B) the acrylic resin may include an epoxy group-containing monomer. In an embodiment of the present disclosure, the acrylic resin can be made of methacrylic acid tricyclo[5,2,1,02,6]dec-8-yl ester (TCDMA), methacrylic acid (MAA), styrene (Styrene) , Methacrylic acid, 7-oxabicyclo[4.1.0]heptan-3-yl methyl ester (CYCLOMER M-100) and tetrahydrofuran methyl methacrylate (THFMA). More specifically, the acrylic resin can be made of methacrylic acid tricyclo[5,2,1,02,6]dec-8-yl ester, methacrylic acid, styrene, CYCLOMER M-100 and tetrahydrofuran methyl methacrylate. Aggregated. In addition, the molecular weight of the acrylic resin may be between 10,000 g/mole and 20,000 g/mole.
於本揭露的負型感光性樹脂組成物中,(D)熱酸起始劑為一加熱後可產生酸的起始劑。其中,熱酸起始劑的反應溫度可為50℃至150℃或80℃至150℃。於本揭露中,熱酸起始劑可為一陽離子型熱酸起始劑。此外,熱酸起始劑加熱後形成的酸的酸解離常數(pKa)可小於或等於-20且大於或等於-30,即-30≦pKa≦-20;或小於-20且大於或等於-30,即-30≦pKa<-20。於本揭露的一實施例中,熱酸起始劑的酸根為SbF6-或B(C6F5)-;但本揭露並不僅限於此。 In the negative photosensitive resin composition of the present disclosure, (D) the thermal acid initiator is an initiator that can generate acid after heating. Wherein, the reaction temperature of the hot acid initiator can be 50°C to 150°C or 80°C to 150°C. In the present disclosure, the thermal acid initiator can be a cationic thermal acid initiator. In addition, the acid dissociation constant (pKa) of the acid formed after the hot acid initiator is heated can be less than or equal to -20 and greater than or equal to -30, that is, -30≦pKa≦-20; or less than -20 and greater than or equal to- 30, that is, -30≦pKa<-20. In an embodiment of the present disclosure, the acid radical of the thermal acid initiator is SbF6 - or B(C 6 F 5 ) - ; but the present disclosure is not limited to this.
於本揭露的負型感光性樹脂組成物中,(E)環氧單體的種類並無特殊限制,只要是含有環氧基的單體即可。於本揭露的一實施例中,環氧單體可包括雙(3,4-環氧環己烷甲基)己二酸(Bis(3,4-epoxycyclohexylmethyl)adipate)、3-環氧丙氧丙基三甲氧基矽烷(3-Glycidoxypropyltrimethoxysilane)或其組合;但本揭露並不僅限於此。 In the negative photosensitive resin composition of the present disclosure, the type of (E) epoxy monomer is not particularly limited, as long as it is an epoxy group-containing monomer. In an embodiment of the present disclosure, the epoxy monomer may include bis(3,4-epoxycyclohexylmethyl)adipate (Bis(3,4-epoxycyclohexylmethyl)adipate), 3-epoxycyclohexylmethyl 3-Glycidoxypropyltrimethoxysilane (3-Glycidoxypropyltrimethoxysilane) or a combination thereof; but the present disclosure is not limited to this.
除了前述的負型感光性樹脂組成物外,本揭露更提供前述負型感光性樹脂組成物的用途,其係用於一捲對捲製程上。特別是,本揭露的負型感光性樹脂組成物可塗佈於一軟性基材上,並於低溫固烤後,形成一絕緣層或保護層。由於本揭露的負型感光性樹脂組成物低溫固烤後具有表面不沾黏的特性,而可用於捲對捲製程上,並可收捲存放。 In addition to the aforementioned negative photosensitive resin composition, the present disclosure further provides the use of the aforementioned negative photosensitive resin composition, which is used in a roll-to-roll manufacturing process. In particular, the negative photosensitive resin composition of the present disclosure can be coated on a flexible substrate and cured at low temperature to form an insulating layer or protective layer. Since the negative photosensitive resin composition disclosed in the present disclosure has the characteristics of non-sticking on the surface after being cured at low temperature, it can be used in a roll-to-roll manufacturing process and can be wound and stored.
