TWI315691B - Methods of bonding superabrasive particles in an organic matrix - Google Patents
Methods of bonding superabrasive particles in an organic matrixInfo
- Publication number
- TWI315691B TWI315691B TW095133055A TW95133055A TWI315691B TW I315691 B TWI315691 B TW I315691B TW 095133055 A TW095133055 A TW 095133055A TW 95133055 A TW95133055 A TW 95133055A TW I315691 B TWI315691 B TW I315691B
- Authority
- TW
- Taiwan
- Prior art keywords
- methods
- organic matrix
- superabrasive particles
- bonding superabrasive
- bonding
- Prior art date
Links
- 239000011159 matrix material Substances 0.000 title 1
- 239000002245 particle Substances 0.000 title 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
- B24B53/12—Dressing tools; Holders therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23F—MAKING GEARS OR TOOTHED RACKS
- B23F21/00—Tools specially adapted for use in machines for manufacturing gear teeth
- B23F21/03—Honing tools
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B7/00—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
- B24B7/20—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground
- B24B7/22—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain
- B24B7/228—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain for grinding thin, brittle parts, e.g. semiconductors, wafers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D18/00—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for
- B24D18/0009—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for using moulds or presses
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
- B24D3/02—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
- B24D3/20—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially organic
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Inorganic Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Polishing Bodies And Polishing Tools (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US11/223,786 US20070060026A1 (en) | 2005-09-09 | 2005-09-09 | Methods of bonding superabrasive particles in an organic matrix |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW200724308A TW200724308A (en) | 2007-07-01 |
| TWI315691B true TWI315691B (en) | 2009-10-11 |
Family
ID=37855801
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW095133055A TWI315691B (en) | 2005-09-09 | 2006-09-07 | Methods of bonding superabrasive particles in an organic matrix |
Country Status (5)
| Country | Link |
|---|---|
| US (7) | US20070060026A1 (zh) |
| KR (1) | KR20080065612A (zh) |
| CN (1) | CN101528414B (zh) |
| TW (1) | TWI315691B (zh) |
| WO (1) | WO2007032946A2 (zh) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI455794B (zh) * | 2008-02-20 | 2014-10-11 | Nippon Steel Materials Co Ltd | 研磨布用修整輪 |
Families Citing this family (97)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9221154B2 (en) | 1997-04-04 | 2015-12-29 | Chien-Min Sung | Diamond tools and methods for making the same |
| US9868100B2 (en) | 1997-04-04 | 2018-01-16 | Chien-Min Sung | Brazed diamond tools and methods for making the same |
| US9238207B2 (en) | 1997-04-04 | 2016-01-19 | Chien-Min Sung | Brazed diamond tools and methods for making the same |
| US9409280B2 (en) | 1997-04-04 | 2016-08-09 | Chien-Min Sung | Brazed diamond tools and methods for making the same |
| US9199357B2 (en) | 1997-04-04 | 2015-12-01 | Chien-Min Sung | Brazed diamond tools and methods for making the same |
| US9463552B2 (en) | 1997-04-04 | 2016-10-11 | Chien-Min Sung | Superbrasvie tools containing uniformly leveled superabrasive particles and associated methods |
| US20050247486A1 (en) | 2004-04-30 | 2005-11-10 | Smith International, Inc. | Modified cutters |
| US7658666B2 (en) * | 2004-08-24 | 2010-02-09 | Chien-Min Sung | Superhard cutters and associated methods |
| US20060258276A1 (en) * | 2005-05-16 | 2006-11-16 | Chien-Min Sung | Superhard cutters and associated methods |
| US7762872B2 (en) * | 2004-08-24 | 2010-07-27 | Chien-Min Sung | Superhard cutters and associated methods |
| US20070060026A1 (en) * | 2005-09-09 | 2007-03-15 | Chien-Min Sung | Methods of bonding superabrasive particles in an organic matrix |
| US8622787B2 (en) * | 2006-11-16 | 2014-01-07 | Chien-Min Sung | CMP pad dressers with hybridized abrasive surface and related methods |
| US8974270B2 (en) | 2011-05-23 | 2015-03-10 | Chien-Min Sung | CMP pad dresser having leveled tips and associated methods |
| US8398466B2 (en) * | 2006-11-16 | 2013-03-19 | Chien-Min Sung | CMP pad conditioners with mosaic abrasive segments and associated methods |
