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TW200603328A - Apparatus for carrying substrates and method of carrying substrates - Google Patents

Apparatus for carrying substrates and method of carrying substrates

Info

Publication number
TW200603328A
TW200603328A TW094116722A TW94116722A TW200603328A TW 200603328 A TW200603328 A TW 200603328A TW 094116722 A TW094116722 A TW 094116722A TW 94116722 A TW94116722 A TW 94116722A TW 200603328 A TW200603328 A TW 200603328A
Authority
TW
Taiwan
Prior art keywords
substrate
carrying
conveyance
processing
inclination angle
Prior art date
Application number
TW094116722A
Other languages
Chinese (zh)
Other versions
TWI359472B (en
Inventor
Yukinobu Nishibe
Akinori Iso
Satoru Hara
Yoichi Fuse
Original Assignee
Shibaura Mechatronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shibaura Mechatronics Corp filed Critical Shibaura Mechatronics Corp
Publication of TW200603328A publication Critical patent/TW200603328A/en
Application granted granted Critical
Publication of TWI359472B publication Critical patent/TWI359472B/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67745—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber characterized by movements or sequence of movements of transfer devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G43/00—Control devices, e.g. for safety, warning or fault-correcting
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/22—Devices influencing the relative position or the attitude of articles during transit by conveyors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/068—Stacking or destacking devices; Means for preventing damage to stacked sheets, e.g. spaces
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67271—Sorting devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67276—Production flow monitoring, e.g. for increasing throughput
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67712—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations the substrate being handled substantially vertically
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67718—Changing orientation of the substrate, e.g. from a horizontal position to a vertical position
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67778—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Mechanical Engineering (AREA)
  • Attitude Control For Articles On Conveyors (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Liquid Crystal (AREA)
  • Intermediate Stations On Conveyors (AREA)
  • Cleaning Or Drying Semiconductors (AREA)

Abstract

The present invention is used to provide a substrate conveyance device capable of efficiently transferring a substrate to a processing chamber when processing the substrate in the processing chamber by inclining the substrate. This substrate conveyance device is provided with a carrying-in transfer part for inclining the substrate fed in a horizontal condition at a predetermined inclination angle to transfer it to the processing chamber, an inclination conveyance part for receiving the substrate inclined at the predetermined angle in the carrying-in transfer part to convey it in a processing part at the inclination angle, and a carrying-out transfer part for receiving the substrate conveyed in the processing part chamber at the predetermined inclination angle and processed from the inclination conveyance part and returning it into a horizontal condition. At least either of the carrying-in transfer part and the carrying-out transfer part is constituted by first and second carrying-in or carrying-out conveyors which are sequentially arranged along the direction of conveyance of the substrate and can set inclination angle of the substrate separately and whose length is set to be shorter than length along the direction of conveyance of the substrate.
TW094116722A 2004-06-03 2005-05-23 Apparatus for carrying substrates and method of ca TWI359472B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004165846A JP4485853B2 (en) 2004-06-03 2004-06-03 Substrate transfer apparatus and transfer method

Publications (2)

Publication Number Publication Date
TW200603328A true TW200603328A (en) 2006-01-16
TWI359472B TWI359472B (en) 2012-03-01

Family

ID=35496368

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094116722A TWI359472B (en) 2004-06-03 2005-05-23 Apparatus for carrying substrates and method of ca

Country Status (4)

Country Link
JP (1) JP4485853B2 (en)
KR (1) KR101160534B1 (en)
CN (1) CN100470754C (en)
TW (1) TWI359472B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8502952B2 (en) 2007-04-14 2013-08-06 Industrial Technology Research Institute Color cholesteric liquid crystal display devices and fabrication methods thereof

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4593536B2 (en) * 2006-08-23 2010-12-08 大日本スクリーン製造株式会社 Attitude change device and substrate transfer device
JP4834604B2 (en) * 2007-05-10 2011-12-14 芝浦メカトロニクス株式会社 Substrate angle conversion device and substrate processing device
CN103065998A (en) * 2011-10-21 2013-04-24 东京毅力科创株式会社 Processing bench device and coating processing device using same
KR101303900B1 (en) * 2012-04-17 2013-09-05 세메스 주식회사 Apparatus for processing substrate and method thereof
TWI557056B (en) * 2013-04-24 2016-11-11 財團法人工業技術研究院 Delivery apparatus for roll to roll having protection of flexible substrate
CN104347352B (en) * 2013-07-31 2018-05-29 细美事有限公司 A kind of substrate board treatment and substrate processing method using same
CN108033270A (en) * 2017-11-23 2018-05-15 东旭科技集团有限公司 Glass substrate conveying device and its operating method and glass substrate transmission system
JP2019102540A (en) * 2017-11-29 2019-06-24 三星ダイヤモンド工業株式会社 Substrate unloading device
KR101867016B1 (en) 2018-03-22 2018-06-12 김민석 Wiping mop
KR20250085835A (en) * 2018-12-19 2025-06-12 도쿄엘렉트론가부시키가이샤 Substrate processing apparatus and substrate processing method

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5854427Y2 (en) * 1979-10-31 1983-12-12 シ−ケ−ディ株式会社 Multi-row bending conveyor
JPH11307493A (en) * 1998-04-17 1999-11-05 Dainippon Screen Mfg Co Ltd Substrate processing device
JP4339722B2 (en) * 2004-03-03 2009-10-07 大日本印刷株式会社 Substrate transfer system

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8502952B2 (en) 2007-04-14 2013-08-06 Industrial Technology Research Institute Color cholesteric liquid crystal display devices and fabrication methods thereof

Also Published As

Publication number Publication date
CN1705097A (en) 2005-12-07
JP4485853B2 (en) 2010-06-23
KR101160534B1 (en) 2012-06-28
JP2005343639A (en) 2005-12-15
CN100470754C (en) 2009-03-18
TWI359472B (en) 2012-03-01
KR20060049511A (en) 2006-05-19

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees