TWI759045B - Antimony material heating device - Google Patents

Abstract

An antimony material heating device includes a seat, a container, an electric heater, and a heat-preserving member. The seat has an opening and an accommodating space that communicate with each other; the container is detachably arranged in the accommodating space. The container is used to contain a solid antimony raw material and a silicon seed crystal. The top of the container has an air inlet and an air outlet. The air inlet is used to communicate with an external air source and the air outlet is used to communicate with an external pump. The electric heater is arranged in the accommodating space and located adjacent to the outer wall of the container to heat the solid antimony raw material; the thermal insulation member is arranged in the accommodating space and located between the inner wall of the seat and the electric heater.

Description

Antimony raw material heating device

The present invention relates to an antimony raw material heating device; in particular, it refers to an antimony raw material heating device which can provide a stable, uniform and efficient heating effect.

In the CZ method (Czochralski) process, the silicon material is placed in a crucible, and after the silicon material is melted into liquid silicon at a temperature of about 1414°C, the silicon seed with a predetermined crystallographic orientation is lowered to contact the surface of the liquid silicon , under proper temperature control, the liquid silicon forms a single crystal with a predetermined crystallographic orientation with the silicon seed crystal on the silicon seed crystal. A silicon crystal rod is formed below; it is known that solid dopants such as boron, phosphorus, antimony, arsenic, etc. are added to the silicon material in order to change the electrical conductivity of silicon.

Conventional solid-state dopants, such as antimony solid-state dopants, are prepared by a heating device 100 as shown in FIG. 1 . The heating device 100 includes a container 1a and an alcohol lamp 1b, and the container 1a is used for accommodating A solid antimony raw material 1c and a silicon seed crystal 1d are heated by the alcohol lamp 1b disposed at the bottom of the container 1a, so that the solid antimony raw material 1c is melted, and then the alcohol lamp 1b is turned off to make the solid antimony raw material 1c melt. The antimony raw material is cooled and solidified on the silicon seed 1d to obtain the solid dopant of antimony. However, the conventional heating device 1 uses the alcohol lamp 1b for heating, not only the heating efficiency is not good, but the heating range is also limited by alcohol The position of the lamp 1b, when the ambient airflow disturbance is set, will cause the burning flame of the alcohol lamp 1b to be large or small, resulting in poor heating uniformity and stability. In addition, the process of operating the alcohol lamp must be very careful. , it is easy to endanger the life safety of the operator if it is not careful. Therefore, the conventional heating device 100 still needs to be improved.

In view of this, the purpose of the present invention is to provide an antimony raw material heating device, which can provide stable, uniform and efficient heating effect, and can provide better safety performance.

In order to achieve the above purpose, an antimony raw material heating device provided by the present invention includes a base, a container, an electric heater and a heat preservation member, and the base has an opening and an accommodating space communicated with each other; the container Removably arranged in the accommodating space, the container is used for accommodating a solid antimony raw material and a silicon seed, the top of the container has an air inlet hole and an air outlet hole, and the air inlet hole is used to communicate with an external gas source and the air outlet is used to communicate with an external air extraction device; the electric heater is arranged in the accommodating space and adjacent to the outer wall of the container to heat the solid antimony raw material; the heat preservation member is arranged in the container It is placed in the space and between the inner wall of the base and the electric heater.

The effect of the present invention is that the heat energy required for melting the solid antimony raw material can be provided stably and uniformly through the electrothermal heater disposed on the outer wall of the container, and the heat energy required for melting the solid antimony raw material can be provided through the electrothermal heater disposed between the inner wall of the base and the electrothermal heater. The thermal insulation member provides a better thermal insulation effect, so as to prevent a large amount of heat energy provided by the electric heater from dissipating into the environment, thereby improving the heating efficiency of the antimony raw material heating device. Compared with the conventional heating device using an alcohol lamp for heating, the antimony raw material heating device of the present invention can greatly improve the safety of the operator during operation.

In order to describe the present invention more clearly, preferred embodiments are given and described in detail with the drawings as follows. Referring to FIGS. 2 to 4 , it is an antimony raw material heating device 1 according to a preferred embodiment of the present invention. The antimony raw material heating device 1 includes a base 10 , a container 20 , an electric heater 30 and a heat preservation member 40.

