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TW200642933A - Substrate carrying device - Google Patents

Substrate carrying device

Info

Publication number
TW200642933A
TW200642933A TW094136703A TW94136703A TW200642933A TW 200642933 A TW200642933 A TW 200642933A TW 094136703 A TW094136703 A TW 094136703A TW 94136703 A TW94136703 A TW 94136703A TW 200642933 A TW200642933 A TW 200642933A
Authority
TW
Taiwan
Prior art keywords
substrates
carrying device
substrate carrying
cassette
transfer hand
Prior art date
Application number
TW094136703A
Other languages
Chinese (zh)
Other versions
TWI307675B (en
Inventor
Kensuke Hirata
Susumu Murayama
Original Assignee
Ishikawajima Harima Heavy Ind
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ishikawajima Harima Heavy Ind filed Critical Ishikawajima Harima Heavy Ind
Publication of TW200642933A publication Critical patent/TW200642933A/en
Application granted granted Critical
Publication of TWI307675B publication Critical patent/TWI307675B/zh

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/068—Stacking or destacking devices; Means for preventing damage to stacked sheets, e.g. spaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02—Articles
    • B65G2201/0294—Vehicle bodies
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/04—Arrangements of vacuum systems or suction cups
    • B65G2249/045—Details of suction cups suction cups
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67766—Mechanical parts of transfer devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67778—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Liquid Crystal (AREA)
  • Specific Conveyance Elements (AREA)
  • Manufacture Of Electron Tubes, Discharge Lamp Vessels, Lead-In Wires, And The Like (AREA)
  • Gas-Filled Discharge Tubes (AREA)
  • Warehouses Or Storage Devices (AREA)

Abstract

A substrate carrying device, comprising a cassette side conveyor (3) capable of carrying out substrates (W) from a cassette (CS), a process side transfer hand (5) capable of feeding the substrates (W) to a process device for processing the substrates (W), and a substrate delivery means (7) capable of delivering the substrates (W) between the cassette side conveyor (3) and the process side transfer hand (5).
TW094136703A 2005-06-02 2005-10-20 Substrate carrying device TW200642933A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005162225A JP4904722B2 (en) 2005-06-02 2005-06-02 Substrate transfer device

Publications (2)

Publication Number Publication Date
TW200642933A true TW200642933A (en) 2006-12-16
TWI307675B TWI307675B (en) 2009-03-21

Family

ID=37481322

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094136703A TW200642933A (en) 2005-06-02 2005-10-20 Substrate carrying device

Country Status (5)

Country Link
JP (1) JP4904722B2 (en)
KR (1) KR101226733B1 (en)
CN (1) CN101035725B (en)
TW (1) TW200642933A (en)
WO (1) WO2006129385A1 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI422521B (en) * 2011-03-02 2014-01-11 Au Optronics Corp Device for delivering glass substrate
TWI506716B (en) * 2009-12-01 2015-11-01 Tokyo Electron Ltd Substrate handling device and substrate processing system

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4840595B2 (en) * 2007-02-20 2011-12-21 株式会社Ｉｈｉ Board transfer machine
KR100973190B1 (en) * 2008-08-22 2010-07-30 주식회사 에스에프에이 Substrate transfer cassette, substrate transfer robot, and substrate transfer cassette system having them
KR101037063B1 (en) * 2008-12-30 2011-05-26 에이펫(주) Substrate processing apparatus
JP2011051748A (en) * 2009-09-03 2011-03-17 Murata Machinery Ltd Loader-unloader and loading-unloading method between carrier and device
JP5575689B2 (en) * 2011-04-01 2014-08-20 株式会社 ハリーズ Thin plate processing apparatus and method for manufacturing thin plate member
KR101520744B1 (en) * 2013-11-04 2015-05-15 코닝정밀소재 주식회사 Non-contact vibration cut device and method of processing an object
CN103950716B (en) * 2014-05-21 2016-07-27 芜湖万辰电光源科技有限公司 A conveying mechanism for a glass strip coating platform
JP6297989B2 (en) * 2015-01-27 2018-03-20 光洋サーモシステム株式会社 Transport device
CN107818938B (en) * 2016-09-13 2021-07-30 台湾积体电路制造股份有限公司 Transport system and method of transporting process components
CN108502543B (en) 2017-02-28 2020-01-24 上海微电子装备（集团）股份有限公司 A substrate transfer device and method
CN111347341A (en) * 2020-04-01 2020-06-30 长江存储科技有限责任公司 Semiconductor manufacturing apparatus and chemical mechanical polishing apparatus having the same
CN112158604A (en) * 2020-10-13 2021-01-01 南京多脉智能设备有限公司 Combined exhaust floating type friction-free glass panel transfer robot
JP7342840B2 (en) * 2020-11-05 2023-09-12 トヨタ自動車株式会社 Conveyance method and conveyance device for thin plate materials
CN118062576B (en) * 2024-04-25 2024-06-21 肇庆南玻节能玻璃有限公司 Flexible conveying system applied to glass production

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4558983A (en) * 1983-10-24 1985-12-17 Usm Corporation Automatic board handling mechanism
JPS60153306A (en) * 1984-01-21 1985-08-12 Fujitsu Ltd Device for supplying and discharging print circuit board
CA1234924A (en) * 1984-01-21 1988-04-05 Hideo Sakamoto Printed circuit board load-unload system with bypass route
JPH11227943A (en) * 1998-02-09 1999-08-24 Ishikawajima Harima Heavy Ind Co Ltd Substrate transfer device
JP4474672B2 (en) * 2000-04-24 2010-06-09 株式会社Ｉｈｉ Substrate transfer device
JP4153812B2 (en) * 2002-07-22 2008-09-24 大日本印刷株式会社 Color filter production line system

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI506716B (en) * 2009-12-01 2015-11-01 Tokyo Electron Ltd Substrate handling device and substrate processing system
TWI422521B (en) * 2011-03-02 2014-01-11 Au Optronics Corp Device for delivering glass substrate

Also Published As

Publication number Publication date
JP2006335518A (en) 2006-12-14
KR20080016518A (en) 2008-02-21
TWI307675B (en) 2009-03-21
CN101035725B (en) 2011-04-20
KR101226733B1 (en) 2013-01-25
WO2006129385A1 (en) 2006-12-07
JP4904722B2 (en) 2012-03-28
CN101035725A (en) 2007-09-12

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