[go: up one dir, main page]

TWI315691B - Methods of bonding superabrasive particles in an organic matrix - Google Patents

Methods of bonding superabrasive particles in an organic matrix

Info

Publication number
TWI315691B
TWI315691B TW095133055A TW95133055A TWI315691B TW I315691 B TWI315691 B TW I315691B TW 095133055 A TW095133055 A TW 095133055A TW 95133055 A TW95133055 A TW 95133055A TW I315691 B TWI315691 B TW I315691B
Authority
TW
Taiwan
Prior art keywords
methods
organic matrix
superabrasive particles
bonding superabrasive
bonding
Prior art date
Application number
TW095133055A
Other languages
English (en)
Other versions
TW200724308A (en
Inventor
Chien Min Sung
Original Assignee
Chien Min Sung
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Chien Min Sung filed Critical Chien Min Sung
Publication of TW200724308A publication Critical patent/TW200724308A/zh
Application granted granted Critical
Publication of TWI315691B publication Critical patent/TWI315691B/zh

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B1/00Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B53/00Devices or means for dressing or conditioning abrasive surfaces
    • B24B53/12Dressing tools; Holders therefor
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23FMAKING GEARS OR TOOTHED RACKS
    • B23F21/00Tools specially adapted for use in machines for manufacturing gear teeth
    • B23F21/03Honing tools
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B7/00Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
    • B24B7/20Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground
    • B24B7/22Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain
    • B24B7/228Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain for grinding thin, brittle parts, e.g. semiconductors, wafers
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24DTOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D18/00Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for
    • B24D18/0009Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for using moulds or presses
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24DTOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • B24D3/02Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
    • B24D3/20Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially organic

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
TW095133055A 2005-09-09 2006-09-07 Methods of bonding superabrasive particles in an organic matrix TWI315691B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US11/223,786 US20070060026A1 (en) 2005-09-09 2005-09-09 Methods of bonding superabrasive particles in an organic matrix

Publications (2)

Publication Number Publication Date
TW200724308A TW200724308A (en) 2007-07-01
TWI315691B true TWI315691B (en) 2009-10-11

Family

ID=37855801

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095133055A TWI315691B (en) 2005-09-09 2006-09-07 Methods of bonding superabrasive particles in an organic matrix

Country Status (5)

Country Link
US (7) US20070060026A1 (zh)
KR (1) KR20080065612A (zh)
CN (1) CN101528414B (zh)
TW (1) TWI315691B (zh)
WO (1) WO2007032946A2 (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI455794B (zh) * 2008-02-20 2014-10-11 Nippon Steel Materials Co Ltd 研磨布用修整輪

