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SI23609A - One-stage process of manufacturing composite ceramic heater - Google Patents

One-stage process of manufacturing composite ceramic heater Download PDF

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SI23609A
SI23609A SI201100015A SI201100015A SI23609A SI 23609 A SI23609 A SI 23609A SI 201100015 A SI201100015 A SI 201100015A SI 201100015 A SI201100015 A SI 201100015A SI 23609 A SI23609 A SI 23609A
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ceramic heater
conductive
heater
sintering
composite
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SI201100015A
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Slovenian (sl)
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MAGLICA@Aljoša
KRNEL@Kristoffer
KOSMAÄŚ@TomaĹľ
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Institut@@quot@JoĹľef@Stefan@quot
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Abstract

The subject of invention is a one-stage process of manufacturing composite ceramic heater before sintering powder mixtures of silicon nitride (Si3N4), Zirconium dioxode (Zn02) and oxide additives (Y203, Al203, Re203, ...) for sintering and organic additions to the design, while during sintering in an inert atmosphere of nitrogen or argon on the surface of the composite with the reaction of Si3N4 and ZrO2 forms ZrN, while core product remains unreacted. After sintering the product has the right mix insulating and conductive ceramic components, and good mechanical,thermal and electrical properties.

Description

ENOSTOPENJSKI POSTOPEK IZDELAVE KOMPOZITNEGA KERAMIČNEGA GRELCAONE-STAGE PROCESS OF MANUFACTURING A COMPOSITE CERAMIC HEATER

Predmet izuma je enostopenjski postopek izdelave kompozitnega keramičnega grelca pred sintranjem mešanice prahu silicijevega nitrida (S>3N4), cirkonijevega dioksida (ZrO2) in oksidnih dodatkov za sintranje. Med sintranjem pri temperaturi nad 1600 °C v zaščitni atmosferi dušika ali argona se z reakcijo med Si3N4 in ZrO2 na površini kompozita tvori električnoprevodni cirkonijev nitrid (ZrN), medtem ko sredica izdelka ostane nezreagirana. Zato ima izdelek po sintranju že pravilno kombinacijo izolativne in prevodne keramične komponente z dobrimi mehanskimi in električnimi lastnostmi.The subject of the invention is a one-step process for manufacturing a composite ceramic heater prior to sintering a mixture of silicon nitride powder (S> 3N 4 ), zirconium dioxide (ZrO 2 ) and sintering oxide additives. During sintering at temperatures above 1600 ° C under a protective atmosphere of nitrogen or argon, a reaction between Si 3 N 4 and ZrO 2 forms an electrically conductive zirconium nitride (ZrN) on the surface of the composite while leaving the core of the product unreacted. Therefore, after sintering, the product already has the correct combination of an insulating and conductive ceramic component with good mechanical and electrical properties.

Prikaz problemaView the problem

Keramični grelci se zaradi sposobnosti delovanja pri visokih temperaturah najpogosteje uporabljajo pri vžignih sistemih dizelskih motorjev, kot prižigalci peči in kot grelni elementi v toplotnih strojih in napravah. V novejšem času so po obsegu proizvodnje daleč na prvem mestu keramične žarilne svečke dizelskih motorjev, pri katerih beležimo tudi največje število patentov znanih proizvajalcev, kot so NGK, Denso in Kyocera, Bosch, Beru, LeMark in drugi.Because of their ability to operate at high temperatures, ceramic heaters are most commonly used in diesel engine ignition systems, as furnace lighters and as heating elements in heat machines and appliances. In recent times, ceramic glow plugs for diesel engines are by far the largest in terms of production, with the largest number of patents by well-known manufacturers such as NGK, Denso and Kyocera, Bosch, Beru, LeMark and others.

Ne glede na področje uporabnosti so keramični grelci praviloma izdelani iz najmanj dveh med seboj kompatibilnih materialov, od katerih je eden električno prevoden, drugi pa električno izolativen. Prevodni in izolativni del grelca se morata ujemati v kinetiki zgoščevanja in toplotnem razteznostnem koeficientu. Imeti morata dobro toplotno prevodnost, prevodni del pa ustrezne električne lastnosti. Grelec mora biti kemijsko, korozijsko in mehansko odporen v širokem temperaturnem območju, dolgotrajno delovanje in ciklične termomehanske obremenitve pa ne smejo vplivati na spremembo električnih lastnosti keramike.Regardless of their scope, ceramic heaters are generally made of at least two compatible materials, one of which is electrically conductive and the other electrically insulating. The conductive and insulating parts of the heater must match in the kinetics of thickening and the thermal expansion coefficient. They must have good thermal conductivity and the conductive part must have adequate electrical properties. The heater must be chemically, corrosion and mechanically resistant over a wide temperature range, and the prolonged operation and cyclic thermomechanical loads must not affect the change in the electrical properties of the ceramic.

