TWI781096B - Heat treatment device - Google Patents

Abstract

The present invention provides a heat treatment device capable of making the temperature change of the object to be processed more uniform even when the temperature control conditions are changed, and automatically performing a process for making the temperature change of the object more uniform. Adjust assignments. The heat treatment device 1 has: a chamber 4 for accommodating the object to be processed 100; a medium supply part 7 including a reference damper 32 and auxiliary dampers 31, 33 for supplying cooling air to the chamber 4; The control unit 18 controls the supply form of the cooling air supplied to the sub dampers 31 and 33 based on the supply form of the cooling air supplied from the damper 32 .

Description

Heat treatment device

The present invention relates to a heat treatment device.

There is known a heat treatment apparatus for heat-treating an object to be processed such as a semiconductor substrate (see, for example, Document 1 below). As an example of a heat treatment apparatus, the heat treatment apparatus described in Document 1 includes: a heater surrounded by a heat insulator; and a quartz tube surrounded by the heater. Moreover, the pipe which penetrates a heat insulating material is connected, and the air blower is connected to this pipe.

After the object to be processed in the quartz tube is heat-treated by heating with the heater, the blower is operated to introduce cooling air into the quartz tube. Thereby, the quartz tube and the object to be processed are cooled. At this time, the controller for controlling the blower controls the output of the heater and the air volume of the blower so that the deviation between the actual temperature of the quartz tube and the target temperature becomes zero. Thus, a structure using a blower for forced cooling of quartz tubes is known.

[Patent Document 1] Japanese Patent Laid-Open No. 1-282619

Also, in a structure in which a container such as a quartz tube is forcibly cooled using an air blower, a structure using a plurality of dampers is conceivable. For example, in this structure, the piping connected to the blower has branch pipes branched into plural. And, in each branch A damper is attached to the tube. The plurality of dampers supplies the cooling air from the blower to, for example, a plurality of locations along the longitudinal direction of the container. The opening of each damper is adjusted, for example, by manual operation of an operator. In addition, the cooling air passes through the corresponding damper from the blower and contacts the container, thereby cooling the container. In order to make the cooling rate of the container as uniform as possible in each part of the container, the operator manually adjusted the opening of each damper.

On the other hand, the content and quantity of the object to be heat-treated in the container are not necessarily the same every time. That is, the total heat capacity of the objects to be processed in the container is not always the same. In addition, the target cooling temperature and cooling area of the container (object to be processed) are not necessarily the same every time. In addition, the frequency of the blower motor that drives the blower (for example, the number of revolutions of the blower motor) may vary depending on the conditions of the power supply. In this way, when a difference in cooling conditions occurs, the cooling rate of each part of the container will vary unless the opening of each damper is adjusted.

On the other hand, from the viewpoint of performing uniform heat treatment, it is preferable to cool the container and the plurality of objects as a whole as evenly as possible regardless of differences in cooling conditions. Therefore, the worker manually adjusts the opening degrees of the respective dampers according to the cooling conditions. Thereby, the flow rate of the cooling air which contacts a container from each damper is adjusted, and more uniform cooling of a container and an object to be processed is realized.

In this way, it is preferable to realize the automatic adjustment operation in the structure in which the adjustment operation of the opening degree of each damper is performed manually.

In view of the above circumstances, the present invention aims to provide a heat treatment apparatus that can change the temperature of the object to be processed more evenly even when the temperature control conditions change, and can automatically perform the process for making the object to be processed The adjustment operation of the temperature change is performed more evenly.

(1) In order to solve the above-mentioned problems, a heat treatment apparatus according to an aspect of the present invention includes: a container for accommodating the object to be processed during heat treatment of the object; a medium supply unit for supplying a medium for temperature adjustment to the A reference valve and a sub-valve of the container; and a control unit for controlling a supply form of the medium from the sub-valve based on a supply form of the medium from the reference valve.

According to this configuration, the supply form of the auxiliary valve supply medium is controlled by the control unit. Thereby, when the temperature control condition of the object to be processed changes, the supply form of the auxiliary valve supply medium can be changed. As a result, even when the temperature control conditions of the object to be processed are changed, the object to be processed can be cooled more uniformly. In addition, as a result of controlling the supply form of the sub-valve supply medium based on the supply form of the reference valve supply medium, it is possible to more reliably suppress the divergence of the control calculation of the sub-valve. Thus, more accurate temperature control of the object to be processed is realized. In addition, since the sub-valve is controlled by the controller, manpower is not required to adjust the sub-valve. In view of the above, according to the present invention, it is possible to realize a heat treatment apparatus that can change the temperature of the object to be processed more evenly even when the temperature control conditions change, and can automatically perform the process for making the object to be processed. It is an adjustment operation to make the temperature change more evenly in the processed object.

(2) There may be a case where the control unit controls the opening degree of the sub valve based on a state where the opening degree of the reference valve is fixed.

According to this configuration, the control unit does not need to change the opening degree of the reference valve in controlling the opening degree of the sub valve, and as a result, calculations required for controlling the sub valve can be further simplified. In addition, in the opening degree control of the sub valve, occurrence of hunting can be suppressed more reliably.

(3) There is a case where the above-mentioned control unit is configured to use the above-mentioned container The flow rate of the medium supplied from the sub-valve to the container is controlled based on the temperature at a portion where the medium is supplied from the reference valve.

According to this configuration, the degree of temperature change of the container due to the medium supplied to the container from the sub valve and the degree of temperature change of the container due to the medium supplied to the container from the reference valve can be made more equal.

(4) There is a case where the control unit controls the opening degree of the sub-valve so that the temperature of the part of the container to which the medium is supplied from the reference valve is the same as the temperature of the part of the container to which the medium is supplied from the sub-valve. The temperature deviation at the point of the medium is reduced.

According to this configuration, the control unit can control the sub-valve so that the temperature of the part of the container supplied with the medium from the reference valve and the temperature of the part of the container supplied with the medium from the sub-valve become more equal.

(5) There may be a case where a plurality of the sub-valves are provided, and the control unit controls each of the sub-valves so that one of the sub-valves operates differently from the other sub-valves.

According to this configuration, the temperature can be uniformly changed in a wider area of the container by the operation of the plurality of sub-valves. In addition, it is possible to more finely control the temperature of each region of the container.

(6) There may be a case where the control unit is configured to control each of the sub valves using proportional control, and the control unit may set a control gain of one of the sub valves to a different value from a control gain of the other sub valves.

