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SE333644B - - Google Patents

Info

Publication number
SE333644B
SE333644B SE06204/67A SE620467A SE333644B SE 333644 B SE333644 B SE 333644B SE 06204/67 A SE06204/67 A SE 06204/67A SE 620467 A SE620467 A SE 620467A SE 333644 B SE333644 B SE 333644B
Authority
SE
Sweden
Application number
SE06204/67A
Inventor
H Willis
W Boyes
Original Assignee
Ici Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ici Ltd filed Critical Ici Ltd
Publication of SE333644B publication Critical patent/SE333644B/xx

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21Polarisation-affecting properties
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/02Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
    • G01B11/0641Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of polarization

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
SE06204/67A 1966-05-04 1967-05-02 SE333644B (xx)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB19754/66A GB1137144A (en) 1966-05-04 1966-05-04 Method and apparatus for measuring absorption of electro-magnetic radiation

Publications (1)

Publication Number Publication Date
SE333644B true SE333644B (xx) 1971-03-22

Family

ID=10134653

Family Applications (1)

Application Number Title Priority Date Filing Date
SE06204/67A SE333644B (xx) 1966-05-04 1967-05-02

Country Status (5)

Country Link
US (1) US3437811A (xx)
DE (1) DE1623196C3 (xx)
GB (1) GB1137144A (xx)
NL (1) NL152979B (xx)
SE (1) SE333644B (xx)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4129781A (en) * 1976-05-17 1978-12-12 Doyle W Film thickness measuring apparatus and method
GB2016678B (en) * 1978-03-10 1982-09-15 Asahi Dow Ltd Infrared multilayer film thickness measuring method and apparatus
JPS589362B2 (ja) * 1978-03-10 1983-02-21 旭化成株式会社 赤外線多層フイルム膜厚測定方法及びその測定装置
DE3728704A1 (de) * 1987-08-28 1989-03-09 Agfa Gevaert Ag Vorrichtung zur bestimmung der dicke von schichttraegern
DE3728705A1 (de) * 1987-08-28 1989-03-09 Agfa Gevaert Ag Vorrichtung zur ueberpruefung von beschichteten und unbeschichteten folien
US5091647A (en) * 1990-12-24 1992-02-25 Ford Motor Company Method and apparatus for measuring the thickness of a layer on a substrate
US5392124A (en) * 1993-12-17 1995-02-21 International Business Machines Corporation Method and apparatus for real-time, in-situ endpoint detection and closed loop etch process control
US10607335B2 (en) 2016-06-28 2020-03-31 Johnson & Johnson Vision Care, Inc. Systems and methods of using absorptive imaging metrology to measure the thickness of ophthalmic lenses
CN112466773B (zh) * 2021-02-01 2021-05-11 中电化合物半导体有限公司 一种半导体外延厚度的检测方法及装置
CN117288103B (zh) * 2023-09-20 2024-06-07 广州泽亨实业有限公司 一种涂层膜厚测量方法和系统

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2393631A (en) * 1940-11-27 1946-01-29 Ilford Ltd Testing of photographic films, plates, and papers
US2726173A (en) * 1953-04-03 1955-12-06 Itt Method and apparatus for measuring film thickness
US3017512A (en) * 1959-06-29 1962-01-16 American Can Co Coating thickness gauge

Also Published As

Publication number Publication date
DE1623196B2 (de) 1975-02-13
DE1623196A1 (de) 1971-03-18
DE1623196C3 (de) 1975-09-11
NL6706250A (xx) 1967-11-06
GB1137144A (en) 1968-12-18
US3437811A (en) 1969-04-08
NL152979B (nl) 1977-04-15

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