Families Citing this family (97)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9221154B2 (en) 1997-04-04 2015-12-29 Chien-Min Sung Diamond tools and methods for making the same
US9868100B2 (en) 1997-04-04 2018-01-16 Chien-Min Sung Brazed diamond tools and methods for making the same
US9238207B2 (en) 1997-04-04 2016-01-19 Chien-Min Sung Brazed diamond tools and methods for making the same
US9409280B2 (en) 1997-04-04 2016-08-09 Chien-Min Sung Brazed diamond tools and methods for making the same
US9199357B2 (en) 1997-04-04 2015-12-01 Chien-Min Sung Brazed diamond tools and methods for making the same
US9463552B2 (en) 1997-04-04 2016-10-11 Chien-Min Sung Superbrasvie tools containing uniformly leveled superabrasive particles and associated methods
US20050247486A1 (en) 2004-04-30 2005-11-10 Smith International, Inc. Modified cutters
US7658666B2 (en) * 2004-08-24 2010-02-09 Chien-Min Sung Superhard cutters and associated methods
US20060258276A1 (en) * 2005-05-16 2006-11-16 Chien-Min Sung Superhard cutters and associated methods
US7762872B2 (en) * 2004-08-24 2010-07-27 Chien-Min Sung Superhard cutters and associated methods
US20070060026A1 (en) * 2005-09-09 2007-03-15 Chien-Min Sung Methods of bonding superabrasive particles in an organic matrix
US8622787B2 (en) * 2006-11-16 2014-01-07 Chien-Min Sung CMP pad dressers with hybridized abrasive surface and related methods
US8974270B2 (en) 2011-05-23 2015-03-10 Chien-Min Sung CMP pad dresser having leveled tips and associated methods
US8398466B2 (en) * 2006-11-16 2013-03-19 Chien-Min Sung CMP pad conditioners with mosaic abrasive segments and associated methods
US8393934B2 (en) * 2006-11-16 2013-03-12 Chien-Min Sung CMP pad dressers with hybridized abrasive surface and related methods
US9724802B2 (en) 2005-05-16 2017-08-08 Chien-Min Sung CMP pad dressers having leveled tips and associated methods
TWI537097B (zh) * 2012-04-10 2016-06-11 宋健民 組合式修整器及其製法與化學機械平坦化應用
US9138862B2 (en) 2011-05-23 2015-09-22 Chien-Min Sung CMP pad dresser having leveled tips and associated methods
US8678878B2 (en) 2009-09-29 2014-03-25 Chien-Min Sung System for evaluating and/or improving performance of a CMP pad dresser
WO2007023949A1 (ja) * 2005-08-25 2007-03-01 Hiroshi Ishizuka 焼結体研磨部を持つ工具およびその製造方法
US7241206B1 (en) * 2006-02-17 2007-07-10 Chien-Min Sung Tools for polishing and associated methods
US7494404B2 (en) * 2006-02-17 2009-02-24 Chien-Min Sung Tools for polishing and associated methods
GB0612788D0 (en) * 2006-06-28 2006-08-09 Insectshield Ltd Pest control materials
TWI289093B (en) * 2006-07-26 2007-11-01 Kinik Co Method of manufacturing diamond disk
US20150017884A1 (en) * 2006-11-16 2015-01-15 Chien-Min Sung CMP Pad Dressers with Hybridized Abrasive Surface and Related Methods
US20080153398A1 (en) * 2006-11-16 2008-06-26 Chien-Min Sung Cmp pad conditioners and associated methods
US8393938B2 (en) * 2007-11-13 2013-03-12 Chien-Min Sung CMP pad dressers
TWI388402B (en) * 2007-12-06 2013-03-11 Methods for orienting superabrasive particles on a surface and associated tools
DE102008021636B3 (de) * 2008-04-30 2009-11-19 Esk Ceramics Gmbh & Co. Kg Verfahren zum Fixieren eines Verbindungselements auf einem Werkstück und Bauteil aus einem Werkstück mit einem darauf fixierten Verbindungselement
US8684310B2 (en) * 2009-01-29 2014-04-01 The Boeing Company Rigid tipped riblets
US8070558B2 (en) * 2009-03-04 2011-12-06 David Young Porcelain epoxy flooring and method for producing the same
JP5502987B2 (ja) 2009-03-24 2014-05-28 サンーゴバン アブレイシブズ,インコーポレイティド 化学機械平坦化パッドコンディショナとして使用するための研磨工具
EP2419243A1 (en) * 2009-04-17 2012-02-22 3M Innovative Properties Company Metal particle transfer article, metal modified substrate, and method of making and using the same
TWI380878B (zh) * 2009-04-21 2013-01-01 Sung Chien Min Combined Dressing Machine and Its Making Method
US8801497B2 (en) * 2009-04-30 2014-08-12 Rdc Holdings, Llc Array of abrasive members with resilient support
CN101879706B (zh) * 2009-05-08 2012-01-11 中国砂轮企业股份有限公司 钻石研磨碟及其制造方法
MY155563A (en) * 2009-06-02 2015-10-30 Saint Gobain Abrasives Inc Corrosion-resistant cmp conditioning tools and methods for making and using same
US20110097977A1 (en) * 2009-08-07 2011-04-28 Abrasive Technology, Inc. Multiple-sided cmp pad conditioning disk
EP2474025A2 (en) 2009-09-01 2012-07-11 Saint-Gobain Abrasives, Inc. Chemical mechanical polishing conditioner
US20110073094A1 (en) * 2009-09-28 2011-03-31 3M Innovative Properties Company Abrasive article with solid core and methods of making the same
US20110306275A1 (en) * 2010-06-13 2011-12-15 Nicolson Matthew D Component finishing tool
DE102010038324B4 (de) * 2010-07-23 2012-03-22 Hilti Aktiengesellschaft Vorrichtung zum Positionieren von Schneidpartikeln
US8777699B2 (en) 2010-09-21 2014-07-15 Ritedia Corporation Superabrasive tools having substantially leveled particle tips and associated methods
TW201219131A (en) * 2010-11-04 2012-05-16 Ritedia Corp comprising multiple stacked and bonded composite bodies each of which is formed by using a metal substrate to enclose a single layer of planar arrangement of diamond particles
JP6033233B2 (ja) * 2010-12-17 2016-11-30 スリーエム イノベイティブ プロパティズ カンパニー マルチサイズ粒子を有する転写物品及び方法
US20120171935A1 (en) 2010-12-20 2012-07-05 Diamond Innovations, Inc. CMP PAD Conditioning Tool