According to this configuration, the one sub-valve described above can further increase the response speed for achieving the target medium supply form. On the other hand, the other above-mentioned auxiliary valves can further reduce the response speed for achieving the target medium supply form. Thus, by adding The combination of sub valves with different response speeds to the target can make the temperature change more evenly in the container that is prone to thermal deviation.

(7) There is such a case: the above-mentioned medium is a cooling medium for cooling the above-mentioned container, and the position where the above-mentioned cooling medium is supplied to the above-mentioned container from one of the above-mentioned auxiliary valves is set to be higher than the position where the above-mentioned cooling medium is supplied to the above-mentioned container from the other above-mentioned auxiliary valves. The position of the cooling medium is high, and the control unit sets the control gain for one of the sub valves to be larger than the control gains for the other sub valves.

According to this configuration, since the heat of the container is directed upward, there is a tendency that the heat of the upper portion of the container is larger than the heat of the lower portion of the container. Therefore, by increasing the control gain of the one sub-valve cooling the upper side of the container, it is possible to more quickly supply a larger amount of medium toward the upper side of the container. Thereby, the upper part side of a container which tends to accumulate heat can be cooled more reliably. On the other hand, by making the control gain of the other sub-valve that cools the lower side of the container smaller, excessive supply of the medium toward the lower side of the container can be suppressed rapidly. Thereby, it can suppress that the lower part side of the container from which heat escapes comparatively is cooled earlier than the other part of a container. As a result, all parts of the container are cooled more evenly.

(8) There is a case where the container includes: an opening open to the outside of the container, and an inner portion of a shape closed to the outside of the container, and the medium is a cooling medium for cooling the container. A position where one of the auxiliary valves supplies the cooling medium to the container is set close to the inner portion of the opening and the inner portion, and a position where the cooling medium is supplied from the other auxiliary valve to the container is set close to the opening. In the opening part and the opening part of the back part, the control part sets the control gain for one of the sub-valves to be larger than the control gain for the other sub-valves.

According to this structure, heat of the container tends to accumulate in the inside, so the heat of the inside of the container tends to be larger than the heat of the opening of the container. Therefore, by increasing the control gain of one sub-valve cooling the inner side of the container, it is possible to more quickly supply a larger amount of medium toward the inner side of the container. Thereby, it is possible to more reliably cool the inner side of the container, which tends to accumulate heat. On the other hand, by making the control gain of the other sub-valve that cools the opening of the container smaller, it is possible to suppress excessive supply of the medium toward the opening of the container. Thereby, it can suppress that the opening part side of the container from which heat escapes comparatively is cooled earlier than other parts of a container. As a result, all parts of the container are cooled more evenly.

(9) There may be a case where a plurality of the sub-valves are provided, and the outlet position of the medium from the reference valve is set between the outlet positions of the medium from the sub-valves.

According to this configuration, it is possible to more uniformly change the temperature of a wider area of the container by using a medium through a plurality of valves. In addition, the proportion of the area in the container other than the portion supplied with the medium from the reference valve can be further increased in the vicinity of the portion supplied with the medium from the reference valve. As a result, for a wider area of the container, the temperature difference with the site supplied with the medium from the reference valve can be reduced.

According to the present invention, it is possible to realize a heat treatment apparatus that can change the temperature of the object to be processed more evenly even when the temperature control conditions are changed, and can automatically perform the process for making the object to be processed more uniform. Adjustment work where temperature changes occur.

1‧‧‧Heat treatment device

2‧‧‧base plate

2a‧‧‧through hole

3‧‧‧Heater

3a‧‧‧Side wall

3b‧‧‧top wall

4‧‧‧Chamber (container)

4a‧‧‧upper part

4b‧‧‧middle part

4c‧‧‧bottom

4d‧‧‧opening

4e‧‧‧Libu

5‧‧‧Crystal boat

6‧‧‧Elevating mechanism

7‧‧‧Media supply department

8‧‧‧flange

10‧‧‧space

11‧‧‧Blower unit

12‧‧‧Supply pipe

13‧‧‧Manifold

14‧‧‧Damper unit

15‧‧‧exhaust pipe

16‧‧‧Exhaust cooler

17‧‧‧Sensor unit

18‧‧‧Control Department

21‧‧‧Blower

22‧‧‧Blower motor

30‧‧‧damper

31‧‧‧The first auxiliary damper (auxiliary valve; one auxiliary valve)

32‧‧‧Reference damper (reference valve)

33‧‧‧Second auxiliary damper (auxiliary valve; other auxiliary valves)

41‧‧‧Inlet pipe

42‧‧‧Valve box

43‧‧‧Support shaft

44‧‧‧Valve body

45‧‧‧Motor with damper

46, 47‧‧‧Exit pipe

48‧‧‧Motor shell

49‧‧‧Output shaft

51~53‧‧‧temperature sensor

100‧‧‧processed objects

A1‧‧‧(cooling air) air flow

kp1, kp2‧‧‧control gain

P1‧‧‧Fully closed position

P2‧‧‧full open position

T1‧‧‧Temperature at the upper part of the chamber (at the part of the container where the medium is supplied from the auxiliary valve temperature)

T2‧‧‧temperature in the middle of the chamber (the temperature at the part of the container where the medium is supplied from the reference valve)

T3‧‧‧Chamber lower temperature (the temperature at the part of the container where the medium is supplied from the auxiliary valve)

T1t, T3t, Tft‧‧‧target temperature

FIG. 1 is a schematic diagram showing a part of a heat treatment apparatus according to an embodiment of the present invention in cross section, and shows a state in which the heat treatment apparatus is viewed from the side.

FIG. 2 is an enlarged view showing a main part of the heat treatment apparatus of FIG. 1 .

3 is a cross-sectional view of a damper provided in a refrigerant supply unit of the heat treatment device, showing a state of the damper viewed from a side.

FIG. 4 is a flow chart illustrating an example of cooling operation in the heat treatment apparatus.

Embodiments for implementing the present invention will be described below with reference to the drawings. In addition, the present invention can be widely applied as a heat treatment device for heat-treating an object to be processed.

FIG. 1 is a schematic diagram showing a part of a heat treatment apparatus 1 according to an embodiment of the present invention in cross section, and shows a state in which the heat treatment apparatus 1 is viewed from the side. FIG. 2 is an enlarged view showing a main part of the heat treatment apparatus 1 of FIG. 1 . 3 is a cross-sectional view of the damper 30 provided in the medium supply unit 7 of the heat treatment apparatus 1, showing a state in which the damper 30 is viewed from the side.

