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TW200507136A - Optimized position detection for detection method, alignment method, exposure method, device manufacturing method, and the device - Google Patents

Optimized position detection for detection method, alignment method, exposure method, device manufacturing method, and the device

Info

Publication number
TW200507136A
TW200507136A TW093104866A TW93104866A TW200507136A TW 200507136 A TW200507136 A TW 200507136A TW 093104866 A TW093104866 A TW 093104866A TW 93104866 A TW93104866 A TW 93104866A TW 200507136 A TW200507136 A TW 200507136A
Authority
TW
Taiwan
Prior art keywords
exposure
ega
correction
linear
alignment
Prior art date
Application number
TW093104866A
Other languages
English (en)
Other versions
TWI342057B (zh
Inventor
Shinichi Okita
Original Assignee
Nippon Kogaku Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Kogaku Kk filed Critical Nippon Kogaku Kk
Publication of TW200507136A publication Critical patent/TW200507136A/zh
Application granted granted Critical
Publication of TWI342057B publication Critical patent/TWI342057B/zh

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G03F9/7003—Alignment type or strategy, e.g. leveling, global alignment
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
    • G03F7/70491—Information management, e.g. software; Active and passive control, e.g. details of controlling exposure processes or exposure tool monitoring processes
    • G03F7/705—Modelling or simulating from physical phenomena up to complete wafer processes or whole workflow in wafer productions
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
    • G03F7/70605—Workpiece metrology
    • G03F7/706843—Metrology apparatus
    • G03F7/706845—Calibration, e.g. tool-to-tool calibration, beam alignment, spot position or focus
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
    • G03F7/70605—Workpiece metrology
    • G03F7/706843—Metrology apparatus
    • G03F7/706851—Detection branch, e.g. detector arrangements, polarisation control, wavelength control or dark/bright field detection
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70775—Position control, e.g. interferometers or encoders for determining the stage position

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
TW093104866A 2003-02-26 2004-02-26 Optimized position detection for detection method, alignment method, exposure method, device manufacturing method, and the device TW200507136A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003049421A JP2004265957A (ja) 2003-02-26 2003-02-26 最適位置検出式の検出方法、位置合わせ方法、露光方法、デバイス製造方法及びデバイス

Publications (2)

Publication Number Publication Date
TW200507136A true TW200507136A (en) 2005-02-16
TWI342057B TWI342057B (zh) 2011-05-11

Family

ID=32923308

Family Applications (1)

Application Number Title Priority Date Filing Date
TW093104866A TW200507136A (en) 2003-02-26 2004-02-26 Optimized position detection for detection method, alignment method, exposure method, device manufacturing method, and the device

Country Status (7)

Country Link
US (1) US20060040191A1 (zh)
EP (1) EP1603153B1 (zh)
JP (1) JP2004265957A (zh)
KR (1) KR101022680B1 (zh)
CN (1) CN1751378B (zh)
TW (1) TW200507136A (zh)
WO (1) WO2004077534A1 (zh)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI382187B (zh) * 2008-05-27 2013-01-11 Aerospace Ind Dev Corp 磁浮自動逆向工程設備及其檢測之方法
TWI580459B (zh) * 2015-07-01 2017-05-01 三菱電機股份有限公司 線量分布演算裝置、粒子線治療裝置，及線量分布演算方法
TWI740266B (zh) * 2018-11-20 2021-09-21 新加坡商先進科技新加坡有限公司 檢查鍵合的半導體晶片的設備和方法