US8870985B2 (en) * 2010-12-30 2014-10-28 Saint-Gobain Abrasives, Inc. Abrasive particle and method of forming same
RU2569437C2 (ru) * 2011-02-16 2015-11-27 3М Инновейтив Пропертиз Компани Абразивное изделие с покрытием с вращательно ориентированными профилированными керамическими абразивными частицами и способ его изготовления
ITVR20110068A1 (it) * 2011-04-05 2012-10-06 Aros Srl Utensile di finitura di superfici lavorabili e procedimento per il suo ottenimento
KR101667943B1 (ko) 2012-01-10 2016-10-20 생-고뱅 세라믹스 앤드 플라스틱스, 인코포레이티드 복잡한 형상들을 가지는 연마 입자들 및 이의 성형 방법들
US9242342B2 (en) 2012-03-14 2016-01-26 Taiwan Semiconductor Manufacturing Company, Ltd. Manufacture and method of making the same
KR101813466B1 (ko) 2012-05-23 2017-12-29 생-고뱅 세라믹스 앤드 플라스틱스, 인코포레이티드 형상화 연마입자들 및 이의 형성방법
TWI530361B (zh) * 2012-11-07 2016-04-21 中國砂輪企業股份有限公司 化學機械研磨修整器及其製法
US20140134933A1 (en) 2012-11-09 2014-05-15 Di-Coat Corporation Abrading tools and methods of making same
CN103009238A (zh) * 2012-12-24 2013-04-03 江苏中晶光电有限公司 高效、无划伤、长寿命橡胶高分子材料抛光垫
US10030452B2 (en) 2013-03-14 2018-07-24 Smith International, Inc. Cutting structures for fixed cutter drill bit and other downhole cutting tools
US10309156B2 (en) 2013-03-14 2019-06-04 Smith International, Inc. Cutting structures for fixed cutter drill bit and other downhole cutting tools
CN107685296B (zh) 2013-03-29 2020-03-06 圣戈班磨料磨具有限公司 具有特定形状的磨粒、形成这种粒子的方法及其用途
CN203390712U (zh) * 2013-04-08 2014-01-15 宋健民 化学机械研磨修整器
ES2756849T3 (es) * 2013-08-07 2020-04-27 Reishauer Ag Herramienta rectificadora y procedimiento para su fabricación
RU2643004C2 (ru) 2013-09-30 2018-01-29 Сен-Гобен Серэмикс Энд Пластикс, Инк. Формованные абразивные частицы и способы их получения
CN103586792A (zh) * 2013-11-26 2014-02-19 常熟市巨力砂轮有限责任公司 陶瓷cbn砂轮的制备方法
TWI546158B (zh) * 2013-12-20 2016-08-21 中國砂輪企業股份有限公司 低磁性化學機械研磨修整器
MX380754B (es) 2013-12-31 2025-03-12 Saint Gobain Abrasives Inc Artículo abrasivo que incluye partículas abrasivas perfiladas.
TWI580523B (zh) * 2014-01-21 2017-05-01 中國砂輪企業股份有限公司 具有最佳磨料露出率之化學機械研磨修整器
US9771507B2 (en) 2014-01-31 2017-09-26 Saint-Gobain Ceramics & Plastics, Inc. Shaped abrasive particle including dopant material and method of forming same
KR101555874B1 (ko) * 2014-02-13 2015-09-30 새솔다이아몬드공업 주식회사 도트부를 구비한 cmp 패드 컨디셔너 및 그 제조방법
US10287825B2 (en) 2014-03-11 2019-05-14 Smith International, Inc. Cutting elements having non-planar surfaces and downhole cutting tools using such cutting elements
CA2945491C (en) 2014-04-14 2023-03-14 Saint-Gobain Ceramics & Plastics, Inc. Abrasive article including shaped abrasive particles
CN104084884B (zh) * 2014-07-03 2017-02-15 南京三超新材料股份有限公司 一种cmp片状研磨修整器及其生产方法
US10173300B1 (en) * 2014-10-06 2019-01-08 Us Synthetic Corporation Polycrystalline diamond compact, drill bit incorporating same, and methods of manufacture
US9914864B2 (en) 2014-12-23 2018-03-13 Saint-Gobain Ceramics & Plastics, Inc. Shaped abrasive particles and method of forming same
EP3277459B1 (en) 2015-03-31 2023-08-16 Saint-Gobain Abrasives, Inc. Fixed abrasive articles and methods of forming same
TWI634200B (zh) 2015-03-31 2018-09-01 聖高拜磨料有限公司 固定磨料物品及其形成方法
US9714083B2 (en) 2015-05-06 2017-07-25 The Boeing Company Color applications for aerodynamic microstructures
US9868135B2 (en) 2015-05-06 2018-01-16 The Boeing Company Aerodynamic microstructures having sub-microstructures
US9751618B2 (en) 2015-05-06 2017-09-05 The Boeing Company Optical effects for aerodynamic microstructures
ES2819375T3 (es) 2015-06-11 2021-04-15 Saint Gobain Ceramics & Plastics Inc Artículo abrasivo que incluye partículas abrasivas conformadas
US10105813B2 (en) 2016-04-20 2018-10-23 Seagate Technology Llc Lapping plate and method of making
US10010996B2 (en) * 2016-04-20 2018-07-03 Seagate Technology Llc Lapping plate and method of making
KR102390844B1 (ko) 2016-05-10 2022-04-26 생-고뱅 세라믹스 앤드 플라스틱스, 인코포레이티드 연마 입자 및 이의 형성 방법
EP3455320A4 (en) 2016-05-10 2019-11-20 Saint-Gobain Ceramics&Plastics, Inc. GRINDING PARTICLES AND METHOD FOR FORMING THEREOF
CN106041765A (zh) * 2016-05-31 2016-10-26 安徽砥钻砂轮有限公司 一种韧性高耐磨树脂切割砂轮及其制备方法
US10105877B2 (en) 2016-07-08 2018-10-23 The Boeing Company Multilayer riblet applique and methods of producing the same
US10563105B2 (en) 2017-01-31 2020-02-18 Saint-Gobain Ceramics & Plastics, Inc. Abrasive article including shaped abrasive particles
WO2019133724A1 (en) * 2017-12-28 2019-07-04 Sinmat, Inc. Cmp polishing pad conditioner
TWI674947B (zh) * 2018-04-19 2019-10-21 智勝科技股份有限公司 研磨墊、研磨墊的製造方法及研磨方法
US11911871B2 (en) * 2018-10-31 2024-02-27 Taiwan Semiconductor Manufacturing Company Ltd. Method of manufacturing composite article
CN110614593A (zh) * 2019-07-31 2019-12-27 陈祉序 一种打磨材料及打磨设备
CN114845838B (zh) 2019-12-27 2024-10-25 圣戈本陶瓷及塑料股份有限公司 磨料制品及其形成方法
KR102765343B1 (ko) 2019-12-27 2025-02-13 세인트-고바인 세라믹스 앤드 플라스틱스, 인크. 연마 물품 및 이의 형성 방법
EP4081609A4 (en) 2019-12-27 2024-06-05 Saint-Gobain Ceramics & Plastics Inc. Abrasive articles and methods of forming same
CN112223131A (zh) * 2020-11-02 2021-01-15 惠州市新科磨具有限公司 耐磨薄片树脂切割片及其制备方法
US11987021B2 (en) 2021-09-01 2024-05-21 The Boeing Company Multilayer riblet appliques
JP2025500060A (ja) 2021-12-30 2025-01-07 サンーゴバン アブレイシブズ,インコーポレイティド 研磨物品及びそれを形成する方法
CN114571576B (zh) * 2022-03-25 2023-07-21 浙江寰龙环境科技有限公司 一种固废制备陶粒生产线
CN119427209B (zh) * 2025-01-09 2025-04-08 浙江中钻新材料科技有限公司 具有平坦化尖端的cmp研磨垫修整器小锭自动精密布钻设备