Referring to FIG. 1 , a heat treatment apparatus 1 is configured to perform heat treatment on an object 100 to be processed. More specifically, the heat treatment apparatus 1 is configured to be able to perform heat treatment on the surface of the object 100 to be processed by supplying heated gas toward the object 100 to be processed. In addition, the heat treatment apparatus 1 is configured to be able to forcibly cool the object 100 to be processed using air as a medium as cooling air.

The object to be processed 100 is, for example, a glass substrate, a semiconductor substrate, or the like.

The heat treatment apparatus 1 has a susceptor plate 2 , a heater 3 , a chamber 4 as a container, a boat 5 , an elevating mechanism 6 , and a medium supply unit 7 .

The base plate 2 is provided as a member supporting the heater 3 and the chamber 4 . A through hole 2 a is formed in the center of the base plate 2 . The heater 3 is arranged so as to close the through-hole 2 a from above.

The heater 3 is, for example, an electrothermal heater, and is configured to be able to heat the gas to, for example, approximately 600°C. The heater 3 is formed in a box shape as a whole. The heater 3 has a cylindrical side wall 3 a extending in the vertical direction (vertical direction), and a ceiling wall 3 b closing the upper end of the side wall 3 a. An opening that opens downward is formed at the lower end of the side wall 3a. The lower end portion of the side wall 3 a of the heater 3 is received by the base plate 2 . In the space surrounded by the heater 3, a chamber 4 is disposed.

The chamber 4 is configured as a container for accommodating the object to be processed 100 during heat treatment of the object to be processed 100 . The chamber 4 is formed in a cylindrical shape as a whole. The upper end of the chamber 4 is blocked. In addition, the chamber 4 is open downwards. The lower end of the chamber 4 is received by the base plate 2 . The space in the chamber 4 is opened to the space below the base plate 2 through the through hole 2 a of the base plate 2 . Thus, the chamber 4 includes an opening 4 d opened to the outside of the chamber 4 , and an inner portion 4 e of a shape closed to the outside of the chamber 4 .

When the heat treatment apparatus 1 performs a heat treatment operation, the object 100 to be processed is arranged in the space in the chamber 4 . The object to be processed 100 is supported by the wafer boat 5 in a horizontally arranged state, for example.

The wafer boat 5 is provided for arranging the object 100 to be processed in the chamber 4 . The wafer boat 5 has, for example, a plurality of slots arranged vertically, and a plurality of objects to be processed 100 are held in the slots. The wafer boat 5 is supported by the elevating mechanism 6 and can be displaced in the vertical direction together with the object 100 by the operation of the elevating mechanism 6 . The object to be processed 100 and the wafer boat 5 move in and out of the chamber 4 by the operation of the lifting mechanism 6 .

In the state where the wafer boat 5 and the object to be processed 100 are arranged in the chamber 4 Next, the lower end portion of the chamber 4 and the through-hole 2 a of the susceptor plate 2 are closed by the flange 8 connected to the wafer boat 5 . Thereby, the object 100 and the wafer boat 5 are hermetically sealed in the chamber 4 . In this state, the object to be processed 100 is heated by heating by the heater 3 . Then, after the heater 3 finishes heating the object 100 to be processed, the object 100 , the boat 5 , and the chamber 4 are forcibly cooled by the cooling air supplied from the medium supply unit 7 .

The medium supply unit 7 is configured to cool the chamber 4 and the processed object 100 by forcibly supplying cooling air as a cooling medium for temperature adjustment to the space 10 formed between the heater 3 and the chamber 4 . The space 10 is a space formed between the base plate 2 and the chamber 4 and the heater 3 arranged on the base plate 2 . This space 10 surrounds the outer periphery of the chamber 4 over its entire circumference. In addition, this space 10 is a space covering the upper end portion of the chamber 4 from above. In addition, in FIG. 1 , the flow of cooling air is schematically indicated by arrow A1 . In the present embodiment, the medium supply unit 7 is configured as a supply form in which the supply of cooling air to the space 10 is controlled by electronic control.

The medium supply unit 7 has a blower unit 11 , a supply pipe 12 , a manifold 13 , a damper unit 14 , an exhaust pipe 15 , an exhaust cooler 16 , a sensor unit 17 , and a control unit 18 .

The blower unit 11 is provided to take in air existing outside the heater 3 and supply the air to the supply pipe 12 as cooling air.

The blower unit 11 has a blower 21 and a blower motor 22 for driving the blower 21 .

The blower 21 is, for example, a centrifugal blower, and is configured to take in air existing outside the heater 3 , pressurize the air, and output it as cooling air in a pressurized state. This blower 21 has an impeller (not shown). The impeller is connected to the output shaft of the blower motor 22 and operated by the drive of the blower motor 22 . deliver The fan motor 22 is an electric motor in this embodiment. The blower motor 22 generates an output corresponding to the frequency of the supplied electric power.

In addition, the air sucked into the air blower 21 may be at normal temperature, or may be cooled by a cooler (not shown) in advance. One end of the supply pipe 12 is connected to the discharge port of the blower 21 .

The supply pipe 12 is a pipe extending substantially straight. The supply pipe 12 may be a rigid metal pipe or an elastically deformable flexible pipe. The other end of the supply pipe 12 is connected to a manifold 13 .

The manifold 13 is provided to distribute cooling air to a plurality of dampers 30 described later of the damper unit 14 . The manifold 13 is formed using, for example, a cylindrical metal pipe having a predetermined diameter. In this embodiment, both ends of the manifold 13 are blocked. In addition, in the present embodiment, the manifold 13 extends in a direction substantially perpendicular to the direction in which the supply pipe 12 extends.

More specifically, in the present embodiment, the manifold 13 extends in the vertical direction and is arranged in a direction parallel to the longitudinal direction of the chamber 4 . The manifold 13 is arranged on the side of the heater 3 (in other words, on the side of the chamber 4 ).

In this embodiment, the supply pipe 12 is connected to the outer peripheral portion of the upper end portion of the manifold 13 . According to the above configuration, the cooling air passing through the supply pipe 12 travels downward in the manifold 13 after entering the manifold 13 . This cooling air is then fed into the damper 30 of the damper unit 14 .

The damper unit 14 is provided to supply the cooling air sent into the manifold 13 to the upper part 4a, the middle part 4b, and the lower part 4c of the chamber 4, respectively. The damper unit 14 is arranged between the manifold 13 and the heater 3 in this embodiment.

The damper unit 14 has a plurality of dampers 30 . In this embodiment Among them, as a plurality of dampers 30 , there are a reference damper 32 and a first sub damper 31 and a second sub damper 33 as a plurality of sub dampers. In addition, when the dampers 31 , 32 , and 33 are collectively referred to as the damper 30 .