-2Zaradi ugodne kombinacije kemijskih, toplotnih in mehanskih lastnosti je kot material za neprevodno matrično komponento najprimernejša keramika na osnovi Si3N4. Literatura omenja tudi keramično matrico na osnovi ΑΙΝ-SiC, kompozite na osnovi boridov kovin prehoda in SiAlON-e, vendar so mehanske lastnosti in kemijska stabilnost teh matričnih materialov bistveno slabše, zato keramičnih grelcev s tako sestavo (še) ni na tržišču. Znanih je tudi nekaj poskusov izdelave električnoprevodne keramike z oksidno matrico na osnovi Al2O3, S1O2 in Zr2O3, vendar tovrstni materiali zaradi slabe toplotne prevodnosti niso primerni.-2Because of a favorable combination of chemical, thermal and mechanical properties, Si 3 N 4 based ceramics are the most suitable material for the non-conducting matrix component. The literature also mentions ceramic matrix based on Α osnovi-SiC, composites based on transition metal borides and SiAlON, but the mechanical properties and chemical stability of these matrix materials are significantly worse, so ceramic heaters of this composition are not (yet) commercially available. There are also some attempts to produce electrically conductive ceramics with an oxide matrix based on Al2O 3 , S1O2 and Zr 2 O 3 , but such materials are not suitable due to poor thermal conductivity.

Električnoprevodno komponento navadno dobimo tako, da v električno neprevodni matrici z dobrimi kemijskimi in mehanskimi lastnostmi dispergiramo ustrezen delež elektroprevodnih delcev. Elektroprevodni materiali, ki pridejo v poštev, so lahko nekatere ognjevarne kovine (npr. W) ter karbidi, nitridi, karbonitridi, silicidi, boridi 3., 4., 5. in 6. skupine kovin prehoda, ki imajo visoka tališča. V praksi se skupaj z matrično fazo na osnovi Si3N4 najpogosteje uporabljata kot prevodni fazi M0S12 in WC. Poleg teh dveh v javno dostopni in patentni literaturi zasledimo tudi WSi2, NbSi2, TiN, TiB2, TiCN, TiC, ZrN, ZrB2 in TaN. Pomembno je, da v elektroprevodnem delu keramičnega grelca zagotovimo zadosten volumski delež prevodnih delcev za dosego perkolacijskega praga, ki zavisi od velikosti, porazdelitve velikosti in oblike delcev in je običajno med 2535 %. Ker tako velik delež dispergiranih delcev prevodne faze vodi do slabšega sintranja in neustreznih mehanskih lastnosti, potekajo v zadnjem času intenzivne raziskave materialov z manjšim deležem prevodne faze, s čimer skušajo znižati mejo perkolacijskega praga, izboljšati sintranje in čim bolj ohraniti mehanske lastnosti matrične faze.The electrically conductive component is usually obtained by dispersing an appropriate fraction of electrically conductive particles in an electrically nonconductive matrix with good chemical and mechanical properties. Conductive materials that may be considered suitable may be some refractory metals (eg W) and carbides, nitrides, carbonitrides, silicides, borides of the 3rd, 4th, 5th and 6th transition metal groups having high melting points. In practice, together with the Si 3 N 4 based matrix phase, they are most commonly used as the M0S12 and WC conductive phases. In addition to these two, we also find WSi2, NbSi 2 , TiN, TiB 2 , TiCN, TiC, ZrN, ZrB 2 and TaN in the public and patent literature. It is important to provide a sufficient volume fraction of conductive particles in the conductive part of the ceramic heater to achieve a percolation threshold that depends on the particle size, size distribution and shape and is typically between 2535%. Because such a high proportion of dispersed particles of the conductive phase leads to poorer sintering and inadequate mechanical properties, intensive research has recently been conducted on materials with a smaller proportion of conductive phase, in an attempt to lower the percolation threshold, improve sintering and preserve the mechanical properties of the matrix phase as much as possible.

Stanje tehnikeThe state of the art

Patente s področja keramičnih grelcev lahko razdelimo v dve skupini. Najštevilčnejša skupina patentov obravnava različne konstrukcijske podrobnosti, rešuje posamezne tehnične probleme, kot so npr. zaščita kontaktov, v novejšem času tudi možnosti upravljanja dodatnih funkcij. Druga skupina vsebuje patente, ki ščitijo sestavo in oblikoPatents in the field of ceramic heaters can be divided into two groups. The largest group of patents deals with various construction details, solving individual technical problems, such as. contact protection, more recently the ability to manage additional features. The second group contains patents protecting the composition and form