於本揭露中,軟性基材可為一可撓性基板或一薄膜。此外,軟性基材的材料可包括,聚碳酸酯(polycarbonate,PC)、聚醯亞胺(polyimide,PI)、聚丙烯(polypropylene,PP)、聚對苯二甲酸乙二酯(polyethylene terephthalate,PET)、或其他塑膠或高分子材料;但本揭露並不僅限於此。再者,於本揭露中,低溫可為140℃以下,例如:80℃至140℃或120℃至140℃。 In the present disclosure, the flexible substrate can be a flexible substrate or a thin film. In addition, the material of the flexible substrate may include polycarbonate (PC), polyimide (PI), polypropylene (PP), polyethylene terephthalate (PET) ), or other plastic or polymer materials; but this disclosure is not limited to this. Furthermore, in the present disclosure, the low temperature may be below 140°C, for example: 80°C to 140°C or 120°C to 140°C.
以下係藉由特定的具體實施例說明本揭露之實施方式,熟習此技藝之人士可由本說明書所揭示之內容輕易地了解本揭露之其他優點與功效。本揭露亦可藉由其他不同的具體實施例加以施行或應用,本說明書中的各項細節亦可針對不同觀點與應用,在不悖離本創作之精神下進行各種修飾與變更。 The following is a specific embodiment to illustrate the implementation of the present disclosure. Those who are familiar with this technique can easily understand the other advantages and effects of the present disclosure from the content disclosed in this specification. The present disclosure can also be implemented or applied by other different specific embodiments, and various details in this specification can also be modified and changed according to different viewpoints and applications without departing from the spirit of the creation.
在本文中,除了特別指明者之外,所謂的特徵甲「或」或「及/或」特徵乙,是指甲單獨存在、乙單獨存在、或甲與乙同時存在;所謂的特徵 甲「及」或「與」或「且」特徵乙,是指甲與乙同時存在;所謂的「包括」、「包含」、「具有」、「含有」,是指包括但不限於此。 In this article, unless otherwise specified, the so-called feature A "or" or "and/or" feature B refers to the presence of nails alone, B alone, or both A and B; the so-called feature A "and" or "and" or "and" feature B is that the nail exists at the same time as B; the so-called "include", "include", "have", and "contain" refer to including but not limited to this.
此外,若一數值係介於一第一數值和一第二數值之間,該數值可為該第一數值、該第二數值或該第一數值和該第二數值之間的另一個數值。 In addition, if a value is between a first value and a second value, the value may be the first value, the second value, or another value between the first value and the second value.
再者,在本文中,「約」一數值是指包括該數值的±10%的範圍,特別是該數值±5%的範圍。在此給定的數量為大約的數量,亦即在沒有特定說明「約」的情況下,仍可隱含「約」之含義。 Furthermore, in this article, a value "about" refers to a range including ±10% of the value, especially a range of ±5% of the value. The quantity given here is an approximate quantity, which means that the meaning of "covenant" can still be implied in the absence of a specific description of "covenant".
本揭露將藉由實施例更具體地說明,但該等實施例並非用於限制本揭露之範疇。除非特別指明,於下列製備例、實施例與比較例中,溫度為攝氏溫度,份數及百分比係以重量計。重量份數和體積份數之關係就如同公斤和公升之關係。 The present disclosure will be described in more detail through embodiments, but these embodiments are not used to limit the scope of the present disclosure. Unless otherwise specified, in the following preparation examples, examples and comparative examples, the temperature is Celsius, and the parts and percentages are by weight. The relationship between parts by weight and parts by volume is like the relationship between kilograms and liters.
實施例與比較例 Examples and Comparative Examples
於本揭露下述實施例及比較例中,所使用的丙烯酸單體或寡聚物為M-400(CAS NO.:29570-58-9),其結構如下式(A-1)所示: In the following examples and comparative examples of this disclosure, the acrylic monomer or oligomer used is M-400 (CAS NO.: 29570-58-9), and its structure is shown in the following formula (A-1):
於本揭露下述實施例及比較例中,所使用的丙烯酸樹脂(B-1)之合成方式如下。 In the following examples and comparative examples of the present disclosure, the synthetic method of the acrylic resin (B-1) used is as follows.