The reference damper 32 is provided as a reference valve for supplying cooling air to the chamber 4 . In addition, sub dampers 31 , 33 are provided as sub valves for supplying cooling air to chamber 4 . The first sub-damper 31 is an example of "one sub-valve" in the present invention. The second sub-damper 33 is an example of the "other sub-valve" of the present invention. Each damper 30 is configured such that an opening degree can be adjusted. That is, it is configured to be able to adjust the flow rate of cooling air passing through each damper 30 .

The first sub damper 31 is configured to supply cooling air toward the upper portion 4 a of the chamber 4 . The reference damper 32 is configured to supply cooling air toward the middle portion 4 b of the chamber 4 . The second sub-damper 33 is configured to supply cooling air toward the lower portion 4 c of the chamber 4 .

The first sub damper 31 , the reference damper 32 , and the second sub damper 33 are arranged in this order along the longitudinal direction of the chamber 4 , that is, the vertical direction. That is, the reference damper 32 is arranged below the first sub damper 31 . In addition, the second sub damper 33 is arranged below the reference damper 32 .

Referring to FIGS. 1 to 3 , the damper 30 (that is, each of the reference damper 32 and the auxiliary dampers 31 and 33) has an inlet pipe 41, a valve box 42, a support shaft 43, a valve body 44, a damper motor 45, and an outlet. Tubes 46, 47.

In addition, in the present embodiment, an example in which the reference damper 32 is an electric damper including the damper motor 45 is described, but it is not limited thereto. For example, the reference damper 32 may be a manual opening adjustment type damper without the damper motor 45 and capable of fixing the opening of the valve body 44 .

The inlet pipe 41 is connected with the manifold 13 and the valve box 42, and is configured as a future The cooling air from the manifold 13 is introduced into the valve box 42 . The inner diameter of the inlet pipe 41 is set smaller than that of the manifold 13 . One end of the inlet pipe 41 is connected to the outer peripheral portion of the manifold 13 .

The inlet pipe 41 of the first sub-damper 31 is connected to the upper portion of the manifold 13 . The inlet pipe 41 of the reference damper 32 is connected to the middle portion of the manifold 13 . The inlet pipe 41 of the second sub-damper 33 is connected to the lower portion of the manifold 13 . The inlet pipe 41 extends horizontally from the manifold 13 towards the corresponding valve box 42 .

The valve box 42 is formed, for example, in the shape of a hollow square column. The other end of the inlet pipe 41 is connected to a side wall of the valve box 42 . The cooling air passing through the inlet pipe 41 is introduced into the valve box 42 . The valve box 42 accommodates the support shaft 43 and the valve body 44 .

The support shaft 43 is supported by the valve case 42 and supports the valve body 44 so as to be swingable about the support shaft 43 . In the present embodiment, the support shaft 43 and the valve body 44 are connected so as to be integrally rotatable. The support shaft 43 extends, for example, in the horizontal direction, and is disposed adjacent to the inlet pipe 41 . A part of the support shaft 43 penetrates the valve box 42 and is connected to the output shaft 49 of the damper motor 45 .

The damper motor 45 is provided to set the valve opening degree of the damper 30 by swinging the valve body 44 around the support shaft 43 .

The damper motor 45 has a motor case 48 and an output shaft 49 supported by the motor case 48 .

The damper motor 45 is an electric motor configured to be capable of controlling the rotational position, such as a servo motor. The damper motor 45 is configured to be able to change the rotational position of the output shaft 49 of the damper motor 45 by receiving a control signal from the control unit 18 .

The motor case 48 is fixed to the valve box 42, for example. An output shaft 49 of the damper motor 45 is coupled to the support shaft 43 so as to be rotatable in conjunction with it. The output shaft 49 may be connected to the support shaft 43 so as to be integrally rotatable, or it may be connected to the support shaft 43 via a detent not shown. The speed mechanism is coupled to the support shaft 43 so as to be rotatable. According to the above configuration, the rotational position of the output shaft 49 is set by driving the damper motor 45, and accordingly, the rotational position of the valve body 44 around the support shaft 43 (that is, the opening degree of the damper 30) is set.

The valve body 44 is configured to open and close the other end of the inlet pipe 41 . The valve body 44 is formed using, for example, a rectangular flat member. One edge of the valve body 44 is connected to the support shaft 43 . The valve body 44 is arranged, for example, to block the inlet pipe 41 in a vertically erect posture.

The valve body 44 is arranged at the fully open position P2 by rotating, for example, several tens of degrees around the support shaft 43 from the vertically erected posture. That is, when the valve body 44 is in the vertical position, that is, the fully closed position P1, the opening of the damper 30 is zero. In addition, when the valve body 44 is at the predetermined fully open position P2 rotated by several tens of degrees from the vertical position, the opening degree of the damper 30 is 100%.

Furthermore, the relationship between the rotational position of the valve body 44 and the opening degree of the damper 30 is determined according to the structure of the damper 30 . Therefore, the relationship between the rotational position of the valve body 44 and the opening degree of the damper 30 may be linear or nonlinear. In the present embodiment, the relationship between the rotational position of the valve body 44 and the rotational position of the damper 30 is stored in the control unit 18 in advance.

When the valve body 44 opens the other end of the inlet pipe 41 , the cooling air from the inlet pipe 41 is introduced into the valve body 44 and then guided to the outlet pipes 46 and 47 .

In this embodiment, two outlet pipes (that is, outlet pipes 46 and 47 ) are provided in each of the dampers 31 , 32 , and 33 . Each outlet pipe 46 , 47 is provided to connect the space in the corresponding valve box 42 with the space 10 formed in the heater 3 . One end of each outlet pipe 46 , 47 is connected to one side wall of the corresponding valve box 42 .

In addition, the other end of each outlet pipe 46, 47 penetrates the side of the heater 3 The wall 3 a faces the space 10 . In each damper 31, 32, 33, the other end of the outlet pipe 46 and the other end of the outlet pipe 47 are equally spaced (in this embodiment, at intervals of 180 degrees) in the circumferential direction of the side wall 3a of the heater 3. ) configuration.

The other ends of the outlet pipes 46 and 47 of the first sub-damper 31 are disposed so as to face the upper portion 4 a of the chamber 4 horizontally. The other ends of the outlet pipes 46 , 47 of the reference damper 32 are arranged to face the middle portion 4 b of the chamber 4 horizontally. The other ends of the outlet pipes 46 and 47 of the second sub-damper 33 are disposed so as to face the lower portion 4c of the chamber 4 horizontally.

