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TWD209426S - 光罩傳送盒之底座 - Google Patents

光罩傳送盒之底座 Download PDF

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Publication number
TWD209426S
TWD209426S TW108304632F TW108304632F TWD209426S TW D209426 S TWD209426 S TW D209426S TW 108304632 F TW108304632 F TW 108304632F TW 108304632 F TW108304632 F TW 108304632F TW D209426 S TWD209426 S TW D209426S
Authority
TW
Taiwan
Prior art keywords
base
transfer box
mask transfer
designed
case
Prior art date
Application number
TW108304632F
Other languages
English (en)
Inventor
莊家和
薛新民
邱銘乾
Original Assignee
家登精密工業股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 家登精密工業股份有限公司 filed Critical 家登精密工業股份有限公司
Priority to TW108304632F priority Critical patent/TWD209426S/zh
Priority to US29/711,300 priority patent/USD965543S1/en
Publication of TWD209426S publication Critical patent/TWD209426S/zh

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Abstract

【物品用途】;本設計物品係為一種光罩傳送盒之底座，尤其是用於半導體製程中光罩傳送盒之底座，用於保護半導體晶片。;【設計說明】;本案創作光罩傳送盒之底座係為一新穎獨特之設計，藉由獨特地設計的光罩傳送盒之底座，可顯現出先前技藝未曾有過的視覺效果。;圖式所揭露之虛線部分，為本案不主張設計之部分。

Description

光罩傳送盒之底座
本設計物品係為一種光罩傳送盒之底座，尤其是用於半導體製程中光罩傳送盒之底座，用於保護半導體晶片。
本案創作光罩傳送盒之底座係為一新穎獨特之設計，藉由獨特地設計的光罩傳送盒之底座，可顯現出先前技藝未曾有過的視覺效果。
圖式所揭露之虛線部分，為本案不主張設計之部分。
TW108304632F 2019-08-02 2019-08-02 光罩傳送盒之底座 TWD209426S (zh)

Priority Applications (2)

Application Number Priority Date Filing Date Title
TW108304632F TWD209426S (zh) 2019-08-02 2019-08-02 光罩傳送盒之底座
US29/711,300 USD965543S1 (en) 2019-08-02 2019-10-30 Base for an ultraviolet light reticle transfer box

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW108304632F TWD209426S (zh) 2019-08-02 2019-08-02 光罩傳送盒之底座

Publications (1)

Publication Number Publication Date
TWD209426S true TWD209426S (zh) 2021-01-21

Family

ID=83440240

Family Applications (1)

Application Number Title Priority Date Filing Date
TW108304632F TWD209426S (zh) 2019-08-02 2019-08-02 光罩傳送盒之底座

Country Status (2)

Country Link
US (1) USD965543S1 (zh)
TW (1) TWD209426S (zh)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWD214306S (zh) 2021-07-02 2021-09-21 家登精密工業股份有限公司 光罩盒下蓋支撐件
TWD214307S (zh) 2021-07-02 2021-09-21 家登精密工業股份有限公司 光罩盒上蓋支撐件

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWD234768S (zh) * 2024-03-28 2024-11-11 家登精密工業股份有限公司 新北市土城區中央路4段2號9樓之5 (中華民國) 光罩盒

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWM467088U (zh) 2013-04-12 2013-12-01 Ming-Sheng Chen 光罩撐托結構
TW201524866A (zh) 2013-12-20 2015-07-01 Gudeng Prec Ind Co Ltd 應用於晶圓／光罩載具之塑膠組合物及應用彼之光罩傳送盒
TWM555966U (zh) 2017-10-31 2018-02-21 中勤實業股份有限公司 光罩盒
TW201827919A (zh) 2017-01-26 2018-08-01 家登精密工業股份有限公司 光罩盒
TWI666510B (zh) 2017-01-25 2019-07-21 家登精密工業股份有限公司 極紫外光光罩容器

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6338409B1 (en) * 2000-04-13 2002-01-15 International Business Machines Corporation Reticle SMIF pod in situ orientation
US6948619B2 (en) * 2002-07-05 2005-09-27 Taiwan Semiconductor Manufacturing Co., Ltd Reticle pod and reticle with cut areas
US7477358B2 (en) * 2004-09-28 2009-01-13 Nikon Corporation EUV reticle handling system and method
JP4710308B2 (ja) * 2004-10-29 2011-06-29 株式会社ニコン レチクル搬送装置、露光装置、及びレチクルの搬送方法
US7607543B2 (en) * 2005-02-27 2009-10-27 Entegris, Inc. Reticle pod with isolation system
KR101442264B1 (ko) * 2005-09-27 2014-09-22 엔테그리스, 아이엔씨. 레티클 포드
TWI414464B (zh) * 2011-01-11 2013-11-11 Gudeng Prec Ind Co Ltd 具有固定結構之極紫外光光罩儲存傳送盒
TWI501910B (zh) * 2011-11-17 2015-10-01 Gudeng Prec Ind Co Ltd 具有排水結構之極紫外光光罩儲存傳送盒
USD712364S1 (en) * 2012-05-09 2014-09-02 Gudeng Precision Industrial Co., Ltd. EUV pod
WO2014062956A1 (en) * 2012-10-19 2014-04-24 Entegris, Inc. Reticle pod with cover to baseplate alignment system
USD732482S1 (en) * 2013-03-01 2015-06-23 Randl Industries, Inc. Plaster ring
USD807303S1 (en) * 2016-09-06 2018-01-09 S.J. Electro Systems, Inc. Panel enclosure

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWM467088U (zh) 2013-04-12 2013-12-01 Ming-Sheng Chen 光罩撐托結構
TW201524866A (zh) 2013-12-20 2015-07-01 Gudeng Prec Ind Co Ltd 應用於晶圓／光罩載具之塑膠組合物及應用彼之光罩傳送盒
TWI666510B (zh) 2017-01-25 2019-07-21 家登精密工業股份有限公司 極紫外光光罩容器
TW201827919A (zh) 2017-01-26 2018-08-01 家登精密工業股份有限公司 光罩盒
TWM555966U (zh) 2017-10-31 2018-02-21 中勤實業股份有限公司 光罩盒

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWD214306S (zh) 2021-07-02 2021-09-21 家登精密工業股份有限公司 光罩盒下蓋支撐件
TWD214307S (zh) 2021-07-02 2021-09-21 家登精密工業股份有限公司 光罩盒上蓋支撐件

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Publication number Publication date
USD965543S1 (en) 2022-10-04

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