TWI620651B - Embossing tool and method for preparation thereof - Google Patents
Embossing tool and method for preparation thereof Download PDFInfo
- Publication number
- TWI620651B TWI620651B TW105127782A TW105127782A TWI620651B TW I620651 B TWI620651 B TW I620651B TW 105127782 A TW105127782 A TW 105127782A TW 105127782 A TW105127782 A TW 105127782A TW I620651 B TWI620651 B TW I620651B
- Authority
- TW
- Taiwan
- Prior art keywords
- base metal
- gold alloy
- embossing tool
- layer
- gold
- Prior art date
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- 238000004049 embossing Methods 0.000 title claims abstract description 95
- 238000000034 method Methods 0.000 title claims description 43
- 238000002360 preparation method Methods 0.000 title description 2
- 239000000956 alloy Substances 0.000 claims abstract description 38
- 229910045601 alloy Inorganic materials 0.000 claims abstract description 37
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims abstract description 29
- 229910052737 gold Inorganic materials 0.000 claims abstract description 29
- 239000010931 gold Substances 0.000 claims abstract description 29
- 239000010953 base metal Substances 0.000 claims abstract description 18
- 238000000151 deposition Methods 0.000 claims abstract description 6
- 239000000463 material Substances 0.000 claims description 75
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 52
- 229910052759 nickel Inorganic materials 0.000 claims description 26
- 238000000576 coating method Methods 0.000 claims description 25
- 239000011248 coating agent Substances 0.000 claims description 24
- 229910000510 noble metal Inorganic materials 0.000 claims description 17
- 239000000758 substrate Substances 0.000 claims description 16
- 229920002120 photoresistant polymer Polymers 0.000 claims description 13
- 239000010970 precious metal Substances 0.000 claims description 11
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 9
- 229910052802 copper Inorganic materials 0.000 claims description 9
- 239000010949 copper Substances 0.000 claims description 9
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 8
- 229910017052 cobalt Inorganic materials 0.000 claims description 8
- 239000010941 cobalt Substances 0.000 claims description 8
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 claims description 8
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 claims description 7
- 229910052725 zinc Inorganic materials 0.000 claims description 7
- 239000011701 zinc Substances 0.000 claims description 7
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims description 5
- 229910052804 chromium Inorganic materials 0.000 claims description 5
- 239000011651 chromium Substances 0.000 claims description 5
- 230000005855 radiation Effects 0.000 claims description 5
- 229910052742 iron Inorganic materials 0.000 claims description 4
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 3
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims description 3
- 229910052738 indium Inorganic materials 0.000 claims description 3
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 claims description 3
- 229910052750 molybdenum Inorganic materials 0.000 claims description 3
- 239000011733 molybdenum Substances 0.000 claims description 3
- 229910052718 tin Inorganic materials 0.000 claims description 3
- 239000011135 tin Substances 0.000 claims description 3
- 229910001020 Au alloy Inorganic materials 0.000 claims 13
- 239000003353 gold alloy Substances 0.000 claims 13
- 239000010410 layer Substances 0.000 description 53
- 229910052751 metal Inorganic materials 0.000 description 17
- 239000002184 metal Substances 0.000 description 17
- 239000000203 mixture Substances 0.000 description 14
- 238000007747 plating Methods 0.000 description 13
- 229920000642 polymer Polymers 0.000 description 11
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 9
- 229910000077 silane Inorganic materials 0.000 description 9
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 7
- 239000004810 polytetrafluoroethylene Substances 0.000 description 7
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 6
- 239000003792 electrolyte Substances 0.000 description 6
- -1 polytetrafluoroethylene Polymers 0.000 description 6
- 238000009713 electroplating Methods 0.000 description 5
- 150000002739 metals Chemical class 0.000 description 5
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 4
- 150000001252 acrylic acid derivatives Chemical class 0.000 description 4
- 239000012530 fluid Substances 0.000 description 4
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 4
- 229920000139 polyethylene terephthalate Polymers 0.000 description 4
- 239000005020 polyethylene terephthalate Substances 0.000 description 4
- 239000002861 polymer material Substances 0.000 description 4
- 239000000243 solution Substances 0.000 description 4
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 description 3
- XFXPMWWXUTWYJX-UHFFFAOYSA-N Cyanide Chemical compound N#[C-] XFXPMWWXUTWYJX-UHFFFAOYSA-N 0.000 description 3
- 238000005229 chemical vapour deposition Methods 0.000 description 3
- 239000002131 composite material Substances 0.000 description 3
- 238000007796 conventional method Methods 0.000 description 3
- 238000011161 development Methods 0.000 description 3
- 239000004205 dimethyl polysiloxane Substances 0.000 description 3
- 238000001035 drying Methods 0.000 description 3
- 230000002209 hydrophobic effect Effects 0.000 description 3
- 238000005240 physical vapour deposition Methods 0.000 description 3
- 238000005498 polishing Methods 0.000 description 3
- 229920000435 poly(dimethylsiloxane) Polymers 0.000 description 3
- 229910052709 silver Inorganic materials 0.000 description 3
- 239000004332 silver Substances 0.000 description 3
- 239000010935 stainless steel Substances 0.000 description 3
- 229910001220 stainless steel Inorganic materials 0.000 description 3
- 239000004372 Polyvinyl alcohol Substances 0.000 description 2
- 239000007864 aqueous solution Substances 0.000 description 2
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 238000003618 dip coating Methods 0.000 description 2
- KPUWHANPEXNPJT-UHFFFAOYSA-N disiloxane Chemical class [SiH3]O[SiH3] KPUWHANPEXNPJT-UHFFFAOYSA-N 0.000 description 2
- 230000009977 dual effect Effects 0.000 description 2
- 238000007772 electroless plating Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 150000002734 metacrylic acid derivatives Chemical class 0.000 description 2
- 239000003960 organic solvent Substances 0.000 description 2
- 229910052763 palladium Inorganic materials 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- 229920001483 poly(ethyl methacrylate) polymer Polymers 0.000 description 2
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 2
- 239000004417 polycarbonate Substances 0.000 description 2
- 229920000728 polyester Polymers 0.000 description 2
- 239000004926 polymethyl methacrylate Substances 0.000 description 2
- 229920002451 polyvinyl alcohol Polymers 0.000 description 2
- 239000002243 precursor Substances 0.000 description 2
- BDERNNFJNOPAEC-UHFFFAOYSA-N propan-1-ol Chemical compound CCCO BDERNNFJNOPAEC-UHFFFAOYSA-N 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 238000005507 spraying Methods 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 229920001187 thermosetting polymer Polymers 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- PJAKWOZHTFWTNF-UHFFFAOYSA-N (2-nonylphenyl) prop-2-enoate Chemical class CCCCCCCCCC1=CC=CC=C1OC(=O)C=C PJAKWOZHTFWTNF-UHFFFAOYSA-N 0.000 description 1
