RU2555191C1 - Device for x-ray-fluorescent analysis of materials with flux generation by flat x-ray waveguide-resonator - Google Patents

Abstract

FIELD: physics.

SUBSTANCE: this device comprises primary X-ray radiation source and excitation flux generator. Analysed material specimen fitted on holder is arranged inside excitation flux generator parallel with direction of propagation of this flux. X-ray fluorescent radiation detector is located opposite specimen holder with specimen fitted thereon. Excitation flux generator is composed of a flat X-ray waveguide-resonator with clearance between reflectors of nano-sized magnitude. Note also that said generator has hole to introduce analysed material in specimen flux so that its analysed surface is located in reflector plane located opposite aforesaid detector. Besides it incorporates radiation recorder detector located at waveguide-resonator outlet. Said detector allows positioning of this device relative to primary radiation source. Note here that specimen holder can displace independently of waveguide-resonator in direction perpendicular to direction of excitation radiation flux propagation. Radiation recoding detector can register radiation that passed through waveguide-resonator and control the specimen input to excitation radiation flux.

EFFECT: controlled feed of specimen to excitation radiation flux.

20 cl, 2 dwg

Description

FIELD OF THE INVENTION

The device for X-ray fluorescence analysis under conditions of total external reflection (hereinafter referred to as X-ray diffraction analysis) with the formation of an excitation flux by a flat X-ray waveguide-resonator (hereinafter referred to as PRVR) is intended for non-destructive multicomponent quantitative analysis of ultra-small quantities of matter with trace trace impurities and with minimal concentrations of: near-surface nanosized layers of solid solids, films, solids of liquids, natural minerals, petroleum products, food products, biological objects, volume environmental projects. The device is also intended to determine the structural characteristics of thin surface layers of epitaxial heterostructures and single crystals, as well as multilayer coatings and composite materials.

State of the art

Known measuring devices for X-ray air defense, containing an x-ray source, a flow monochromator, a reflecting plate of the sample holder mounted at an angle of total external reflection to the propagation direction of the radiation stream coming from the monochromator, and a semiconductor detector mounted on the working side of the sample holder plate. With X-ray air defense, the angle of incidence of the radiation beam formed by the monochromator should be less than the critical angle of air defense (Θ _K ), usually not more than 0.1 deg. An example of such a device is a Picofox 2 spectrometer from Bruker, Germany [1].

Similar X-ray air defense spectrometers are equipped with high-precision mechanical devices for the mutual orientation of the x-ray tube, monochromator and sample holder plate to provide a predetermined angle of incidence of the x-ray flux onto the plate and the sample located on it, which complicates and increases the cost of the design and leads to a decrease in mechanical stability, despite the fact that the error of setting the angle should not be more than 0.01 degrees, with an absolute value of this angle of 0.1 angle. hail.

The above-mentioned disadvantages are overcome in the known device for X-ray fluorescence analysis of materials (USSR author's certificate No. 1831109, publ. 03/10/1996) [2] by creating a slot device formed by a polished sample holder plate and a sample holder supporting, forming a micron gap with the sample holder, through which radiation from the X-ray the tube directly hits the sample located on the sample holder plate. This patent is the closest in technical essence to the claimed invention. In the prototype, the secondary X-ray fluorescence excitation flow driver is an extended slot structure formed by polished quartz reflectors located at a distance of 20 μm from each other.

The input section of the shaper is installed close to the window of the x-ray source. This device is focused on x-ray fluorescence analysis of the elemental composition of solids of liquids. After the droplet has dried, the slit device is assembled and installed on a movable truss fixed to the casing of the x-ray tube. Opposite the sample in the assembly of the slit device is a window of a nitrogen-cooled x-ray detector. Next, the shutter of the X-ray window opens and a manual search is made for the position of the slit assembly relative to the position of the focus of the X-ray tube according to the maximum yield of secondary X-ray fluorescence. It is assumed that the output of the secondary X-ray fluorescence is fixed in accordance with the conditions for the total external reflection of the excitation flux on the material of the dry residue of the liquid sample.

The assembly of the exciter flow driver in the prototype device was carried out by embedding between the reflectors of molybdenum inserts with a thickness of 20 μm. In this case, an extended slotted gap 40 mm long with a slot size of 10 mm × 20 μm was formed. The flow of exciting radiation generated by such a slit device consists of a directly passing beam and contributions that experience multiple total external reflection on the internal surfaces of the reflectors. As a result, the integrated intensity of the generated flow turns out to be higher in comparison with the situation if this flow were formed by two successively installed cutting slits of equivalent width. This leads to a higher efficiency of XRD measurements under the conditions of using extended slotted structures in comparison with shapers using cutting slits. At the same time, the design of the prototype device is characterized by a number of obvious disadvantages.

The principal disadvantage of the X-ray diffraction analysis of the prototype spectrometer is the insufficiently high radiation density of the exciting radiation flux propagating in the gap gap [2]. In addition, there is no clear criterion for fixing the correct position of this cell relative to the focus of the x-ray emitter. The installation of the studied object in the prototype relative to the focus of the x-ray tube is carried out “by eye”, which cannot be an objective criterion for the adjustment operation of the analytical instrument.