According to the above structure, the position where the cooling air is supplied from the first sub-damper 31 to the chamber 4 (that is, the position at the other end of the outlet pipes 46, 47 of the first sub-damper 31) is set to be larger than the position where the cooling air is supplied. The position from the second sub-damper 33 to the chamber 4 (that is, the position of the other end of the outlet pipes 46 and 47 of the second sub-damper 33 ) is high.

In addition, the position where the cooling air is supplied from the first sub damper 31 to the chamber 4 is set close to the inner portion 4e of the opening portion 4d and the inner portion 4e. In addition, the position where the cooling air is supplied from the second sub damper 33 to the chamber 4 is set close to the opening 4d and the opening 4d in the back portion 4e.

In addition, the positions of the other ends of the outlet pipes 46 and 47, which are the outlets of the cooling air from the reference damper 32, are set at the same position as the other ends of the outlet pipes 46 and 47, which are the outlets of the cooling air from the first sub-damper 31. Between the other end positions of the outlet pipes 46 and 47 , which is the outlet of the cooling air of the second sub-damper 33 .

In addition, in the present embodiment, the positions of the other ends of the outlet pipes 46 of the respective dampers 31 , 32 , and 33 in the circumferential direction of the chamber 4 are aligned. Also, the positions of the other ends of the outlet pipes 47 of the respective dampers 31 , 32 , 33 in the circumferential direction of the chamber 4 are aligned.

According to the above structure, the cooling air passing through the first sub damper 31 It is fed into the space 10 towards the upper part 4 a of the chamber 4 . In addition, cooling air passing through the reference damper 32 is supplied into the space 10 toward the middle portion 4 b of the chamber 4 . Furthermore, the cooling air passing through the second sub damper 33 is supplied into the space 10 toward the lower portion 4 c of the chamber 4 . The cooling air supplied into the space 10 flows toward the exhaust duct 15 while absorbing heat from the chamber 4 .

The exhaust pipe 15 penetrates through the ceiling wall 3 b of the heater 3 . One end of the exhaust pipe 15 faces the space 10 . The exhaust duct 15 guides the cooling air that has reached the upper end of the space 10 to the other end side of the exhaust duct 15 . The exhaust pipe 15 is connected to an exhaust cooler 16 in a space outside the heater 3 . The exhaust cooler 16 cools the cooling air that has absorbed heat from the chamber 4 . The cooling air cooled by passing through the exhaust cooler 16 is exhausted to the external space of the heat treatment apparatus 1 .

According to the above-mentioned structure, the cooling air passes through the supply pipe 12 and the manifold 13 from the blower 21 and then passes through the corresponding dampers 31, 32, 33 to reach the space 10, and then is discharged to the exhaust pipe 15 and the exhaust cooler 16. The exterior of the heat treatment device 1. The temperature of the chamber 4 at a position adjacent to the other end of the outlet pipe 46 , 47 of each damper 31 , 32 , 33 is detected by the sensor unit 17 .

More specifically, the sensor unit 17 detects the temperature of the chamber 4 at the position facing the other end of the outlet pipe 46 of the first sub-damper 31 and the temperature of the other end of the outlet pipe 46 of the reference damper 32. The temperature of the chamber 4 at the facing position and the temperature of the chamber 4 at the position facing the other end of the outlet pipe 46 of the second sub-damper 33 .

The sensor unit 17 has temperature sensors 51 to 53 .

The temperature sensors 51 to 53 are, for example, electrical temperature sensors such as thermocouples, and are configured to output electrical signals specifying detected temperatures. Temperature sensors 51~53 such as It is supported by the heater 3 at a position adjacent to the chamber 4 .

The temperature sensor 51 is arranged adjacent to the outer peripheral surface of the upper portion 4 a of the chamber 4 and adjacent to the other end of the outlet pipe 46 of the first sub-damper 31 . The temperature sensor 51 detects the temperature of the upper part 4a of the chamber 4 horizontally facing the outlet pipe 46 of the first sub-damper 31 as the chamber upper part temperature T1.

The temperature sensor 52 is arranged adjacent to the outer peripheral surface of the intermediate portion 4 b of the chamber 4 and adjacent to the other end of the outlet pipe 46 of the reference damper 32 . The temperature sensor 52 detects the temperature of the middle part 4b of the chamber 4 horizontally opposed to the outlet pipe 46 of the reference damper 32 as the chamber middle part temperature T2.

The temperature sensor 53 is arranged adjacent to the outer peripheral surface of the lower portion 4 c of the chamber 4 and adjacent to the other end of the outlet pipe 46 of the second sub-damper 33 . The temperature sensor 53 detects the temperature of the lower portion 4c of the chamber 4 horizontally opposed to the outlet pipe 46 of the second sub-damper 33 as the chamber lower portion temperature T3. The temperature detection results of the respective temperature sensors 51 to 53 are supplied to the control unit 18 .

The control unit 18 is configured to control the supply form of the cooling air supplied by the sub dampers 31 and 33 based on the supply form of the cooling air supplied by the reference damper 32 . The control unit 18 is formed using a PLC (Programmable Logic Controller: Programmable Logic Controller) or the like. Moreover, the control unit 18 can be formed using a computer including a CPU (Central Processing Unit: Central Processing Unit), a ROM (Read Only Memory: Read Only Memory), and a RAM (Random Access Memory: Random Access Memory). It can be formed using a sequential circuit or the like.

The control unit 18 is connected to each of the temperature sensors 51-53, and receives electrical signals specifying the temperature detection results of the temperature sensors 51-53, that is, the chamber temperatures T1-T3. In addition, the control unit 18 is connected to the blower motor 22, and by controlling the blower motor 22, thereby controlling the flow rate of the cooling air supplied from the blower 21.

In addition, the control unit 18 is connected to the damper motor 45 of the first sub-damper 31 , the damper motor 45 of the reference damper 32 , and the damper motor 45 of the second sub-damper 33 , and controls the operation of the motors 45 respectively.

In the present embodiment, the control unit 18 controls the respective opening degrees of the first sub-damper 31 and the second sub-damper 33 based on the state where the opening degree of the reference damper 32 is fixed. More specifically, when the medium supply unit 7 starts to cool the chamber 4 and the object 100 to be processed, the control unit 18 first sets the opening degree of the reference damper 32 .

The opening degree of the reference damper 32 at this time is set to 50%, for example. In this way, the control unit 18 drives the damper motor 45 of the reference damper 32 so that the opening degree of the reference damper 32 is 50%, for example, the valve body 44 is arranged at a position halfway between the fully closed position P1 and the fully open position P2. place. In this way, by setting the opening degree of the reference damper 32 to 50% of the middle of 0% and 100%, the cooling air flow rate from each sub-damper 31, 33 can be adjusted relative to the cooling air flow rate from the reference damper 32. The adjustment of air flow is more extensive.