Λ ·Λ ·

-3uporovnega dela grelca, v patentnih zahtevkih pa je posredno zaščiten tudi način oblikovanja keramičnega grelca. Tako naprimer sta v EP 1477740 zaščiteni sestava in oblika NGK-jeve žarilne svečke tipa 2., opisan pa je tudi postopek izdelave. Matrična faza je keramika na osnovi Si3N4, prevodnost pa zagotavljajo dispergirani delci WC. Grelec je zasnovan tako, da ima v spodnjem delu več delcev prevodne faze v matrici in večji presek, kar zagotavlja višjo prevodnost. Pri vrhu grelca se zaradi manjšega deleža prevodne faze upornost poveča, tam grelec tudi zažari. V konici grelca je volumska vsebnost WC 16 % in 20 % v preostalem delu. Prevodni del grelca oblikujejo z dvokomponentnim injekcijskim brizganjem in ulivanjem v porozen model. Orodje za dvokomponentno brizganje je sestavljeno iz treh delov, pri čemer se po brizganju prve prevodne faze, zamenja zgornji del kalupa in dobrizgne naslednjo prevodno komponento. Predizdelan prevodni del grelca se nato umesti v izolacijsko komponento, ki je bila predhodno ulita v porozen model. Sledijo hladno izostatsko stiskanje, kalcinacija, eno-osno vroče stiskanje v grafitnih kalupih pri 1900 °C v atmosferi N2, mehanska in termična obdelava, in vgradnja v ohišje.-3 resistive part of the heater, and the patent claims indirectly also protect the method of forming a ceramic heater. For example, the composition and shape of type 2 NGK glow plugs are protected in EP 1477740, and the manufacturing process is described. The matrix phase is Si 3 N 4 based ceramics and conductivity is provided by the dispersed WC particles. The heater is designed to have more particles of conductive phase in the matrix in the lower part and a larger cross section, which provides higher conductivity. At the top of the heater, due to the smaller proportion of the conduction phase, the resistance increases and the heater also lights up. At the tip of the heater the volume content of the toilet is 16% and 20% in the rest. The conductive part of the heater is formed by two-component injection molding and casting into a porous model. The two-component injection molding tool consists of three parts, where after the first conductive phase is injected, the top of the mold is replaced and the next conductive component is injected. The pre-fabricated conductor portion of the heater is then placed in an insulating component that has been previously poured into a porous model. This is followed by cold isostatic compression, calcination, single-axis hot compression in graphite molds at 1900 ° C in an N 2 atmosphere, mechanical and thermal treatment, and installation in a housing.

Nekoliko drugačno zasnovo oblikovanja keramičnega grelca je patentirala družba Bosch (US 6710305). V patentu navajajo, da se iz surovin za posamezno komponento grelca po mokrem mletju in mešanju v polipropilenu najprej pripravijo suspenzije. Nato se z visokotlačnim brizganjem oblikuje izolativno komponento, ki poteka v sredini grelca, nakar se dobrizgne prevodno komponento, ki oblije izolativni del grelca. Sledi hladno izostatsko stiskanje celotnega grelca, kalcinacija in sintranje s povišanim tlakom N2 pri 1900 °C. Patenti US 6309581, US 6309589, US 6054680 obravnavajo bodisi drugačno kombinacijo materialov, bodisi posamezne geometrijske in konstrukcijske izboljšave keramičnega grelca, ki pa je v vseh primerih oblikovan v več stopnjah, npr. s pomočjo injekcijskega brizganja v kombinaciji s hladnim stiskanjem.A slightly different design of the ceramic heater design was patented by Bosch (US 6710305). The patent states that suspensions are first prepared from the raw materials for each component of the heater after wet milling and mixing in polypropylene. Then, a high-pressure injection molds an insulating component which runs in the middle of the heater, and then a conductive component is sprayed, which wraps the insulating part of the heater. This is followed by cold isostatic compression of the entire heater, calcination and sintering with an elevated pressure of N 2 at 1900 ° C. Patents US 6309581, US 6309589, US 6054680 address either a different combination of materials or individual geometric and structural enhancements to a ceramic heater, which in all cases is designed in several stages, e.g. by injection molding combined with cold compression.

Nadalje je znan postopek izdelave keramičnega grelca s kombinacijo večplastnega ulivanja vodnih suspenzij. Postopek je razvilo kitajsko-kanadsko podjetje ChongqingLeMark. Osnovni material, ki služi za matrico, je lahko iz skupine (Si3N4, AIN, SiC, SiO2, AI2O3, ZrO2), prevodno fazo predstavlja eden izmed znanih električnih prevodnikov (MoSi2, TiN, ZrN, TiCN, TiB2). Patenti US 5993722, US 6084212 in US 6884967The process of making a ceramic heater with a combination of multi-layer casting of aqueous suspensions is further known. The process was developed by Chinese-Canadian company ChongqingLeMark. The base material used for the matrix can be from the group (Si 3 N 4 , AIN, SiC, SiO 2 , AI 2 O 3 , ZrO 2 ), the conducting phase being represented by one of the known electrical conductors (MoSi 2 , TiN, ZrN, TiCN, TiB 2 ). US 5993722, US 6084212 and US 6884967

opisujejo način izdelave večplastnega keramičnega grelca z različno masno koncentracijo prevodne komponente v posameznem sloju, in sicer od 51-80 % v prevodnem jedru in od 0-28 % v zunanji izolacijski plasti. Po večplastnem ulivanju vodnih suspenzij v mavčni model sledijo hladno stiskanje, sušenje in sintranje v zaščitni atmosferi. Pogoji sintranja, to je temperatura, tlak, atmosfera v patentih niso omenjeni, so pa omenjeni dodatki za sintranje in deflokulanti, ki služijo za pripravo suspenzije.describe a method of manufacturing a multilayer ceramic heater with different mass concentrations of the conductive component in each layer, from 51-80% in the conductive core and from 0-28% in the outer insulation layer. The multi-layer casting of aqueous suspensions into the gypsum model is followed by cold pressing, drying and sintering in a protective atmosphere. The sintering conditions, i.e. temperature, pressure, atmosphere, are not mentioned in the patents, but sintering additives and deflocculants are used to prepare the suspension.