| US8393934B2 (en) * | 2006-11-16 | 2013-03-12 | Chien-Min Sung | CMP pad dressers with hybridized abrasive surface and related methods |
| US9724802B2 (en) | 2005-05-16 | 2017-08-08 | Chien-Min Sung | CMP pad dressers having leveled tips and associated methods |
| TWI537097B (zh) * | 2012-04-10 | 2016-06-11 | 宋健民 | 組合式修整器及其製法與化學機械平坦化應用 |
| US9138862B2 (en) | 2011-05-23 | 2015-09-22 | Chien-Min Sung | CMP pad dresser having leveled tips and associated methods |
| US8678878B2 (en) | 2009-09-29 | 2014-03-25 | Chien-Min Sung | System for evaluating and/or improving performance of a CMP pad dresser |
| WO2007023949A1 (ja) * | 2005-08-25 | 2007-03-01 | Hiroshi Ishizuka | 焼結体研磨部を持つ工具およびその製造方法 |
| US7241206B1 (en) * | 2006-02-17 | 2007-07-10 | Chien-Min Sung | Tools for polishing and associated methods |
| US7494404B2 (en) * | 2006-02-17 | 2009-02-24 | Chien-Min Sung | Tools for polishing and associated methods |
| GB0612788D0 (en) * | 2006-06-28 | 2006-08-09 | Insectshield Ltd | Pest control materials |
| TWI289093B (en) * | 2006-07-26 | 2007-11-01 | Kinik Co | Method of manufacturing diamond disk |
| US20150017884A1 (en) * | 2006-11-16 | 2015-01-15 | Chien-Min Sung | CMP Pad Dressers with Hybridized Abrasive Surface and Related Methods |
| US20080153398A1 (en) * | 2006-11-16 | 2008-06-26 | Chien-Min Sung | Cmp pad conditioners and associated methods |
| US8393938B2 (en) * | 2007-11-13 | 2013-03-12 | Chien-Min Sung | CMP pad dressers |
| TWI388402B (en) * | 2007-12-06 | 2013-03-11 | Methods for orienting superabrasive particles on a surface and associated tools | |
| DE102008021636B3 (de) * | 2008-04-30 | 2009-11-19 | Esk Ceramics Gmbh & Co. Kg | Verfahren zum Fixieren eines Verbindungselements auf einem Werkstück und Bauteil aus einem Werkstück mit einem darauf fixierten Verbindungselement |
| US8684310B2 (en) * | 2009-01-29 | 2014-04-01 | The Boeing Company | Rigid tipped riblets |
| US8070558B2 (en) * | 2009-03-04 | 2011-12-06 | David Young | Porcelain epoxy flooring and method for producing the same |
| JP5502987B2 (ja) | 2009-03-24 | 2014-05-28 | サンーゴバン アブレイシブズ,インコーポレイティド | 化学機械平坦化パッドコンディショナとして使用するための研磨工具 |
| EP2419243A1 (en) * | 2009-04-17 | 2012-02-22 | 3M Innovative Properties Company | Metal particle transfer article, metal modified substrate, and method of making and using the same |
| TWI380878B (zh) * | 2009-04-21 | 2013-01-01 | Sung Chien Min | Combined Dressing Machine and Its Making Method |
| US8801497B2 (en) * | 2009-04-30 | 2014-08-12 | Rdc Holdings, Llc | Array of abrasive members with resilient support |
| CN101879706B (zh) * | 2009-05-08 | 2012-01-11 | 中国砂轮企业股份有限公司 | 钻石研磨碟及其制造方法 |
| MY155563A (en) * | 2009-06-02 | 2015-10-30 | Saint Gobain Abrasives Inc | Corrosion-resistant cmp conditioning tools and methods for making and using same |
| US20110097977A1 (en) * | 2009-08-07 | 2011-04-28 | Abrasive Technology, Inc. | Multiple-sided cmp pad conditioning disk |
| EP2474025A2 (en) | 2009-09-01 | 2012-07-11 | Saint-Gobain Abrasives, Inc. | Chemical mechanical polishing conditioner |
| US20110073094A1 (en) * | 2009-09-28 | 2011-03-31 | 3M Innovative Properties Company | Abrasive article with solid core and methods of making the same |
| US20110306275A1 (en) * | 2010-06-13 | 2011-12-15 | Nicolson Matthew D | Component finishing tool |
| DE102010038324B4 (de) * | 2010-07-23 | 2012-03-22 | Hilti Aktiengesellschaft | Vorrichtung zum Positionieren von Schneidpartikeln |
| US8777699B2 (en) | 2010-09-21 | 2014-07-15 | Ritedia Corporation | Superabrasive tools having substantially leveled particle tips and associated methods |
| TW201219131A (en) * | 2010-11-04 | 2012-05-16 | Ritedia Corp | comprising multiple stacked and bonded composite bodies each of which is formed by using a metal substrate to enclose a single layer of planar arrangement of diamond particles |
| JP6033233B2 (ja) * | 2010-12-17 | 2016-11-30 | スリーエム イノベイティブ プロパティズ カンパニー | マルチサイズ粒子を有する転写物品及び方法 |
| US20120171935A1 (en) | 2010-12-20 | 2012-07-05 | Diamond Innovations, Inc. | CMP PAD Conditioning Tool |
| US8870985B2 (en) * | 2010-12-30 | 2014-10-28 | Saint-Gobain Abrasives, Inc. | Abrasive particle and method of forming same |
| RU2569437C2 (ru) * | 2011-02-16 | 2015-11-27 | 3М Инновейтив Пропертиз Компани | Абразивное изделие с покрытием с вращательно ориентированными профилированными керамическими абразивными частицами и способ его изготовления |
| ITVR20110068A1 (it) * | 2011-04-05 | 2012-10-06 | Aros Srl | Utensile di finitura di superfici lavorabili e procedimento per il suo ottenimento |
| KR101667943B1 (ko) | 2012-01-10 | 2016-10-20 | 생-고뱅 세라믹스 앤드 플라스틱스, 인코포레이티드 | 복잡한 형상들을 가지는 연마 입자들 및 이의 성형 방법들 |
