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TW200303803A - Method to manufacture the rotor of a friction-vacuum-pump and the rotor manufactured by this method - Google Patents

Method to manufacture the rotor of a friction-vacuum-pump and the rotor manufactured by this method Download PDF

Info

Publication number
TW200303803A
TW200303803A TW092104789A TW92104789A TW200303803A TW 200303803 A TW200303803 A TW 200303803A TW 092104789 A TW092104789 A TW 092104789A TW 92104789 A TW92104789 A TW 92104789A TW 200303803 A TW200303803 A TW 200303803A
Authority
TW
Taiwan
Prior art keywords
rotor
pump
blade
circumferential groove
grooves
Prior art date
Application number
TW092104789A
Other languages
English (en)
Chinese (zh)
Inventor
Christian Beyer
Heinz Englander
Peter Klingner
Martin Laerbusch
Original Assignee
Leybold Vakuum Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Vakuum Gmbh filed Critical Leybold Vakuum Gmbh
Publication of TW200303803A publication Critical patent/TW200303803A/zh

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/32—Rotors specially for elastic fluids for axial flow pumps
    • F04D29/321—Rotors specially for elastic fluids for axial flow pumps for axial flow compressors
    • F04D29/324—Blades

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
TW092104789A 2002-03-08 2003-03-06 Method to manufacture the rotor of a friction-vacuum-pump and the rotor manufactured by this method TW200303803A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE10210404A DE10210404A1 (de) 2002-03-08 2002-03-08 Verfahren zur Herstellung des Rotors einer Reibungsvakuumpumpe sowie nach diesem Verfahren hergestellter Rotor

Publications (1)

Publication Number Publication Date
TW200303803A true TW200303803A (en) 2003-09-16

Family

ID=27762820

Family Applications (1)

Application Number Title Priority Date Filing Date
TW092104789A TW200303803A (en) 2002-03-08 2003-03-06 Method to manufacture the rotor of a friction-vacuum-pump and the rotor manufactured by this method

Country Status (7)

Country Link
US (1) US20050220606A1 (fr)
EP (1) EP1483507A1 (fr)
JP (1) JP2005519236A (fr)
AU (1) AU2003218990A1 (fr)
DE (1) DE10210404A1 (fr)
TW (1) TW200303803A (fr)
WO (1) WO2003076809A1 (fr)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10053664A1 (de) * 2000-10-28 2002-05-08 Leybold Vakuum Gmbh Mechanische kinetische Vakuumpumpe
DE502007003011D1 (de) * 2006-04-29 2010-04-15 Oerlikon Leybold Vacuum Gmbh Verfahren zur herstellung von rotoren oder statoren einer turbomolekularpumpe
GB2498816A (en) * 2012-01-27 2013-07-31 Edwards Ltd Vacuum pump
DE102013207269A1 (de) * 2013-04-22 2014-10-23 Pfeiffer Vacuum Gmbh Statorelement für eine Holweckpumpstufe, Vakuumpumpe mit einer Holweckpumpstufe und Verfahren zur Herstellung eines Statorelements für eine Holweckpumpstufe
DE102013219043A1 (de) 2013-09-23 2015-03-26 Oerlikon Leybold Vacuum Gmbh Legierungen von Rotoren einer Turbomolekularpumpe
DE102013219050B3 (de) * 2013-09-23 2015-01-22 Oerlikon Leybold Vacuum Gmbh Hochleistungsrotoren einer Turbomolekularpumpe
EP3093496B1 (fr) * 2015-05-15 2019-03-06 Pfeiffer Vacuum Gmbh Rotor pour pompe à vide
CN106401991A (zh) * 2016-08-31 2017-02-15 四川九天真空科技股份有限公司 一种分子泵转子及其制造方法
EP3670924B1 (fr) * 2019-11-19 2021-11-17 Pfeiffer Vacuum Gmbh Pompe à vide et procédé de fabrication d'une telle pompe à vide
JP2021173257A (ja) * 2020-04-28 2021-11-01 株式会社島津製作所 ターボ分子ポンプおよびターボ分子ポンプのステータ
JP7396209B2 (ja) * 2020-06-03 2023-12-12 株式会社島津製作所 ターボ分子ポンプ、ターボ分子ポンプのロータおよびステータ
JP7531313B2 (ja) * 2020-06-05 2024-08-09 エドワーズ株式会社 真空ポンプおよび真空ポンプの回転体

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SU1152308A1 (ru) * 1983-09-23 1990-05-15 A D Anishin Способ изготовления лопаточного диска турбомолекулярного насоса
JPS63173895A (ja) * 1987-01-12 1988-07-18 Mitsubishi Electric Corp タ−ボ分子ポンプのロ−タ製造方法
JPH01195992A (ja) * 1988-01-30 1989-08-07 Naoto Ibarada ターボ分子ポンプの動翼
FI894271A7 (fi) * 1988-02-26 1989-09-11 Sholokhov Valery B Turbomolekulaarinen tyhjöpumppu
DE19627921A1 (de) * 1996-07-11 1998-01-15 Leybold Vakuum Gmbh Verfahren zum Wuchten eines Rotors sowie für die Durchführung dieses Verfahrens geeigneter Rotor
IT1293907B1 (it) * 1997-05-28 1999-03-11 Varian Spa Procedimento di fresatura di rotori di pompe turbomolecolari con inglobamento in resina del particolare da fresare.
DE19846188A1 (de) * 1998-10-07 2000-04-13 Leybold Vakuum Gmbh Reibungsvakuumpumpe mit Stator und Rotor
DE19924616C2 (de) * 1999-05-28 2001-04-19 Bornemann J H Gmbh Verfahren zur Herstellung von Rotoren
DE10102341A1 (de) * 2001-01-19 2002-08-08 Ralf Steffens Profilkontur einer Schraubenspindelpumpe

Also Published As

Publication number Publication date
DE10210404A1 (de) 2003-09-18
AU2003218990A1 (en) 2003-09-22
US20050220606A1 (en) 2005-10-06
JP2005519236A (ja) 2005-06-30
EP1483507A1 (fr) 2004-12-08
WO2003076809A1 (fr) 2003-09-18

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