TWI635515B - Transparent conductive substrate and method for producing transparent conductive substrate - Google Patents
Transparent conductive substrate and method for producing transparent conductive substrate Download PDFInfo
- Publication number
- TWI635515B TWI635515B TW103129699A TW103129699A TWI635515B TW I635515 B TWI635515 B TW I635515B TW 103129699 A TW103129699 A TW 103129699A TW 103129699 A TW103129699 A TW 103129699A TW I635515 B TWI635515 B TW I635515B
- Authority
- TW
- Taiwan
- Prior art keywords
- transparent
- transparent conductive
- substrate
- metal oxide
- oxide layer
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B7/00—Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers
- B32B7/02—Physical, chemical or physicochemical properties
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/08—Oxides
-
- G—PHYSICS
- G06—COMPUTING OR CALCULATING; COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
- G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
- G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
- G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
- G06F3/044—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means
- G06F3/0445—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means using two or more layers of sensing electrodes, e.g. using two layers of electrodes separated by a dielectric layer
-
- G—PHYSICS
- G06—COMPUTING OR CALCULATING; COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
- G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
- G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
- G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
- G06F3/045—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means using resistive elements, e.g. a single continuous surface or two parallel surfaces put in contact
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B5/00—Non-insulated conductors or conductive bodies characterised by their form
- H01B5/14—Non-insulated conductors or conductive bodies characterised by their form comprising conductive layers or films on insulating-supports
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K9/00—Screening of apparatus or components against electric or magnetic fields
- H05K9/0073—Shielding materials
- H05K9/0094—Shielding materials being light-transmitting, e.g. transparent, translucent
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F71/00—Manufacture or treatment of devices covered by this subclass
- H10F71/138—Manufacture of transparent electrodes, e.g. transparent conductive oxides [TCO] or indium tin oxide [ITO] electrodes
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F77/00—Constructional details of devices covered by this subclass
- H10F77/10—Semiconductor bodies
- H10F77/16—Material structures, e.g. crystalline structures, film structures or crystal plane orientations
- H10F77/169—Thin semiconductor films on metallic or insulating substrates
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F77/00—Constructional details of devices covered by this subclass
- H10F77/20—Electrodes
- H10F77/244—Electrodes made of transparent conductive layers, e.g. transparent conductive oxide [TCO] layers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2307/00—Properties of the layers or laminate
- B32B2307/20—Properties of the layers or laminate having particular electrical or magnetic properties, e.g. piezoelectric
- B32B2307/202—Conductive
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2307/00—Properties of the layers or laminate
- B32B2307/40—Properties of the layers or laminate having particular optical properties
- B32B2307/412—Transparent
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2307/00—Properties of the layers or laminate
- B32B2307/40—Properties of the layers or laminate having particular optical properties
- B32B2307/416—Reflective
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2307/00—Properties of the layers or laminate
- B32B2307/50—Properties of the layers or laminate having particular mechanical properties
- B32B2307/554—Wear resistance
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2307/00—Properties of the layers or laminate
- B32B2307/50—Properties of the layers or laminate having particular mechanical properties
- B32B2307/584—Scratch resistance
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2457/00—Electrical equipment
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2457/00—Electrical equipment
- B32B2457/12—Photovoltaic modules
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2457/00—Electrical equipment
- B32B2457/20—Displays, e.g. liquid crystal displays, plasma displays
- B32B2457/208—Touch screens
-
- G—PHYSICS
- G06—COMPUTING OR CALCULATING; COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F2203/00—Indexing scheme relating to G06F3/00 - G06F3/048
- G06F2203/041—Indexing scheme relating to G06F3/041 - G06F3/045
- G06F2203/04103—Manufacturing, i.e. details related to manufacturing processes specially suited for touch sensitive devices
