TW200644305A - Polymeric gate dielectrics for organic thin film transistors - Google Patents
Polymeric gate dielectrics for organic thin film transistorsInfo
- Publication number
- TW200644305A TW200644305A TW095110077A TW95110077A TW200644305A TW 200644305 A TW200644305 A TW 200644305A TW 095110077 A TW095110077 A TW 095110077A TW 95110077 A TW95110077 A TW 95110077A TW 200644305 A TW200644305 A TW 200644305A
- Authority
- TW
- Taiwan
- Prior art keywords
- thin film
- contact
- dielectric layer
- film transistors
- organic thin
- Prior art date
Links
- 239000010409 thin film Substances 0.000 title abstract 3
- 239000003989 dielectric material Substances 0.000 title 1
- 239000000463 material Substances 0.000 abstract 5
- 239000004065 semiconductor Substances 0.000 abstract 2
- 239000000758 substrate Substances 0.000 abstract 2
- 230000008021 deposition Effects 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
- 230000008022 sublimation Effects 0.000 abstract 1
- 238000000859 sublimation Methods 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K10/00—Organic devices specially adapted for rectifying, amplifying, oscillating or switching; Organic capacitors or resistors having potential barriers
- H10K10/40—Organic transistors
- H10K10/46—Field-effect transistors, e.g. organic thin-film transistors [OTFT]
- H10K10/462—Insulated gate field-effect transistors [IGFETs]
- H10K10/468—Insulated gate field-effect transistors [IGFETs] characterised by the gate dielectrics
- H10K10/471—Insulated gate field-effect transistors [IGFETs] characterised by the gate dielectrics the gate dielectric comprising only organic materials
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K10/00—Organic devices specially adapted for rectifying, amplifying, oscillating or switching; Organic capacitors or resistors having potential barriers
- H10K10/40—Organic transistors
- H10K10/46—Field-effect transistors, e.g. organic thin-film transistors [OTFT]
- H10K10/462—Insulated gate field-effect transistors [IGFETs]
- H10K10/468—Insulated gate field-effect transistors [IGFETs] characterised by the gate dielectrics
- H10K10/474—Insulated gate field-effect transistors [IGFETs] characterised by the gate dielectrics the gate dielectric comprising a multilayered structure
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F19/00—Integrated devices, or assemblies of multiple devices, comprising at least one photovoltaic cell covered by group H10F10/00, e.g. photovoltaic modules
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K10/00—Organic devices specially adapted for rectifying, amplifying, oscillating or switching; Organic capacitors or resistors having potential barriers
- H10K10/40—Organic transistors
- H10K10/46—Field-effect transistors, e.g. organic thin-film transistors [OTFT]
- H10K10/462—Insulated gate field-effect transistors [IGFETs]
- H10K10/466—Lateral bottom-gate IGFETs comprising only a single gate
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K77/00—Constructional details of devices covered by this subclass and not covered by groups H10K10/80, H10K30/80, H10K50/80 or H10K59/80
- H10K77/10—Substrates, e.g. flexible substrates
- H10K77/111—Flexible substrates
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K85/00—Organic materials used in the body or electrodes of devices covered by this subclass
- H10K85/60—Organic compounds having low molecular weight
- H10K85/615—Polycyclic condensed aromatic hydrocarbons, e.g. anthracene
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/549—Organic PV cells
Landscapes
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Thin Film Transistor (AREA)
- Formation Of Insulating Films (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US11/088,645 US20060214154A1 (en) | 2005-03-24 | 2005-03-24 | Polymeric gate dielectrics for organic thin film transistors and methods of making the same |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TW200644305A true TW200644305A (en) | 2006-12-16 |