- NGNBDVOYPDDBFK-UHFFFAOYSA-N 2-[2,4-di(pentan-2-yl)phenoxy]acetyl chloride Chemical compound CCCC(C)C1=CC=C(OCC(Cl)=O)C(C(C)CCC)=C1 NGNBDVOYPDDBFK-UHFFFAOYSA-N 0.000 description 1
- GTELLNMUWNJXMQ-UHFFFAOYSA-N 2-ethyl-2-(hydroxymethyl)propane-1,3-diol;prop-2-enoic acid Chemical class OC(=O)C=C.OC(=O)C=C.OC(=O)C=C.CCC(CO)(CO)CO GTELLNMUWNJXMQ-UHFFFAOYSA-N 0.000 description 1
- ZCYVEMRRCGMTRW-UHFFFAOYSA-N 7553-56-2 Chemical compound [I] ZCYVEMRRCGMTRW-UHFFFAOYSA-N 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 description 1
- 229910000851 Alloy steel Inorganic materials 0.000 description 1
- WKBOTKDWSSQWDR-UHFFFAOYSA-N Bromine atom Chemical compound [Br] WKBOTKDWSSQWDR-UHFFFAOYSA-N 0.000 description 1
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 description 1
- 229910000846 In alloy Inorganic materials 0.000 description 1
- 239000004952 Polyamide Substances 0.000 description 1
- 239000004793 Polystyrene Substances 0.000 description 1
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 229920002125 Sokalan® Polymers 0.000 description 1
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- QYKIQEUNHZKYBP-UHFFFAOYSA-N Vinyl ether Chemical class C=COC=C QYKIQEUNHZKYBP-UHFFFAOYSA-N 0.000 description 1
- KNSXNCFKSZZHEA-UHFFFAOYSA-N [3-prop-2-enoyloxy-2,2-bis(prop-2-enoyloxymethyl)propyl] prop-2-enoate Chemical class C=CC(=O)OCC(COC(=O)C=C)(COC(=O)C=C)COC(=O)C=C KNSXNCFKSZZHEA-UHFFFAOYSA-N 0.000 description 1
- MUBKMWFYVHYZAI-UHFFFAOYSA-N [Al].[Cu].[Zn] Chemical compound [Al].[Cu].[Zn] MUBKMWFYVHYZAI-UHFFFAOYSA-N 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 239000003929 acidic solution Substances 0.000 description 1
- 125000003545 alkoxy group Chemical group 0.000 description 1
- 125000000217 alkyl group Chemical group 0.000 description 1
- GDTBXPJZTBHREO-UHFFFAOYSA-N bromine Substances BrBr GDTBXPJZTBHREO-UHFFFAOYSA-N 0.000 description 1
- 229910052794 bromium Inorganic materials 0.000 description 1
- 238000005234 chemical deposition Methods 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- 239000000460 chlorine Substances 0.000 description 1
- 239000011247 coating layer Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 229920001577 copolymer Polymers 0.000 description 1
- 125000004093 cyano group Chemical group *C#N 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 150000002118 epoxides Chemical class 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 230000004927 fusion Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000009477 glass transition Effects 0.000 description 1
- 239000004519 grease Substances 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 1
- 239000004615 ingredient Substances 0.000 description 1
- 229910052740 iodine Inorganic materials 0.000 description 1
- 239000011630 iodine Substances 0.000 description 1
- 229910052741 iridium Inorganic materials 0.000 description 1
- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 description 1
- 239000002075 main ingredient Substances 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 125000000449 nitro group Chemical group [O-][N+](*)=O 0.000 description 1
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 description 1
- 239000012811 non-conductive material Substances 0.000 description 1
- 229910052762 osmium Inorganic materials 0.000 description 1
- SYQBFIAQOQZEGI-UHFFFAOYSA-N osmium atom Chemical compound [Os] SYQBFIAQOQZEGI-UHFFFAOYSA-N 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 229920006112 polar polymer Polymers 0.000 description 1
- 229920002037 poly(vinyl butyral) polymer Polymers 0.000 description 1
- 229920000058 polyacrylate Polymers 0.000 description 1
- 239000004584 polyacrylic acid Substances 0.000 description 1
- 229920002647 polyamide Polymers 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 229920002338 polyhydroxyethylmethacrylate Polymers 0.000 description 1
- 229920000098 polyolefin Polymers 0.000 description 1
- 229920002635 polyurethane Polymers 0.000 description 1
- 239000004814 polyurethane Substances 0.000 description 1
- 239000004800 polyvinyl chloride Substances 0.000 description 1
- 238000012805 post-processing Methods 0.000 description 1
- 229910000923 precious metal alloy Inorganic materials 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 229910052703 rhodium Inorganic materials 0.000 description 1
- 239000010948 rhodium Substances 0.000 description 1
- MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 description 1
- 229910052707 ruthenium Inorganic materials 0.000 description 1
- 238000007764 slot die coating Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 239000011877 solvent mixture Substances 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 229910052717 sulfur Inorganic materials 0.000 description 1
- 239000011593 sulfur Substances 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
- 229920001169 thermoplastic Polymers 0.000 description 1
- 239000012815 thermoplastic material Substances 0.000 description 1
- 239000004416 thermosoftening plastic Substances 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
- B29C59/02—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing
- B29C59/04—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing using rollers or endless belts
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C33/00—Moulds or cores; Details thereof or accessories therefor
- B29C33/38—Moulds or cores; Details thereof or accessories therefor characterised by the material or the manufacturing process
- B29C33/40—Plastics, e.g. foam or rubber
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C33/00—Moulds or cores; Details thereof or accessories therefor
- B29C33/42—Moulds or cores; Details thereof or accessories therefor characterised by the shape of the moulding surface, e.g. ribs or grooves
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/02—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings only including layers of metallic material
- C23C28/021—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings only including layers of metallic material including at least one metal alloy layer
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Moulds For Moulding Plastics Or The Like (AREA)
- Electroplating Methods And Accessories (AREA)
Abstract
一種藉由以下製備的壓花工具:形成具有限定所述壓花工具的外形的非平面模具表面的模具;在所述模具表面上沉積金或其合金層;在所述金或其合金層上沉積卑金屬,以形成具有遠離所述模具表面的基本上平整的表面的卑金屬層;和從所述金或其合金層和所述卑金屬層移除所述模具,以形成一側具有三維結構而另一側具有基本上平整的表面的壓花工具。 An embossing tool prepared by: forming a mold having a non-planar mold surface defining an outer shape of the embossing tool; depositing gold or an alloy layer thereof on the mold surface; on the gold or alloy layer thereof Depositing base metal to form a base metal layer having a substantially flat surface away from the mold surface; and removing the die from the gold or its alloy layer and the base metal layer to form a three-dimensional surface An embossing tool with a structure that has a substantially flat surface on the other side.
Description
本發明係關於一種壓花(embossing)工具,一種用於製備這種壓花工具的組合件(assembly),和一種用於製備這種壓花工具的方法。 The present invention relates to an embossing tool, an assembly for preparing such an embossing tool, and a method for preparing such an embossing tool.
壓花工具通常由鎳、銅、合金或其他類型的複合材料製成。鎳是最廣泛使用的用於壓花機製造的材料。 Embossing tools are usually made of nickel, copper, alloys or other types of composite materials. Nickel is the most widely used material for embossing machine manufacture.
