TWD203064S - 基板保持環 - Google Patents
基板保持環 Download PDFInfo
- Publication number
- TWD203064S TWD203064S TW108301324F TW108301324F TWD203064S TW D203064 S TWD203064 S TW D203064S TW 108301324 F TW108301324 F TW 108301324F TW 108301324 F TW108301324 F TW 108301324F TW D203064 S TWD203064 S TW D203064S
- Authority
- TW
- Taiwan
- Prior art keywords
- retaining ring
- substrate retaining
- design
- case
- item
- Prior art date
Links
- 239000000758 substrate Substances 0.000 title abstract description 5
- 230000000007 visual effect Effects 0.000 abstract description 2
- 238000000034 method Methods 0.000 abstract 1
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Abstract
【物品用途】;本案設計之物品係基板保持環。;【設計說明】;本案設計係新穎獨特之樣式，藉由獨特地設計基板保持環，可顯現出先前技藝所未有之視覺效果。
Description
本案設計之物品係基板保持環。
本案設計係新穎獨特之樣式，藉由獨特地設計基板保持環，可顯現出先前技藝所未有之視覺效果。
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2018026885F JP1639765S (ja) | 2018-12-10 | 2018-12-10 | 基板保持リング |
| JP2018-026885 | 2018-12-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TWD203064S true TWD203064S (zh) | 2020-03-01 |
Family
ID=82750133
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW108301324F TWD203064S (zh) | 2018-12-10 | 2019-03-08 | 基板保持環 |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP1639765S (zh) |
| TW (1) | TWD203064S (zh) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US12387913B2 (en) | 2022-07-08 | 2025-08-12 | Tosoh Smd, Inc. | Dynamic vacuum seal system for physical vapor deposition sputter applications |
-
2018
- 2018-12-10 JP JP2018026885F patent/JP1639765S/ja active Active
-
2019
- 2019-03-08 TW TW108301324F patent/TWD203064S/zh unknown
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US12387913B2 (en) | 2022-07-08 | 2025-08-12 | Tosoh Smd, Inc. | Dynamic vacuum seal system for physical vapor deposition sputter applications |
Also Published As
| Publication number | Publication date |
|---|---|
| JP1639765S (ja) | 2019-08-26 |
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