Ne glede na koncept svečke in geometrijo grelca je skupna značilnost vseh znanih patentov postopek dvo - ali večstopenjske izdelave grelca z injekcijskim brizganjem in/ali večplastnim ulivanjem, zato je oblikovanje grelca v več stopnjah zelo zamudno in tehnološko zahtevno, poleg tega se med sintranjem ali kasneje med delovanjem grelca lahko pojavijo težave zaradi nepopolnega stika med izolativno in prevodno komponento, kar vodi do slabega delovanja ali celo porušitve.Regardless of the concept of the spark plug and the geometry of the heater, the common feature of all known patents is the process of two or more stages of injection molding and / or multilayer casting, which makes the design of the heater in many stages very time-consuming and technologically demanding, and during sintering or later during the operation of the heater, there may be problems due to incomplete contact between the insulating and the conducting components, leading to poor performance or even rupture.

Cilj in naloga izuma je izdelali grelec tako, da bi po sintranju na površini prevajal električni tok, sredica grelca pa bi bila izolativna, ne da bi bilo potrebno grelec pred sintranjem oblikovati v več stopnjah tako kot po dosedaj znanih postopkih.The object and object of the invention is to provide a heater in such a way that, after sintering, it conducts electrical current on the surface, and the core of the heater is insulating, without the need for the heater to be shaped in several steps before sintering, as in the methods known to date.

Po izumu je naloga rešena z enostopenjskim postopkom izdelave kompozitnega keramičnega grelca iz mešanice prahu, ki vsebuje Si3N4, ZrO2 in oksidne dodatke za sintranje. Med sintranjem v prisotnosti ene od znanih prehodnih tekočih faz, ki omogočajo zgoščevanje Si3N4, se z reakcijo med Si3N4 in ZrO2 na površini grelca tvori ZrN kot prevodna komponenta, medtem ko sredica grelca ostane nezreagirana in torej ne prevaja električnega toka. Keramični grelec po izumu ima dobro kemijsko, korozijsko, oksidacijsko in mehansko odpornost, visoko trdnost in žilavost ter ustrezno električno prevodnost na površini. V primerjavi z že znanimi postopki je tako poenostavljena in pocenjena izdelava grelca.According to the invention, the problem is solved by a one-step process of manufacturing a composite ceramic heater from a powder mixture containing Si 3 N 4 , ZrO 2 and oxide sintering additives. During sintering in the presence of one of the known transient liquid phase, allowing densification Si 3 N 4, with the reaction between the Si 3 N 4 and ZrO 2 on the surface of the heating element forming ZrN as the conductive component, while the core of the heater remain unreacted, and therefore does not conduct electric flow. The ceramic heater according to the invention has good chemical, corrosion, oxidation and mechanical resistance, high strength and toughness and adequate electrical conductivity on the surface. In comparison with the known procedures, the production of the heater is thus simplified and inexpensive.

-5Opis izuma-5Description of the invention

Slika 1 prikazuje geometrijo in prečni prerez izvedbenega primera keramičnega grelca.Figure 1 shows the geometry and cross-section of an embodiment of a ceramic heater.

Postopek izdelave keramičnega grelca po izumu obsega naslednje korake:The process of manufacturing a ceramic heater according to the invention comprises the following steps:

Kot osnovni gradnik se uporabi katerikoli prah silicijevega nitrida z veliko specifično površino in majhno povprečno velikostjo delcev, v kombinaciji z eno od znanih formulacij oksidnih dodatkov (Υ2Ο3, AI2O3, Re2C>3, ...) za izboljšanje sintranja, kot na primer Y2O3 in AI2O3 z masnim deležem od 1 do 15 % in od 0,5 do 12 %. Zaželeno je, da so omenjene snovi čim čistejše, ker prisotnost nečistoč kvarno vpliva na lastnosti sintrane keramike. Kot trdni reagent za tvorbo prevodnih zrn ZrN na površini grelca se uporabi nanometrski ali submikrometrski prah ZrO2 s povprečno velikostjo delcev od 6 nm do 40 pm, katerega volumski delež znaša od 5 do 50 % glede na Si3N4, prednostno od 10 do 30 %. Nanometrske delce ZrO2 se lahko tvori z in-situ precipitacijo cirkonijevih hidroksidov na površini delcev Si3N4 iz raztopine katerekoli cirkonijeve soli v suspenziji Si3N4 in naknadno kalcinacijo, lahko pa se uporabi komercialno dostopno suspenzijo iz ZrO2 nanodelcev. V primeru submikronskih delcev se lahko uporabi katerikoli komercialno dostopen prah ZrO2, ki ne vsebuje Y2C>3 v trdni raztopini. Mešanico prahu, ki vsebuje Si3N4, ZrO2, eno od znanih kombinacij oksidnih dodatkov (Y2C>3, AI2O3, Re2O3, ...) za sintranje in znanih organskih dodatkov, ki so potrebni za suho ali mokro oblikovanje surovcev, se dispergira v vodnem ali nevodnem mokrem mediju. Po homogenizaciji se suspenzijo v eni stopnji oblikuje v surovce po kateremkoli znanem postopku suhega ali mokrega oblikovanja, kot je stiskanje, vlivanje in brizganje. Po oblikovanju se vzorce suši ali se iz njih izžene organske dodatke, ki so potrebni za oblikovanje, in sintra pri temperaturah od 1600 °C do 1900 °C od 1 do 6 h, prednostno od 1750 °C do 1850 °C od 2 do 4 h v pretoku N2 ali Ar, in se jih naknadno mehansko obdela. Tlak inertne atmosfere lahko variira od 0,002 MPa do 20 MPa.Any basic silicon nitride powder with a large specific surface area and a small average particle size, in combination with one of the known oxide additive formulations (Υ2Ο3, AI 2 O 3 , Re 2 C> 3, ...), is used as the basic building block to improve sintering, such as Y 2 O 3 and AI 2 O3 by weight of from 1 to 15% and from 0.5 to 12%. It is desirable to keep these substances as pure as possible, since the presence of impurities adversely affects the properties of sintered ceramics. As a solid reagent for the formation of conductive ZrN grains on the surface of the heater, a nanometer or submicrometer ZrO 2 powder with an average particle size of 6 nm to 40 pm, having a volume fraction of from 5 to 50% with respect to Si 3 N 4 , preferably from 10 to 10, is used 30%. ZrO 2 nanometer particles can be formed by in situ precipitation of zirconium hydroxides on the surface of Si 3 N 4 particles from a solution of any zirconium salt in Si 3 N 4 suspension and subsequent calcination, and a commercially available ZrO 2 nanoparticle suspension may be used. In the case of submicron particles, any commercially available ZrO 2 powder containing no Y 2 C> 3 in solid solution may be used. A powder mixture containing Si 3 N 4 , ZrO 2 , one of the known combinations of oxide additives (Y 2 C> 3, AI 2 O 3 , Re 2 O 3 , ...) for sintering and known organic additives required for dry or wet forming of blanks, it is dispersed in aqueous or non-aqueous wet media. After homogenisation, the suspension is formed into blanks in one step by any known method of dry or wet molding, such as pressing, casting and injection molding. After molding, the samples are dried or expelled from the organic additives required for molding and sintered at temperatures from 1600 ° C to 1900 ° C for 1 to 6 hours, preferably from 1750 ° C to 1850 ° C from 2 to 4 h at a flow of N 2 or Ar, and subsequently machined. The inert atmosphere pressure can vary from 0.002 MPa to 20 MPa.

