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SG11201901964UA - Axial electron gun - Google Patents

Axial electron gun

Info

Publication number
SG11201901964UA
SG11201901964UA SG11201901964UA SG11201901964UA SG11201901964UA SG 11201901964U A SG11201901964U A SG 11201901964UA SG 11201901964U A SG11201901964U A SG 11201901964UA SG 11201901964U A SG11201901964U A SG 11201901964UA SG 11201901964U A SG11201901964U A SG 11201901964UA
Authority
SG
Singapore
Prior art keywords
electron
electron gun
axial
gun
cathodes
Prior art date
Application number
SG11201901964UA
Inventor
Victor Alexandrovich Timashov
Andrey Anatolyevich Tsepkalov
Sergey Ivanovich Ryabenko
Aleksandr Fyodorovich Belyavin
Georgiy Sergeevich Marynskiy
Aleksey Vladislavovich Filippov
Original Assignee
Paton Turbine Tech Llc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Paton Turbine Tech Llc filed Critical Paton Turbine Tech Llc
Publication of SG11201901964UA publication Critical patent/SG11201901964UA/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/075—Electron guns using thermionic emission from cathodes heated by particle bombardment or by irradiation, e.g. by laser
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02—Main electrodes
    • H01J1/13—Solid thermionic cathodes
    • H01J1/15—Cathodes heated directly by an electric current
    • H01J1/18—Supports; Vibration-damping arrangements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02—Main electrodes
    • H01J1/13—Solid thermionic cathodes
    • H01J1/20—Cathodes heated indirectly by an electric current; Cathodes heated by electron or ion bombardment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02—Main electrodes
    • H01J1/13—Solid thermionic cathodes
    • H01J1/20—Cathodes heated indirectly by an electric current; Cathodes heated by electron or ion bombardment
    • H01J1/26—Supports for the emissive material
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/065—Construction of guns or parts thereof

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

AXIAL ELECTRON GUN The invention relates to the field of fabrication of new materials and coatings and may be used in plants designed for electron-beam heating, melting and evaporating 5 of materials in vacuum or reactive gas atmosphere. The disclosed axial electron gun that comprises, in particular, the primary and secondary cathodes and features the figure- shaped holder used for maintaining a stable position of the secondary cathode relative to the electron-beam axis of the axial gun and the pulsing voltage that is applied between the cathodes for electron bombardment of the secondary cathode. The invention ensures 10 an improved stability of process parameters and operation of the electron gun. Fig. 7
SG11201901964UA 2016-09-07 2017-06-09 Axial electron gun SG11201901964UA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
UAA201609313A UA113827C2 (en) 2016-09-07 2016-09-07 Axial Electron Cannon
PCT/UA2017/000064 WO2018048376A1 (en) 2016-09-07 2017-06-09 Axial electron gun

Publications (1)

Publication Number Publication Date
SG11201901964UA true SG11201901964UA (en) 2019-04-29

Family

ID=58503834

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11201901964UA SG11201901964UA (en) 2016-09-07 2017-06-09 Axial electron gun

Country Status (9)

Country Link
US (1) US10636617B2 (en)
EP (1) EP3474307A4 (en)
JP (1) JP6947436B2 (en)
CN (1) CN109791865B (en)
CA (1) CA3036261C (en)
RU (1) RU2699765C1 (en)
SG (1) SG11201901964UA (en)
UA (1) UA113827C2 (en)
WO (1) WO2018048376A1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6636472B2 (en) 2017-02-28 2020-01-29 株式会社日立ハイテクノロジーズ Electron source and electron beam device using the same

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FR2315766A1 (en) * 1975-06-23 1977-01-21 Sciaky Sa ELECTRON CANNON
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US4084077A (en) 1977-05-10 1978-04-11 Igor Antonovich Porazhinsky Cathode assembly of electron beam welding gun
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JPH0417247A (en) * 1990-05-10 1992-01-22 Fujitsu Ltd Electric field ionization type ion source
JPH07335161A (en) * 1994-06-03 1995-12-22 Hitachi Medical Corp Electron gun
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UA43927C2 (en) 2000-12-26 2002-01-15 Міжнародний Центр Електронно-Променевих Технологій Інституту Електрозварювання Ім. Е.О. Патона Нан України ELECTRONIC CANNON WITH LINEAR THERMOCATODE FOR ELECTRONIC RADIATION HEATING
JP4262002B2 (en) 2003-06-30 2009-05-13 株式会社堀場製作所 Field emission electron gun
FR2861215B1 (en) * 2003-10-20 2006-05-19 Calhene ELECTRON GUN WITH FOCUSING ANODE, FORMING A WINDOW OF THIS CANON, APPLICATION TO IRRADIATION AND STERILIZATION
JP2006331853A (en) * 2005-05-26 2006-12-07 Jeol Ltd Filament assembly, electron gun, and electron beam apparatus
US8159118B2 (en) * 2005-11-02 2012-04-17 United Technologies Corporation Electron gun
JP4636082B2 (en) * 2007-12-27 2011-02-23 日新イオン機器株式会社 Cathode holding structure and ion source including the same
DE102010049521B3 (en) * 2010-10-25 2012-04-12 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Device for generating an electron beam
RU130535U1 (en) 2013-02-28 2013-07-27 Федеральное государственное унитарное предприятие "Научно-производственный центр газотурбостроения "Салют" (ФГУП "НПЦ газотурбостроения "Салют") CATHODE ASSEMBLY FOR ELECTRON BEAM (OPTIONS)
WO2015101537A1 (en) 2013-12-30 2015-07-09 Mapper Lithography Ip B.V. Cathode arrangement, electron gun, and lithography system comprising such electron gun
JP6346034B2 (en) * 2014-08-29 2018-06-20 日本電子株式会社 3D image construction method, image processing apparatus, and electron microscope

Also Published As

Publication number Publication date
CN109791865B (en) 2021-02-23
US20190214220A1 (en) 2019-07-11
UA113827C2 (en) 2017-03-10
EP3474307A1 (en) 2019-04-24
RU2699765C1 (en) 2019-09-10
CA3036261A1 (en) 2018-03-15
JP2019526922A (en) 2019-09-19
CN109791865A (en) 2019-05-21
WO2018048376A1 (en) 2018-03-15
JP6947436B2 (en) 2021-10-13
US10636617B2 (en) 2020-04-28
CA3036261C (en) 2024-03-26
EP3474307A4 (en) 2020-03-04

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