Family
ID=36698995
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW095110077A TW200644305A (en) | 2005-03-24 | 2006-03-23 | Polymeric gate dielectrics for organic thin film transistors |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US20060214154A1 (zh) |
| EP (1) | EP1878066A1 (zh) |
| JP (1) | JP2008535218A (zh) |
| KR (1) | KR20070122203A (zh) |
| TW (1) | TW200644305A (zh) |
| WO (1) | WO2006104665A1 (zh) |
Families Citing this family (51)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100635567B1 (ko) * | 2004-06-29 | 2006-10-17 | 삼성에스디아이 주식회사 | 박막트랜지스터 및 그 제조 방법 |
| JP4502382B2 (ja) * | 2004-11-02 | 2010-07-14 | キヤノン株式会社 | 有機トランジスタ |
| KR101202980B1 (ko) * | 2005-04-06 | 2012-11-20 | 엘지디스플레이 주식회사 | 유기 반도체물질을 이용한 박막트랜지스터 어레이 기판 및그의 제조 방법 |
| US20060231908A1 (en) * | 2005-04-13 | 2006-10-19 | Xerox Corporation | Multilayer gate dielectric |
| GB0515175D0 (en) * | 2005-07-25 | 2005-08-31 | Plastic Logic Ltd | Flexible resistive touch screen |
| TWI261361B (en) * | 2005-08-31 | 2006-09-01 | Ind Tech Res Inst | Organic thin-film transistor structure and method for fabricating the same is provided |
| KR101219047B1 (ko) * | 2005-12-13 | 2013-01-07 | 삼성디스플레이 주식회사 | 표시장치와 이의 제조방법 |
| US8138075B1 (en) | 2006-02-06 | 2012-03-20 | Eberlein Dietmar C | Systems and methods for the manufacture of flat panel devices |
| WO2007099690A1 (ja) * | 2006-02-28 | 2007-09-07 | Pioneer Corporation | 有機トランジスタ及びその製造方法 |
| TW200737520A (en) * | 2006-03-17 | 2007-10-01 | Univ Nat Chiao Tung | Gate dielectric structure and an organic thin film transistor based thereon |
| TWI307124B (en) * | 2006-04-06 | 2009-03-01 | Ind Tech Res Inst | Method of fabricating a semiconductor device |
| GB0611032D0 (en) | 2006-06-05 | 2006-07-12 | Plastic Logic Ltd | Multi-touch active display keyboard |
| TWI305961B (en) * | 2006-08-14 | 2009-02-01 | Ind Tech Res Inst | Method of fabricating a electrical device |
| TWI323034B (en) * | 2006-12-25 | 2010-04-01 | Ind Tech Res Inst | Electronic devices with hybrid high-k dielectric and fabrication methods thereof |
| US11136667B2 (en) | 2007-01-08 | 2021-10-05 | Eastman Kodak Company | Deposition system and method using a delivery head separated from a substrate by gas pressure |
| US7795614B2 (en) * | 2007-04-02 | 2010-09-14 | Xerox Corporation | Device with phase-separated dielectric structure |
| US7754510B2 (en) | 2007-04-02 | 2010-07-13 | Xerox Corporation | Phase-separated dielectric structure fabrication process |
| GB0709093D0 (en) * | 2007-05-11 | 2007-06-20 | Plastic Logic Ltd | Electronic device incorporating parylene within a dielectric bilayer |
| US8182608B2 (en) * | 2007-09-26 | 2012-05-22 | Eastman Kodak Company | Deposition system for thin film formation |
| US20090081360A1 (en) | 2007-09-26 | 2009-03-26 | Fedorovskaya Elena A | Oled display encapsulation with the optical property |
| KR101581065B1 (ko) | 2008-04-24 | 2015-12-29 | 메르크 파텐트 게엠베하 | 전자 디바이스 |
| US7863694B2 (en) * | 2008-10-14 | 2011-01-04 | Xerox Corporation | Organic thin film transistors |
| US8154080B2 (en) * | 2008-12-05 | 2012-04-10 | Xerox Corporation | Dielectric structure having lower-k and higher-k materials |
| JP5429784B2 (ja) * | 2009-02-06 | 2014-02-26 | 独立行政法人産業技術総合研究所 | 有機薄膜トランジスタ及びその製造方法 |
| JP5630036B2 (ja) * | 2009-05-07 | 2014-11-26 | セイコーエプソン株式会社 | 有機トランジスター、有機トランジスターの製造方法、電気光学装置および電子機器 |
| TWI384616B (zh) * | 2009-09-11 | 2013-02-01 | Univ Nat Cheng Kung | 具備有機多介電層之記憶體元件 |
| US20110097487A1 (en) | 2009-10-27 | 2011-04-28 | Kerr Roger S | Fluid distribution manifold including bonded plates |
| US20110097492A1 (en) * | 2009-10-27 | 2011-04-28 | Kerr Roger S | Fluid distribution manifold operating state management system |
| US20110097489A1 (en) | 2009-10-27 | 2011-04-28 | Kerr Roger S | Distribution manifold including multiple fluid communication ports |