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Theoretical Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Chemical & Material Sciences (AREA)
- Human Computer Interaction (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Mechanical Engineering (AREA)
- Materials Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Non-Insulated Conductors (AREA)
- Manufacturing Of Electric Cables (AREA)
- Laminated Bodies (AREA)
- Electroluminescent Light Sources (AREA)
- Shielding Devices Or Components To Electric Or Magnetic Fields (AREA)
- Led Device Packages (AREA)
- Photovoltaic Devices (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013-187759 | 2013-09-10 | ||
| JP2013187759 | 2013-09-10 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW201523640A TW201523640A (zh) | 2015-06-16 |
| TWI635515B true TWI635515B (zh) | 2018-09-11 |
Family
ID=52665316
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW103129699A TWI635515B (zh) | 2013-09-10 | 2014-08-28 | Transparent conductive substrate and method for producing transparent conductive substrate |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JP6106756B2 (fr) |
| KR (1) | KR102214745B1 (fr) |
| CN (1) | CN105556618B (fr) |
| TW (1) | TWI635515B (fr) |
| WO (1) | WO2015037182A1 (fr) |
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2017058827A (ja) * | 2015-09-15 | 2017-03-23 | 株式会社村田製作所 | タッチパネル及び電子機器 |
| KR102476036B1 (ko) * | 2016-05-09 | 2022-12-12 | 쑤저우 레킨 세미컨덕터 컴퍼니 리미티드 | 발광 소자 |
| JP2018098024A (ja) * | 2016-12-13 | 2018-06-21 | パイオニア株式会社 | 発光装置 |
| CN109986599B (zh) * | 2017-12-29 | 2020-10-02 | 北京纳米能源与系统研究所 | 摩擦电光智能皮肤、机械手及机器人 |
| KR102058865B1 (ko) | 2018-04-12 | 2019-12-24 | (주)아이엠 | 초가속 열소재를 이용한 발열 디바이스 및 이의 제조방법 |
| JP7116994B2 (ja) * | 2018-06-27 | 2022-08-12 | ロック技研工業株式会社 | Itoフィルム及び透明導電性フィルム |
| US11991871B2 (en) | 2018-12-12 | 2024-05-21 | Nitto Denko Corporation | Impedance matching film for radio wave absorber, impedance matching film-attached film for radio wave absorber, radio wave absorber, and laminate for radio wave absorber |
| TWI738433B (zh) * | 2020-01-09 | 2021-09-01 | 致伸科技股份有限公司 | 光源模組以及具有光源模組的電子裝置 |
| US20230422628A1 (en) * | 2020-10-30 | 2023-12-28 | Kureha Corporation | Transparent conductive piezoelectric film and touch panel |
| CN114501970A (zh) * | 2022-02-22 | 2022-05-13 | 深圳市乐工新技术有限公司 | 电磁屏蔽材料、溅射镀膜装置及电磁屏蔽材料的制作方法 |
| CN116345179B (zh) * | 2023-05-31 | 2023-08-18 | 鹏城实验室 | 具有对高频通信信号智能调控功能的透明窗及其制造方法 |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61205925A (ja) * | 1985-03-08 | 1986-09-12 | Fujitsu Ltd | 透明電極の処理方法 |
| JP2008242314A (ja) * | 2007-03-28 | 2008-10-09 | Fujifilm Corp | 光学フィルム、偏光板及び画像表示装置 |
| CN102017012A (zh) * | 2008-03-14 | 2011-04-13 | Nano-C公司 | 用于透明导电用途的碳纳米管-透明导电无机纳米颗粒混杂薄膜 |
| TW201318863A (zh) * | 2011-08-11 | 2013-05-16 | Toray Industries | 積層體、透明導電性積層體、觸控面板、及積層體之製造方法 |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6433811A (en) * | 1987-04-04 | 1989-02-03 | Gunze Kk | Transparent conductive film and its manufacture |
| JP2944668B2 (ja) | 1988-07-15 | 1999-09-06 | 日東電工株式会社 | 透明導電性フイルムの製造法 |
| JP2846887B2 (ja) | 1989-02-10 | 1999-01-13 | 日東電工株式会社 | 透明導電性積層体 |
| KR950009972B1 (en) * | 1991-07-04 | 1995-09-04 | Mitsubishi Electric Corp | Cylinder identifying apparatus for a multi-cylinder internal combustion engine |
| JPH06278244A (ja) * | 1993-01-29 | 1994-10-04 | Mitsui Toatsu Chem Inc | 積層体 |
| CN100565248C (zh) * | 2007-03-29 | 2009-12-02 | 郭爱军 | 新型抗反射导电膜 |
| JP5777611B2 (ja) | 2010-05-12 | 2015-09-09 | 名阪真空工業株式会社 | 透明導電性基材 |
| CN103189311B (zh) * | 2010-10-29 | 2015-09-30 | 东丽株式会社 | 碳纳米管集合体分散液的制造方法 |
| US20120024362A1 (en) * | 2011-05-31 | 2012-02-02 | Primestar Solar, Inc. | Refractive index matching of thin film layers for photovoltaic devices and methods of their manufacture |
| CN102200654A (zh) * | 2011-06-07 | 2011-09-28 | 南京福莱克斯光电科技有限公司 | 一体化触摸显示装置及其制作方法 |
| JP5813875B2 (ja) * | 2011-08-24 | 2015-11-17 | イノバ ダイナミックス, インコーポレイテッド | パターン化された透明導体および関連する製造方法 |
-
2014
- 2014-08-06 WO PCT/JP2014/004104 patent/WO2015037182A1/fr not_active Ceased
- 2014-08-06 KR KR1020167007142A patent/KR102214745B1/ko active Active
- 2014-08-06 CN CN201480049430.0A patent/CN105556618B/zh active Active
- 2014-08-06 JP JP2015536433A patent/JP6106756B2/ja active Active
- 2014-08-28 TW TW103129699A patent/TWI635515B/zh active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61205925A (ja) * | 1985-03-08 | 1986-09-12 | Fujitsu Ltd | 透明電極の処理方法 |
| JP2008242314A (ja) * | 2007-03-28 | 2008-10-09 | Fujifilm Corp | 光学フィルム、偏光板及び画像表示装置 |
| CN102017012A (zh) * | 2008-03-14 | 2011-04-13 | Nano-C公司 | 用于透明导电用途的碳纳米管-透明导电无机纳米颗粒混杂薄膜 |
| TW201318863A (zh) * | 2011-08-11 | 2013-05-16 | Toray Industries | 積層體、透明導電性積層體、觸控面板、及積層體之製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JP6106756B2 (ja) | 2017-04-05 |
| TW201523640A (zh) | 2015-06-16 |
| KR102214745B1 (ko) | 2021-02-09 |
| CN105556618B (zh) | 2018-04-03 |
| CN105556618A (zh) | 2016-05-04 |
| KR20160053941A (ko) | 2016-05-13 |
| JPWO2015037182A1 (ja) | 2017-03-02 |
| WO2015037182A1 (fr) | 2015-03-19 |
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