• · · ·• · · ·

-6Izum bo v nadaljevanju dodatno opisan na osnovi izvedbenih primerov in slike 1, ki prikazuje geometrijo in prečni prerez prototipnega keramičnega grelca, kjer dela z oznako 1 predstavljata prevodni komponenti, in del z oznako 2 izolativno komponento.-6 The invention will be further described below by way of example examples and Figure 1, showing the geometry and cross-section of a prototype ceramic heater, where the parts labeled 1 represent the conductive components and the part labeled 2 an insulating component.

Primer 1Example 1

Ločeno se pripravi 200 ml raztopine cirkonijevega acetata (ZrAc) s koncentracijo 0,5 mol na liter z razredčevanjem in mešanjem komercialne raztopine (proizvajalca Svvinton Manchester, Velika Britanija) z destilirano vodo in 500 ml suspenzije iz 50 g Si3N4 (proizvajalca SN-E10, UBE Industries, Ltd., Japonska) s povprečno velikostjo delcev od 0,7 pm do 1,2 pm in 485 ml destilirane vode z mešanjem v planetarnem mlinu s Si3N4 mievnimi telesi. Razredčeno raztopino ZrAc se dobro umeša v suspenzijo Si3N4. Po 20 minutah mešanja se pH vrednost mešanice ustali pod vrednostjo 3,8, tako da lahko začnemo z vpihovanjem plinastega amoniaka (proizvajalca J. Medinger & Sohne, Avstrija) s pretokom od 100 do 1500 ml/min. Pri pH vrednosti 3,9 cirkonijevi hidroksidi že precipitirajo na površino silicijevega nitridnega prahu, vendar je njihova izrazitost precipitacije največja pri pH vrednosti 7,0. Precipitat se nekajkrat prefiltrira z destilirano vodo in na koncu še z absolutnim etanolom. Vlažno pogačo se suši na zraku pri 80 °C 18 h in nato še termično obdela pri temperaturi 600 °C 2 h za tvorbo kristalinične oblike ZrO2. Tako dobimo prah Si3N4, ki je oblečen z nanodelci ZrO2 z volumskim deležem 20 %, katerih povprečna velikost je od 8 nm do 10 nm. Za oblikovanje surovcev se Si3N4 oblečen z nanodelci ZrO2 skupaj z oksidnima dodatkoma Y2O3 (H.C.Starck, Nemčija) in AI2O3 (Alcoa, ZDA) z masnima deležema 5 % in 3 % in organskim dodatkom polivinilalkohola (PVA, Aldrich, Nemčija) za oblikovanje z masnim deležem 2 % na suho snov mokro melje v planetarnem mlinu v vodi 3 h. Po mešanju se nastalo suspenzijo vlije v porozen model in suši na zraku. Surovce v obliki kvadra 5 mm x 42 mm x 3 mm se sintra v zasipu mešanice prahu Si3N4 in BN pri temperaturi 1850 °C 2 h v pretoku argona s tlakom 0,1 MPa.Separately prepare 200 ml of zirconium acetate (ZrAc) solution at a concentration of 0.5 mol per liter by diluting and mixing the commercial solution (manufactured by Swinton Manchester, United Kingdom) with distilled water and 500 ml of a suspension of 50 g Si 3 N 4 (manufactured by SN -E10, UBE Industries, Ltd., Japan) with an average particle size of 0.7 pm to 1.2 pm and 485 ml of distilled water by mixing in a planetary mill with Si 3 N 4 dishwasher bodies. The diluted ZrAc solution mixes well with the Si 3 N 4 suspension. After stirring for 20 minutes, the pH of the mixture was stabilized below 3.8 so that gas ammonia (manufactured by J. Medinger & Sohne, Austria) can be started to flow from 100 to 1500 ml / min. At a pH of 3.9, zirconium hydroxides already precipitate to the surface of silicon nitride powder, but their precipitating intensity is greatest at pH 7.0. The precipitate was filtered several times with distilled water and finally with absolute ethanol. The moist cake is air-dried at 80 ° C for 18 h and then thermally treated at 600 ° C for 2 h to form the crystalline ZrO 2 form. This gives a Si 3 N 4 powder coated with ZrO 2 nanoparticles with a volume fraction of 20% whose average size ranges from 8 nm to 10 nm. For blanket forming, Si 3 N 4 is coated with ZrO 2 nanoparticles together with the oxide additives Y 2 O 3 (HCStarck, Germany) and AI 2 O 3 (Alcoa, USA) with 5% and 3% by weight and organic polyvinyl alcohol (PVA) , Aldrich, Germany) for molding with a 2% by weight on a wet milled dry matter in a planetary mill in water for 3 h. After stirring, the resulting suspension is poured into a porous model and air-dried. The 5 mm x 42 mm x 3 mm squares are sintered in the backbone of a mixture of Si 3 N 4 and BN powder at 1850 ° C for 2 h at an argon flow of 0.1 MPa.