| US20110097488A1 (en) | 2009-10-27 | 2011-04-28 | Kerr Roger S | Fluid distribution manifold including mirrored finish plate |
| US20110097494A1 (en) | 2009-10-27 | 2011-04-28 | Kerr Roger S | Fluid conveyance system including flexible retaining mechanism |
| US20110097490A1 (en) * | 2009-10-27 | 2011-04-28 | Kerr Roger S | Fluid distribution manifold including compliant plates |
| US20110097493A1 (en) | 2009-10-27 | 2011-04-28 | Kerr Roger S | Fluid distribution manifold including non-parallel non-perpendicular slots |
| US20110097491A1 (en) | 2009-10-27 | 2011-04-28 | Levy David H | Conveyance system including opposed fluid distribution manifolds |
| TWI398952B (zh) * | 2009-11-19 | 2013-06-11 | Ind Tech Res Inst | 電晶體 |
| CN102110713B (zh) * | 2009-12-29 | 2013-08-07 | 财团法人工业技术研究院 | 晶体管 |
| JP2012038924A (ja) * | 2010-08-06 | 2012-02-23 | Sony Corp | 半導体装置、表示装置、および電子機器 |
| JP5811522B2 (ja) * | 2010-09-14 | 2015-11-11 | 株式会社リコー | 薄膜トランジスタの製造方法 |
| CN103403903B (zh) * | 2010-10-07 | 2017-02-15 | 乔治亚州技术研究公司 | 场效应晶体管及其制造方法 |
| WO2013131130A1 (en) * | 2012-03-06 | 2013-09-12 | Newcastle Innovation Limited | Organic thin film transistors and the use thereof in sensing applications |
| JP2013219172A (ja) | 2012-04-09 | 2013-10-24 | Sony Corp | 電子デバイス及びその製造方法並びに画像表示装置 |
| KR102073763B1 (ko) | 2012-06-27 | 2020-02-06 | 삼성디스플레이 주식회사 | 유기절연막 조성물, 유기절연막의 형성방법, 및 상기 유기절연막을 포함하는 유기박막트랜지스터 |
| GB2534600A (en) * | 2015-01-29 | 2016-08-03 | Cambridge Display Tech Ltd | Organic thin film transistors |
| KR101645176B1 (ko) * | 2015-02-26 | 2016-08-04 | 재단법인 나노기반소프트일렉트로닉스연구단 | 다공성 유기 반도체 층을 갖는 적층체 및 그를 포함하는 화학센서 |
| US9761817B2 (en) * | 2015-03-13 | 2017-09-12 | Corning Incorporated | Photo-patternable gate dielectrics for OFET |
| US9502435B2 (en) * | 2015-04-27 | 2016-11-22 | International Business Machines Corporation | Hybrid high electron mobility transistor and active matrix structure |
| US20170229554A1 (en) * | 2016-02-05 | 2017-08-10 | Applied Materials, Inc. | High-k dielectric materials utilized in display devices |
| CN114450812A (zh) * | 2019-06-24 | 2022-05-06 | 弗莱克英纳宝有限公司 | 通过调节机械性能对电介质的应力响应和粘附行为的改变 |
| CN113410385A (zh) * | 2021-06-15 | 2021-09-17 | 南方科技大学 | 一种低压浮栅光电存储器及制备方法 |
| CN114927615A (zh) * | 2022-05-06 | 2022-08-19 | 华南师范大学 | 一种有机场效应晶体管及其制备方法 |
| CN116096102A (zh) * | 2023-03-17 | 2023-05-09 | 南京邮电大学 | 一种基于氟化电介质的双介电层有机场效应晶体管的制备方法 |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CA2469912A1 (en) * | 2001-12-19 | 2003-06-26 | Avecia Limited | Organic field effect transistor with an organic dielectric |
| JP4247377B2 (ja) * | 2001-12-28 | 2009-04-02 | 独立行政法人産業技術総合研究所 | 薄膜トランジスタ及びその製造方法 |
| CN1186822C (zh) * | 2002-09-23 | 2005-01-26 | 中国科学院长春应用化学研究所 | 有机薄膜晶体管及制备方法 |
| US6905908B2 (en) * | 2002-12-26 | 2005-06-14 | Motorola, Inc. | Method of fabricating organic field effect transistors |
| US7098525B2 (en) * | 2003-05-08 | 2006-08-29 | 3M Innovative Properties Company | Organic polymers, electronic devices, and methods |
| KR100995451B1 (ko) * | 2003-07-03 | 2010-11-18 | 삼성전자주식회사 | 다층 구조의 게이트 절연막을 포함하는 유기 박막 트랜지스터 |
| US7399668B2 (en) * | 2004-09-30 | 2008-07-15 | 3M Innovative Properties Company | Method for making electronic devices having a dielectric layer surface treatment |
-
2005
- 2005-03-24 US US11/088,645 patent/US20060214154A1/en not_active Abandoned
-
2006
- 2006-03-09 WO PCT/US2006/008496 patent/WO2006104665A1/en not_active Ceased
- 2006-03-09 JP JP2008503019A patent/JP2008535218A/ja active Pending
- 2006-03-09 EP EP06737655A patent/EP1878066A1/en not_active Withdrawn
- 2006-03-09 KR KR1020077021762A patent/KR20070122203A/ko not_active Withdrawn
- 2006-03-23 TW TW095110077A patent/TW200644305A/zh unknown
Also Published As
| Publication number | Publication date |
|---|---|
| JP2008535218A (ja) | 2008-08-28 |
| WO2006104665A1 (en) | 2006-10-05 |
| EP1878066A1 (en) | 2008-01-16 |
| US20060214154A1 (en) | 2006-09-28 |
| KR20070122203A (ko) | 2007-12-28 |
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