存在一些與當前可得的壓花工具有關的問題,尤其是壓花後固化的材料或熱壓花的材料從壓花工具的釋放不完全。 There are some problems associated with the currently available embossing tools, especially the incomplete release of embossed or cured materials from embossing tools.
有許多用於使壓花工具的表面改性以降低壓花工具的表面與固化的或熱壓花的材料之間的黏著性的方法。這些方法可包括矽烷塗布、矽氧烷樹脂塗布、PTFE(聚四氟乙烯)塗布或鎳-PTFE複合鍍敷。不幸的是,它們全部都不能得到令人滿意的結果。 There are many methods for modifying the surface of an embossing tool to reduce the adhesion between the surface of the embossing tool and a cured or heat embossed material. These methods may include silane coating, siloxane resin coating, PTFE (polytetrafluoroethylene) coating, or nickel-PTFE composite plating. Unfortunately, none of them gives satisfactory results.
可經由濕塗將矽氧烷樹脂和PTFE施加到壓花工具的表面。然而,在乾燥和固化後,在微結構表面上的塗層的厚度均勻性差,這可能改變在壓花工具上得到的微結構的形狀。 Siloxane resin and PTFE can be applied to the surface of the embossing tool via wet coating. However, after drying and curing, the thickness uniformity of the coating on the surface of the microstructure is poor, which may change the shape of the microstructure obtained on the embossing tool.
當壓花工具的表面上的微結構具有高的深寬比(aspect ratio)時,經由物理氣相沉積(PVD)或化學氣相沉積(CVD)的PTFE塗層已經表現出分散能力(throwing power)差,還表現出覆蓋不均勻。此外,PTFE塗層的耐久性和機械強度差是另外的顧慮,尤其是如果壓花工具需要廣泛地用於大量生產時。 When the microstructure on the surface of the embossing tool has a high aspect ratio, the PTFE coating via physical vapor deposition (PVD) or chemical vapor deposition (CVD) has already exhibited a throwing power ) Poor, and also showed uneven coverage. In addition, poor durability and mechanical strength of the PTFE coating are additional concerns, especially if the embossing tool needs to be widely used for mass production.
可藉由電鍍或無電鍍(electro-less plating)方法將鎳-PTFE複合塗層施加到壓花工具的表面。然而,最小的塗層厚度通常是幾微米。因此,如果壓花工具在其表面上具有小尺寸的微結構,尤其是窄槽,那麼這種塗層可能徹底改變微結構的輪廓和深寬比,使得壓花工作困難得多。 The nickel-PTFE composite coating can be applied to the surface of the embossing tool by electroplating or electro-less plating. However, the minimum coating thickness is usually a few microns. Therefore, if the embossing tool has small-sized microstructures on its surface, especially narrow grooves, this coating may completely change the microstructure's contour and aspect ratio, making the embossing work much more difficult.
公開的第2016/0059442號美國專利申請和第104129779號臺灣申請描述了一種在其表面上具有微結構的壓花工具,使得用貴金屬或貴金屬合金塗布微結構的表面。該工具是藉由首先使用傳統光刻技術形成微結構,然後用貴金屬或貴金屬合金塗布這些微結構而製備。本發明係關於用於形成壓花工具的該方法的變型,和關於在該方法的過程中製備的結構。 Published U.S. Patent Application No. 2016/0059442 and Taiwan Application No. 104129779 describe an embossing tool having a microstructure on its surface such that the surface of the microstructure is coated with a precious metal or precious metal alloy. The tool is prepared by first forming microstructures using conventional photolithographic techniques and then coating these microstructures with a noble metal or noble metal alloy. The invention relates to a variant of the method for forming an embossing tool, and to a structure prepared during the method.
因此,本發明提供了一種用於製備壓花工具的方法,所述方法包括:a)形成具有限定所述壓花工具的外形的非平面模具表面的模具;b)在所述模具表面上塗布金或其合金層; c)在所述金或其合金層上鍍敷卑金屬(base metal),以形成具有遠離所述模具表面的基本上平整的表面的卑金屬層;和d)從所述金或其合金層和所述卑金屬層移除所述模具,以形成一側具有三維結構而另一側具有基本上平整的表面的壓花工具。在一個實施方式中,隨後將步驟d)中製備的所述壓花工具包裹在滾筒上。所述模具可以藉由以下形成:在基材上塗布光阻材料,將所述光阻材料暴露於輻射,和移除所述光阻的曝光的區域或未曝光的區域。 Therefore, the present invention provides a method for preparing an embossing tool, the method comprising: a) forming a mold having a non-planar mold surface that defines the outer shape of the embossing tool; b) coating on the mold surface Gold or its alloy layer; c) plating a base metal on said gold or its alloy layer to form a base metal layer having a substantially flat surface away from the mold surface; and d) from said gold or its alloy layer And the base metal layer to remove the mold to form an embossing tool having a three-dimensional structure on one side and a substantially flat surface on the other side. In one embodiment, the embossing tool prepared in step d) is subsequently wrapped on a drum. The mold may be formed by coating a photoresist material on a substrate, exposing the photoresist material to radiation, and removing exposed or unexposed areas of the photoresist.
本發明還提供了一種用於製備壓花工具的組合件,所述組合件包括:具有非平面模具表面的模具;設置在所述模具表面上並且貼合所述模具表面的金或其合金層;和遠離所述模具表面而在所述金或其合金層的相對側上的卑金屬層,所述卑金屬層具有與所述金或其合金層接觸的三維結構,和在其遠離所述金或其合金層的一側上的基本上平整的表面。 The present invention also provides an assembly for preparing an embossing tool, the assembly comprising: a mold having a non-planar mold surface; and a gold or alloy layer disposed on the mold surface and conforming to the mold surface And a base metal layer on the opposite side of the gold or its alloy layer away from the mold surface, the base metal layer having a three-dimensional structure in contact with the gold or its alloy layer, and away from the A substantially flat surface on one side of a layer of gold or its alloy.
11‧‧‧壓花工具 11‧‧‧ Embossing tools
12‧‧‧可固化壓花組成物或可熱壓花材料 12‧‧‧ Curable embossing composition or heat embossing material
21‧‧‧壓花滾筒或套筒 21‧‧‧Embossed roller or sleeve
22‧‧‧感光材料、乾膜光阻 22‧‧‧Photosensitive material, dry film photoresist
23‧‧‧光源 23‧‧‧light source
24‧‧‧光罩 24‧‧‧Mask
25‧‧‧圖案化感光材料 25‧‧‧ patterned photosensitive material
26‧‧‧鍍敷材料、沉積物 26‧‧‧Plating materials, deposits
31‧‧‧貴金屬或其合金 31‧‧‧Precious metals or their alloys
41‧‧‧基材層或基材 41‧‧‧ substrate layer or substrate
42‧‧‧感光材料 42‧‧‧Photosensitive material
43‧‧‧導電種晶層 43‧‧‧Conductive seed layer
44‧‧‧金屬或合金、鍍敷的材料、金屬片 44‧‧‧ Metal or alloy, plated material, metal sheet
51‧‧‧基材 51‧‧‧ substrate
52‧‧‧感光材料 52‧‧‧Photosensitive materials
53‧‧‧金或其合金層、金或合金塗層 53‧‧‧Gold or its alloy layer, gold or alloy coating
54‧‧‧鍍敷的材料、金屬片 54‧‧‧Plating material, metal sheet
圖1A和圖1B示出了一般的壓花方法。 1A and 1B illustrate a general embossing method.