Rentgenska analiza sintranih vzorcev pokaže, da je ZrN, ki se tvori z reakcijo med Si3N4 in ZrO2, prisoten v zunanjem delu prereza kompozita (slika 1), medtem ko je v sredici • · · ·X-ray analysis of sintered specimens shows that ZrN, which is formed by the reaction between Si 3 N 4 and ZrO 2 , is present in the outer section of the composite cross section (Fig. 1) while in the core • · · ·

-7prisoten nezreagirani ZrO2. Kvantitativna Rietveldova analiza XRD spektra pokaže, daje 50 % celokupnega ZrO2 zreagiralo v ZrN. Debelina prevodne komponente 1 na površini vzorca znaša 0,5 mm ± 0,1 mm. Tako izdelan kompozit ima visoko gostoto 3,78 g/cm3 in upogibno trdnost 850 ± 50 MPa, ki je bila izmerjena s štiritočkovno metodo. Razmika med podpornimi valji pri tej meritvi sta znašala 10 in 20 mm (natezna stran). Hitrost obremenjevanja je bila 1 mm/min. Za merjenje električne upornosti je bila uporabljena štiritočkovna metoda enosmernega toka. Kot elektroda za merjenje električne upornosti je bila uporabljena In-Ga pasta. Iz izmerjene električne upornosti je bila izračunana električna prevodnost. Izračunana električna prevodnost končnega kompozita je bila 8280 1/Qm. Z namenom, da bi preverili, pri kakšnih pogojih keramični grelec deluje, je bila najprej po sintranju z brušenjem na diamantnih ploščah odstranjena prevodna plast na stranskih ploskvah in na ta način zasnovana poljubna geometrija prototipnega keramičnega grelca po sliki 1. Testni vzorec je bil priključen na napetost 12 V, pri čemer je konica vzorca zažarela pri toku 8 A. Temperatura žarjenja je bila izmerjena z optičnim pirometrom OMEGA OS 3722 (Omega Engineering, ZDA) in je znašala 1300 °C. Test je pokazal, da ima material kratek odzivni čas, saj temperaturo 1300 °C doseže v času 2,2 sekunde. Izračunana upornost keramičnega grelca je 1,56 Ω, kar ustreza zahtevanim karakteristikam za delovanje keramičnega grelca.7 unreacted ZrO 2 present . Quantitative Rietveld analysis of the XRD spectrum shows that 50% of all ZrO 2 reacted in ZrN. The thickness of conductive component 1 on the sample surface is 0.5 mm ± 0.1 mm. The composite thus produced has a high density of 3.78 g / cm 3 and a flexural strength of 850 ± 50 MPa as measured by the four-point method. The distance between the supporting cylinders in this measurement was 10 and 20 mm (tensile side). The loading speed was 1 mm / min. A four-point DC method was used to measure electrical resistance. An In-Ga paste was used as the electrode for measuring electrical resistance. From the electrical resistance measured, electrical conductivity was calculated. The calculated electrical conductivity of the final composite was 8280 1 / Qm. In order to check the conditions under which the ceramic heater operates, the conductive layer on the lateral surfaces was first removed after sintering with diamond plates and thus designed any geometry of the prototype ceramic heater according to Figure 1. The test sample was connected to voltage is 12 V, with the tip of the sample glowing at a current of 8 A. The annealing temperature was measured with an OMEGA OS 3722 optical pyrometer (Omega Engineering, USA) and was 1300 ° C. The test showed that the material has a short response time, reaching a temperature of 1300 ° C in 2.2 seconds. The calculated resistance of the ceramic heater is 1.56 Ω, which corresponds to the required performance characteristics of the ceramic heater.