在裝有冷凝管、攪拌機的燒瓶中,投入4重量份熱自由基起始劑2,2’-偶氮雙異丁基(AIBN)、282重量份的溶劑甲基乙基二甘醇(Methyl Ethyl Di Glycol,MEDG),接著投入46重量份甲基丙烯酸三環[5,2,1,02,6]癸-8-基酯(tricyclodecanyl methacrylate,TCDMA)、21重量份的甲基丙烯酸(MAA)、3重量份苯乙烯(Styrene)、40重量份甲基丙烯酸,7-氧雜二環[4.1.0]庚-3-基甲基酯(Methacrylic acid,7-oxabicyclo[4.1.0]hept-3-ylmethyl ester,CYCLOMER M-100,由Daicel Chemical Industries,Ltd製造)、12重量份甲基丙烯酸四氫呋喃甲酯(Tetrahydrofurfuryl methacrylate,THFMA),用氮氣置換後,開始快速攪拌,使溫度維持在65℃下3個半小時,接著升溫到75℃下2個半小時,得到樹脂共聚物溶液(B-1),固含率31.8重量%,平均分子量(Mw)為11000。 In a flask equipped with a condenser and a stirrer, 4 parts by weight of the thermal radical initiator 2,2'-azobisisobutyl (AIBN) and 282 parts by weight of the solvent methyl ethyl diethylene glycol (Methyl Ethyl Di Glycol, MEDG), then add 46 parts by weight of tricyclodecanyl methacrylate (TCDMA), 21 parts by weight of methacrylic acid (MAA), 3 parts by weight of styrene (Styrene), 40 parts by weight of methacrylic acid, 7-oxabicyclo[4.1.0]hept-3-ylmethyl ester (Methacrylic acid, 7-oxabicyclo[4.1.0]hept-3 -ylmethyl ester, CYCLOMER M-100, manufactured by Daicel Chemical Industries, Ltd), 12 parts by weight of Tetrahydrofurfuryl methacrylate (THFMA), replaced with nitrogen, and then rapidly stirred to maintain the temperature at 65°C After 3 and a half hours, the temperature was increased to 75°C for 2 and a half hours to obtain a resin copolymer solution (B-1) with a solid content of 31.8% by weight and an average molecular weight (Mw) of 11,000.
於本揭露下述實施例及比較例中,所使用的光起始劑為:I-907(CAS NO.:71686-10-5),其結構如下式(C-1)所示;以及ITX(CAS NO.:5495-84-1),其結構如下式(C-2)所示: In the following examples and comparative examples of the present disclosure, the photoinitiator used is: I-907 (CAS NO.: 71686-10-5), the structure of which is shown in the following formula (C-1); and ITX (CAS NO.: 5495-84-1), its structure is shown in the following formula (C-2):
於本揭露下述實施例及比較例中,所使用的熱酸起始劑之結構、形成的酸及酸根的解離常數(pKa)如下表1所式。 In the following embodiments and comparative examples of the present disclosure, the structure of the thermal acid initiator used, the acid formed and the dissociation constant (pKa) of the acid radical are shown in Table 1 below.
表1
於本揭露下述實施例及比較例中,所使用的環氧單體為:雙(3,4-環氧環己烷甲基)己二酸(Bis(3,4-epoxycyclohexylmethyl)adipate)(DM 4128E,CAS NO.:3130-19-6),其結構如下式(E-1)所示;以及3-環氧丙氧丙基三甲氧基矽烷(3-Glycidoxypropyltrimethoxysilane)(A-187,CAS NO.:2530-83-8),其結構如下式(E-2)所示: In the following examples and comparative examples of the present disclosure, the epoxy monomer used is: Bis(3,4-epoxycyclohexylmethyl)adipate (Bis(3,4-epoxycyclohexylmethyl)adipate) ( DM 4128E, CAS NO.: 3130-19-6), its structure is shown in the following formula (E-1); and 3-Glycidoxypropyltrimethoxysilane (A-187, CAS NO.: 2530-83-8), its structure is shown in the following formula (E-2):
於本揭露下述實施例及比較例中,所使用的有機溶劑(F-1)為1-甲氧基-2-丙基乙酸乙酯(1-Methoxy-2-propyl acetate,PGMEA)(CAS NO.:108-65-6)。 In the following examples and comparative examples of this disclosure, the organic solvent (F-1) used is 1-Methoxy-2-propyl acetate (PGMEA) (CAS NO.: 108-65-6).
