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GB2016678B - Infrared multilayer film thickness measuring method and apparatus - Google Patents

Infrared multilayer film thickness measuring method and apparatus

Info

Publication number
GB2016678B
GB2016678B GB7907539A GB7907539A GB2016678B GB 2016678 B GB2016678 B GB 2016678B GB 7907539 A GB7907539 A GB 7907539A GB 7907539 A GB7907539 A GB 7907539A GB 2016678 B GB2016678 B GB 2016678B
Authority
GB
United Kingdom
Prior art keywords
film thickness
multilayer film
measuring method
thickness measuring
infrared multilayer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB7907539A
Other versions
GB2016678A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Asahi Dow Ltd
Original Assignee
Asahi Dow Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP53026610A external-priority patent/JPS589362B2/en
Priority claimed from JP1639879A external-priority patent/JPS55109904A/en
Application filed by Asahi Dow Ltd filed Critical Asahi Dow Ltd
Publication of GB2016678A publication Critical patent/GB2016678A/en
Application granted granted Critical
Publication of GB2016678B publication Critical patent/GB2016678B/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
    • G01B11/0625—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of absorption or reflection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
    • G01B11/0625—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of absorption or reflection
    • G01B11/0633—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of absorption or reflection using one or more discrete wavelengths

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
GB7907539A 1978-03-10 1979-03-02 Infrared multilayer film thickness measuring method and apparatus Expired GB2016678B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP53026610A JPS589362B2 (en) 1978-03-10 1978-03-10 Infrared multilayer film thickness measurement method and measuring device
JP1639879A JPS55109904A (en) 1979-02-15 1979-02-15 Optical physical-value measuring instrument of penetration type

Publications (2)

Publication Number Publication Date
GB2016678A GB2016678A (en) 1979-09-26
GB2016678B true GB2016678B (en) 1982-09-15

Family

ID=26352740

Family Applications (1)

Application Number Title Priority Date Filing Date
GB7907539A Expired GB2016678B (en) 1978-03-10 1979-03-02 Infrared multilayer film thickness measuring method and apparatus

Country Status (3)

Country Link
DE (1) DE2909400C2 (en)
FR (1) FR2419507A1 (en)
GB (1) GB2016678B (en)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3014774C2 (en) * 1980-04-17 1984-11-08 Paul Lippke Gmbh & Co Kg, 5450 Neuwied Method for measuring the thickness or basis weight of a coating on a substrate, carried out using ultra-red radiation
DE3248091A1 (en) * 1982-12-24 1984-06-28 Leybold-Heraeus GmbH, 5000 Köln MEASURING METHOD AND PHOTOMETER ARRANGEMENT FOR THE MANUFACTURE OF MULTIPLE-LAYER SYSTEMS
JPS617445A (en) * 1984-06-21 1986-01-14 Toshiba Corp Oxidizing degree judging apparatus of copper oxide film
US4631408A (en) * 1984-09-24 1986-12-23 Kollmorgen Technologies Corporation Method of simultaneously determining gauge and orientation of polymer films
DE3585875D1 (en) * 1984-12-24 1992-05-21 Mitsubishi Heavy Ind Ltd METHOD FOR CONTROLLING THE THICKNESS OF FILM CONTAINING A LIQUID MIXTURE OF FAT BODIES AND WATER IN PRINTING MACHINES.
DE3631652C2 (en) * 1986-09-17 1994-05-19 Siemens Ag Measuring arrangement for non-contact thickness determination
DE3728704A1 (en) * 1987-08-28 1989-03-09 Agfa Gevaert Ag DEVICE FOR DETERMINING THE THICKNESS OF LAYER
DE3728705A1 (en) * 1987-08-28 1989-03-09 Agfa Gevaert Ag DEVICE FOR CHECKING COATED AND UNCOATED FILMS
GB9219450D0 (en) * 1992-09-15 1992-10-28 Glaverbel Thin film thickness monitoring and control
IL109589A0 (en) * 1993-05-14 1994-08-26 Hughes Aircraft Co Apparatus and method for performing high spatial resolution thin film layer thickness metrology
DE29502560U1 (en) * 1995-02-16 1995-03-30 "Optikzentrum NRW GmbH (OZ)" i.K., 44799 Bochum Device for determining the layer thickness of colored layers on transparent substrates
DE19847617C2 (en) * 1998-10-15 2002-11-07 Sensor Instr Gmbh Method and device for measuring the length of the light guide
US7008518B2 (en) * 2004-01-15 2006-03-07 Deposition Sciences, Inc. Method and apparatus for monitoring optical characteristics of thin films in a deposition process
DE102010025277A1 (en) 2010-06-28 2011-12-29 Sensorik-Bayern Gmbh Device for controlling order of coating on tubular substrate e.g. blood bag, has evaluation and control unit generating control instructions for controlling order of material of coating unit i.e. screw extruder, based on layer thickness
DE102018103171A1 (en) * 2017-11-23 2019-05-23 Tdk Electronics Ag Method for determining properties of a coating on a transparent film, method for producing a capacitor film and device for determining properties of a coating on a transparent film
CN116748254A (en) * 2023-06-29 2023-09-15 华电电力科学研究院有限公司 An automatic cleaning method and device for photovoltaic panels and photovoltaic power station

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3405268A (en) * 1965-03-12 1968-10-08 Brun Sensor Systems Inc Radiant energy absorption gage for measuring the weight of a base material and the content of a material sorbed by the base material
GB1137144A (en) * 1966-05-04 1968-12-18 Ici Ltd Method and apparatus for measuring absorption of electro-magnetic radiation
US3631526A (en) * 1969-11-05 1971-12-28 Brun Sensor Systems Inc Apparatus and methods for eliminating interference effect errors in dual-beam infrared measurements
FR2082717A5 (en) * 1970-03-25 1971-12-10 Cellophane Sa
US3869211A (en) * 1972-06-29 1975-03-04 Canon Kk Instrument for measuring thickness of thin film
US3824017A (en) * 1973-03-26 1974-07-16 Ibm Method of determining the thickness of contiguous thin films on a substrate
US4027161A (en) * 1976-04-05 1977-05-31 Industrial Nucleonics Corporation Minimizing wave interference effects on the measurement of thin films having specular surfaces using infrared radiation

Also Published As

Publication number Publication date
FR2419507A1 (en) 1979-10-05
DE2909400C2 (en) 1985-12-05
GB2016678A (en) 1979-09-26
DE2909400A1 (en) 1979-09-20
FR2419507B1 (en) 1983-10-28

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Legal Events

Date Code Title Description
732 Registration of transactions, instruments or events in the register (sect. 32/1977)
PCNP Patent ceased through non-payment of renewal fee