Primer 2Example 2

Kot izhodne surovine za izdelavo kompozitnega keramičnega grelca so bili uporabljeni uporabili Si3N4 (SN-E10, Ube Industries, Japonska), ZrO2 (TZ-0, Tosoh, Japonska) z volumsko vsebnostjo 20 % in oksidna dodatka Y2O3 (H.C.Starck, Nemčija) in AI2O3 (Alcoa, ZDA) z masnima deležema 5 % in 3 %. 100 g mešanice prahu, ki je vsebovala 58 g Si3N4 in 34 g ZrO2, 5 g Y2O3 in 3 g AI2O3. Je bila 5 h mokro mleta v atritorskem mlinu s Si3N4 kroglicami (Φ = 3 mm) v izopropanolu, ki mu je bilo primešano 2 g polietilenglikola (PEG 400, Merck, Nemčija). Po sušenju pri temperaturi 80 °C je bil prah zdrobljen in presejan skozi plastično sito do finega granulata. Tako pripravljena mešanica prahu je bila nato stisnjena v preizkusne kvadre dimenzij 5 mm x 42 mm x 3Si 3 N 4 (SN-E10, Ube Industries, Japan), ZrO 2 (TZ-0, Tosoh, Japan) with a volume content of 20% and oxide additives Y 2 O 3 were used as the starting materials for the composite ceramic heater. (HCStarck, Germany) and AI 2 O 3 (Alcoa, USA) with 5% and 3% by weight, respectively. 100 g of a powder mixture containing 58 g Si 3 N 4 and 34 g ZrO 2 , 5 g Y 2 O 3 and 3 g AI 2 O 3 . It was ground wet for 5 h in an Si 3 N 4 bead mill (Φ = 3 mm) in isopropanol treated with 2 g of polyethylene glycol (PEG 400, Merck, Germany). After drying at 80 ° C, the powder was crushed and sieved through a plastic sieve to fine granulate. The powder mixture thus prepared was then compressed into test squares measuring 5 mm x 42 mm x 3

mm. Stisnjeni surovci so bili dodatno izostatsko stisninjeni s tlakom 760 MPa in sintrani v zasipu prahu S13N4 in BN pri 1850 °C2 h v zaščiteni atmosferi dušika, pri tlaku dušika 0,1 MPa.mm. Compressed blanks were further compressed isostatically with a pressure of 760 MPa and sintered in a dusting of S13N4 and BN at 1850 ° C2 h under a shielded nitrogen atmosphere at a nitrogen pressure of 0.1 MPa.

Rezultati rentgenske in EDS analize so pokazali, da tako kot v prvem primeru tudi sedaj med sintranjem poteče reakcija med S13N4 in ZrO2, pri čemer se ZrN tvori le na površini izdelka (slika 1). Material z volumsko vsebnostjo ZrO2 20 % v začetni mešanici izkazuje visoko gostoto, 3,92 g/cm3 in upogibno trdnost, ki je 810 ± 30 MPa. Električna prevodnost sintranega kompozita je 911 1/Qm, kar je primerno za delovanje keramičnega grelca. Kompozitu z brušenjem stranskih površin, kot v primeru 1 (slika 1), odstranimo prevodno plast 1, da oblikujemo poljubno geometrijo keramičnega grelca. Po priključitvi vzorca na napetost 12 V, material zažari v konici prototipa s tokom 9 A, kar daje upornost 1,33 Ω in delovno temperaturo 1260 °C. Izdelek ima kratek odzivni čas, saj delovno temperaturo (1260 °C) doseže v času 2 sekund. Po izdelanem prototipu je razvidno, da izdelek izpolnjuje bistvene pogoje za delovanje prototipnega keramičnega grelca.The results of X-ray and EDS analysis showed that, as in the first case, the reaction between S13N4 and ZrO 2 also proceeds during sintering, with ZrN only forming on the surface of the product (Figure 1). A material with a volume content of ZrO 2 of 20% in the initial mixture exhibits a high density, 3.92 g / cm 3 and a flexural strength of 810 ± 30 MPa. The electrical conductivity of the sintered composite is 911 1 / Qm, which is suitable for the operation of a ceramic heater. By grinding the side surfaces, as in Example 1 (Figure 1), the conductive layer 1 is removed to form any geometry of the ceramic heater. After connecting the sample to a voltage of 12 V, the material ignites at the tip of the prototype with a current of 9 A, which gives a resistance of 1.33 Ω and an operating temperature of 1260 ° C. The product has a short response time as the operating temperature (1260 ° C) reaches a time of 2 seconds. The prototype produced shows that the product meets the essential requirements for the operation of the prototype ceramic heater.