Family Cites Families (148)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USRE20660E (en) * 1938-02-22 Method of coaxing and apparatus
US2027307A (en) * 1928-07-30 1936-01-07 Behr Manning Corp Method of coating and apparatus therefor and product
US2027087A (en) * 1928-10-03 1936-01-07 Behr Manning Corp Abrasive sheet and process of making the same
US2318570A (en) * 1930-01-20 1943-05-04 Minnesota Mining & Mfg Manufacture of abrasives
US1854071A (en) * 1930-07-14 1932-04-12 Behr Manning Corp Method of manufacturing abrasives
US2187624A (en) * 1932-10-10 1940-01-16 Carborundum Co Apparatus for the manufacture of coated webs
US2035521A (en) * 1932-10-26 1936-03-31 Carborundum Co Granular coated web and method of making same
US2194253A (en) * 1932-10-27 1940-03-19 Carborundum Co Coating apparatus
US2281558A (en) * 1933-03-06 1942-05-05 Minnesota Mining & Mfg Manufacture of abrasive articles and apparatus therefor
US2033991A (en) * 1935-07-09 1936-03-17 Carborundum Co Coating apparatus
ES272672A1 (es) * 1961-12-04 1962-05-01 The Osborn Manufacturing Company Mejoras en ruedas pulimentadoras
DE1502642A1 (de) * 1963-05-13 1969-06-04 Naradi Narodni Podnik Diamantformwerkzeug
JPS4823595B1 (zh) * 1969-06-17 1973-07-14
US3852078A (en) * 1970-12-24 1974-12-03 M Wakatsuki Mass of polycrystalline cubic system boron nitride and composites of polycrystalline cubic system boron nitride and other hard materials, and processes for manufacturing the same
US3767371A (en) * 1971-07-01 1973-10-23 Gen Electric Cubic boron nitride/sintered carbide abrasive bodies
US3743489A (en) * 1971-07-01 1973-07-03 Gen Electric Abrasive bodies of finely-divided cubic boron nitride crystals
US3819814A (en) * 1972-11-01 1974-06-25 Megadiamond Corp Plural molded diamond articles and their manufacture from diamond powders under high temperature and pressure
US4078906A (en) * 1976-09-29 1978-03-14 Elgin Diamond Products Co., Inc. Method for making an abrading tool with discontinuous diamond abrading surfaces
US4151154A (en) * 1976-09-29 1979-04-24 Union Carbide Corporation Silicon treated surfaces
US4188194A (en) * 1976-10-29 1980-02-12 General Electric Company Direct conversion process for making cubic boron nitride from pyrolytic boron nitride
IE48798B1 (en) * 1978-08-18 1985-05-15 De Beers Ind Diamond Method of making tool inserts,wire-drawing die blank and drill bit comprising such inserts
US4390647A (en) * 1981-02-27 1983-06-28 Ppg Industries, Inc. Non-starch containing aqueous sizing composition for glass fibers and sized glass fibers for use in reinforcing elastomers
US4525179A (en) * 1981-07-27 1985-06-25 General Electric Company Process for making diamond and cubic boron nitride compacts
US4828582A (en) * 1983-08-29 1989-05-09 General Electric Company Polycrystalline abrasive grit
US4797241A (en) * 1985-05-20 1989-01-10 Sii Megadiamond Method for producing multiple polycrystalline bodies
CA1290202C (en) * 1985-07-02 1991-10-08 Mikhail M. Girgis Chemically treated glass fibers
US4662896A (en) * 1986-02-19 1987-05-05 Strata Bit Corporation Method of making an abrasive cutting element
US4737162A (en) * 1986-08-12 1988-04-12 Alfred Grazen Method of producing electro-formed abrasive tools
US5195404A (en) * 1987-06-18 1993-03-23 Notter Theo A Drill bit with cutting insert
US4849602A (en) * 1988-08-12 1989-07-18 Iscar Ltd. Method for fabricating cutting pieces
US4923490A (en) 1988-12-16 1990-05-08 General Electric Company Novel grinding wheels utilizing polycrystalline diamond or cubic boron nitride grit
US5049165B1 (en) * 1989-01-30 1995-09-26 Ultimate Abrasive Syst Inc Composite material
US4925457B1 (en) * 1989-01-30 1995-09-26 Ultimate Abrasive Syst Inc Method for making an abrasive tool
US5190568B1 (en) * 1989-01-30 1996-03-12 Ultimate Abrasive Syst Inc Abrasive tool with contoured surface
US4954139A (en) 1989-03-31 1990-09-04 The General Electric Company Method for producing polycrystalline compact tool blanks with flat carbide support/diamond or CBN interfaces
GB9006703D0 (en) 1990-03-26 1990-05-23 De Beers Ind Diamond Abrasive product
EP0488623B1 (en) * 1990-11-26 1996-02-21 De Beers Industrial Diamond Division (Proprietary) Limited Cutting insert for a rotary cutting tool
GB9104366D0 (en) * 1991-03-01 1991-04-17 De Beers Ind Diamond Composite cutting insert
US5380390B1 (en) * 1991-06-10 1996-10-01 Ultimate Abras Systems Inc Patterned abrasive material and method
US5247765A (en) * 1991-07-23 1993-09-28 Abrasive Technology Europe, S.A. Abrasive product comprising a plurality of discrete composite abrasive pellets in a resilient resin matrix
US5194071A (en) * 1991-07-25 1993-03-16 General Electric Company Inc. Cubic boron nitride abrasive and process for preparing same
US5314513A (en) * 1992-03-03 1994-05-24 Minnesota Mining And Manufacturing Company Abrasive product having a binder comprising a maleimide binder
JPH0639729A (ja) 1992-05-29 1994-02-15 Canon Inc 精研削砥石およびその製造方法
US5243790A (en) 1992-06-25 1993-09-14 Abrasifs Vega, Inc. Abrasive member
GB9310500D0 (en) * 1993-05-21 1993-07-07 De Beers Ind Diamond Cutting tool
EP0664187B1 (en) * 1993-06-02 1999-10-13 Dai Nippon Printing Co., Ltd. Grinding tape and method of manufacturing the same
US5681612A (en) * 1993-06-17 1997-10-28 Minnesota Mining And Manufacturing Company Coated abrasives and methods of preparation
EP0702615B1 (en) 1993-06-17 1997-10-22 Minnesota Mining And Manufacturing Company Patterned abrading articles and methods making and using same
US5453106A (en) * 1993-10-27 1995-09-26 Roberts; Ellis E. Oriented particles in hard surfaces
US5486131A (en) 1994-01-04 1996-01-23 Speedfam Corporation Device for conditioning polishing pads
US5547417A (en) 1994-03-21 1996-08-20 Intel Corporation Method and apparatus for conditioning a semiconductor polishing pad
US5536202A (en) 1994-07-27 1996-07-16 Texas Instruments Incorporated Semiconductor substrate conditioning head having a plurality of geometries formed in a surface thereof for pad conditioning during chemical-mechanical polish
BR9509116A (pt) 1994-09-30 1997-11-18 Minnesota Mining & Mfg Artigo abrasivo revestido processos para produzir o mesmo e processo para desbastar uma peça dura
US5527424A (en) 1995-01-30 1996-06-18 Motorola, Inc. Preconditioner for a polishing pad and method for using the same
US6478831B2 (en) 1995-06-07 2002-11-12 Ultimate Abrasive Systems, L.L.C. Abrasive surface and article and methods for making them
US5560754A (en) 1995-06-13 1996-10-01 General Electric Company Reduction of stresses in the polycrystalline abrasive layer of a composite compact with in situ bonded carbide/carbide support
US5958794A (en) 1995-09-22 1999-09-28 Minnesota Mining And Manufacturing Company Method of modifying an exposed surface of a semiconductor wafer
US5852146A (en) * 1996-06-27 1998-12-22 Union Carbide Chemicals & Plastics Technology Corporation Catalyst for the production of olefin polymers
US6371838B1 (en) 1996-07-15 2002-04-16 Speedfam-Ipec Corporation Polishing pad conditioning device with cutting elements
US5851138A (en) * 1996-08-15 1998-12-22 Texas Instruments Incorporated Polishing pad conditioning system and method
US6206942B1 (en) * 1997-01-09 2001-03-27 Minnesota Mining & Manufacturing Company Method for making abrasive grain using impregnation, and abrasive articles
US6190240B1 (en) 1996-10-15 2001-02-20 Nippon Steel Corporation Method for producing pad conditioner for semiconductor substrates
US6039641A (en) * 1997-04-04 2000-03-21 Sung; Chien-Min Brazed diamond tools by infiltration
US6368198B1 (en) * 1999-11-22 2002-04-09 Kinik Company Diamond grid CMP pad dresser
US7124753B2 (en) * 1997-04-04 2006-10-24 Chien-Min Sung Brazed diamond tools and methods for making the same
US6884155B2 (en) * 1999-11-22 2005-04-26 Kinik Diamond grid CMP pad dresser
US7491116B2 (en) * 2004-09-29 2009-02-17 Chien-Min Sung CMP pad dresser with oriented particles and associated methods
US5921855A (en) 1997-05-15 1999-07-13 Applied Materials, Inc. Polishing pad having a grooved pattern for use in a chemical mechanical polishing system
JP3244454B2 (ja) 1997-06-05 2002-01-07 理化学研究所 切削研削両用工具
US5921856A (en) 1997-07-10 1999-07-13 Sp3, Inc. CVD diamond coated substrate for polishing pad conditioning head and method for making same
US6054183A (en) * 1997-07-10 2000-04-25 Zimmer; Jerry W. Method for making CVD diamond coated substrate for polishing pad conditioning head