將前述的丙烯酸單體或寡聚物、丙烯酸樹脂、光起始劑、熱酸起始劑、環氧單體及有機溶劑,依照下表4所示之組成配方配製成實施例1至9及比較例1至5之負型感光性樹脂組成物。 The aforementioned acrylic monomers or oligomers, acrylic resins, photoinitiators, thermal acid initiators, epoxy monomers and organic solvents were formulated into Examples 1 to 9 according to the composition formula shown in Table 4 below And the negative photosensitive resin composition of Comparative Examples 1 to 5.
測試例 Test case
首先,準備一基材,其為一表面形成有ITO的薄膜,並以去離子水及丙酮清潔該基材表面。接著,將上述實施例1至9及比較例1至5所製備之負型感光性樹脂組成物以旋轉塗佈方式分別均勻塗佈於該基材上。接著,於80℃下軟烤5分鐘,並使用一光罩,直接以高壓水銀燈(曝光能量:100mJ/cm2)對上述 塗佈於基材表面之負型感光性樹脂組成物進行曝光。接著,以1%的ENPD 23進行顯影100秒。於140℃下,進行30分鐘之硬烤。最後獲得所需之樣本,而樣本厚度為1.5~2.0μm。 First, prepare a substrate, which is a thin film with ITO formed on the surface, and clean the surface of the substrate with deionized water and acetone. Next, the negative photosensitive resin compositions prepared in the foregoing Examples 1 to 9 and Comparative Examples 1 to 5 were uniformly coated on the substrate by spin coating. Next, soft bake at 80°C for 5 minutes, and use a photomask to directly expose the negative photosensitive resin composition coated on the surface of the substrate with a high-pressure mercury lamp (exposure energy: 100mJ/cm 2 ). Next, development was performed with 1% ENPD 23 for 100 seconds. Hard bake for 30 minutes at 140°C. Finally, the required sample is obtained, and the thickness of the sample is 1.5~2.0μm.
沾粘性測試 Stickiness test
於軟烤後所得的樣本,進行沾粘性測試。評分標準如下表2所示。 The sample obtained after soft baking is tested for stickiness. The scoring criteria are shown in Table 2 below.
表2
耐蝕刻測試 Etching resistance test
依製程所製得之樣本於王水或鋁酸(40℃、160秒)處理,以超純水洗淨試片並吹乾,再進行剝離劑N-300(60℃、135秒)處理,再以超純水洗淨試片並吹乾,進行百格測試。其耐蝕刻測試評估標準如下表3所示。 The sample prepared according to the manufacturing process is treated with aqua regia or aluminate (40℃, 160 seconds), the test piece is washed with ultrapure water and dried, and then treated with stripper N-300 (60℃, 135 seconds), Then rinse the test piece with ultrapure water and blow-dry it for a hundred grid test. The etch resistance test evaluation criteria are shown in Table 3 below.
表3
表4
如表4的結果所示,當丙烯酸單體或寡聚物的含量佔丙烯酸單體或寡聚物與丙烯酸樹脂的重量和的比例(即,(A)/(A)+(B))在20%時(比較例1),負型感光性樹脂組成物的顯影性不佳。當此比例超過45%時(比較例2至5),所形成的薄膜會產生沾黏的現象。然而,當此比例控制在25%至45%的範圍內時(實施 例1至9),負型感光性樹脂組成物除了保有良好的顯影性外,更具有極佳的抗沾粘性。因此,本揭露的負型感光性樹脂組成物可有效應用於捲對捲製程上。 As shown in the results in Table 4, when the content of acrylic monomer or oligomer accounts for the ratio of the total weight of acrylic monomer or oligomer and acrylic resin (ie, (A)/(A)+(B)) At 20% (Comparative Example 1), the developability of the negative photosensitive resin composition is poor. When the ratio exceeds 45% (Comparative Examples 2 to 5), the formed film may be sticky. However, when this ratio is controlled within the range of 25% to 45% (implementation Examples 1 to 9), the negative photosensitive resin composition not only maintains good developability, but also has excellent anti-sticking properties. Therefore, the negative photosensitive resin composition of the present disclosure can be effectively applied to a roll-to-roll manufacturing process.