In addition, the opening degree of the reference damper 32 may correspond to the heat capacity of the object to be processed 100 (specifically, the number, material, and volume of the object to be processed 100), the target cooling temperature of the object to be processed 100, and the blower motor. 22 operating frequency, etc., are appropriately set by the control unit 18.

In addition, the control unit 18 is configured to control the outlets from the sub-dampers 31 and 33 based on the temperature T2 of the middle portion of the chamber 4 at the middle portion 4b of the chamber 4 that is supplied with cooling air from the reference damper 32 . The flow rate of the cooling air supplied to the chamber 4 by the pipes 46 , 47 . More specifically, the control unit 18 feedback-controls the openings of the secondary dampers 31 and 33 to reduce the amount of cold supplied from the reference damper 32 in the chamber 4 . The temperature at the position where the cooling air is cooled (chamber middle part temperature T2), and the temperatures at the upper part 4a and lower part 4c of the chamber 4 that are supplied with cooling air from the respective sub dampers 31, 33 (chamber upper part temperature T1, Deviation of temperature T3) in the lower part of the chamber.

The control unit 18 is configured to individually control the respective dampers 31 , 32 , and 33 using proportional control. In this embodiment, the control part 18 controls the damper motor 45 of each damper 31, 32, 33 respectively by PID control (Proportional Integral Differential Control, proportional integral differential control), thereby controlling each damper 31, 32, 33 degrees of opening. Furthermore, the control unit 18 may also control the respective dampers 31 , 32 , and 33 by other control methods such as PI control (Proportional Integral Control, proportional integral control).

The control unit 18 controls the sub-dampers 31 and 33 so that the first sub-damper 31 and the second sub-damper 33 perform different operations. Specifically, the control unit 18 sets the control gain kp1 of the first sub-damper 31 and the control gain kp2 of the second sub-damper 33 to different values. In this embodiment, the control unit 18 sets the control gain kp1 of the first sub-damper 31 that supplies cooling air to the upper portion 4a of the chamber 4 to be higher than that of the second sub-damper that supplies cooling air to the lower portion 4c of the chamber 4. The control gain kp2 of 33 is large (kp1>kp2).

Next, an example of the cooling operation in the heat treatment apparatus 1 will be described. And, for example, the cooling operation in the thermal processing apparatus 1 is performed after the heating operation of the heater 3 is stopped. FIG. 4 is a flowchart illustrating an example of the cooling operation in the heat treatment apparatus 1 . In addition, when the description is made with reference to the flowchart, the description is also made with reference to figures other than the flowchart as appropriate.

Referring to FIG. 4 , when the cooling operation starts, the control unit 18 first operates the blower motor 22 to introduce cooling air into the medium supply unit 7 (step S1 ).

Next, the control unit 18 controls the opening degree of the reference damper 32 (step S2). That is, the control unit 18 sets the target opening degree of the reference damper 32 , and further sets the opening degree of the reference damper 32 to a value corresponding to the target opening degree by driving the damper motor 45 of the reference damper 32 .

Next, the control part 18 measures the chamber middle part temperature T2 by referring to the chamber middle part temperature T2 (step S3).

Next, the control unit 18 controls the opening degree of the first sub damper 31 (step S4). That is, the control unit 18 sets the target opening degree of the first sub-damper 31 , and further sets the opening degree of the first sub-damper 31 to match the target opening degree by driving the damper motor 45 of the first sub-damper 31 . considerable value. At this time, the control unit 18 calculates the target temperature T1t based on the detected chamber intermediate temperature T2. Then, the controller 18 controls the opening degree of the first sub-damper 31 so that the deviation (T1t-T1) between the target temperature T1t and the chamber upper temperature T1 is reduced.

In addition, the control unit 18 controls the opening degree of the second sub damper 33 (step S5). That is, the control unit 18 sets the target opening degree of the second sub-damper 33, and further sets the opening degree of the second sub-damper 33 to the target opening degree by driving the damper motor 45 of the second sub-damper 33. considerable value. At this time, the control unit 18 calculates the target temperature T3t based on the detected chamber middle portion temperature T2. Then, the control unit 18 controls the opening degree of the second sub-damper 33 so that the deviation (T3t-T3) between the target temperature T3t and the chamber lower temperature T3 is reduced.

Furthermore, the order of the opening degree control of the first sub-damper 31 (step S4) and the opening degree control of the second sub-damper 33 (step S5) may be changed, or these steps S4 and S5 may be executed in parallel.

Next, the control unit 18 detects the temperature T1 of the upper part of the chamber, the temperature in the middle of the chamber internal temperature T2 and chamber lower temperature T3 (step S6). Then, the control unit 18 determines whether or not the temperatures T1 to T3 have reached the target temperature Tft at which the cooling operation ends (step S7 ).

When the temperatures T1-T3 have reached the target temperature Tft (YES in step S8), the control unit 18 stops the operation of the blower motor 22 (step S8), and ends the cooling operation of the chamber 4 and the processed object 100.

On the other hand, when the temperatures T1 to T3 have not reached the target temperature Tft at which the cooling operation ends (NO in step S8), the control unit 18 executes the control after step S3 again.

As described above, according to the present embodiment, the control unit 18 controls the supply form of the cooling air supplied to the sub dampers 31 and 33 based on the supply form of the cooling air supplied from the reference damper 32 . According to this configuration, the supply form of the cooling air supplied to the sub dampers 31 and 33 is controlled by the control unit 18 . Thereby, when the temperature control conditions of the processed object 100 such as the number of processed objects 100 change, the supply form of the cooling air supplied by the sub dampers 31 and 33 can be changed. As a result, even when the temperature control conditions of the object 100 are changed, the object 100 can be cooled more uniformly. In addition, controlling the supply form of cooling air to the sub dampers 31 and 33 based on the supply form of the cooling air supplied from the reference damper 32 can more reliably suppress the divergence of the control calculations of the sub dampers 31 and 33 . Thus, more accurate temperature control of the object 100 to be processed is realized. In addition, since the sub-dampers 31 and 33 are controlled by the control unit 18, manual adjustment of the sub-dampers 31 and 33 is unnecessary. Based on the above, it is possible to realize a heat treatment apparatus 1 that can change the temperature of the object 100 to be processed more evenly even when the temperature control conditions change, and can automatically perform the process for making the object 100 more uniform. 100 more equal Adjustment operations where temperature changes occur.