US6024824A (en) * 1997-07-17 2000-02-15 3M Innovative Properties Company Method of making articles in sheet form, particularly abrasive articles
US6093280A (en) * 1997-08-18 2000-07-25 Lsi Logic Corporation Chemical-mechanical polishing pad conditioning systems
EP1019337B1 (en) * 1997-09-05 2002-09-25 Frenton Limited Method of manufacturing a diamond-silicon carbide-silicon composite and a composite produced by this method
US6027659A (en) * 1997-12-03 2000-02-22 Intel Corporation Polishing pad conditioning surface having integral conditioning points
US6196911B1 (en) 1997-12-04 2001-03-06 3M Innovative Properties Company Tools with abrasive segments
CA2261491C (en) 1998-03-06 2005-05-24 Smith International, Inc. Cutting element with improved polycrystalline material toughness and method for making same
EP0950470B1 (en) * 1998-04-13 2004-11-03 Toyoda Koki Kabushiki Kaisha Abrasive tool and the method of producing the same
US6123612A (en) 1998-04-15 2000-09-26 3M Innovative Properties Company Corrosion resistant abrasive article and method of making
JP3295888B2 (ja) 1998-04-22 2002-06-24 株式会社藤森技術研究所 ケミカルマシンポリッシャの研磨盤用研磨ドレッサ
KR19990081117A (ko) * 1998-04-25 1999-11-15 윤종용 씨엠피 패드 컨디셔닝 디스크 및 컨디셔너, 그 디스크의 제조방법, 재생방법 및 세정방법
US6354918B1 (en) 1998-06-19 2002-03-12 Ebara Corporation Apparatus and method for polishing workpiece
US6299508B1 (en) 1998-08-05 2001-10-09 3M Innovative Properties Company Abrasive article with integrally molded front surface protrusions containing a grinding aid and methods of making and using
US6346202B1 (en) * 1999-03-25 2002-02-12 Beaver Creek Concepts Inc Finishing with partial organic boundary layer
US6409904B1 (en) * 1998-12-01 2002-06-25 Nutool, Inc. Method and apparatus for depositing and controlling the texture of a thin film
US20020077037A1 (en) 1999-05-03 2002-06-20 Tietz James V. Fixed abrasive articles
GB2354470B (en) * 1999-05-24 2004-02-04 Honda Motor Co Ltd Cutting tip and manufacturing method thereof
US6319108B1 (en) * 1999-07-09 2001-11-20 3M Innovative Properties Company Metal bond abrasive article comprising porous ceramic abrasive composites and method of using same to abrade a workpiece
US6755720B1 (en) * 1999-07-15 2004-06-29 Noritake Co., Limited Vitrified bond tool and method of manufacturing the same
EP1075898A3 (en) 1999-08-13 2003-11-05 Mitsubishi Materials Corporation Dresser and dressing apparatus
US6419574B1 (en) 1999-09-01 2002-07-16 Mitsubishi Materials Corporation Abrasive tool with metal binder phase
US6281129B1 (en) 1999-09-20 2001-08-28 Agere Systems Guardian Corp. Corrosion-resistant polishing pad conditioner
TW467802B (en) * 1999-10-12 2001-12-11 Hunatech Co Ltd Conditioner for polishing pad and method for manufacturing the same
US7201645B2 (en) * 1999-11-22 2007-04-10 Chien-Min Sung Contoured CMP pad dresser and associated methods
JP3527448B2 (ja) 1999-12-20 2004-05-17 株式会社リード Cmp研磨布用ドレッサー及びその製造方法
US6293980B2 (en) * 1999-12-20 2001-09-25 Norton Company Production of layered engineered abrasive surfaces
US6533645B2 (en) 2000-01-18 2003-03-18 Applied Materials, Inc. Substrate polishing article
US6991528B2 (en) * 2000-02-17 2006-01-31 Applied Materials, Inc. Conductive polishing article for electrochemical mechanical polishing
US6749485B1 (en) * 2000-05-27 2004-06-15 Rodel Holdings, Inc. Hydrolytically stable grooved polishing pads for chemical mechanical planarization
US6524357B2 (en) * 2000-06-30 2003-02-25 Saint-Gobain Abrasives Technology Company Process for coating superabrasive with metal
KR100853060B1 (ko) 2000-08-08 2008-08-19 엘리먼트 씩스 (프티) 리미티드 다이아몬드를 포함하는 연마 제품을 생산하는 방법
WO2002028598A1 (en) * 2000-10-02 2002-04-11 Rodel Holdings, Inc. Method for conditioning polishing pads
WO2002028980A2 (en) * 2000-10-06 2002-04-11 3M Innovative Properties Company Agglomerate abrasive grain and a method of making the same
CN1249194C (zh) * 2000-10-12 2006-04-05 六号元素(控股)公司 多晶磨料
US20030207659A1 (en) 2000-11-03 2003-11-06 3M Innovative Properties Company Abrasive product and method of making and using the same
US7520800B2 (en) * 2003-04-16 2009-04-21 Duescher Wayne O Raised island abrasive, lapping apparatus and method of use
US8545583B2 (en) * 2000-11-17 2013-10-01 Wayne O. Duescher Method of forming a flexible abrasive sheet article
CN100361786C (zh) 2000-12-21 2008-01-16 新日本制铁株式会社 Cmp调节器、用于cmp调节器的硬质磨粒的排列方法以及cmp调节器的制造方法