Please refer to FIG. 2 to FIG. 4 , the base body 10 has an opening 101 and an accommodating space communicating with each other, the opening 101 is located above the accommodating space, the electric heater 30 , the heat insulating member 40 and the container 20 is disposed in the accommodating space, wherein the container 20 is detachably disposed in the accommodating space, the container 20 is used for accommodating a solid antimony raw material S1 and a silicon seed crystal S2, the container 20 The top has an air inlet hole 201 and an air outlet hole 202. The air inlet hole 201 is used to communicate with an external air source and the air outlet hole 202 is used to communicate with an external air suction device. In this embodiment, the external air source is a An external nitrogen gas source is used as an example.

Wherein, the heat insulating member 40 is made of alumina material, the heat insulating member 40 has an upper opening 401 and an inner accommodating space, and the electric heater 30 is arranged in the inner accommodating space of the insulating member 40 , The diameter of the upper opening 401 is matched with the outer diameter of the container 20, so that the container 20 can pass through the upper opening 401 and be stably located in the inner accommodating space of the heat insulating member 40 without being easily toppled. When the container 20 is disposed in the inner accommodating space of the heat insulating member 40 , the electric heater 30 is located adjacent to the outer wall of the container 20 and surrounds the outer wall of the container 20 . The electrothermal heater 30 can stably and uniformly provide the heat energy required for melting the solid antimony raw material S1 , and provides better thermal energy through the heat preservation member 40 disposed between the inner wall of the base body 10 and the electrothermal heater 30 . The heat preservation effect can prevent a large amount of heat energy provided by the electrothermal heater 30 from dissipating into the environment, thereby improving the heating efficiency of the antimony raw material heating device 1. In addition, the present invention uses the electrothermal heater 30 for heating , Compared with the conventional heating device using an alcohol lamp for heating, the antimony raw material heating device 1 of the present invention can greatly improve the safety of the operator during operation.

It is worth mentioning that the container 20 includes an upper cover 22 and a beaker 24, the upper cover 22 is detachably coupled to the opening of the beaker 24, the upper cover 22 has the air inlet hole 201 and the air outlet hole 202, the air inlet hole 201 and the air outlet 202 can be respectively connected to the external air source and the external air suction device through a pipeline, so as to prevent the operator from inhaling the antimony volatile gas generated by heating the solid antimony raw material during the operation.

Please refer to FIG. 4 again. The antimony raw material heating device 1 includes a transverse partition plate 50 disposed in the container 20 . The transverse partition plate 50 has a through hole 501 , and the silicon seed S2 can pass through the through hole 501 . In other embodiments, it is not excluded that the number of the lateral spacers is greater than two, so that more than two silicon seed crystals can be correspondingly drilled to improve production efficiency.

In other embodiments, the antimony raw material heating device can further include a longitudinal partition 60 as shown in FIG. The fluids L accommodated in the accommodating space cannot communicate with each other, the transverse partition plate 50 is arranged above the longitudinal partition plate 60, and the transverse partition plate 50 has two through holes 501, and each of the through holes 501 corresponds to one The accommodating spaces separated by the longitudinal partitions 60 are respectively provided with a silicon seed S2, so that different quantities of solid antimony raw materials S1 can be accommodated in the accommodating spaces separated by the longitudinal partitions 60, and further Solid state dopants with different antimony contents can be generated on each of the silicon seed crystals S2. In addition, in practice, two or more longitudinal partitions can also be set to separate the internal accommodation space of the container into two or more spaces, and two or more perforations are correspondingly set on the horizontal partitions to facilitate the installation of Each of the silicon seed rods in the vias produces solid dopants with different antimony contents.

To further illustrate, the antimony raw material heating device 1 includes a temperature measuring rod 70 , one end of the temperature measuring rod 70 is connected to the electric heater 30 , and the other end is disposed outside the base 10 , wherein the temperature measuring rod 70 is for example For example, it can be a K-type thermocouple, so as to accurately monitor the temperature of the electric heater 30 .

Please refer to FIG. 6 to FIG. 7 , the antimony raw material heating device 1 includes a cover 80 , the cover 80 is detachably combined with the base 10 and closes the opening 101 of the base 10 , that is, when operating After the person takes out the container 20 , the operator can combine the cover 80 with the base 10 and close the opening 101 of the base 10 . In this way, dust accumulation in the accommodating space of the base 10 can be avoided. It will cause pollution in the subsequent heating process and affect the quality of the finished product.

Please refer to FIG. 8 , the antimony raw material heating device 1 includes a safety net 90 , the safety net 90 is sleeved on the outer peripheral wall of the base body 10 , and the surrounding of the safety net 90 can prevent the operator from directly touching to the outer wall of the base body 10 to improve the safety of the operator during operation.