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KR101060982B1 (ko) * 2003-11-28 2011-08-31 가부시키가이샤 니콘 노광 방법 및 디바이스 제조 방법, 노광 장치, 그리고 프로그램을 기록한 컴퓨터 판독가능 기록 매체
EP1796136B1 (en) * 2004-08-19 2015-09-30 Nikon Corporation Alignment information display method, program thereof, alignment method, exposure method, device manufacturing method, display system, display device, program, and measurement/inspection device
KR101133490B1 (ko) * 2004-09-14 2012-04-23 가부시키가이샤 니콘 보정 방법 및 노광 장치
JP2006148013A (ja) * 2004-11-24 2006-06-08 Nikon Corp 位置合わせ方法及び露光方法
US7126669B2 (en) * 2004-12-27 2006-10-24 Asml Netherlands B.V. Method and system for automated process correction using model parameters, and lithographic apparatus using such method and system
DE102005006239A1 (de) * 2005-02-10 2006-08-17 Leica Microsystems Cms Gmbh Vorrichtung zur Einstellung der Divergenz und/oder Konvergenz eines Lichtstrahls
EP1744217B1 (en) 2005-07-12 2012-03-14 ASML Netherlands B.V. Method of selecting a grid model for correcting grid deformations in a lithographic apparatus and lithographic assembly using the same
KR101440630B1 (ko) * 2006-01-26 2014-09-15 가부시키가이샤 니콘 중첩 관리 방법 및 장치, 처리 장치, 측정 장치 및 노광 장치, 디바이스 제조 시스템 및 디바이스 제조 방법, 및 정보 기록 매체
KR100724579B1 (ko) 2006-02-01 2007-06-04 삼성전자주식회사 웨이퍼 프리 얼라인먼트 유니트를 갖는 노광설비 및 이를이용한 웨이퍼 프리 얼라인먼트 방법
WO2007129688A1 (ja) * 2006-05-10 2007-11-15 Mejiro Precision, Inc. 投影露光装置及び投影露光方法
JP2009094265A (ja) * 2007-10-09 2009-04-30 Canon Inc マーク位置検出方法および装置
JP5264406B2 (ja) * 2008-10-22 2013-08-14 キヤノン株式会社 露光装置、露光方法およびデバイスの製造方法
US9052604B2 (en) * 2008-11-06 2015-06-09 Micron Technology, Inc. Photolithography systems and associated alignment correction methods
US8260449B2 (en) 2008-11-06 2012-09-04 Micron Technology, Inc. Photolithography systems and associated methods of overlay error correction
JP2010186918A (ja) * 2009-02-13 2010-08-26 Nikon Corp アライメント方法、露光方法及び露光装置、デバイス製造方法、並びに露光システム
US7977655B2 (en) * 2009-05-21 2011-07-12 Taiwan Semiconductor Manufacturing Company, Ltd. Method and system of monitoring E-beam overlay and providing advanced process control
WO2011087129A1 (ja) * 2010-01-18 2011-07-21 株式会社ニコン 露光方法、露光装置、及びデバイス製造方法
JP2012089591A (ja) * 2010-10-18 2012-05-10 Hitachi High-Technologies Corp 真空処理装置及び真空処理方法
CN103365124B (zh) * 2012-03-31 2015-01-21 中芯国际集成电路制造(上海)有限公司 曝光对准方法
CN102929105A (zh) * 2012-11-13 2013-02-13 美迪亚印刷设备（杭州）有限公司 曝光质量检测方法
US9735067B2 (en) 2013-11-27 2017-08-15 Tokyo Electron Limited Substrate tuning system and method using optical projection
US9645391B2 (en) 2013-11-27 2017-05-09 Tokyo Electron Limited Substrate tuning system and method using optical projection
JP6418744B2 (ja) * 2014-01-23 2018-11-07 キヤノン株式会社 パターン形成方法、リソグラフィ装置およびシステム、ならびに物品製造方法
WO2017060054A1 (en) 2015-10-08 2017-04-13 Asml Netherlands B.V. Method of controlling a lithographic apparatus and device manufacturing method, control system for a lithographic apparatus and lithographic apparatus
KR102207155B1 (ko) * 2016-07-19 2021-01-25 어플라이드 머티어리얼스, 인코포레이티드 구분적 정렬 모델링 방법
US10692227B2 (en) 2017-01-05 2020-06-23 Kla-Tencor Corporation Determination of sampling maps for alignment measurements based on reduction of out of specification points
JP7023062B2 (ja) * 2017-07-24 2022-02-21 株式会社荏原製作所 基板研磨装置及び方法
CN109146956B (zh) * 2018-08-09 2021-11-16 厦门市计量检定测试院 一种视觉定位系统的线性误差修正系数获取方法
JP7369529B2 (ja) * 2019-02-28 2023-10-26 株式会社オーク製作所 露光装置およびアライメント方法
CN110045582B (zh) * 2019-04-19 2020-12-18 东莞市多普光电设备有限公司 一种基于数字微镜ldi的装置及倾斜扫描方法
TWI738510B (zh) * 2020-09-15 2021-09-01 倍利科技股份有限公司 半導體元件圖像疊合方法
CN113178408A (zh) * 2021-05-28 2021-07-27 重庆翰博显示科技研发中心有限公司 一种微型电子组件排料转移定位装置及其工作方法
JP2025015221A (ja) * 2023-07-20 2025-01-30 株式会社ニューフレアテクノロジー ステージ位置計測システムの非線形誤差測定方法

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US5561606A (en) * 1991-08-30 1996-10-01 Nikon Corporation Method for aligning shot areas on a substrate
US5525808A (en) * 1992-01-23 1996-06-11 Nikon Corporaton Alignment method and alignment apparatus with a statistic calculation using a plurality of weighted coordinate positions
JP3287047B2 (ja) * 1993-02-08 2002-05-27 株式会社ニコン 位置合わせ方法、その位置合わせ方法を用いた露光方法、その露光方法を用いたデバイス製造方法、そのデバイス製造方法で製造されたデバイス、並びに位置合わせ装置、その位置合わせ装置を備えた露光装置
JP3219217B2 (ja) * 1993-01-22 2001-10-15 株式会社ニコン 位置合わせ方法及び装置、並びに露光方法及び装置
JP3258178B2 (ja) * 1994-09-27 2002-02-18 株式会社東芝 位置合わせ方法
JPH09115817A (ja) * 1995-10-13 1997-05-02 Nikon Corp 露光方法及び装置
JP3634487B2 (ja) * 1996-02-09 2005-03-30 キヤノン株式会社 位置合せ方法、位置合せ装置、および露光装置
JP3595707B2 (ja) * 1998-10-23 2004-12-02 キヤノン株式会社 露光装置および露光方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI382187B (zh) * 2008-05-27 2013-01-11 Aerospace Ind Dev Corp 磁浮自動逆向工程設備及其檢測之方法
TWI580459B (zh) * 2015-07-01 2017-05-01 三菱電機股份有限公司 線量分布演算裝置、粒子線治療裝置，及線量分布演算方法
TWI740266B (zh) * 2018-11-20 2021-09-21 新加坡商先進科技新加坡有限公司 檢查鍵合的半導體晶片的設備和方法

Also Published As

Publication number Publication date
CN1751378B (zh) 2010-06-23
CN1751378A (zh) 2006-03-22
KR20050098963A (ko) 2005-10-12
KR101022680B1 (ko) 2011-03-22
WO2004077534A1 (ja) 2004-09-10
TWI342057B (zh) 2011-05-11
EP1603153A4 (en) 2008-07-09
US20060040191A1 (en) 2006-02-23
EP1603153B1 (en) 2013-05-01
EP1603153A1 (en) 2005-12-07
JP2004265957A (ja) 2004-09-24

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Legal Events

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MM4A Annulment or lapse of patent due to non-payment of fees