圖2示出了用於在壓花工具的表面上形成微結構的習知技術的方法。 Figure 2 illustrates a method of a conventional technique for forming microstructures on the surface of an embossing tool.
圖3是貫穿如前文提到的US 2016/0059442中描述的習知技術的壓花工具的橫截面,所述壓花工具具有三維微結構和鍍敷於其表面上的貴金屬(例如金)。 Fig. 3 is a cross section through an embossing tool of the conventional technique described in the aforementioned US 2016/0059442, said embossing tool having a three-dimensional microstructure and a precious metal (e.g. gold) plated on its surface.
圖4示出了前文提到的US 2016/0059442中描述的用於形成壓花工具的方法。 Figure 4 shows the method for forming an embossing tool described in the aforementioned US 2016/0059442.
圖5示出了本發明的用於形成壓花工具的方法。 Fig. 5 shows a method for forming an embossing tool according to the present invention.
圖6A是顯示由使用傳統壓花工具的壓花製程製造的物體的表面的照片。 FIG. 6A is a photograph showing the surface of an object manufactured by an embossing process using a conventional embossing tool.
圖6B是顯示由使用本發明的壓花工具的壓花製程製造的物體的表面的照片。 FIG. 6B is a photograph showing the surface of an object manufactured by the embossing process using the embossing tool of the present invention.
圖1A和圖1B示出了使用壓花工具(11)的壓花製程,在壓花工具(11)表面上有三維微結構(被圈出的)。如圖1B中所示,在將壓花工具(11)施加到可固化壓花組成物或可熱壓花材料(12),並且所述壓花組成物固化(例如通過輻射)或可熱壓花材料藉由熱和壓力變得有壓花之後,將固化的或熱壓花的材料從壓花工具釋放(見圖1B)。然而,使用傳統壓花工具時,由於固化的或熱壓花的材料與壓花工具的表面之間的不希望的強黏著性,固化的或熱壓花的材料有時不能從工具完全釋放。在這種情況下,可能有一些固化的或熱壓花的材料被轉移至壓花工具的表面或黏在壓花工具的表面上,在由該方法形成的物體上留下不均勻的表面。 Figures 1A and 1B show an embossing process using an embossing tool (11) with a three-dimensional microstructure (circled) on the surface of the embossing tool (11). As shown in FIG. 1B, the embossing tool (11) is applied to a curable embossing composition or a heat embossable material (12), and the embossing composition is cured (e.g., by radiation) or heat embossable After the embossing material becomes embossed by heat and pressure, the cured or heat embossed material is released from the embossing tool (see Figure 1B). However, when using conventional embossing tools, the cured or hot embossed material sometimes cannot be completely released from the tool due to the undesirably strong adhesion between the cured or hot embossed material and the surface of the embossed tool. In this case, there may be some cured or hot embossed material that is transferred to the surface of the embossing tool or stuck to the surface of the embossing tool, leaving an uneven surface on the object formed by this method.
如果該物體形成於諸如透明導電層或聚合物層的支撐層上,則該問題甚至更明顯。如果固化的或熱壓花的材料與支撐層之間的黏著性比固化的或熱壓花的材料與壓花工具的表面之間的黏著性更弱,那麼固化 的或熱壓花的材料從壓花工具釋放的過程就可能導致物體從支撐層分離。 This problem is even more pronounced if the object is formed on a support layer such as a transparent conductive layer or a polymer layer. If the adhesion between the cured or heat embossed material and the support layer is weaker than the adhesion between the cured or heat embossed material and the surface of the embossing tool, then cure The release of hot or embossed material from the embossing tool may cause the object to separate from the support layer.
在一些情況下,物體可形成於堆疊層上,而在這種情況下,如果任何兩個相鄰的層之間的黏著性比固化的或熱壓花的材料與壓花工具的表面之間的黏著性更弱,那麼固化的或熱壓花的材料從壓花工具釋放的過程就可以導致這兩個層之間的分裂。 In some cases, objects may be formed on stacked layers, and in this case, if the adhesion between any two adjacent layers is greater than The adhesion is weaker, so the process of releasing the cured or hot embossed material from the embossing tool can cause splitting between the two layers.
當固化的壓花組成物或熱壓花的材料不能很好地黏附至某些支撐層時,上文描述的這些問題尤其會被顧慮。例如,如果支撐層是聚合物層,則在它們中的一個是親水的而另一個是疏水的情況下,聚合物層與固化的或熱壓花的壓花組成物之間的黏著性弱。因此,優選的是,壓花組成物和支撐層兩者都是疏水的,或者兩者都是親水的。 These issues described above are particularly a concern when the cured embossed composition or heat embossed material does not adhere well to certain support layers. For example, if the support layer is a polymer layer, in the case where one of them is hydrophilic and the other is hydrophobic, the adhesion between the polymer layer and the cured or heat-embossed embossed composition is weak. Therefore, it is preferred that both the embossed composition and the support layer are hydrophobic, or both are hydrophilic.
作為實例,用於形成壓花層或支撐層的合適的疏水組成物可以包括熱塑性材料、熱固性材料或其前驅物。熱塑性材料或熱固性材料前驅物的實例可以是多官能丙烯酸酯或甲基丙烯酸酯、多官能乙烯基醚、多官能環氧化物和其寡聚物或聚合物。 As an example, a suitable hydrophobic composition for forming an embossed layer or a support layer may include a thermoplastic material, a thermosetting material, or a precursor thereof. Examples of the thermoplastic or thermosetting material precursors may be polyfunctional acrylates or methacrylates, polyfunctional vinyl ethers, polyfunctional epoxides, and oligomers or polymers thereof.