| US9242342B2 (en) | 2012-03-14 | 2016-01-26 | Taiwan Semiconductor Manufacturing Company, Ltd. | Manufacture and method of making the same |
| KR101813466B1 (ko) | 2012-05-23 | 2017-12-29 | 생-고뱅 세라믹스 앤드 플라스틱스, 인코포레이티드 | 형상화 연마입자들 및 이의 형성방법 |
| TWI530361B (zh) * | 2012-11-07 | 2016-04-21 | 中國砂輪企業股份有限公司 | 化學機械研磨修整器及其製法 |
| US20140134933A1 (en) | 2012-11-09 | 2014-05-15 | Di-Coat Corporation | Abrading tools and methods of making same |
| CN103009238A (zh) * | 2012-12-24 | 2013-04-03 | 江苏中晶光电有限公司 | 高效、无划伤、长寿命橡胶高分子材料抛光垫 |
| US10030452B2 (en) | 2013-03-14 | 2018-07-24 | Smith International, Inc. | Cutting structures for fixed cutter drill bit and other downhole cutting tools |
| US10309156B2 (en) | 2013-03-14 | 2019-06-04 | Smith International, Inc. | Cutting structures for fixed cutter drill bit and other downhole cutting tools |
| CN107685296B (zh) | 2013-03-29 | 2020-03-06 | 圣戈班磨料磨具有限公司 | 具有特定形状的磨粒、形成这种粒子的方法及其用途 |
| CN203390712U (zh) * | 2013-04-08 | 2014-01-15 | 宋健民 | 化学机械研磨修整器 |
| ES2756849T3 (es) * | 2013-08-07 | 2020-04-27 | Reishauer Ag | Herramienta rectificadora y procedimiento para su fabricación |
| RU2643004C2 (ru) | 2013-09-30 | 2018-01-29 | Сен-Гобен Серэмикс Энд Пластикс, Инк. | Формованные абразивные частицы и способы их получения |
| CN103586792A (zh) * | 2013-11-26 | 2014-02-19 | 常熟市巨力砂轮有限责任公司 | 陶瓷cbn砂轮的制备方法 |
| TWI546158B (zh) * | 2013-12-20 | 2016-08-21 | 中國砂輪企業股份有限公司 | 低磁性化學機械研磨修整器 |
| MX380754B (es) | 2013-12-31 | 2025-03-12 | Saint Gobain Abrasives Inc | Artículo abrasivo que incluye partículas abrasivas perfiladas. |
| TWI580523B (zh) * | 2014-01-21 | 2017-05-01 | 中國砂輪企業股份有限公司 | 具有最佳磨料露出率之化學機械研磨修整器 |
| US9771507B2 (en) | 2014-01-31 | 2017-09-26 | Saint-Gobain Ceramics & Plastics, Inc. | Shaped abrasive particle including dopant material and method of forming same |
| KR101555874B1 (ko) * | 2014-02-13 | 2015-09-30 | 새솔다이아몬드공업 주식회사 | 도트부를 구비한 cmp 패드 컨디셔너 및 그 제조방법 |
| US10287825B2 (en) | 2014-03-11 | 2019-05-14 | Smith International, Inc. | Cutting elements having non-planar surfaces and downhole cutting tools using such cutting elements |
| CA2945491C (en) | 2014-04-14 | 2023-03-14 | Saint-Gobain Ceramics & Plastics, Inc. | Abrasive article including shaped abrasive particles |
| CN104084884B (zh) * | 2014-07-03 | 2017-02-15 | 南京三超新材料股份有限公司 | 一种cmp片状研磨修整器及其生产方法 |
| US10173300B1 (en) * | 2014-10-06 | 2019-01-08 | Us Synthetic Corporation | Polycrystalline diamond compact, drill bit incorporating same, and methods of manufacture |
| US9914864B2 (en) | 2014-12-23 | 2018-03-13 | Saint-Gobain Ceramics & Plastics, Inc. | Shaped abrasive particles and method of forming same |
| EP3277459B1 (en) | 2015-03-31 | 2023-08-16 | Saint-Gobain Abrasives, Inc. | Fixed abrasive articles and methods of forming same |
| TWI634200B (zh) | 2015-03-31 | 2018-09-01 | 聖高拜磨料有限公司 | 固定磨料物品及其形成方法 |
| US9714083B2 (en) | 2015-05-06 | 2017-07-25 | The Boeing Company | Color applications for aerodynamic microstructures |
| US9868135B2 (en) | 2015-05-06 | 2018-01-16 | The Boeing Company | Aerodynamic microstructures having sub-microstructures |
| US9751618B2 (en) | 2015-05-06 | 2017-09-05 | The Boeing Company | Optical effects for aerodynamic microstructures |
| ES2819375T3 (es) | 2015-06-11 | 2021-04-15 | Saint Gobain Ceramics & Plastics Inc | Artículo abrasivo que incluye partículas abrasivas conformadas |
| US10105813B2 (en) | 2016-04-20 | 2018-10-23 | Seagate Technology Llc | Lapping plate and method of making |
| US10010996B2 (en) * | 2016-04-20 | 2018-07-03 | Seagate Technology Llc | Lapping plate and method of making |
| KR102390844B1 (ko) | 2016-05-10 | 2022-04-26 | 생-고뱅 세라믹스 앤드 플라스틱스, 인코포레이티드 | 연마 입자 및 이의 형성 방법 |
| EP3455320A4 (en) | 2016-05-10 | 2019-11-20 | Saint-Gobain Ceramics&Plastics, Inc. | GRINDING PARTICLES AND METHOD FOR FORMING THEREOF |
| CN106041765A (zh) * | 2016-05-31 | 2016-10-26 | 安徽砥钻砂轮有限公司 | 一种韧性高耐磨树脂切割砂轮及其制备方法 |
| US10105877B2 (en) | 2016-07-08 | 2018-10-23 | The Boeing Company | Multilayer riblet applique and methods of producing the same |
| US10563105B2 (en) | 2017-01-31 | 2020-02-18 | Saint-Gobain Ceramics & Plastics, Inc. | Abrasive article including shaped abrasive particles |
| WO2019133724A1 (en) * | 2017-12-28 | 2019-07-04 | Sinmat, Inc. | Cmp polishing pad conditioner |
| TWI674947B (zh) * | 2018-04-19 | 2019-10-21 | 智勝科技股份有限公司 | 研磨墊、研磨墊的製造方法及研磨方法 |
| US11911871B2 (en) * | 2018-10-31 | 2024-02-27 | Taiwan Semiconductor Manufacturing Company Ltd. | Method of manufacturing composite article |
| CN110614593A (zh) * | 2019-07-31 | 2019-12-27 | 陈祉序 | 一种打磨材料及打磨设备 |
