TW200809227A - Board inspecting method and board inspecting device - Google Patents
Board inspecting method and board inspecting device Download PDFInfo
- Publication number
- TW200809227A TW200809227A TW096121866A TW96121866A TW200809227A TW 200809227 A TW200809227 A TW 200809227A TW 096121866 A TW096121866 A TW 096121866A TW 96121866 A TW96121866 A TW 96121866A TW 200809227 A TW200809227 A TW 200809227A
- Authority
- TW
- Taiwan
- Prior art keywords
- terminals
- inspection
- contact
- terminal
- substrate
- Prior art date
Links
- 238000000034 method Methods 0.000 title claims abstract description 47
- 238000007689 inspection Methods 0.000 claims abstract description 158
- 239000000758 substrate Substances 0.000 claims description 116
- 238000012545 processing Methods 0.000 claims description 6
- 238000005259 measurement Methods 0.000 description 13
- 239000004065 semiconductor Substances 0.000 description 6
- 230000007547 defect Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 238000009413 insulation Methods 0.000 description 3
- 239000000523 sample Substances 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2855—Environmental, reliability or burn-in testing
- G01R31/2872—Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation
- G01R31/2879—Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation related to electrical aspects, e.g. to voltage or current supply or stimuli or to electrical loads
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
- G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
- G01R1/07364—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch
- G01R1/07385—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch using switching of signals between probe tips and test bed, i.e. the standard contact matrix which in its turn connects to the tester
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2855—Environmental, reliability or burn-in testing
- G01R31/286—External aspects, e.g. related to chambers, contacting devices or handlers
- G01R31/2863—Contacting devices, e.g. sockets, burn-in boards or mounting fixtures
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Environmental & Geological Engineering (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Engineering & Computer Science (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006179826A JP2008008773A (ja) | 2006-06-29 | 2006-06-29 | 基板検査方法及び基板検査装置 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TW200809227A true TW200809227A (en) | 2008-02-16 |
Family
ID=38845419
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW096121866A TW200809227A (en) | 2006-06-29 | 2007-06-15 | Board inspecting method and board inspecting device |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP2008008773A (fr) |
| KR (1) | KR20090031663A (fr) |
| TW (1) | TW200809227A (fr) |
| WO (1) | WO2008001651A1 (fr) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI404949B (zh) * | 2009-10-21 | 2013-08-11 | Nidec Read Corp | 檢查用治具之維修方法及基板檢查裝置 |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5260163B2 (ja) * | 2008-07-02 | 2013-08-14 | 日置電機株式会社 | 測定装置および測定方法 |
| JP5260164B2 (ja) * | 2008-07-04 | 2013-08-14 | 日置電機株式会社 | 測定装置および測定方法 |
| CN112689769B (zh) * | 2018-09-14 | 2025-03-04 | 日本电产理德股份有限公司 | 检查指示信息产生装置与方法、基板检查系统及存储介质 |
| TWI834728B (zh) * | 2018-11-09 | 2024-03-11 | 日商日本電產理德股份有限公司 | 檢查指示資訊產生裝置、基板檢查系統、檢查指示資訊產生方法以及檢查指示資訊產生程式 |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0419574A (ja) * | 1990-05-14 | 1992-01-23 | Fujitsu Ltd | プリント配線板の検査治具 |
| JPH0666832A (ja) * | 1992-08-24 | 1994-03-11 | Hitachi Ltd | プローブ及び検査装置 |
| JP3191467B2 (ja) * | 1993-01-12 | 2001-07-23 | 松下電器産業株式会社 | プリント基板検査データ作成方法 |
| JPH07191076A (ja) * | 1993-12-27 | 1995-07-28 | Fujitsu Ltd | 印刷配線板試験装置 |
| JP4544810B2 (ja) * | 2002-04-23 | 2010-09-15 | 日本特殊陶業株式会社 | 基板製造方法 |
-
2006
- 2006-06-29 JP JP2006179826A patent/JP2008008773A/ja active Pending
-
2007
- 2007-06-15 TW TW096121866A patent/TW200809227A/zh unknown
- 2007-06-19 WO PCT/JP2007/062337 patent/WO2008001651A1/fr not_active Ceased
- 2007-06-19 KR KR1020087026200A patent/KR20090031663A/ko not_active Withdrawn
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI404949B (zh) * | 2009-10-21 | 2013-08-11 | Nidec Read Corp | 檢查用治具之維修方法及基板檢查裝置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2008008773A (ja) | 2008-01-17 |
| WO2008001651A1 (fr) | 2008-01-03 |
| KR20090031663A (ko) | 2009-03-27 |
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