用於形成壓花層或支撐層的合適的親水性組成物可以包括極性寡聚物或聚合物材料。如在第7,880,958號美國專利中所描述的,這樣的極性寡聚物或聚合物材料可以選自由以下組成的群組:具有至少一個諸如硝基(-NO2)、羥基(-OH)、羧基(-COO)、烷氧基(-OR,其中R是烷基)、鹵素(例如氟、氯、溴或碘)、氰基(-CN) 和磺酸基(sultanate)(-SO3)等的基團的寡聚物或聚合物。極性聚合物材料的玻璃化轉變溫度優選在約100℃以下,且更優選在約60℃以下。合適的極性寡聚物或聚合物材料的具體實例可包括但不限於,聚乙烯醇、聚丙烯酸、聚(甲基丙烯酸2-羥基乙酯)、多羥基官能化的聚酯丙烯酸酯(諸如BOE 1025,Bomar Specialties Co,Winsted,CT)或烷氧基化丙烯酸酯,諸如乙氧基化壬基苯酚丙烯酸酯(例如,SR504,Sartomer Company),乙氧基化三羥甲基丙烷三丙烯酸酯(例如,SR9035,Sartomer Company)或乙氧基化季戊四醇四丙烯酸酯(例如,來自Sartomer Company的SR494)。 A suitable hydrophilic composition for forming the embossed layer or support layer may include a polar oligomer or a polymer material. As described in US Patent No. 7,880,958, such a polar oligomer or polymer material may be selected from the group consisting of having at least one such as a nitro (-NO 2 ), a hydroxyl (-OH), a carboxyl group (-COO), alkoxy (-OR, where R is alkyl), halogen (e.g. fluorine, chlorine, bromine or iodine), cyano (-CN), and sultanate (-SO 3 ), etc. Group of oligomers or polymers. The glass transition temperature of the polar polymer material is preferably about 100 ° C or lower, and more preferably about 60 ° C or lower. Specific examples of suitable polar oligomers or polymer materials may include, but are not limited to, polyvinyl alcohol, polyacrylic acid, poly (2-hydroxyethyl methacrylate), polyhydroxy-functional polyester acrylates such as BOE 1025, Bomar Specialties Co, Winsted, CT) or alkoxylated acrylates such as ethoxylated nonylphenol acrylate (eg, SR504, Sartomer Company), ethoxylated trimethylolpropane triacrylate ( For example, SR9035, Sartomer Company) or ethoxylated pentaerythritol tetraacrylate (eg, SR494 from Sartomer Company).
方法1:method 1:
圖2示出了一種用於在壓花工具的表面上形成微結構的習知技術的方法。 Figure 2 illustrates a method of a conventional technique for forming microstructures on the surface of an embossing tool.
本文使用的術語“壓花工具”可以是壓花套筒(embossing sleeve)、壓花滾筒(embossing drum)或其他形式的壓花工具。雖然僅有壓花套筒的製備示於圖2中,但該方法也可以用於製備壓花滾筒。術語“壓花”滾筒或套筒指的是在其外表面上具有三維微結構的滾筒或套筒。使用術語“壓花滾筒”,以將其與在外表面上不具有三維微結構的平滑滾筒(plain drum)區別開。 The term "embossing tool" as used herein may be an embossing sleeve, an embossing drum, or other form of embossing tool. Although only the preparation of the embossing sleeve is shown in Fig. 2, this method can also be used to prepare an embossing cylinder. The term "embossed" drum or sleeve refers to a drum or sleeve having a three-dimensional microstructure on its outer surface. The term "embossing drum" is used to distinguish it from a plain drum that does not have a three-dimensional microstructure on the outer surface.
可以直接將壓花滾筒用作壓花工具。當將壓花套筒用於壓花時,通常將其安裝在平滑滾筒上,以允許壓花套筒轉動。 The embossing cylinder can be used directly as an embossing tool. When an embossing sleeve is used for embossing, it is usually mounted on a smooth drum to allow the embossing sleeve to rotate.
壓花滾筒或套筒(21)通常是由導電材料形成的,所述導電材料如金屬(例如鋁、銅、鋅、鎳、鉻、鐵、鈦或鈷等)、由上述金屬中的任何金屬得到的合金、或不銹鋼。可以使用不同的材料形成滾筒或套筒。例如,滾筒或套筒的中心可以由不銹鋼形成,並且將鎳層夾在不銹鋼和最外層之間,最外層可以是銅層。 The embossing roller or sleeve (21) is generally formed of a conductive material such as a metal (e.g., aluminum, copper, zinc, nickel, chromium, iron, titanium, or cobalt, etc.), or any of the foregoing metals The obtained alloy, or stainless steel. Different materials can be used to form the drum or sleeve. For example, the center of the drum or sleeve may be formed of stainless steel with a nickel layer sandwiched between the stainless steel and the outermost layer, and the outermost layer may be a copper layer.
供選擇地所述壓花滾筒或套筒(21)可由其外表面上具有導電塗層或導電種晶層(seed layer)的非導電材料形成。 Alternatively, the embossing roller or sleeve (21) may be formed of a non-conductive material having a conductive coating or a conductive seed layer on an outer surface thereof.
在滾筒或套筒(21)的外表面上塗布感光材料(22)之前,如圖2的步驟B中所示,可使用精密研磨和拋光以確保滾筒或套筒的外表面的光滑度。 Before coating the photosensitive material (22) on the outer surface of the drum or sleeve (21), as shown in step B of FIG. 2, precision grinding and polishing can be used to ensure the smoothness of the outer surface of the drum or sleeve.
在步驟B中,將感光材料(22),例如光阻,塗布在滾筒或套筒(21)的外表面上。感光材料可以是正型(positive tone)、負型(negative tone)或雙重型(dual tone)。感光材料也可以是化學增幅型光阻(chemically amplified photoresist)。可以使用浸塗、噴塗或環塗(ring coating)進行塗布。在乾燥和/或烘烤後,感光材料經歷暴露於輻射源,如步驟C中所示。 In step B, a photosensitive material (22), such as a photoresist, is coated on the outer surface of a roller or sleeve (21). The photosensitive material may be a positive tone, a negative tone, or a dual tone. The photosensitive material may be a chemically amplified photoresist. Coating can be performed using dip coating, spray coating, or ring coating. After drying and / or baking, the photosensitive material undergoes exposure to a radiation source, as shown in step C.
供選擇地,感光材料(22)可以是乾膜光阻(其通常是有市售的),其被層壓到滾筒或套筒(21)的外表面上。當使用乾膜時,也可將其暴露於如下文所描述的輻射源。 Alternatively, the photosensitive material (22) may be a dry film photoresist (which is usually commercially available), which is laminated to the outer surface of the drum or sleeve (21). When a dry film is used, it can also be exposed to a radiation source as described below.
在步驟C中,使用合適的光源(23),例如IR、UV、電子束或鐳射,以對塗布於滾筒或套筒(21)上 的感光材料或層壓於滾筒或套筒(21)上的乾膜光阻(22)進行曝光。光源可以是連續光或者脈衝光。任選地使用光罩(24)以限定待形成的三維微結構。根據微結構,曝光可以是步進式、連續式或其組合。 In step C, a suitable light source (23) such as IR, UV, electron beam or laser is used to coat the roller or sleeve (21). Light-sensitive material or dry film photoresist (22) laminated on a roller or sleeve (21) for exposure. The light source may be continuous light or pulsed light. A photomask (24) is optionally used to define the three-dimensional microstructure to be formed. Depending on the microstructure, the exposure can be stepwise, continuous, or a combination thereof.
曝光之後顯影之前,感光材料(22)可經歷曝光後處理,例如烘烤。根據感光材料的類型,藉由使用顯影劑來移除曝光的區域或未曝光的區域。顯影之後沉積(例如電鍍、無電鍍、物理氣相沉積、化學氣相沉積或濺射沉積)之前,在其外表面上具有圖案化感光材料(25)的滾筒或套筒(如步驟D中所示)可經歷烘烤或全面曝光。圖案化感光材料的厚度優選大於待形成的三維微結構的深度或高度。 Prior to development after exposure, the photosensitive material (22) may undergo post-exposure processing, such as baking. Depending on the type of photosensitive material, exposed areas or unexposed areas are removed by using a developer. A roller or sleeve having a patterned photosensitive material (25) on its outer surface (as described in step D) before development (e.g., electroplating, electroless plating, physical vapor deposition, chemical vapor deposition or sputtering deposition) (Shown) can undergo baking or full exposure. The thickness of the patterned photosensitive material is preferably greater than the depth or height of the three-dimensional microstructure to be formed.