| CN114845838B (zh) | 2019-12-27 | 2024-10-25 | 圣戈本陶瓷及塑料股份有限公司 | 磨料制品及其形成方法 |
| KR102765343B1 (ko) | 2019-12-27 | 2025-02-13 | 세인트-고바인 세라믹스 앤드 플라스틱스, 인크. | 연마 물품 및 이의 형성 방법 |
| EP4081609A4 (en) | 2019-12-27 | 2024-06-05 | Saint-Gobain Ceramics & Plastics Inc. | Abrasive articles and methods of forming same |
| CN112223131A (zh) * | 2020-11-02 | 2021-01-15 | 惠州市新科磨具有限公司 | 耐磨薄片树脂切割片及其制备方法 |
| US11987021B2 (en) | 2021-09-01 | 2024-05-21 | The Boeing Company | Multilayer riblet appliques |
| JP2025500060A (ja) | 2021-12-30 | 2025-01-07 | サンーゴバン アブレイシブズ,インコーポレイティド | 研磨物品及びそれを形成する方法 |
| CN114571576B (zh) * | 2022-03-25 | 2023-07-21 | 浙江寰龙环境科技有限公司 | 一种固废制备陶粒生产线 |
| CN119427209B (zh) * | 2025-01-09 | 2025-04-08 | 浙江中钻新材料科技有限公司 | 具有平坦化尖端的cmp研磨垫修整器小锭自动精密布钻设备 |
Family Cites Families (148)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| USRE20660E (en) * | 1938-02-22 | Method of coaxing and apparatus | ||
| US2027307A (en) * | 1928-07-30 | 1936-01-07 | Behr Manning Corp | Method of coating and apparatus therefor and product |
| US2027087A (en) * | 1928-10-03 | 1936-01-07 | Behr Manning Corp | Abrasive sheet and process of making the same |
| US2318570A (en) * | 1930-01-20 | 1943-05-04 | Minnesota Mining & Mfg | Manufacture of abrasives |
| US1854071A (en) * | 1930-07-14 | 1932-04-12 | Behr Manning Corp | Method of manufacturing abrasives |
| US2187624A (en) * | 1932-10-10 | 1940-01-16 | Carborundum Co | Apparatus for the manufacture of coated webs |
| US2035521A (en) * | 1932-10-26 | 1936-03-31 | Carborundum Co | Granular coated web and method of making same |
| US2194253A (en) * | 1932-10-27 | 1940-03-19 | Carborundum Co | Coating apparatus |
| US2281558A (en) * | 1933-03-06 | 1942-05-05 | Minnesota Mining & Mfg | Manufacture of abrasive articles and apparatus therefor |
| US2033991A (en) * | 1935-07-09 | 1936-03-17 | Carborundum Co | Coating apparatus |
| ES272672A1 (es) * | 1961-12-04 | 1962-05-01 | The Osborn Manufacturing Company | Mejoras en ruedas pulimentadoras |
| DE1502642A1 (de) * | 1963-05-13 | 1969-06-04 | Naradi Narodni Podnik | Diamantformwerkzeug |
| JPS4823595B1 (zh) * | 1969-06-17 | 1973-07-14 | ||
| US3852078A (en) * | 1970-12-24 | 1974-12-03 | M Wakatsuki | Mass of polycrystalline cubic system boron nitride and composites of polycrystalline cubic system boron nitride and other hard materials, and processes for manufacturing the same |
| US3767371A (en) * | 1971-07-01 | 1973-10-23 | Gen Electric | Cubic boron nitride/sintered carbide abrasive bodies |
| US3743489A (en) * | 1971-07-01 | 1973-07-03 | Gen Electric | Abrasive bodies of finely-divided cubic boron nitride crystals |
| US3819814A (en) * | 1972-11-01 | 1974-06-25 | Megadiamond Corp | Plural molded diamond articles and their manufacture from diamond powders under high temperature and pressure |
| US4078906A (en) * | 1976-09-29 | 1978-03-14 | Elgin Diamond Products Co., Inc. | Method for making an abrading tool with discontinuous diamond abrading surfaces |
| US4151154A (en) * | 1976-09-29 | 1979-04-24 | Union Carbide Corporation | Silicon treated surfaces |
| US4188194A (en) * | 1976-10-29 | 1980-02-12 | General Electric Company | Direct conversion process for making cubic boron nitride from pyrolytic boron nitride |
| IE48798B1 (en) * | 1978-08-18 | 1985-05-15 | De Beers Ind Diamond | Method of making tool inserts,wire-drawing die blank and drill bit comprising such inserts |
| US4390647A (en) * | 1981-02-27 | 1983-06-28 | Ppg Industries, Inc. | Non-starch containing aqueous sizing composition for glass fibers and sized glass fibers for use in reinforcing elastomers |
| US4525179A (en) * | 1981-07-27 | 1985-06-25 | General Electric Company | Process for making diamond and cubic boron nitride compacts |
| US4828582A (en) * | 1983-08-29 | 1989-05-09 | General Electric Company | Polycrystalline abrasive grit |
| US4797241A (en) * | 1985-05-20 | 1989-01-10 | Sii Megadiamond | Method for producing multiple polycrystalline bodies |
| CA1290202C (en) * | 1985-07-02 | 1991-10-08 | Mikhail M. Girgis | Chemically treated glass fibers |
| US4662896A (en) * | 1986-02-19 | 1987-05-05 | Strata Bit Corporation | Method of making an abrasive cutting element |
| US4737162A (en) * | 1986-08-12 | 1988-04-12 | Alfred Grazen | Method of producing electro-formed abrasive tools |
| US5195404A (en) * | 1987-06-18 | 1993-03-23 | Notter Theo A | Drill bit with cutting insert |
| US4849602A (en) * | 1988-08-12 | 1989-07-18 | Iscar Ltd. | Method for fabricating cutting pieces |