In addition, according to the present embodiment, the control unit 18 controls the opening degrees of the sub dampers 31 and 33 based on the state where the opening degree of the reference damper 32 is fixed. According to this configuration, the control unit 18 does not need to change the opening degree of the reference damper 32 in controlling the opening degree of the damper 30 , and as a result, calculations required for controlling the sub dampers 31 and 33 can be further simplified. In addition, in the opening degree control of the sub dampers 31 and 33 , it is possible to more reliably suppress the occurrence of oscillation.

In addition, according to the present embodiment, the control unit 18 is configured to control the secondary temperature T2 based on the temperature at the middle part 4b of the chamber 4 to which the cooling air is supplied from the reference damper 32 (chamber middle part temperature T2). The flow rate of the cooling air supplied by the dampers 31 , 33 to the chamber 4 . According to this structure, the temperature change degree of the upper part 4a and the lower part 4c of the chamber 4 caused by the cooling air supplied from the sub dampers 31, 33 to the chamber 4 can be made different from that due to the cooling air supplied from the reference damper 32 to the chamber 4. The degree of temperature change in the middle part 4b of the chamber 4 caused by the cooling air in the middle part 4b of the chamber 4 is more uniform.

In addition, according to the present embodiment, the control unit 18 controls the opening degrees of the auxiliary dampers 31 and 33 so that the deviation (T2-T1) between the temperature T2 of the middle part of the chamber and the temperature T1 of the upper part of the chamber and the temperature T2 of the middle part of the chamber The deviation (T2-T3) from the temperature T3 of the lower part of the chamber decreases respectively. According to this configuration, the control unit 18 can control the sub dampers 31, 33 so that the temperature at the middle portion 4b of the chamber 4 to which the cooling air is supplied from the reference damper 32 in the chamber 4 (chamber middle portion temperature T2 ), and the temperature at the upper part 4a and lower part 4c of the chamber 4 supplied with cooling air from the auxiliary dampers 31, 33 in the chamber 4 (chamber upper temperature T1 and chamber lower temperature T3) are more equal.

In addition, according to the present embodiment, the control unit 18 controls the respective sub-dampers 31 and 33 so that the first sub-damper 31 and the second sub-damper 33 perform different operations. According to this structure, by the operation of the plurality of sub-dampers 31 and 33 , it is possible to uniformly change the temperature in a wider area of the chamber 4 . In addition, it is possible to more finely control the temperature of each region of the chamber 4 .

In addition, according to the present embodiment, the control unit 18 is configured to control the respective sub-dampers 31, 33 using proportional integral-derivative control so that the control gain kp1 of the first sub-damper 31 and the control gain kp2 of the second sub-damper 33 set to a different value. According to this configuration, the first sub-damper 31 can further increase the response speed for realizing the target cooling air supply form (that is, the opening degree). On the other hand, the second sub-damper 33 can further reduce the response speed for realizing the target cooling air supply form (that is, the opening degree). In this way, by combining the sub-dampers 31 and 33 having different response speeds to the target opening degree, it is possible to cause more uniform temperature changes in the chamber 4, which is prone to thermal variation.

More specifically, the position where the cooling air is supplied from the first sub-damper 31 to the chamber 4 is set higher than the position where the cooling air is supplied from the second sub-damper 33 to the chamber 4 . Furthermore, the control unit 18 sets the control gain kp1 for the first sub-damper 31 to be larger than the control gain kp2 for the second sub-damper 33 . According to this configuration, since the heat of the chamber 4 is directed upward, there is a tendency that the heat of the upper part 4 a of the chamber 4 is larger than the heat of the lower part 4 b of the chamber 4 . Therefore, by increasing the control gain kp1 of the first sub-damper 31 for cooling the upper portion 4 a side of the chamber 4 , more cooling air can be quickly supplied toward the upper portion 4 a side of the chamber 4 . Thereby, the upper part 4a side of the chamber 4 which tends to accumulate heat can be cooled more reliably. On the other hand, by making the control gain kp2 of the second sub-damper 33 for cooling the lower portion 4c of the chamber 4 smaller, excessive supply of cooling air toward the lower portion 4c of the chamber 4 can be suppressed from being suddenly supplied. Thereby, the lower part 4c of the chamber 4 where heat escapes relatively easily can be suppressed. The case where the side is cooled before the rest of the chamber 4. As a result, each part of the chamber 4 is cooled more evenly.

In addition, the position where the cooling air is supplied from the first sub damper 31 to the chamber 4 is set close to the inner portion 4e of the opening portion 4d and the inner portion 4e. In addition, the position where the cooling air is supplied from the second sub damper 33 to the chamber 4 is set close to the opening 4d and the opening 4d in the back portion 4e. Furthermore, the control unit 18 sets the control gain kp1 for the first sub-damper 31 to be larger than the control gain kp2 for the second sub-damper 33 . According to this structure, the heat of the chamber 4 tends to accumulate in the inner part 4e, so the heat of the inner part 4e tends to be larger than the heat of the opening 4d. Therefore, by increasing the control gain kp1 for the first sub-damper 31 for cooling the inner portion 4e side, more cooling air can be supplied more quickly toward the inner portion 4e side of the chamber 4 . Thereby, the back part 4e side of the chamber 4 which tends to accumulate heat can be cooled more reliably. On the other hand, by making the control gain kp2 for the second sub-damper 33 for cooling the opening 4d side of the chamber 4 smaller, excessive cooling can be suppressed from being rapidly supplied to the opening 4d side of the chamber 4. Air. Thereby, it can suppress that the opening part 4d side of the chamber 4 from which heat escapes comparatively is cooled earlier than the other part of the chamber 4. As shown in FIG. As a result, each part of the chamber 4 is cooled more evenly.

In addition, the position of the other end of the outlet pipes 46, 47 of the reference damper 32 is set at the position of the other end of the outlet pipes 46, 47 of the first sub-damper 31 and the position of the other end of the outlet pipes 46, 47 of the second sub-damper 33. between one end position. According to this configuration, it is possible to more uniformly change the temperature of a wider area of the chamber 4 by the plurality of dampers 31 , 32 , and 33 using the cooling air. In addition, for the area of the chamber 4 other than the portion (intermediate portion 4 b ) to which the cooling air is supplied from the reference damper 32 , it is possible to further enlarge the area near the portion to which the cooling air is supplied from the reference damper 32 . proportion. As a result, for a wider area of the chamber 4, the temperature difference with the intermediate portion 4b supplied with cooling air from the reference damper 32 can be reduced.

The embodiments of the present invention have been described above, but the present invention is not limited to the above-mentioned embodiments. The present invention can be modified in various ways as long as it is described in the claims.