可以將金屬或合金(例如,鎳、鈷、鉻、銅、鋅或由上述金屬中的任何金屬得到的合金)電鍍和/或無電鍍於滾筒或套筒上。將鍍敷材料(26)沉積在滾筒或套筒的外表面上未被圖案化感光材料覆蓋的區域中。沉積厚度優選小於感光材料的厚度,如步驟E中所示。藉由調節鍍敷條件,例如陽極與陰極(即滾筒或套筒)之間的距離(如果使用電鍍),滾筒或套筒的轉動速度和/或鍍敷溶液的循環,可將沉積物在整個滾筒或套筒區域上的厚度變化控制為小於1%。 Metals or alloys (for example, nickel, cobalt, chromium, copper, zinc, or alloys derived from any of the above metals) can be electroplated and / or electrolessly plated on a drum or sleeve. A plating material (26) is deposited in an area on the outer surface of the drum or sleeve that is not covered by the patterned photosensitive material. The deposition thickness is preferably smaller than the thickness of the photosensitive material, as shown in step E. By adjusting the plating conditions, such as the distance between the anode and the cathode (i.e. drum or sleeve) (if electroplating is used), the speed of rotation of the drum or sleeve and / or the circulation of the plating solution, The thickness variation on the drum or sleeve area is controlled to less than 1%.
供選擇地,在使用電鍍以沉積鍍敷材料(26)的情況下,藉由在陰極(即滾筒或套筒)與陽極之間插入非導電厚度均勻器(thickness uniformer),可以控制沉積物在滾筒或套筒的整個表面上的厚度變化,如第8,114,262號美國專利中所描述的。 Alternatively, in the case of using electroplating to deposit the plating material (26), by inserting a non-conductive thickness uniformer between the cathode (i.e., the drum or the sleeve) and the anode, the deposit can be controlled at The thickness of the roller or sleeve over the entire surface is as described in US Patent No. 8,114,262.
在鍍敷後,可藉由剝離劑(例如有機溶劑或水溶液)剝離圖案化感光材料(25)。可以任選地採用精密拋光,以確保沉積物(26)在整個滾筒或套筒上的可接受的厚度變化和粗糙度。 After plating, the patterned photosensitive material (25) can be peeled by a release agent (such as an organic solvent or an aqueous solution). Precision polishing may optionally be employed to ensure acceptable thickness variation and roughness of the deposit (26) across the drum or sleeve.
圖2的步驟F示出了貫穿具有在其上形成的三維圖案微結構的壓花滾筒或套筒的橫截面。 Step F of FIG. 2 shows a cross section through an embossing cylinder or sleeve having a three-dimensional patterned microstructure formed thereon.
如上述US 2016/0059442中所述,已經發現,如果用貴金屬或其合金塗布壓花工具的表面,則壓花工具可以具有改善的釋放性能。換句話說,作為在壓花工具的表面上形成三維微結構之後的後處理步驟,可以將貴金屬或其合金(31)塗布於壓花工具的整個表面上,如圖3中所示。 As described in the aforementioned US 2016/0059442, it has been found that if the surface of an embossing tool is coated with a precious metal or an alloy thereof, the embossing tool may have improved release properties. In other words, as a post-processing step after the three-dimensional microstructure is formed on the surface of the embossing tool, a noble metal or its alloy (31) may be coated on the entire surface of the embossing tool, as shown in FIG. 3.
術語“貴金屬”可以包括金、銀、鉑、鈀和其他更不常見的金屬,諸如釕、銠、鋨或銥。在這些貴金屬中,本發明人已經發現金及其合金在降低固化的或熱壓花的材料與壓花工具的表面之間的黏附力方面是最有效的。當固化的或熱壓花的材料具有以下成分中的一種或多種時,該優點尤其明顯:聚丙烯酸酯、聚甲基丙烯酸甲酯(PMMA)、聚甲基丙烯酸乙酯(PEMA)、聚碳酸脂(PC)、聚氯乙烯(PVC)、聚苯乙烯(PS)、聚酯、聚醯胺、聚胺甲酸酯、聚烯烴、聚乙烯縮丁醛和其共聚物。在這些固化的或熱壓花的材料中,特別優選基於丙烯酸酯或甲基丙烯酸酯的聚合物。 The term "precious metal" may include gold, silver, platinum, palladium, and other less common metals, such as ruthenium, rhodium, osmium, or iridium. Among these precious metals, the present inventors have found that gold and its alloys are most effective in reducing the adhesion between the solidified or hot-embossed material and the surface of the embossing tool. This advantage is particularly evident when the cured or heat embossed material has one or more of the following ingredients: polyacrylate, polymethyl methacrylate (PMMA), polyethyl methacrylate (PEMA), polycarbonate Grease (PC), polyvinyl chloride (PVC), polystyrene (PS), polyester, polyamide, polyurethane, polyolefin, polyvinyl butyral, and copolymers thereof. Among these cured or heat-embossed materials, polymers based on acrylates or methacrylates are particularly preferred.
在本發明中,也可以使用一種或多種貴金屬和非貴金屬的合金。合金中合適的非貴金屬可以包括 但不限於,銅、錫、鈷、鎳、鐵、銦、鋅或鉬。在合金中,也可以存在多於一種的貴金屬和/或多於一種的非貴金屬。合金中非貴金屬的總重量百分比可以在0.001%-50%的範圍內,優選在0.001%-10%的範圍內。 In the present invention, alloys of one or more noble metals and non-noble metals can also be used. Suitable non-noble metals in the alloy may include Without limitation, copper, tin, cobalt, nickel, iron, indium, zinc, or molybdenum. In alloys, there may also be more than one noble metal and / or more than one non-noble metal. The total weight percentage of non-noble metals in the alloy may be in the range of 0.001% -50%, and preferably in the range of 0.001% -10%.
可以藉由電鍍、化學沉積、濺射塗膜或氣相沉積實現貴金屬或合金的塗布。在一個實施方式中,可以在30-70℃的溫度下和在3-8的pH範圍內使用基於氰化物的中性金、酸性硬金或金衝擊鍍電解質(gold strike plating electrolytes)。可以在40-70℃的溫度下和在0.1-3的pH範圍內用酸性氯化物電解質鍍敷鉑和鈀。一些貴金屬或其合金的鹼性電解質可商購得到,且也可用於本發明。 Coating of precious metals or alloys can be achieved by electroplating, chemical deposition, sputter coating, or vapor deposition. In one embodiment, cyanide-based neutral gold, acid hard gold, or gold strike plating electrolytes may be used at a temperature of 30-70 ° C and a pH range of 3-8. Platinum and palladium can be plated with acid chloride electrolytes at a temperature of 40-70 ° C and a pH range of 0.1-3. Alkaline electrolytes of some precious metals or their alloys are commercially available and can also be used in the present invention.