| US4923490A (en) | 1988-12-16 | 1990-05-08 | General Electric Company | Novel grinding wheels utilizing polycrystalline diamond or cubic boron nitride grit |
| US5049165B1 (en) * | 1989-01-30 | 1995-09-26 | Ultimate Abrasive Syst Inc | Composite material |
| US4925457B1 (en) * | 1989-01-30 | 1995-09-26 | Ultimate Abrasive Syst Inc | Method for making an abrasive tool |
| US5190568B1 (en) * | 1989-01-30 | 1996-03-12 | Ultimate Abrasive Syst Inc | Abrasive tool with contoured surface |
| US4954139A (en) | 1989-03-31 | 1990-09-04 | The General Electric Company | Method for producing polycrystalline compact tool blanks with flat carbide support/diamond or CBN interfaces |
| GB9006703D0 (en) | 1990-03-26 | 1990-05-23 | De Beers Ind Diamond | Abrasive product |
| EP0488623B1 (en) * | 1990-11-26 | 1996-02-21 | De Beers Industrial Diamond Division (Proprietary) Limited | Cutting insert for a rotary cutting tool |
| GB9104366D0 (en) * | 1991-03-01 | 1991-04-17 | De Beers Ind Diamond | Composite cutting insert |
| US5380390B1 (en) * | 1991-06-10 | 1996-10-01 | Ultimate Abras Systems Inc | Patterned abrasive material and method |
| US5247765A (en) * | 1991-07-23 | 1993-09-28 | Abrasive Technology Europe, S.A. | Abrasive product comprising a plurality of discrete composite abrasive pellets in a resilient resin matrix |
| US5194071A (en) * | 1991-07-25 | 1993-03-16 | General Electric Company Inc. | Cubic boron nitride abrasive and process for preparing same |
| US5314513A (en) * | 1992-03-03 | 1994-05-24 | Minnesota Mining And Manufacturing Company | Abrasive product having a binder comprising a maleimide binder |
| JPH0639729A (ja) | 1992-05-29 | 1994-02-15 | Canon Inc | 精研削砥石およびその製造方法 |
| US5243790A (en) | 1992-06-25 | 1993-09-14 | Abrasifs Vega, Inc. | Abrasive member |
| GB9310500D0 (en) * | 1993-05-21 | 1993-07-07 | De Beers Ind Diamond | Cutting tool |
| EP0664187B1 (en) * | 1993-06-02 | 1999-10-13 | Dai Nippon Printing Co., Ltd. | Grinding tape and method of manufacturing the same |
| US5681612A (en) * | 1993-06-17 | 1997-10-28 | Minnesota Mining And Manufacturing Company | Coated abrasives and methods of preparation |
| EP0702615B1 (en) | 1993-06-17 | 1997-10-22 | Minnesota Mining And Manufacturing Company | Patterned abrading articles and methods making and using same |
| US5453106A (en) * | 1993-10-27 | 1995-09-26 | Roberts; Ellis E. | Oriented particles in hard surfaces |
| US5486131A (en) | 1994-01-04 | 1996-01-23 | Speedfam Corporation | Device for conditioning polishing pads |
| US5547417A (en) | 1994-03-21 | 1996-08-20 | Intel Corporation | Method and apparatus for conditioning a semiconductor polishing pad |
| US5536202A (en) | 1994-07-27 | 1996-07-16 | Texas Instruments Incorporated | Semiconductor substrate conditioning head having a plurality of geometries formed in a surface thereof for pad conditioning during chemical-mechanical polish |
| BR9509116A (pt) | 1994-09-30 | 1997-11-18 | Minnesota Mining & Mfg | Artigo abrasivo revestido processos para produzir o mesmo e processo para desbastar uma peça dura |
| US5527424A (en) | 1995-01-30 | 1996-06-18 | Motorola, Inc. | Preconditioner for a polishing pad and method for using the same |
| US6478831B2 (en) | 1995-06-07 | 2002-11-12 | Ultimate Abrasive Systems, L.L.C. | Abrasive surface and article and methods for making them |
| US5560754A (en) | 1995-06-13 | 1996-10-01 | General Electric Company | Reduction of stresses in the polycrystalline abrasive layer of a composite compact with in situ bonded carbide/carbide support |
| US5958794A (en) | 1995-09-22 | 1999-09-28 | Minnesota Mining And Manufacturing Company | Method of modifying an exposed surface of a semiconductor wafer |
| US5852146A (en) * | 1996-06-27 | 1998-12-22 | Union Carbide Chemicals & Plastics Technology Corporation | Catalyst for the production of olefin polymers |
| US6371838B1 (en) | 1996-07-15 | 2002-04-16 | Speedfam-Ipec Corporation | Polishing pad conditioning device with cutting elements |
| US5851138A (en) * | 1996-08-15 | 1998-12-22 | Texas Instruments Incorporated | Polishing pad conditioning system and method |
| US6206942B1 (en) * | 1997-01-09 | 2001-03-27 | Minnesota Mining & Manufacturing Company | Method for making abrasive grain using impregnation, and abrasive articles |
| US6190240B1 (en) | 1996-10-15 | 2001-02-20 | Nippon Steel Corporation | Method for producing pad conditioner for semiconductor substrates |
| US6039641A (en) * | 1997-04-04 | 2000-03-21 | Sung; Chien-Min | Brazed diamond tools by infiltration |
| US6368198B1 (en) * | 1999-11-22 | 2002-04-09 | Kinik Company | Diamond grid CMP pad dresser |