US6672943B2 (en) 2001-01-26 2004-01-06 Wafer Solutions, Inc. Eccentric abrasive wheel for wafer processing
US6293856B1 (en) 2001-03-20 2001-09-25 Reuben Hertz Disposable, multi-conduit particulate matter propelling apparatus
DE10139762A1 (de) * 2001-08-13 2003-02-27 Hilti Ag Schleifscheibe
JP2003062748A (ja) * 2001-08-24 2003-03-05 Inoac Corp 研磨用パッド
KR100428947B1 (ko) 2001-09-28 2004-04-29 이화다이아몬드공업 주식회사 다이아몬드 공구
KR100449630B1 (ko) * 2001-11-13 2004-09-22 삼성전기주식회사 화학기계적 연마장치의 연마패드 컨디셔닝 장치
JP2004025401A (ja) 2002-06-27 2004-01-29 Airtec Japan:Kk ディスク状ダイヤモンド砥石
US6872127B2 (en) * 2002-07-11 2005-03-29 Taiwan Semiconductor Manufacturing Co., Ltd Polishing pad conditioning disks for chemical mechanical polisher
US6899592B1 (en) 2002-07-12 2005-05-31 Ebara Corporation Polishing apparatus and dressing method for polishing tool
JP4216025B2 (ja) 2002-09-09 2009-01-28 株式会社リード 研磨布用ドレッサー及びそれを用いた研磨布のドレッシング方法
US6915796B2 (en) * 2002-09-24 2005-07-12 Chien-Min Sung Superabrasive wire saw and associated methods of manufacture
TWI241939B (en) * 2002-10-25 2005-10-21 Alex C Long Producing method and structure of cutting and polishing plate
CN1532026A (zh) 2003-03-19 2004-09-29 铨科光电材料股份有限公司 研磨垫整理器及其制造方法
US20040192178A1 (en) 2003-03-28 2004-09-30 Barak Yardeni Diamond conditioning of soft chemical mechanical planarization/polishing (CMP) polishing pads
US7367872B2 (en) 2003-04-08 2008-05-06 Applied Materials, Inc. Conditioner disk for use in chemical mechanical polishing
CN100491077C (zh) 2003-05-13 2009-05-27 中国砂轮企业股份有限公司 在制造中能个别调整磨粒的修整盘及其制造方法
US7160178B2 (en) * 2003-08-07 2007-01-09 3M Innovative Properties Company In situ activation of a three-dimensional fixed abrasive article
US20050060941A1 (en) 2003-09-23 2005-03-24 3M Innovative Properties Company Abrasive article and methods of making the same
JP2005262341A (ja) * 2004-03-16 2005-09-29 Noritake Super Abrasive:Kk Cmpパッドコンディショナー
US20050260939A1 (en) 2004-05-18 2005-11-24 Saint-Gobain Abrasives, Inc. Brazed diamond dressing tool
US6945857B1 (en) * 2004-07-08 2005-09-20 Applied Materials, Inc. Polishing pad conditioner and methods of manufacture and recycling
US20070060026A1 (en) * 2005-09-09 2007-03-15 Chien-Min Sung Methods of bonding superabrasive particles in an organic matrix
US20060258276A1 (en) 2005-05-16 2006-11-16 Chien-Min Sung Superhard cutters and associated methods
US7762872B2 (en) 2004-08-24 2010-07-27 Chien-Min Sung Superhard cutters and associated methods
US7658666B2 (en) 2004-08-24 2010-02-09 Chien-Min Sung Superhard cutters and associated methods
US7150677B2 (en) 2004-09-22 2006-12-19 Mitsubishi Materials Corporation CMP conditioner
US7066795B2 (en) * 2004-10-12 2006-06-27 Applied Materials, Inc. Polishing pad conditioner with shaped abrasive patterns and channels
KR100636793B1 (ko) 2004-12-13 2006-10-23 이화다이아몬드공업 주식회사 Cmp 패드용 컨디셔너
US7169029B2 (en) 2004-12-16 2007-01-30 3M Innovative Properties Company Resilient structured sanding article
US7258708B2 (en) * 2004-12-30 2007-08-21 Chien-Min Sung Chemical mechanical polishing pad dresser
KR100693251B1 (ko) * 2005-03-07 2007-03-13 삼성전자주식회사 연마 속도와 연마 패드의 조도를 향상시킬 수 있는 패드 컨디셔너 및 이를 이용하는 화학기계적 연마 장치
US20060254154A1 (en) * 2005-05-12 2006-11-16 Wei Huang Abrasive tool and method of making the same
US8398466B2 (en) * 2006-11-16 2013-03-19 Chien-Min Sung CMP pad conditioners with mosaic abrasive segments and associated methods
US8393934B2 (en) * 2006-11-16 2013-03-12 Chien-Min Sung CMP pad dressers with hybridized abrasive surface and related methods
US7300338B2 (en) 2005-09-22 2007-11-27 Abrasive Technology, Inc. CMP diamond conditioning disk
US7594845B2 (en) * 2005-10-20 2009-09-29 3M Innovative Properties Company Abrasive article and method of modifying the surface of a workpiece
KR100723436B1 (ko) 2005-12-29 2007-05-30 삼성전자주식회사 연마패드의 컨디셔너 및 이를 구비하는 화학기계적연마장치
US20080096479A1 (en) * 2006-10-18 2008-04-24 Chien-Min Sung Low-melting point superabrasive tools and associated methods
US8393938B2 (en) * 2007-11-13 2013-03-12 Chien-Min Sung CMP pad dressers
US20100203811A1 (en) 2009-02-09 2010-08-12 Araca Incorporated Method and apparatus for accelerated wear testing of aggressive diamonds on diamond conditioning discs in cmp