表面上的貴金屬或其合金優選具有次微米級厚度,因此其不導致對微結構的輪廓的任何顯著改變。貴金屬或其合金的厚度可以在0.001-10微米的範圍內,優選在0.001-3微米的範圍內。 The noble metal or its alloy on the surface preferably has a thickness of the sub-micron order, so it does not cause any significant change to the profile of the microstructure. The thickness of the noble metal or its alloy may be in the range of 0.001-10 microns, and preferably in the range of 0.001-3 microns.
方法2:Method 2:
供選擇地,如上述US 2016/0059442中所描述的,三維微結構可以在平整基材上形成,如圖4中所示。 Alternatively, as described in the aforementioned US 2016/0059442, a three-dimensional microstructure may be formed on a flat substrate, as shown in FIG. 4.
在圖4的步驟A中,將感光材料(42)塗布於基材層(41)(例如玻璃基材)上。如上所述,感光材料可以是正型、負型或雙重型。感光材料也可以是化學增幅型光阻。可以使用浸塗、噴塗、狹縫模頭塗布或旋轉塗布進行塗布。在乾燥和/或烘烤之後,使感光材料藉由光罩(未示出)暴露於合適的光源(未示出)。 In step A of FIG. 4, a photosensitive material (42) is applied on a substrate layer (41) (for example, a glass substrate). As described above, the photosensitive material may be a positive type, a negative type, or a dual type. The photosensitive material may be a chemically amplified photoresist. Coating can be performed using dip coating, spray coating, slot die coating, or spin coating. After drying and / or baking, the photosensitive material is exposed to a suitable light source (not shown) through a photomask (not shown).
供選擇地,感光材料(42)可以是被層壓於基材(41)上的乾膜光阻(其通常是可商購的)。也可將乾膜暴露於如上所述的光源。 Alternatively, the photosensitive material (42) may be a dry film photoresist (which is generally commercially available) laminated on a substrate (41). The dry film can also be exposed to a light source as described above.
在步驟B中,在曝光後,根據感光材料的類型,藉由使用顯影劑來移除感光材料的曝光區域或未曝光區域。在顯影後在步驟C之前,具有剩餘的感光材料(42)的基材層(41)可以經歷烘烤或全面曝光。剩餘的感光材料的厚度應當與待形成的三維微結構的深度或高度相同。 In step B, after exposure, depending on the type of photosensitive material, the exposed or unexposed areas of the photosensitive material are removed by using a developer. After development, before step C, the substrate layer (41) with the remaining photosensitive material (42) may undergo baking or full exposure. The thickness of the remaining photosensitive material should be the same as the depth or height of the three-dimensional microstructure to be formed.
在步驟C中,將導電種晶層(43)塗布於剩餘的感光材料(42)上和基材(41)上未被感光材料佔據的區域中。導電種晶層通常由銀形成。 In step C, a conductive seed layer (43) is applied on the remaining photosensitive material (42) and on the substrate (41) in a region not occupied by the photosensitive material. The conductive seed layer is usually formed of silver.
在步驟D中,將金屬或合金(44)(例如,鎳、鈷、鉻、銅、鋅或由上述金屬中的任何金屬得到的合金)電鍍和/或無電鍍於被導電種晶層覆蓋的表面上,並且進行鍍敷製程直到在圖案化的感光材料上有足夠的鍍敷的材料厚度(h)。圖4中的厚度(h)優選為25-5000微米,且更優選為25-1000微米。 In step D, a metal or alloy (44) (e.g., nickel, cobalt, chromium, copper, zinc, or an alloy obtained from any of the above metals) is electroplated and / or electrolessly plated on the surface covered by the conductive seed layer Surface, and a plating process is performed until there is a sufficient thickness of the plated material (h) on the patterned photosensitive material. The thickness (h) in FIG. 4 is preferably 25-5000 microns, and more preferably 25-1000 microns.
在鍍敷後,將鍍敷的材料(44)與被剝落的基材層(41)分離。感光材料(42)連同導電種晶層(43)一起被移除。可以藉由剝離劑(例如有機溶劑或水溶液)將感光材料移除。可以藉由酸性溶液(例如含硫/含氮混合物)或可商購的化學剝離劑將導電種晶層(43)移除,只留下一側具有三維結構且另一側平整的金屬片(44)。 After plating, the plated material (44) is separated from the peeled substrate layer (41). The photosensitive material (42) is removed together with the conductive seed layer (43). The photosensitive material may be removed by a release agent such as an organic solvent or an aqueous solution. The conductive seed layer (43) can be removed by an acidic solution (e.g., a sulfur-containing / nitrogen-containing mixture) or a commercially available chemical stripper, leaving only a metal sheet with a three-dimensional structure on one side and a flat surface on the other 44).
可將精密拋光應用於金屬片(44),此後,可以直接使用平滑的墊片(shim)用於壓花。供選擇地,可以將其安裝(例如包裹)在外表面上具有三維微結構的滾筒上,以形成壓花工具。 Precision polishing can be applied to the metal sheet (44), after which smooth shims can be used directly for embossing. Alternatively, it can be mounted (e.g. wrapped) on a roller having a three-dimensional microstructure on the outer surface to form an embossing tool.
如上文所述,貴金屬或其合金最終被塗布在壓花工具的整個表面上。如上所述,金或其合金相比其他貴金屬和合金是優選的。 As described above, the precious metal or its alloy is finally coated on the entire surface of the embossing tool. As mentioned above, gold or its alloys are preferred over other precious metals and alloys.
方法3:Method 3:
圖5示出了本發明的方法。該方法與圖4的方法類似,但經過簡化。圖5的步驟A和步驟B與圖4的相對應步驟相同。然而,在圖5的步驟C中,塗布金或其合金層(53)而不是諸如銀的導電種晶層。 Figure 5 shows the method of the invention. This method is similar to the method of FIG. 4 but simplified. Steps A and B of FIG. 5 are the same as the corresponding steps of FIG. 4. However, in step C of FIG. 5, a gold or alloy layer (53) thereof is applied instead of a conductive seed layer such as silver.
因此,在圖5的步驟E中,在將鍍敷的材料(54)從基材(51)分離之後,只有感光材料(52)需要被移除,金或合金塗層(53)與在一側上具有三維結構,而另一側上是平整表面的金屬片(54)保留在一起。 Therefore, in step E of FIG. 5, after separating the plated material (54) from the substrate (51), only the photosensitive material (52) needs to be removed, and the gold or alloy coating (53) is The metal sheet (54) with a three-dimensional structure on one side and a flat surface on the other side remains together.
可以直接使用金屬片用於壓花。供選擇地,可將其安裝於滾筒上。在本發明的該方法中,不需要有單獨的塗布步驟以在壓花工具的表面上形成金或合金層。 Metal sheets can be used directly for embossing. Alternatively, it can be mounted on a drum. In the method of the present invention, there is no need for a separate coating step to form a gold or alloy layer on the surface of the embossing tool.