To sum up, through the antimony raw material heating device 1 of the present invention, the electrothermal heater 30 disposed on the outer wall of the container 20 can stably and uniformly provide the heat energy required for melting the solid antimony raw material S1, The thermal insulation member 40 between the inner wall of the base body 10 and the electric heater 30 provides a better thermal insulation effect, so as to prevent the thermal energy provided by the electric heater 30 from escaping into the environment, thereby enhancing the antimony raw material The heating efficiency of the heating device 1 is improved, and the waste of energy is improved. In addition, the present invention uses an electric heater 30 for heating. Compared with the conventional heating device using an alcohol lamp for heating, the antimony raw material of the present invention is heated. The device 1 can greatly improve the safety of the operator during operation.

The above descriptions are only preferred feasible embodiments of the present invention, and any equivalent changes made by applying the description of the present invention and the scope of the patent application should be included in the patent scope of the present invention.

[accustomed to] 100: Antimony raw material heating device 1a: container 1b: Alcohol lamp 1c: solid antimony raw material 1d: silicon seed [this invention] 1: Antimony raw material heating device 10: seat body 101: Opening 20: Container 201: air inlet 202: vent 22: upper cover 24: Beaker 30: Electric heater 401: upper opening 40 insulation pieces 50: Transverse partition 501: Perforation 60: Longitudinal partition 70: Thermometer 80: Cover 90: Safety net L: fluid S1: solid antimony raw material S2: Silicon seed

Figure 1 is a schematic diagram of a known heating device. 2 is a perspective view of an antimony raw material heating device according to a preferred embodiment of the present invention. FIG. 3 is a schematic exploded view of a part of the components of the antimony raw material heating device according to the above preferred embodiment. 4 is a schematic cross-sectional view of the antimony raw material heating device according to the above preferred embodiment. 5 is a schematic cross-sectional view of an antimony raw material heating device according to another preferred embodiment. 6 is a perspective view of an antimony raw material heating device according to a preferred embodiment of the present invention. 7 is a schematic cross-sectional view of an antimony raw material heating device according to a preferred embodiment of the present invention. 8 is a perspective view of an antimony raw material heating device according to a preferred embodiment of the present invention.

1: Antimony raw material heating device

10: seat body

20: Container

201: air inlet

202: vent

22: upper cover

24: Beaker

40: Insulation pieces

70: Thermometer

Claims (10)

An antimony raw material heating device, comprising: a body with an opening and an accommodating space communicated with each other; A container is detachably arranged in the accommodating space, the container is used for accommodating a solid antimony raw material and a silicon seed, the top of the container has an air inlet hole and an air outlet hole, and the air inlet hole is used to communicate with a The external air source and the air outlet are used to communicate with an external air suction device; an electric heater, disposed in the accommodating space and adjacent to the outer wall of the container, for heating the solid antimony raw material; A heat preservation member is arranged in the accommodating space and located between the inner wall of the base and the electric heater. The antimony raw material heating device as claimed in claim 1, wherein the electrothermal heater surrounds the outer wall of the container. The antimony raw material heating device as claimed in claim 1, wherein the container comprises an upper cover and a beaker, and the upper cover is detachably coupled to the opening of the beaker. The antimony raw material heating device according to claim 3, wherein the upper cover has the air inlet hole and the air outlet hole. The antimony raw material heating device as claimed in claim 1 includes a temperature measuring rod, one end of the temperature measuring rod is connected to the electric heater, and the other end is disposed outside the base. The antimony raw material heating device as claimed in claim 1, comprising a cover body which is detachably coupled to the base body and closes the opening of the base body. The antimony raw material heating device as claimed in claim 1, comprising a transverse partition plate disposed in the container, the transverse partition plate having at least one perforation. The antimony raw material heating device as claimed in claim 7, comprising at least one longitudinal partition, the at least one longitudinal partition partitions the inner accommodating space of the container, so that the accommodating space divided by the at least one longitudinal partition is The contained fluids cannot communicate with each other, the transverse partition is arranged above the at least one longitudinal partition, the at least one perforation is plural, and each of the perforations corresponds to a accommodating space separated by the at least one longitudinal partition. The antimony raw material heating device as claimed in claim 1 includes a safety net, and the safety net is sleeved on the outer peripheral wall of the base body. The antimony raw material heating device as claimed in claim 1, wherein the heat insulating member is made of alumina.

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