Za postopek izdelave kompozitnega keramičnega grelca je torej značilno to, da se mešanico silicijevega nitrida, cirkonijevega oksida in ene izmed znanih kombinacij oksidnih dodatkov dispergira v mokrem mediju in da se po homogenizaciji suspenzijo oblikuje v surovce po enem izmed znanih postopkov suhega ali mokrega oblikovanja, po oblikovanju se vzorce suši ali iz njih izžene organske dodatke, ki so potrebni za oblikovanje, in sintra pri temperaturah od 1600 °C do 1900 °C od 1 do 6 h, prednostno od 1750 °C do 1850 °C od 2 do 4 h v inertnem in/ali reduktivnem plinu, prednostno v N2 ali Ar, pri čemer lahko tlak atmosfere variira od 0,002 MPa do 20 MPa, ali v vakuumu. Uporabljena mešanica vsebuje silicijev nitrid in cirkonijev oksid z volumskim deležem ZrO2 od 5 do 50 % glede na Si3N4, prednostno od 10 do 30 %, s povprečno velikostjo delcev od 6 nm do 40 pm, poleg tega pa še eno izmed znanih kombinacij oksidnih dodatkov, kot sta Y2C>3 in AI2C>3 z masnim deležem od 1 do 15 % in od 0,5 do 12 % v končni mešanici in znane organske dodatke, ki so potrebni za suho ali mokro oblikovanje surovcev.The process of manufacturing a composite ceramic heater is thus characterized by the dispersion of a mixture of silicon nitride, zirconium oxide and one of the known combinations of oxide additives in a wet medium and, after homogenisation, the suspension is formed into blanks by one of the known dry or wet molding processes the molding, the samples are dried or expelled from the organic additives required for molding and sintered at temperatures from 1600 ° C to 1900 ° C for 1 to 6 h, preferably from 1750 ° C to 1850 ° C for 2 to 4 h in inert and / or reductive gas, preferably in N 2 or Ar, wherein the atmospheric pressure may vary from 0.002 MPa to 20 MPa, or under vacuum. The mixture used contains silicon nitride and zirconium with a ZrO 2 content of 5 to 50% by weight of Si 3 N 4 , preferably 10 to 30%, with an average particle size of 6 nm to 40 pm, plus one of the known combinations of oxide additives such as Y 2 C> 3 and AI 2 C> 3 by weight of from 1 to 15% and from 0.5 to 12% in the final mixture and known organic additives required for dry or wet forming of blanks .

Claims (3)

PATENTNI ZAHTEVKIPATENT APPLICATIONS 1. Enostopenjski postopek izdelave kompozitnega keramičnega grelca z izolativno (2) in prevodno (1) keramično komponento po zahtevku 1, označen s tem, da se mešanico silicijevega nitrida, cirkonijevega oksida in ene izmed znanih kombinacij oksidnih dodatkov dispergira v mokrem mediju in da se po homogenizaciji suspenzijo oblikuje v surovce po enem izmed znanih postopkov suhega ali mokrega oblikovanja, po oblikovanju se vzorce suši ali iz njih izžene organske dodatke, ki so potrebni za oblikovanje, in sintra pri temperaturah od 1600 °C do 1900 °C od 1 do 6 h, prednostno od 1750 °C do 1850 °C od 2 do 4 h v inertnem in/ali reduktivnem plinu, prednostno v N2 ali Ar, pri čemer lahko tlak atmosfere variira od 0,002 MPa do 20 MPa, ali v vakuumu.A one-step process for manufacturing a composite ceramic heater with an insulating (2) and conductive (1) ceramic component according to claim 1, characterized in that the mixture of silicon nitride, zirconium oxide and one of the known combinations of oxide additives is dispersed in a wet medium and that after homogenisation, the suspension is molded into blanks by one of the known methods of dry or wet molding; after molding, the samples are dried or expelled from the organic additives required for molding and sintered at temperatures from 1600 ° C to 1900 ° C from 1 to 6 h, preferably from 1750 ° C to 1850 ° C, from 2 to 4 h in inert and / or reductive gas, preferably in N 2 or Ar, wherein the atmospheric pressure may vary from 0.002 MPa to 20 MPa, or in vacuum. 2. Postopek po zahtevku 1, označen s tem, da mešanica vsebuje silicijev nitrid in cirkonijev oksid z volumskim deležem ZrO2 od 5 do 50 % glede na Si3N4, prednostno od 10 do 30 %, s povprečno velikostjo delcev od 6 nm do 40 μιτι, poleg tega pa še eno izmed znanih kombinacij oksidnih dodatkov, kot sta Y2O3 in AI2O3 z masnim deležem od 1 do 15 % in od 0,5 do 12 % v končni mešanici in znane organske dodatke, ki so potrebni za suho ali mokro oblikovanje surovcev.Process according to claim 1, characterized in that the mixture contains silicon nitride and zirconium oxide with a ZrO 2 content by volume of from 5 to 50% relative to Si 3 N 4 , preferably from 10 to 30%, with an average particle size of 6 nm up to 40 μιτι, and in addition one of the known combinations of oxide additives such as Y 2 O 3 and AI 2 O 3 with a weight ratio of 1 to 15% and from 0.5 to 12% in the final mixture and known organic additives, required for dry or wet blanking. 3. Enostopenjski postopek izdelave kompozitnega keramičnega grelca z izolativno (2) in prevodno (1) keramično komponento po predhodnih zahtevkih, označen s tem, da se prevodna komponenta tvori na površini kompozita, medtem ko sredica izdelka ostane nezreagirana in da se tako pripravljenemu izdelku z brušenjem stranskih površin oblikuje poljubno geometrijo prototipnega keramičnega grelca, s čimer se doseže ustrezne karakteristike delovanja keramičnega grelca.A one-step process for manufacturing a composite ceramic heater with an insulating (2) and a conductive (1) ceramic component according to the preceding claims, characterized in that the conductive component is formed on the surface of the composite, while the core of the product remains unreacted and the product thus prepared with By grinding the side surfaces, it forms any geometry of the prototype ceramic heater, thereby achieving the proper performance characteristics of the ceramic heater.
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