本發明的壓花工具適用於如第6,930,818號美國專利中所描述的微壓花方法。微壓花方法製造被間隔壁分開的杯狀微胞(microcells),諸如MICROCUPS(註冊商標)。這些微胞可填充有包含分散於溶劑或溶劑混合物中的帶電粒子的電泳流體。填充的微 胞形成電泳顯示膜。當夾在電極層之間時,電泳顯示膜形成電泳裝置。 The embossing tool of the present invention is suitable for a micro-embossing method as described in US Patent No. 6,930,818. The micro-embossing method manufactures cup-shaped microcells separated by partition walls, such as MICROCUPS (registered trademark). These cells can be filled with an electrophoretic fluid containing charged particles dispersed in a solvent or solvent mixture. Filled micro The cells form an electrophoretic display film. When sandwiched between the electrode layers, the electrophoretic display film forms an electrophoretic device.
實施例1Example 1
在該實施例中,製備了兩種壓花工具(即陽模)。這些模具依據上文所述的方法中的一種由鎳形成。 In this example, two embossing tools (ie, male molds) were prepared. These molds are formed from nickel according to one of the methods described above.
這些鎳模具中的一種的表面未處理。在50℃的溫度和pH5下,進一步用基於氰化物的鍍金電解質對形成的其他鎳模具進行電鍍,以在其表面上得到具有0.5微米的厚度的金塗層。 The surface of one of these nickel molds is untreated. At a temperature of 50 ° C. and a pH of 5, the other nickel molds formed were further plated with a cyanide-based gold plating electrolyte to obtain a gold coating layer having a thickness of 0.5 μm on the surface thereof.
為了測試這兩種壓花模具,製備基於水的聚合物層流體和壓花組成物。聚合物層流體是根據第7,880,958號美國專利製備的,並且其具有聚乙烯醇作為主要成分。該壓花組成物是根據第7,470,386號美國專利製備的,並且其具有多官能丙烯酸酯作為主要成分。 To test both embossing dies, a water-based polymer layer fluid and embossing composition were prepared. The polymer layer fluid was prepared according to US Patent No. 7,880,958, and it had polyvinyl alcohol as a main component. The embossed composition was prepared according to US Patent No. 7,470,386, and it had a polyfunctional acrylate as a main ingredient.
首先使用3號Meyer刮塗棒(drawdown bar)將聚合物流體塗布在PET(聚對苯二甲酸乙二酯)基材上。乾燥的聚合物層具有0.5微米的厚度。 The polymer fluid was first coated on a PET (polyethylene terephthalate) substrate using a No. 3 Meyer drawdown bar. The dried polymer layer has a thickness of 0.5 microns.
用甲乙酮(MEK)稀釋壓花組成物,然後將其塗在PET基材的聚合物層側上,目標乾燥厚度25微米。 The embossed composition was diluted with methyl ethyl ketone (MEK) and then coated on the polymer layer side of the PET substrate to a target dry thickness of 25 microns.
使用這兩種壓花模具,在160℉(71℃)下在50psi(350kPa)的壓力下用通過PET基材背面的UV曝光(0.068J/cm2,Fusion UV,D燈)分別地對塗層進行乾燥和壓花。 Using these two embossing dies, the coatings were applied separately at 160 ° F (71 ° C) and 50psi (350kPa) with UV exposure through the back of the PET substrate (0.068J / cm 2 , Fusion UV, D lamp) The layers are dried and embossed.
圖6A是藉由使用鎳壓花模具製備的膜的表面的顯微照片。可以看出,因為固化的材料與鎳金屬之間的強黏附力,得到的膜上的一些固化的材料已經被轉移至鎳模具或黏在鎳模具上,在得到的膜上留下不均勻的表面。 FIG. 6A is a photomicrograph of the surface of a film prepared by using a nickel embossing mold. It can be seen that because of the strong adhesion between the solidified material and the nickel metal, some of the solidified material on the obtained film has been transferred to the nickel mold or adhered to the nickel mold, leaving unevenness on the obtained film surface.
使用鍍金的鎳模具時,固化的壓花材料與金金屬表面完全分開,在得到的膜上留下光滑的表面,如圖6B中所示。這是由於以下事實:鍍金的表面降低了模具表面與固化的材料之間的黏附力,使得模具更容易從固化的材料釋放。 When using a gold-plated nickel mold, the solidified embossed material is completely separated from the gold metal surface, leaving a smooth surface on the resulting film, as shown in Figure 6B. This is due to the fact that the gold-plated surface reduces the adhesion between the mold surface and the cured material, making the mold easier to release from the cured material.
實施例2Example 2
在該實施例中,製備了幾種壓花工具(即陽模)。這些模具根據上文所述的方法中的一種由鎳形成。用與實施例1中使用的電解質浴(electrolyte bath)相同的電解質浴以0.5微米的金對形成的鎳模具中的一個進一步進行電鍍。 In this example, several embossing tools (ie, male molds) were prepared. These molds are formed from nickel according to one of the methods described above. One of the nickel molds formed was further plated with 0.5 micron gold using the same electrolyte bath as the electrolyte bath used in Example 1.
對形成的鎳模具中的三個進一步進行矽烷表面處理。就矽烷處理而言,將聚二甲基矽氧烷(Gelest,Inc.)添加到95%正丙醇和5%DI水的混合物中,預先用乙酸將該混合物調到pH 4.5。分別製備0.25%、1%和2wt%的三種濃度的聚二甲基矽氧烷溶液。將鎳模具分別浸入不同濃度的矽烷溶液中10分鐘,然後在100℃下烘烤過夜,以在微結構的表面上得到矽烷塗層。 Three of the formed nickel molds were further subjected to a silane surface treatment. For the silane treatment, polydimethylsiloxane (Gelest, Inc.) was added to a mixture of 95% n-propanol and 5% DI water, and the mixture was adjusted to pH 4.5 with acetic acid in advance. Polydimethylsiloxane solutions were prepared at three concentrations of 0.25%, 1%, and 2% by weight, respectively. The nickel molds were immersed in silane solutions of different concentrations for 10 minutes, and then baked at 100 ° C overnight to obtain a silane coating on the surface of the microstructure.
壓花測試材料和條件與實施例1中所使用者相同。使用鍍金的鎳模具時,所有的固化的壓花材料 完全地從金金屬表面分離。然而,無論處理溶液中的聚二甲基矽氧烷濃度如何,得到的膜上的固化的壓花材料多於約50%的區域已經被轉移至經矽烷處理的鎳模具表面或黏在經矽烷處理的鎳模具表面上。 The embossing test materials and conditions were the same as those used in Example 1. All solid embossed materials when using gold-plated nickel molds Completely separated from the gold metal surface. However, regardless of the polydimethylsiloxane concentration in the treatment solution, more than about 50% of the area of the cured embossed material on the resulting film has been transferred to the surface of a silane-treated nickel mold or stuck to a silane-treated silane Treated nickel mold surface.
該實施例顯示固化的材料從鍍金的表面比從矽烷處理的表面更容易釋放。 This example shows that the cured material is more easily released from the gold-plated surface than from the silane-treated surface.
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