| US7124753B2 (en) * | 1997-04-04 | 2006-10-24 | Chien-Min Sung | Brazed diamond tools and methods for making the same |
| US6884155B2 (en) * | 1999-11-22 | 2005-04-26 | Kinik | Diamond grid CMP pad dresser |
| US7491116B2 (en) * | 2004-09-29 | 2009-02-17 | Chien-Min Sung | CMP pad dresser with oriented particles and associated methods |
| US5921855A (en) | 1997-05-15 | 1999-07-13 | Applied Materials, Inc. | Polishing pad having a grooved pattern for use in a chemical mechanical polishing system |
| JP3244454B2 (ja) | 1997-06-05 | 2002-01-07 | 理化学研究所 | 切削研削両用工具 |
| US5921856A (en) | 1997-07-10 | 1999-07-13 | Sp3, Inc. | CVD diamond coated substrate for polishing pad conditioning head and method for making same |
| US6054183A (en) * | 1997-07-10 | 2000-04-25 | Zimmer; Jerry W. | Method for making CVD diamond coated substrate for polishing pad conditioning head |
| US6024824A (en) * | 1997-07-17 | 2000-02-15 | 3M Innovative Properties Company | Method of making articles in sheet form, particularly abrasive articles |
| US6093280A (en) * | 1997-08-18 | 2000-07-25 | Lsi Logic Corporation | Chemical-mechanical polishing pad conditioning systems |
| EP1019337B1 (en) * | 1997-09-05 | 2002-09-25 | Frenton Limited | Method of manufacturing a diamond-silicon carbide-silicon composite and a composite produced by this method |
| US6027659A (en) * | 1997-12-03 | 2000-02-22 | Intel Corporation | Polishing pad conditioning surface having integral conditioning points |
| US6196911B1 (en) | 1997-12-04 | 2001-03-06 | 3M Innovative Properties Company | Tools with abrasive segments |
| CA2261491C (en) | 1998-03-06 | 2005-05-24 | Smith International, Inc. | Cutting element with improved polycrystalline material toughness and method for making same |
| EP0950470B1 (en) * | 1998-04-13 | 2004-11-03 | Toyoda Koki Kabushiki Kaisha | Abrasive tool and the method of producing the same |
| US6123612A (en) | 1998-04-15 | 2000-09-26 | 3M Innovative Properties Company | Corrosion resistant abrasive article and method of making |
| JP3295888B2 (ja) | 1998-04-22 | 2002-06-24 | 株式会社藤森技術研究所 | ケミカルマシンポリッシャの研磨盤用研磨ドレッサ |
| KR19990081117A (ko) * | 1998-04-25 | 1999-11-15 | 윤종용 | 씨엠피 패드 컨디셔닝 디스크 및 컨디셔너, 그 디스크의 제조방법, 재생방법 및 세정방법 |
| US6354918B1 (en) | 1998-06-19 | 2002-03-12 | Ebara Corporation | Apparatus and method for polishing workpiece |
| US6299508B1 (en) | 1998-08-05 | 2001-10-09 | 3M Innovative Properties Company | Abrasive article with integrally molded front surface protrusions containing a grinding aid and methods of making and using |
| US6346202B1 (en) * | 1999-03-25 | 2002-02-12 | Beaver Creek Concepts Inc | Finishing with partial organic boundary layer |
| US6409904B1 (en) * | 1998-12-01 | 2002-06-25 | Nutool, Inc. | Method and apparatus for depositing and controlling the texture of a thin film |
| US20020077037A1 (en) | 1999-05-03 | 2002-06-20 | Tietz James V. | Fixed abrasive articles |
| GB2354470B (en) * | 1999-05-24 | 2004-02-04 | Honda Motor Co Ltd | Cutting tip and manufacturing method thereof |
| US6319108B1 (en) * | 1999-07-09 | 2001-11-20 | 3M Innovative Properties Company | Metal bond abrasive article comprising porous ceramic abrasive composites and method of using same to abrade a workpiece |
| US6755720B1 (en) * | 1999-07-15 | 2004-06-29 | Noritake Co., Limited | Vitrified bond tool and method of manufacturing the same |
| EP1075898A3 (en) | 1999-08-13 | 2003-11-05 | Mitsubishi Materials Corporation | Dresser and dressing apparatus |
| US6419574B1 (en) | 1999-09-01 | 2002-07-16 | Mitsubishi Materials Corporation | Abrasive tool with metal binder phase |
| US6281129B1 (en) | 1999-09-20 | 2001-08-28 | Agere Systems Guardian Corp. | Corrosion-resistant polishing pad conditioner |
| TW467802B (en) * | 1999-10-12 | 2001-12-11 | Hunatech Co Ltd | Conditioner for polishing pad and method for manufacturing the same |
| US7201645B2 (en) * | 1999-11-22 | 2007-04-10 | Chien-Min Sung | Contoured CMP pad dresser and associated methods |
| JP3527448B2 (ja) | 1999-12-20 | 2004-05-17 | 株式会社リード | Cmp研磨布用ドレッサー及びその製造方法 |
| US6293980B2 (en) * | 1999-12-20 | 2001-09-25 | Norton Company | Production of layered engineered abrasive surfaces |
| US6533645B2 (en) | 2000-01-18 | 2003-03-18 | Applied Materials, Inc. | Substrate polishing article |
| US6991528B2 (en) * | 2000-02-17 | 2006-01-31 | Applied Materials, Inc. | Conductive polishing article for electrochemical mechanical polishing |
| US6749485B1 (en) * | 2000-05-27 | 2004-06-15 | Rodel Holdings, Inc. | Hydrolytically stable grooved polishing pads for chemical mechanical planarization |