上述實施例僅係為了方便說明而舉例而已,本揭露所主張之權利範圍自應以申請專利範圍所述為準,而非僅限於上述實施例。 The above-mentioned embodiments are merely examples for convenience of description, and the scope of rights claimed in this disclosure should be subject to the scope of the patent application, rather than being limited to the above-mentioned embodiments.
Claims (10)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW109110179A TWI739360B (en) | 2020-03-26 | 2020-03-26 | Negative photosensitive resin composition and use thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW109110179A TWI739360B (en) | 2020-03-26 | 2020-03-26 | Negative photosensitive resin composition and use thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TWI739360B true TWI739360B (en) | 2021-09-11 |
| TW202136915A TW202136915A (en) | 2021-10-01 |
Family
ID=78778010
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW109110179A TWI739360B (en) | 2020-03-26 | 2020-03-26 | Negative photosensitive resin composition and use thereof |
Country Status (1)
| Country | Link |
|---|---|
| TW (1) | TWI739360B (en) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW201307995A (en) * | 2011-06-14 | 2013-02-16 | Daicel Corp | Curable resin composition containing alicyclic epoxy group, method for preparing the same, and cured article thereof |
| TW201425354A (en) * | 2012-10-02 | 2014-07-01 | Nissan Chemical Ind Ltd | Negative photosensitive resin composition |
| TW201901295A (en) * | 2017-05-26 | 2019-01-01 | 臺灣永光化學工業股份有限公司 | Low-temperature solid baking photosensitive resin composition and use thereof |
-
2020
- 2020-03-26 TW TW109110179A patent/TWI739360B/en active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW201307995A (en) * | 2011-06-14 | 2013-02-16 | Daicel Corp | Curable resin composition containing alicyclic epoxy group, method for preparing the same, and cured article thereof |
| TW201425354A (en) * | 2012-10-02 | 2014-07-01 | Nissan Chemical Ind Ltd | Negative photosensitive resin composition |
| TW201901295A (en) * | 2017-05-26 | 2019-01-01 | 臺灣永光化學工業股份有限公司 | Low-temperature solid baking photosensitive resin composition and use thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| TW202136915A (en) | 2021-10-01 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN103228751B (en) | Adhesive composition for touch panel, adhesive film, and touch panel | |
| TWI667539B (en) | Photosensitive resin composition | |
| JP4181152B2 (en) | Negative resist composition | |
| CN106459316B (en) | Photocurable resin composition | |
| JPWO2009022644A1 (en) | Negative photosensitive resin composition, spacer and liquid crystal display device | |
| TW200909536A (en) | Organic passivation composition | |
| TW201825535A (en) | Photosensitive resin composition, photocurable pattern formed from the same and image display comprising the pattern | |
| CN107957656B (en) | Negative photosensitive resin composition and use thereof | |
| CN105278250B (en) | Negative photosensitive resin composition | |
| CN106054532B (en) | Negative photosensitive polysiloxane composition | |
| CN108931885B (en) | Low temperature curing photosensitive resin composition and use thereof | |
| TWI739360B (en) | Negative photosensitive resin composition and use thereof | |
| CN114265284B (en) | A high heat-resistant copolymer negative photoresist composition and preparation method thereof | |
| CN113448164A (en) | Negative photosensitive resin composition and use thereof | |
| CN114599694B (en) | Non-photosensitive resin composition | |
| TWI485524B (en) | Photosensitive resin composition and use thereof | |
| CN108690521A (en) | Optical transparent double-faced adhesive tape | |
| CN108690524A (en) | Anti-static release liner | |
| TWI534539B (en) | Negative type photosensitive resin composition | |
| JP7707576B2 (en) | Release layer forming composition and release layer | |
| TWI846610B (en) | Photosensitive composition for low-temp post bake and uses thereof | |
| TW201219494A (en) | comprising urethane (alkyl)acrylate or polyurethane (alkyl)acrylate, polyalkylene glycol alkyl ether (alkyl)acrylate, alkyl (alkyl)acrylate and photo-initiator; and having high tensility and transmittance, weatherability and good mechanical properties | |
| JP2011053246A (en) | Photosensitive resin composition, method of forming cured film, cured film, organic el display, and liquid crystal display | |
| CN119717396A (en) | Low-temperature solid-baked photosensitive resin composition and its use | |
| TW201823863A (en) | Water soluble photosensitive resin composition, film and circuit board using the same |