(1) In the above-mentioned embodiment, an example has been described in which the opening degree of the reference damper 32 is fixed while the opening degrees of the sub dampers 31 and 33 are controlled. However, it may not be the case. For example, the opening degree of the reference damper 32 may be periodically changed by the control unit 18 or human power while the opening degree control of each sub damper 31 and 33 is being performed.

(2) In addition, in the said embodiment, the form which made the air volume of the air blower 21 constant was demonstrated as an example. However, it may not be the case. For example, the air volume of the air blower 21 may be changed by the control unit 18 in accordance with the temperatures T1, T2, T3, etc. of each part of the chamber 4 .

(3) In addition, in the above-mentioned embodiment, the mode in which the medium supply unit 7 starts cooling the chamber 4 and the processed object 100 after the heating operation of the heater 3 is completed has been described as an example. However, it may not be the case. For example, the cooling air may be supplied from the medium supply unit 7 toward the chamber 4 while the heater 3 is stopped by cooperating with the medium supply unit 7 and the heater 3 .

(4) In addition, in the above-mentioned embodiment, the embodiment in which two sub-dampers are provided has been described as an example. However, it may not be the case. For example, the number of sub dampers may be one, or three or more.

(5) In addition, in the above-mentioned embodiment, the mode in which the control unit 18 controls the opening degrees of the respective dampers 31 , 32 , and 33 has been described as an example. However, it is also possible It's not like this. For example, the control unit 18 may control other elements such as the pressure of the cooling air passing through the dampers 31 , 32 , and 33 .

(6) In addition, in the above-mentioned embodiments, the damper has been described as an example of the valve member for controlling the cooling air. However, it may not be the case. For example, as the valve means for controlling the cooling air, other valve means having a structure capable of adjusting the opening degree of the valve body, such as a solenoid valve, may be used.

(7) In addition, in the above-mentioned embodiment, the case where this invention is applied to the furnace used for thermal vapor deposition etc. was demonstrated as an example. However, it may not be the case. For example, the present invention can also be applied to a heat treatment apparatus having other furnaces such as a hot air circulation furnace.

(8) In addition, in the above-mentioned embodiment, the embodiment in which air is used as the medium for heat treatment has been described as an example. However, it may not be the case. For example, a gas other than air or a liquid such as water may be used as the heat treatment medium. In the case of using a liquid as a medium for heat treatment, a pump is used instead of a blower.

(9) In addition, in the above-mentioned embodiment, the mode in which the medium supply unit 7 cools the chamber 4 and the object 100 to be processed has been described as an example. However, it may not be the case. For example, it is also possible to apply the structure of the present invention to heating containers such as the chamber 4 and the object 100 to be processed. In this case, each damper 31 , 32 , 33 supplies a heat treatment medium such as heated air toward the chamber 4 .

(10) In addition, in the above-mentioned embodiment, the embodiment in which the chamber 4 is a vertical furnace has been described as an example. However, it may not be the case. For example, the present invention can also be applied to a heat treatment apparatus having chambers arranged laterally.

(industrial availability)

The present invention can be widely applied as a heat treatment device.

1‧‧‧Heat treatment device

2‧‧‧base plate

2a‧‧‧through hole

3‧‧‧Heater

3a‧‧‧Side wall

3b‧‧‧top wall

4‧‧‧Chamber (container)

4a‧‧‧upper part

4b‧‧‧middle part

4c‧‧‧bottom

4d‧‧‧opening

4e‧‧‧Libu

5‧‧‧Crystal boat

6‧‧‧Elevating mechanism

7‧‧‧Media supply department

8‧‧‧flange

10‧‧‧space

11‧‧‧Blower unit

12‧‧‧Supply pipe

13‧‧‧Manifold

14‧‧‧Damper unit

15‧‧‧exhaust pipe

16‧‧‧Exhaust cooler

17‧‧‧Sensor unit

18‧‧‧Control Department

21‧‧‧Blower

22‧‧‧Blower motor

30‧‧‧damper

31‧‧‧The first auxiliary damper (auxiliary valve; one auxiliary valve)

32‧‧‧Reference damper (reference valve)

33‧‧‧Second auxiliary damper (auxiliary valve; other auxiliary valves)

44‧‧‧Valve body

45‧‧‧Motor with damper

46, 47‧‧‧Exit pipe

51~53‧‧‧temperature sensor

100‧‧‧processed objects

A1‧‧‧(cooling air) air flow

Claims (8)

A heat treatment device characterized by comprising: a container for storing the object to be processed during the heat treatment of the object; a medium supply unit including a reference valve and a sub valve; and a control unit that controls the supply form of the medium by the sub-valve based on the supply form of the medium by the reference valve; the control unit controls the above-mentioned The opening of the auxiliary valve. The heat treatment device according to claim 1, wherein the control unit is configured to control the flow rate of the medium supplied from the sub-valve to the container based on the temperature of a portion of the container where the medium is supplied from the reference valve. . The heat treatment device according to claim 2, wherein the control unit controls the opening degree of the sub-valve so that the temperature of the part of the container where the medium is supplied from the reference valve is the same as the temperature in the container where the medium is supplied from the sub-valve. This is the way in which the temperature deviations at the locations of the above-mentioned medium are reduced. The heat treatment device according to claim 1, wherein a plurality of the sub-valves are provided, and the control unit controls each of the sub-valves so that one of the sub-valves operates differently from the other sub-valves. The heat treatment device according to claim 4, wherein the control unit is configured to control each of the sub-valves using proportional control, and the control unit sets a control gain of one of the sub-valves and a control gain of the other sub-valves to different values. The heat treatment device according to claim 5, wherein the above-mentioned medium is a cooling medium for cooling the above-mentioned container, The position where the cooling medium is supplied from one of the sub valves to the container is set higher than the position where the cooling medium is supplied from the other sub valves to the container, and the control unit sets the control gain for one of the sub valves. It is proportionally larger than the above-mentioned control gain for the other above-mentioned sub valves. The heat treatment device according to claim 5, wherein the container includes: an opening open to the outside of the container, and an inner portion of a shape closed to the outside of the container, and the medium is a cooling medium for cooling the container A position where the cooling medium is supplied from one of the sub-valves to the container is set close to the inner portion of the opening and the inner portion, and a position where the cooling medium is supplied from the other sub-valve to the container is set. The control unit may set the control gain for one of the sub-valves to be greater than the control gains for the other sub-valves depending on the opening and the opening in the back portion. The heat treatment device according to claim 1, wherein a plurality of the auxiliary valves are provided, and the outlet position of the medium from the reference valve is set between the outlet positions of the medium from each of the auxiliary valves.

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