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SG136848A1 - Apparatus for measuring thickness of glass substrate - Google Patents

Apparatus for measuring thickness of glass substrate

Info

Publication number
SG136848A1
SG136848A1 SG200604974-6A SG2006049746A SG136848A1 SG 136848 A1 SG136848 A1 SG 136848A1 SG 2006049746 A SG2006049746 A SG 2006049746A SG 136848 A1 SG136848 A1 SG 136848A1
Authority
SG
Singapore
Prior art keywords
glass substrate
thickness
calculates
conveyed
measuring thickness
Prior art date
Application number
SG200604974-6A
Inventor
Tomohiro Nishiyama
Original Assignee
Nishiyama Stainless Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nishiyama Stainless Chemical Co Ltd filed Critical Nishiyama Stainless Chemical Co Ltd
Publication of SG136848A1 publication Critical patent/SG136848A1/en

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  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Geometry (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Medicinal Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Food Science & Technology (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Ceramic Engineering (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)

Abstract

A thickness measuring apparatus 40 is provided which receives a laminated glass substrate GL for use in flat panel display having subjected to thinning process, and measures thickness of the glass substrate in a plurality of inspection lines LN1-LN3. Provided are three sets of displacement sensors Si arranged orthogonally to a conveyance path in which the glass substrate is conveyed, on the sides of front and back faces of the glass substrate; a first means that calculates clearances Dl, D2 between each sensor and a face of the glass substrate GL based on an output signal from the displacement sensor; and a second means that calculates thickness T of the glass substrate being conveyed based on a value calculated in the first means and clearance DO of a pair of sensors determined in advance. According to the present invention, it is possible to accurately measure thickness even for a thinned glass substrate.
SG200604974-6A 2006-04-07 2006-07-24 Apparatus for measuring thickness of glass substrate SG136848A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006106645 2006-04-07

Publications (1)

Publication Number Publication Date
SG136848A1 true SG136848A1 (en) 2007-11-29

Family

ID=38782473

Family Applications (1)

Application Number Title Priority Date Filing Date
SG200604974-6A SG136848A1 (en) 2006-04-07 2006-07-24 Apparatus for measuring thickness of glass substrate

Country Status (4)

Country Link
KR (1) KR20070100618A (en)
CN (1) CN101050946A (en)
SG (1) SG136848A1 (en)
TW (1) TWI421467B (en)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102073327A (en) * 2010-12-23 2011-05-25 南京林业大学 Online monitoring and control system for continuous flat press plate blank thickness of artificial plate
KR101220654B1 (en) * 2010-12-27 2013-02-07 주식회사 포스코 system and method for measuring surface rough
CN102305593A (en) * 2011-05-20 2012-01-04 西安迈瑞测控技术有限公司 Method and device for measuring geometric elements of high-accuracy and wide-range thin-film transistor (TFT) substrate glass
KR200469125Y1 (en) * 2012-03-13 2013-09-25 노바테크인더스트리 주식회사 An Automatic thickness measurement system of a display panel
WO2015001145A1 (en) 2013-07-04 2015-01-08 Fuesca, S.L. Apparatus for measuring the surface diffusion and the nanometric thickness of metals or metallic oxides on glass substrates
KR101413511B1 (en) * 2013-11-28 2014-07-04 컨트롤코리아 주식회사 System for measuring thickness
CN110006350B (en) * 2018-09-19 2021-08-20 核工业华东二六三工程勘察院 Thickness measurement platform based on laser beam emission
CN109813238A (en) * 2019-01-28 2019-05-28 广东拓斯达科技股份有限公司 Control method and device for glass thickness detection
CN110353506B (en) * 2019-07-31 2021-06-04 广东万家乐燃气具有限公司 A kind of water stop control method, water dispenser
CN110384405B (en) * 2019-07-31 2021-06-04 广东万家乐燃气具有限公司 A kind of water supply control method and water dispenser
US20240003677A1 (en) * 2020-12-01 2024-01-04 Lohia Mechatronik Private Limited A device and a method to measure and monitor physical properties of moving web of slit plastic film tapes
US11913772B2 (en) * 2022-03-17 2024-02-27 Intel Corporation Non-destructive gap metrology
CN114812452A (en) * 2022-06-14 2022-07-29 芜湖东旭光电科技有限公司 Glass substrate detection system, method, device, electronic device and storage medium
CN118423566B (en) * 2024-07-03 2024-09-20 陕西旭信通网络科技有限公司 Building engineering monitoring system based on Internet of things
CN119533313A (en) * 2024-11-30 2025-02-28 彩虹（合肥）液晶玻璃有限公司 A non-contact thickness measuring device for substrate glass
CN120120975B (en) * 2025-05-09 2025-08-19 江苏晟驰微电子有限公司 Monitoring device for monitoring thickness of silicon dioxide in real time and application method thereof

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000055626A (en) * 1998-08-06 2000-02-25 Nanotemu:Kk Plate thickness measuring method and device therefor
US20020072134A1 (en) * 2000-12-08 2002-06-13 Ha Jong Eun On-line measuring system for measuring substrate thickness and the method thereof
DE10225488A1 (en) * 2002-06-10 2003-12-18 Bild Und Signalverarbeitung Mb Method and device for non-contact thickness measurement of transparent measurement objects
JP2005061982A (en) * 2003-08-12 2005-03-10 Nishiyama Stainless Chem Kk Display glass substrate inspection equipment

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19949019C2 (en) * 1999-10-11 2001-12-13 Leica Microsystems Measuring device and method for measuring structures on substrates of various thicknesses
JP3768443B2 (en) * 2002-01-09 2006-04-19 大日本スクリーン製造株式会社 Width dimension measuring device and thin film position measuring device
JP2006133099A (en) * 2004-11-08 2006-05-25 Micronics Japan Co Ltd Display panel inspection device

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000055626A (en) * 1998-08-06 2000-02-25 Nanotemu:Kk Plate thickness measuring method and device therefor
US20020072134A1 (en) * 2000-12-08 2002-06-13 Ha Jong Eun On-line measuring system for measuring substrate thickness and the method thereof
DE10225488A1 (en) * 2002-06-10 2003-12-18 Bild Und Signalverarbeitung Mb Method and device for non-contact thickness measurement of transparent measurement objects
JP2005061982A (en) * 2003-08-12 2005-03-10 Nishiyama Stainless Chem Kk Display glass substrate inspection equipment

Also Published As

Publication number Publication date
KR20070100618A (en) 2007-10-11
TW200739031A (en) 2007-10-16
CN101050946A (en) 2007-10-10
TWI421467B (en) 2014-01-01

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