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI455794B (zh) * 2008-02-20 2014-10-11 Nippon Steel Materials Co Ltd 研磨布用修整輪

Also Published As

Publication number Publication date
US20070060026A1 (en) 2007-03-15
US7651386B2 (en) 2010-01-26
CN101528414A (zh) 2009-09-09
WO2007032946A3 (en) 2009-04-16
WO2007032946A2 (en) 2007-03-22
US20100221990A1 (en) 2010-09-02
US7901272B2 (en) 2011-03-08
US20080171503A1 (en) 2008-07-17
US20100139174A1 (en) 2010-06-10
KR20080065612A (ko) 2008-07-14
US9902040B2 (en) 2018-02-27
US20160279758A1 (en) 2016-09-29
US20110212670A1 (en) 2011-09-01
US8414362B2 (en) 2013-04-09
TW200724308A (en) 2007-07-01
US7690971B2 (en) 2010-04-06
CN101528414B (zh) 2012-12-19
US20070264918A1 (en) 2007-11-15

Similar Documents

Publication Publication Date Title
TWI315691B (en) Methods of bonding superabrasive particles in an organic matrix
PL1853718T3 (pl) Przeciwciała anty-CD19 i zastosowania w onkologii
GB2435657B (en) Technique for use in wells
ZA200800723B (en) Structures formed in diamond
EP1954445A4 (en) ABRASIVE GRANULAR AGGLOMER AND METHOD OF MAKING SAME
IL191820A0 (en) Anti-ox40l antibodies and methods using same
IL184728A0 (en) Abrasive articles and methods for making same
EP1813387A4 (en) WHEEL
GB0722863D0 (en) Surface converings and related methods
ZA200900058B (en) Superabrasive materials and methods of manufacture
EP1841558A4 (en) METHOD AND COMPOSITION FOR ELECTROCHEMICAL MECHANICAL POLISHING
IL191065A0 (en) Activated split-polypeptides and methods for their production and use
PT1768940T (pt) Uma partícula encapsulada
EP1973837A4 (en) LIPID NANOPARTICLES
GB2436812B (en) Portable laminator
GB0619096D0 (en) Polishing composition and polishing method
EP1958489A4 (en) PARTICLE ACCOMMODATION AND METHOD THEREFOR
SG131098A1 (en) Polishing composition and polishing method
TWI365899B (en) Adhesive composition and method
GB2413131B (en) Composite particles
EP1992451A4 (de) Schleifwerkzeug mit hoher kornkonzentration
IL191609A0 (en) Nanoparticle and methods therefor
EP1953216A4 (en) composite
GB0515625D0 (en) Hydrogel particle
GB0518478D0 (en) Particles

Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees