RU98113860A - METHOD AND DEVICE FOR DETERMINING THICKNESS OF ELECTRICALLY CONDUCTING LAYER - Google Patents
METHOD AND DEVICE FOR DETERMINING THICKNESS OF ELECTRICALLY CONDUCTING LAYERInfo
- Publication number
- RU98113860A RU98113860A RU98113860/28A RU98113860A RU98113860A RU 98113860 A RU98113860 A RU 98113860A RU 98113860/28 A RU98113860/28 A RU 98113860/28A RU 98113860 A RU98113860 A RU 98113860A RU 98113860 A RU98113860 A RU 98113860A
- Authority
- RU
- Russia
- Prior art keywords
- test
- thickness
- frequency
- protective layer
- layer
- Prior art date
Links
- 238000000034 method Methods 0.000 title claims 10
- 239000011241 protective layer Substances 0.000 claims 9
- 239000010410 layer Substances 0.000 claims 7
- 230000005284 excitation Effects 0.000 claims 5
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims 2
- 239000000956 alloy Substances 0.000 claims 2
- 229910045601 alloy Inorganic materials 0.000 claims 2
- 239000011651 chromium Substances 0.000 claims 2
- 239000000463 material Substances 0.000 claims 2
- 229910052751 metal Inorganic materials 0.000 claims 2
- 239000002184 metal Substances 0.000 claims 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical group [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims 1
- 229910052782 aluminium Inorganic materials 0.000 claims 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims 1
- 229910052804 chromium Inorganic materials 0.000 claims 1
- 229910017052 cobalt Inorganic materials 0.000 claims 1
- 239000010941 cobalt Substances 0.000 claims 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 claims 1
- 238000011156 evaluation Methods 0.000 claims 1
- 229910052735 hafnium Inorganic materials 0.000 claims 1
- VBJZVLUMGGDVMO-UHFFFAOYSA-N hafnium atom Chemical group [Hf] VBJZVLUMGGDVMO-UHFFFAOYSA-N 0.000 claims 1
- 238000009434 installation Methods 0.000 claims 1
- 229910052742 iron Inorganic materials 0.000 claims 1
- 238000005259 measurement Methods 0.000 claims 1
- 150000002739 metals Chemical class 0.000 claims 1
- 229910052759 nickel Inorganic materials 0.000 claims 1
- 230000035515 penetration Effects 0.000 claims 1
- 229910052727 yttrium Inorganic materials 0.000 claims 1
- VWQVUPCCIRVNHF-UHFFFAOYSA-N yttrium atom Chemical group [Y] VWQVUPCCIRVNHF-UHFFFAOYSA-N 0.000 claims 1
Claims (11)
а) через катушку возбуждения (3) пропускают высокочастотный электрический ток,
b) катушку возбуждения (3) приближают к защитному слою (1) так, что, по меньшей мере, в защитном слое (1), производится электрический вихревой ток,
с) определяют приданную в соответствие полному сопротивлению испытательной катушки (9) величину, которая по принципу токовихревого контроля служит в качестве основы для определения толщины (dr) слоя (1) и
d) частоту (f) высокочастотного электрического тока выбирают так, что согласно принципу токовихревого контроля происходит однозначное определение толщины (dr) при соотношении электрических проводимостей k2/k1 между 0,7 и 1,5.1. A method for determining the thickness (d r ) of a protective layer (1) with an electrical conductivity k 1 of a part of a turbine installation, wherein a protective layer (1) is applied to the main material (2) of a part with an electrical conductivity of k 2 , and wherein the electrical conductivity is k 1 and k 2 are different from each other, characterized in that
a) a high-frequency electric current is passed through an excitation coil (3),
b) the excitation coil (3) is brought closer to the protective layer (1) so that, at least in the protective layer (1), an electric eddy current is generated,
c) determine the value that is assigned to the impedance of the test coil (9), which, by the principle of eddy current control, serves as the basis for determining the thickness (d r ) of the layer (1) and
d) the frequency (f) of the high-frequency electric current is chosen so that according to the principle of eddy-current control, an unambiguous determination of the thickness (d r ) occurs with a ratio of electrical conductivities k 2 / k 1 between 0.7 and 1.5.
а) подготавливают набор деталей с известной толщиной слоя, служащих в качестве испытательных тел,
b) на каждом испытательном теле с множеством различных приближенных частот (fp) определяют величину, приданную в соответствие полному сопротивлению испытательной катушки (9), и
с) в качестве частоты (f) выбирают приближенную частоту (fp1) с достаточно высокой разрешающей способностью и высокой линейностью в величине, приданной в соответствие полному сопротивлению.6. The method according to any one of claims 1 to 5, characterized in that
a) prepare a set of parts with a known layer thickness, serving as test bodies,
b) on each test body with a number of different approximate frequencies (f p ), a value is assigned that is mapped to the impedance of the test coil (9), and
c) as the frequency (f), select the approximate frequency (f p1 ) with a sufficiently high resolution and high linearity in magnitude, given in accordance with the impedance.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19548508 | 1995-12-22 | ||
| DE19548508.4 | 1995-12-22 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| RU98113860A true RU98113860A (en) | 2000-05-20 |
| RU2194243C2 RU2194243C2 (en) | 2002-12-10 |
Family
ID=7781261
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| RU98113860/28A RU2194243C2 (en) | 1995-12-22 | 1996-12-10 | Method and device for determining electric conducting layer thickness |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US6040694A (en) |
| EP (1) | EP0868646B1 (en) |
| JP (1) | JP2000502189A (en) |
| DE (1) | DE59610353D1 (en) |
| ES (1) | ES2197260T3 (en) |
| RU (1) | RU2194243C2 (en) |
| WO (1) | WO1997023762A2 (en) |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| WO2000037881A2 (en) * | 1998-12-18 | 2000-06-29 | Micro-Epsilon Messtechnik Gmbh & Co. Kg | Method for operating an eddy current sensor and eddy current sensor |
| ES2155035B1 (en) * | 1999-07-09 | 2001-12-01 | Univ Oviedo | MEASUREMENT SYSTEM OF THE QUANTITY OF METALLIC COATING ON STEEL WIRE. |
| US6369566B1 (en) * | 1999-09-27 | 2002-04-09 | Framatone Anp Inc. | Method for measuring crud thickness on nuclear fuel rods |
| DE10001516B4 (en) * | 2000-01-15 | 2014-05-08 | Alstom Technology Ltd. | Non-destructive method for determining the layer thickness of a metallic protective layer on a metallic base material |
| DE10014348B4 (en) * | 2000-03-24 | 2009-03-12 | Immobiliengesellschaft Helmut Fischer Gmbh & Co. Kg | Device for nondestructive measurement of the thickness of thin layers |
| TWI241398B (en) * | 2000-03-28 | 2005-10-11 | Toshiba Corp | Eddy current loss measuring sensor, film thickness measuring device, film thickness measuring method and recording medium |
| JP4874465B2 (en) * | 2000-03-28 | 2012-02-15 | 株式会社東芝 | Eddy current loss measurement sensor |
| WO2002079774A2 (en) * | 2001-03-16 | 2002-10-10 | Siemens Aktiengesellschaft | Method for carrying out nondestructive testing of alloys, which contain carbides or which are sulfided near the surface |
| DE10128961A1 (en) * | 2001-06-15 | 2003-01-02 | Siemens Ag | Non-destructive testing of a cast metal alloy, e.g. a gas turbine blade, registers corroded zones by eddy current measurements before the surface is cleaned and activated and covered by a protective layer |
| KR100435341B1 (en) * | 2001-11-09 | 2004-06-10 | 현대자동차주식회사 | ozone-reduced apparatus for OBD system |
| EP1394360A1 (en) | 2002-08-23 | 2004-03-03 | Siemens Aktiengesellschaft | Nondestructive method for testing a component as well as method to produce a gas turbine blade |
| US6819120B2 (en) * | 2002-11-13 | 2004-11-16 | Northrop Grumman Corporation | Non-contact surface conductivity measurement probe |
| US6894491B2 (en) * | 2002-12-23 | 2005-05-17 | Lam Research Corporation | Method and apparatus for metrological process control implementing complementary sensors |
| JP4451111B2 (en) * | 2003-10-20 | 2010-04-14 | 株式会社荏原製作所 | Eddy current sensor |
| US7068041B2 (en) * | 2003-11-26 | 2006-06-27 | General Electric Company | Method and system for multi-frequency inductive ratio measurement |
| SE527091C2 (en) * | 2003-12-31 | 2005-12-20 | Abb Ab | Method and apparatus for contactless measurement of thickness and electrical conductivity of a measuring object |
| DE102004034083A1 (en) | 2004-07-15 | 2006-02-09 | Robert Bosch Gmbh | Method for the non-contact determination of a layer thickness by resistance and inductance measurement of a sensor coil |
| US20060038558A1 (en) * | 2004-08-20 | 2006-02-23 | The Boeing Company | Eddy current inspection device |
| US7123031B2 (en) * | 2004-12-20 | 2006-10-17 | Siemens Power Generation, Inc. | System for on-line assessment of the condition of thermal coating on a turbine vane |
| US7887534B2 (en) * | 2006-01-18 | 2011-02-15 | Stryker Corporation | Electrosurgical system |
| FR2900471B1 (en) * | 2006-04-26 | 2008-12-26 | Snecma Sa | MEASUREMENT OF WALL THICKNESS, IN PARTICULAR OF DAWN, BY CURRENTS OF FOUCAULT |
| DE102006025356A1 (en) * | 2006-05-31 | 2007-12-06 | Siemens Ag | Method for determining the layer thickness of an electrically conductive coating on an electrically conductive substrate |
| DE102006040869B4 (en) * | 2006-08-31 | 2013-07-04 | Thermosensorik Gmbh | Method and device for detecting a fault in a layered non-metallic specimen |
| JP5495493B2 (en) * | 2008-02-07 | 2014-05-21 | 株式会社東京精密 | Film thickness measuring apparatus and film thickness measuring method |
| GB0820930D0 (en) * | 2008-11-17 | 2008-12-24 | Dvs Techology Ltd | Coating thickness measurement |
| EP2409114B1 (en) | 2009-03-17 | 2013-03-13 | Abb Ab | A method and an apparatus for measuring the thickness of a metal layer provided on a metal object |
| US9194687B1 (en) * | 2010-02-04 | 2015-11-24 | Textron Innovations Inc. | System and method for measuring non-conductive coating thickness using eddy currents |
| KR101138757B1 (en) | 2010-08-10 | 2012-04-24 | 삼성중공업 주식회사 | Apparatus for measuring dry film thickness |
| US8692564B2 (en) * | 2011-02-04 | 2014-04-08 | General Electric Company | System and method for use in determining the thickness of a layer of interest in a multi-layer structure |
| US8564284B2 (en) * | 2011-02-11 | 2013-10-22 | Siemens Energy, Inc. | Fault detection for laminated core |
| US9030219B2 (en) * | 2012-03-01 | 2015-05-12 | Kla-Tencor Corporation | Variable pressure four-point coated probe pin device and method |
| RU2495370C1 (en) * | 2012-05-25 | 2013-10-10 | Федеральное государственное унитарное предприятие "Научно-производственное предприятие "Исток" (ФГУП НПП "Исток") | Device for monitoring of thickness of conducting film of items belonging to electronic equipment |
| US9103652B2 (en) | 2012-06-21 | 2015-08-11 | International Business Machines Corporation | Non-contact sheet conductivity measurements implementing a rotating magnetic braking system |
| TW201418667A (en) * | 2012-11-08 | 2014-05-16 | Taiwan Power Testing Technology Co Ltd | Apparatus of detecting thickness of fibre cloth and method therefor |
| FR3033895B1 (en) * | 2015-03-18 | 2018-08-31 | Airbus Operations | VERIFICATION TOOL FOR VERIFYING THE STATE OF A VENEER LAYER OF AN ELEMENT |
| CN106152927A (en) * | 2015-03-23 | 2016-11-23 | 佛山市顺德区美的电热电器制造有限公司 | The device and method of detection metal thickness |
| DE102020205857A1 (en) | 2020-05-08 | 2021-11-11 | Volkswagen Aktiengesellschaft | Test system, test facility and method for surface layer analysis of a coated component |
| DE202020103194U1 (en) | 2020-06-03 | 2020-06-29 | Bornemann Gewindetechnik GmbH & Co. KG | Improved assembly with helix shape and system comprising the improved assembly |
| DE102021211836A1 (en) | 2021-09-30 | 2023-03-30 | Robert Bosch Gesellschaft mit beschränkter Haftung | measuring device |
| DE102022100439B4 (en) | 2022-01-11 | 2025-05-08 | Berger Holding GmbH & Co. KG | Technique for measuring the wear of a ball screw |
| CN116678305B (en) * | 2023-06-20 | 2025-09-30 | 电子科技大学 | A coating thickness measurement method based on swept frequency eddy current |
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|---|---|---|---|---|
| SU824016A1 (en) * | 1979-07-27 | 1981-04-23 | Московский Ордена Ленина Энергетическийинститут | Ctive base |
| JPS5967405A (en) * | 1982-09-30 | 1984-04-17 | Sumitomo Metal Ind Ltd | Liner thickness measurement method |
| SU1663400A1 (en) * | 1986-06-28 | 1991-07-15 | Физико-Энергетический Институт Ан Латвсср | Metalic coating thickness measuring device |
| US5017869A (en) * | 1989-12-14 | 1991-05-21 | General Electric Company | Swept frequency eddy current system for measuring coating thickness |
| US5430376A (en) * | 1993-06-09 | 1995-07-04 | General Electric Company | Combined thermoelectric and eddy-current method and apparatus for nondestructive testing of metallic of semiconductor coated objects |
-
1996
- 1996-12-10 JP JP09523206A patent/JP2000502189A/en not_active Ceased
- 1996-12-10 EP EP96946183A patent/EP0868646B1/en not_active Expired - Lifetime
- 1996-12-10 DE DE59610353T patent/DE59610353D1/en not_active Expired - Fee Related
- 1996-12-10 ES ES96946183T patent/ES2197260T3/en not_active Expired - Lifetime
- 1996-12-10 WO PCT/DE1996/002383 patent/WO1997023762A2/en not_active Ceased
- 1996-12-10 RU RU98113860/28A patent/RU2194243C2/en not_active IP Right Cessation
-
1998
- 1998-06-22 US US09/103,161 patent/US6040694A/en not_active Expired - Fee Related
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