SU1452194A1 - Method of applying polymwr coatings in vacuum - Google Patents

Abstract

The invention can be used to produce coatings that are resistant to environmental influences. The environment. The purpose of the invention is to increase the efficiency of use of the source material by reducing unproductive losses. Saturated vapors from steam generator 1 are introduced into a glow discharge area of a flat configuration. This leads to the formation of a flat front of the flow of the working substance in the plane of the mesh cathode 4. On the substrate 5 a polymer coating is formed, the growth of which is determined both by the deposition of the formed flow of the starting material and by the effect of actively acting glow-discharge plasma. 1 tab., 1 Il.

Description

I

The invention relates to a technology for producing polymer coatings in vacuum on products to increase the resistance to environmental exposure with high mechanical, dielectric, friction and zionic properties of the surface and can be used to apply coatings on the information carrier and microelectronics design elements.

The aim of the invention is to repeat. improvement in the efficiency of use of the source material by reducing unproductive losses.

The drawing shows an installation diagram j explaining the proposed method for applying polymer coatings in vacuum.

The installation includes a steam generator 1, a steam pipe 2 connecting the steam generator 1 with the anode 3, the mesh plba cathode 4, behind which the substrate 5 is located. The anode 3 and the cathode 4 are plane-parallel.

The introduction of saturated vapors of the source material into the glow discharge region of a flat configuration leads to the formation of a flat flow front of the working substance in the plane of the grid cathode 4. At the same time, on the substrate 5, located behind the flat mesh, cathode 4, polychernia pqc- forms; digging with almost LITERAL use of the input source material stream, and in contrast to the polymer film known in the proposed method, the growth of a polymer film is defined as precipitated O1 Is5

(to

314

by the formation of the generated flux of the working substance on the surface of the substrate, as well as by the effect of actively acting glow radiation of the plasma on the treated surface.

Note A polypropylene fiber is placed into the cavity of the steam generator 1 (TU 6-06-535-76, 0.33 tex.). A magnetic disk is installed as substrate 5. A vacuum in the vacuum chamber is created in the order of 0.1 Torr. The heating of the steam generator I and the steam line 2 is performed. The steam generator is heated to 250 ° C. The steam pipe 2 is heated by passing an alternating current to a temperature 5 to higher (the temperature of the steam generator). After the thermal mode of the steam generator I is established between the andes 3 and the cathode 4, a DC voltage of 2.0 kV is applied, which provides for the initiation of a self-glowing discharge in the discharge gap.

Plasma ionization in a gas-discharge plasma, liquid-phase particles directed into the discharge gap positively charge, as a result of which they are accelerated from the region of the gas-discharge plasma to cathode 4, passing through the cathode fall zone. Taking into account that the flow of the working substance is viscous, the accelerated / action in the discharge gap is also tested by uncharged particles. Consequently, in the plane of the cathode there is a normally directed, accelerated to an energy corresponding to the voltage on the discharge gap- (obmchnach1-5 kV), noTQK of the working substance with a sufficiently high degree of ionization. The discharge parameters are selected from the condition of providing the necessary degree of ionization of the working substance flow without significant additional degradation fragments. Such conditions are fulfilled in a glow discharge where the gas temperature is significantly lower than the electrical temperature.

The electrodes are made flat with a size of I2 X I2 cm and are located on

four

A distance of 10 cm. The anode 3 is made of stainless steel sheet, and the cathode 4 is a frame in which a grid of 80 µm tungsten wire is wound with a step of I cm. During the coating process, the magnetic disk is rotated. The formation of the polymer layer and its growth are visually monitored by the appearance of interference staining and the alternation of its color.

The proposed set of techniques and technological features of the method will increase the speed of coating compared to the known 8-12 times and improve the process controllability by reducing the working vacuum from 10 to 0.5-1 Torr, forming a flow of the working substance, which will provide almost complete deposition of the working flow on the substrate and its transformation into a poly-MepiHoe coating and combining the ionization operations, forming the flow and accelerating it in one flat discharge gap.

The table shows the working conditions when applying various polymeric coatings on magnetic disks 355 mm in memory. ,

F o rmula of the invention

The method of applying polymer coatings in vacuum, including the formation of an electric field between the anode and the cathode, the introduction of vapors of the starting material into the inter-electrode gap, the acceleration of charged particles, the deposition of the coating on the substrate and its polymerization, in order to increase the efficiency of using the starting material, the anode and the cathode are plane-parallel, and the cathode is in the form of a grid, prior to the introduction of the vapors, they are saturated, and the introduction of saturated vapors is carried out through the anode in a hole The electrical field, the acceleration of charged particles is carried out in the region of the glow discharge, and depositing the coating - is a glow discharge zone.

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Claims (1)

<claim-text> <table border = "1"> <tbody> <tr> <td colspan = "2"> 5 </ td> <td colspan = "3"> . 1452194. </ Td> <td colspan = "2"> 6 </ td> </ tr> <tr> <td> Polymer </ td> <td> Steam Generator Temperature, ®С </ td> <td> Pressure in the reactor volume, torr </ td> <td> Discharge voltage, kV </ td> <td> Discharge current, A </ td> <td> Coating thickness, micron </ td> <td> . Time to carry, min </ td> </ tr> <tr> <td> Polypro - </ td> <td> </ td> <td> </ td> <td> </ td> <td> </ td> <td> </ td> <td> </ td> </ tr> <tr> <td> pilene </ td> <td> 250 </ td> <td> 0.5-1 </ td> <td> 2.0 </ td> <td> 0.1 </ td> <td> 0.15 </ td> <td> 5-7 </ td> </ tr> <tr> <td> Polyethylene </ td> <td> 220 </ td> <td> 11 </ td> <td> 11 </ td> <td> 11 </ td> <td> II </ td> <td> 5-7 </ td> </ tr> <tr> <td> Capra </ td> <td> 240 </ td> <td> '11 </ td> <td> 11 </ td> <td> "1 </ td> <td> < 1 </ td> <td> 4-6 </ td> </ tr> <tr> <td> Fluoroplast F 2M </ td> <td> 180 </ td> <td> 99 </ td> <td> • I </ td> <td> n </ td> <td> II </ td> <td> 3-5 </ td> </ tr> <tr> <td> Vak.maslo PFMS-1 </ td> <td> 120-160 </ td> <td> 99 </ td> <td> * 11 </ td> <td> II </ td> <td> n </ td> <td> 2-4 </ td> </ tr> </ tbody> </ table> <claim-text> <a name="caption1"> </a> &lt; , · + - $ </ claim-text> <claim-text> ά α | ο | ο | □ &lt; e-V </ claim-text> <claim-text> A / </ claim-text>