| US6524357B2 (en) * | 2000-06-30 | 2003-02-25 | Saint-Gobain Abrasives Technology Company | Process for coating superabrasive with metal |
| KR100853060B1 (ko) | 2000-08-08 | 2008-08-19 | 엘리먼트 씩스 (프티) 리미티드 | 다이아몬드를 포함하는 연마 제품을 생산하는 방법 |
| WO2002028598A1 (en) * | 2000-10-02 | 2002-04-11 | Rodel Holdings, Inc. | Method for conditioning polishing pads |
| WO2002028980A2 (en) * | 2000-10-06 | 2002-04-11 | 3M Innovative Properties Company | Agglomerate abrasive grain and a method of making the same |
| CN1249194C (zh) * | 2000-10-12 | 2006-04-05 | 六号元素(控股)公司 | 多晶磨料 |
| US20030207659A1 (en) | 2000-11-03 | 2003-11-06 | 3M Innovative Properties Company | Abrasive product and method of making and using the same |
| US7520800B2 (en) * | 2003-04-16 | 2009-04-21 | Duescher Wayne O | Raised island abrasive, lapping apparatus and method of use |
| US8545583B2 (en) * | 2000-11-17 | 2013-10-01 | Wayne O. Duescher | Method of forming a flexible abrasive sheet article |
| CN100361786C (zh) | 2000-12-21 | 2008-01-16 | 新日本制铁株式会社 | Cmp调节器、用于cmp调节器的硬质磨粒的排列方法以及cmp调节器的制造方法 |
| US6672943B2 (en) | 2001-01-26 | 2004-01-06 | Wafer Solutions, Inc. | Eccentric abrasive wheel for wafer processing |
| US6293856B1 (en) | 2001-03-20 | 2001-09-25 | Reuben Hertz | Disposable, multi-conduit particulate matter propelling apparatus |
| DE10139762A1 (de) * | 2001-08-13 | 2003-02-27 | Hilti Ag | Schleifscheibe |
| JP2003062748A (ja) * | 2001-08-24 | 2003-03-05 | Inoac Corp | 研磨用パッド |
| KR100428947B1 (ko) | 2001-09-28 | 2004-04-29 | 이화다이아몬드공업 주식회사 | 다이아몬드 공구 |
| KR100449630B1 (ko) * | 2001-11-13 | 2004-09-22 | 삼성전기주식회사 | 화학기계적 연마장치의 연마패드 컨디셔닝 장치 |
| JP2004025401A (ja) | 2002-06-27 | 2004-01-29 | Airtec Japan:Kk | ディスク状ダイヤモンド砥石 |
| US6872127B2 (en) * | 2002-07-11 | 2005-03-29 | Taiwan Semiconductor Manufacturing Co., Ltd | Polishing pad conditioning disks for chemical mechanical polisher |
| US6899592B1 (en) | 2002-07-12 | 2005-05-31 | Ebara Corporation | Polishing apparatus and dressing method for polishing tool |
| JP4216025B2 (ja) | 2002-09-09 | 2009-01-28 | 株式会社リード | 研磨布用ドレッサー及びそれを用いた研磨布のドレッシング方法 |
| US6915796B2 (en) * | 2002-09-24 | 2005-07-12 | Chien-Min Sung | Superabrasive wire saw and associated methods of manufacture |
| TWI241939B (en) * | 2002-10-25 | 2005-10-21 | Alex C Long | Producing method and structure of cutting and polishing plate |
| CN1532026A (zh) | 2003-03-19 | 2004-09-29 | 铨科光电材料股份有限公司 | 研磨垫整理器及其制造方法 |
| US20040192178A1 (en) | 2003-03-28 | 2004-09-30 | Barak Yardeni | Diamond conditioning of soft chemical mechanical planarization/polishing (CMP) polishing pads |
| US7367872B2 (en) | 2003-04-08 | 2008-05-06 | Applied Materials, Inc. | Conditioner disk for use in chemical mechanical polishing |
| CN100491077C (zh) | 2003-05-13 | 2009-05-27 | 中国砂轮企业股份有限公司 | 在制造中能个别调整磨粒的修整盘及其制造方法 |
| US7160178B2 (en) * | 2003-08-07 | 2007-01-09 | 3M Innovative Properties Company | In situ activation of a three-dimensional fixed abrasive article |
| US20050060941A1 (en) | 2003-09-23 | 2005-03-24 | 3M Innovative Properties Company | Abrasive article and methods of making the same |
| JP2005262341A (ja) * | 2004-03-16 | 2005-09-29 | Noritake Super Abrasive:Kk | Cmpパッドコンディショナー |
| US20050260939A1 (en) | 2004-05-18 | 2005-11-24 | Saint-Gobain Abrasives, Inc. | Brazed diamond dressing tool |
| US6945857B1 (en) * | 2004-07-08 | 2005-09-20 | Applied Materials, Inc. | Polishing pad conditioner and methods of manufacture and recycling |
| US20070060026A1 (en) * | 2005-09-09 | 2007-03-15 | Chien-Min Sung | Methods of bonding superabrasive particles in an organic matrix |
| US20060258276A1 (en) | 2005-05-16 | 2006-11-16 | Chien-Min Sung | Superhard cutters and associated methods |
| US7762872B2 (en) | 2004-08-24 | 2010-07-27 | Chien-Min Sung | Superhard cutters and associated methods |
| US7658666B2 (en) | 2004-08-24 | 2010-02-09 | Chien-Min Sung | Superhard cutters and associated methods |
| US7150677B2 (en) | 2004-09-22 | 2006-12-19 | Mitsubishi Materials Corporation | CMP conditioner |
| US7066795B2 (en) * | 2004-10-12 | 2006-06-27 | Applied Materials, Inc. | Polishing pad conditioner with shaped abrasive patterns and channels |
| KR100636793B1 (ko) | 2004-12-13 | 2006-10-23 | 이화다이아몬드공업 주식회사 | Cmp 패드용 컨디셔너 |
| US7169029B2 (en) | 2004-12-16 | 2007-01-30 | 3M Innovative Properties Company | Resilient structured sanding article |
| US7258708B2 (en) * | 2004-12-30 | 2007-08-21 | Chien-Min Sung | Chemical mechanical polishing pad dresser |
| KR100693251B1 (ko) * | 2005-03-07 | 2007-03-13 | 삼성전자주식회사 | 연마 속도와 연마 패드의 조도를 향상시킬 수 있는 패드 컨디셔너 및 이를 이용하는 화학기계적 연마 장치 |
| US20060254154A1 (en) * | 2005-05-12 | 2006-11-16 | Wei Huang | Abrasive tool and method of making the same |
| US8398466B2 (en) * | 2006-11-16 | 2013-03-19 | Chien-Min Sung | CMP pad conditioners with mosaic abrasive segments and associated methods |
| US8393934B2 (en) * | 2006-11-16 | 2013-03-12 | Chien-Min Sung | CMP pad dressers with hybridized abrasive surface and related methods |
| US7300338B2 (en) | 2005-09-22 | 2007-11-27 | Abrasive Technology, Inc. | CMP diamond conditioning disk |
| US7594845B2 (en) * | 2005-10-20 | 2009-09-29 | 3M Innovative Properties Company | Abrasive article and method of modifying the surface of a workpiece |
| KR100723436B1 (ko) | 2005-12-29 | 2007-05-30 | 삼성전자주식회사 | 연마패드의 컨디셔너 및 이를 구비하는 화학기계적연마장치 |
| US20080096479A1 (en) * | 2006-10-18 | 2008-04-24 | Chien-Min Sung | Low-melting point superabrasive tools and associated methods |
| US8393938B2 (en) * | 2007-11-13 | 2013-03-12 | Chien-Min Sung | CMP pad dressers |
| US20100203811A1 (en) | 2009-02-09 | 2010-08-12 | Araca Incorporated | Method and apparatus for accelerated wear testing of aggressive diamonds on diamond conditioning discs in cmp |
-
2005
- 2005-09-09 US US11/223,786 patent/US20070060026A1/en not_active Abandoned
-
2006
- 2006-09-01 CN CN2006800405675A patent/CN101528414B/zh not_active Expired - Fee Related
- 2006-09-01 WO PCT/US2006/034425 patent/WO2007032946A2/en not_active Ceased
- 2006-09-01 KR KR1020087008566A patent/KR20080065612A/ko not_active Withdrawn
- 2006-09-07 TW TW095133055A patent/TWI315691B/zh not_active IP Right Cessation
-
2007
- 2007-03-14 US US11/724,585 patent/US7690971B2/en not_active Expired - Lifetime
- 2007-05-16 US US11/804,221 patent/US7651386B2/en not_active Expired - Lifetime
-
2009
- 2009-12-01 US US12/628,859 patent/US7901272B2/en not_active Expired - Fee Related
-
2010
- 2010-03-02 US US12/715,583 patent/US8414362B2/en not_active Expired - Fee Related
-
2011
- 2011-02-04 US US13/021,350 patent/US20110212670A1/en not_active Abandoned
-
2013
- 2013-03-11 US US13/793,871 patent/US9902040B2/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI455794B (zh) * | 2008-02-20 | 2014-10-11 | Nippon Steel Materials Co Ltd | 研磨布用修整輪 |
Also Published As
| Publication number | Publication date |
|---|---|
| US20070060026A1 (en) | 2007-03-15 |
| US7651386B2 (en) | 2010-01-26 |
| CN101528414A (zh) | 2009-09-09 |
| WO2007032946A3 (en) | 2009-04-16 |
| WO2007032946A2 (en) | 2007-03-22 |
| US20100221990A1 (en) | 2010-09-02 |
| US7901272B2 (en) | 2011-03-08 |
| US20080171503A1 (en) | 2008-07-17 |
| US20100139174A1 (en) | 2010-06-10 |
| KR20080065612A (ko) | 2008-07-14 |
| US9902040B2 (en) | 2018-02-27 |
| US20160279758A1 (en) | 2016-09-29 |
| US20110212670A1 (en) | 2011-09-01 |
| US8414362B2 (en) | 2013-04-09 |
| TW200724308A (en) | 2007-07-01 |
| US7690971B2 (en) | 2010-04-06 |
| CN101528414B (zh) | 2012-12-19 |
| US20070264918A1 (en) | 2007-11-15 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| TWI315691B (en) | Methods of bonding superabrasive particles in an organic matrix | |
| PL1853718T3 (pl) | Przeciwciała anty-CD19 i zastosowania w onkologii | |
| GB2435657B (en) | Technique for use in wells | |
| ZA200800723B (en) | Structures formed in diamond | |
| EP1954445A4 (en) | ABRASIVE GRANULAR AGGLOMER AND METHOD OF MAKING SAME | |
| IL191820A0 (en) | Anti-ox40l antibodies and methods using same | |
| IL184728A0 (en) | Abrasive articles and methods for making same | |
| EP1813387A4 (en) | WHEEL | |
| GB0722863D0 (en) | Surface converings and related methods | |
| ZA200900058B (en) | Superabrasive materials and methods of manufacture | |
| EP1841558A4 (en) | METHOD AND COMPOSITION FOR ELECTROCHEMICAL MECHANICAL POLISHING | |
| IL191065A0 (en) | Activated split-polypeptides and methods for their production and use | |
| PT1768940T (pt) | Uma partícula encapsulada | |
| EP1973837A4 (en) | LIPID NANOPARTICLES | |
| GB2436812B (en) | Portable laminator | |
| GB0619096D0 (en) | Polishing composition and polishing method | |
| EP1958489A4 (en) | PARTICLE ACCOMMODATION AND METHOD THEREFOR | |
| SG131098A1 (en) | Polishing composition and polishing method | |
| TWI365899B (en) | Adhesive composition and method | |
| GB2413131B (en) | Composite particles | |
| EP1992451A4 (de) | Schleifwerkzeug mit hoher kornkonzentration | |
| IL191609A0 (en) | Nanoparticle and methods therefor | |
| EP1953216A4 (en) | composite | |
| GB0515625D0 (en) | Hydrogel particle | |
| GB0518478D0 (en) | Particles |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MM4A | Annulment or lapse of patent due to non-payment of fees |