Another significant drawback of the prototype is the lack of an algorithmized method for introducing a sample into the analysis field: for this, you have to disassemble the entire slit device, apply the test solution to one of the reflectors, then assemble the device and then measure after reassembling and adjusting the device.

An additional disadvantage of the prototype is the restriction imposed on the thickness of the sample (sample).

A similar device is described in the patent of the Russian Federation No. 2315981, publ. 01/27/2008 [3]. It has the same disadvantages as the prototype. This patent indicates how a slit device is installed relative to the focus of the emitter, but this procedure is due to the location of the analyzed sample relative to the cut-off filter and the focus of the emitter. Here, restrictions on the thickness of the sample, 0.15 mm, are named.

The objective of the present invention is to reduce the detection limit of trace impurities in the test material by increasing the radiation flux density, exciting x-ray fluorescence radiation of the sample (sample), the exclusion of uncontrolled criteria for the location of the sample (sample) and the entire slot device relative to the focus of the x-ray emitter, simplifying the setup of the device, removing restrictions on the thickness of the analyzed sample (sample), as well as expanding the functionality, Those who wish to perform studies of the X-ray structural characteristics of the analyzed surface.

Disclosure of invention

The technical result achieved by the present invention is to reduce the detection limit of trace impurities in the test material by increasing the radiation density of the flux, exciting X-ray fluorescence radiation of the sample (sample); the exclusion of uncontrolled criteria for the location of the sample (sample) and the entire slot device relative to the focus of the x-ray emitter; simplification of instrument settings; the controlled introduction of the analyzed sample (s) into the flow of exciting radiation, as well as the expansion of functionality that allows you to perform studies of x-ray structural characteristics of the analyzed surface. In addition, the restrictions on the thickness of the analyzed sample (sample) are removed, while the analyzed object can be massive and irregular in shape with one flat surface.

To solve this problem, a device is proposed for X-ray fluorescence analysis of the studied material, containing a source of primary X-ray radiation, an excitation flux shaper formed by two reflectors of total external reflection with reflecting planes parallel to each other, a sample holder with a sample of the studied material placed inside the excitation flux shaper parallel to the propagation direction an exciting radiation flux, and an X-ray fluorescence detector and radiation, located opposite the sample holder with the sample. The claimed device is characterized in that the excitation flux shaper is an X-ray flat waveguide-resonator with a slit gap of nanoscale width between the reflectors, while the distance between the reflectors is no more than half the coherence length of the X-ray radiation constituting the excitation flux, and the shaper has an opening for introduction into the flux the test sample so that its test surface lies in the plane of the reflector located opposite the X-ray detector luminescent radiation, and the sample holder is capable of moving regardless of the position of the waveguide-resonator in a direction perpendicular to the direction of propagation of the excitation stream, while the device is additionally equipped with a detector located at the output of the waveguide-resonator for detecting radiation transmitted through the waveguide-resonator, allowing alignment of the device relative to the focus of the x-ray radiation source, control of the input of the sample into the flow of exciting radiation and the register tion of the flow reflected from the surface of the sample.

In preferred embodiments, the waveguide-resonator may be made of a composite waveguide-resonator or with the possibility of adjusting the width of the gap gap by a piezo positioning device.

The device may further comprise a flow concentrator located in front of the resonator waveguide.

The flow concentrator can be made integral with the waveguide-resonator.

The primary radiation source may be a point source or a linear or extended source.

The sample holder is preferably located on an independent stem.

The device may further comprise a mechanical control system for introducing the analyzed sample or sample into the flow of exciting radiation according to the position of the sample holder, a control system for the intensity of radiation transmitted through the waveguide-resonator, and a control system for the spectrum of X-ray fluorescence radiation from the sample recorded by the semiconductor detector.

Preferably, the sample holder is configured to tilt about an axis perpendicular to the direction of propagation of the flow of exciting radiation.

The device may be further provided with a goniometric device to tilt the sample.

The mechanical control system preferably contains a reading device that determines the position of the sample holder and is a micrometer screw.

The system for monitoring the intensity of radiation transmitted through the waveguide-resonator preferably comprises a detector for detecting radiation transmitted through the waveguide-resonator with a registration system.

The X-ray fluorescence emission spectrum monitoring system preferably comprises a semiconductor detector with a recording system.

The device may include a set of primary radiation filters located at the input of the resonator waveguide.

The device may further comprise an x-ray dust and moisture-proof film placed at the output of the resonator waveguide.

The X-ray fluorescence detector in the plane of the upper reflector is preferably provided with a collimator to increase the contrast of the recorded X-ray fluorescence and to protect the detector from damage by the sample.

The detector for detecting radiation transmitted through the resonator waveguide is preferably configured to move in a direction perpendicular to the axis of the resonator waveguide.

The device can be additionally equipped with a goniometric device for the movement of the detector for detecting radiation transmitted through the waveguide-resonator.

The invention consists in the following.

To excite the X-ray fluorescence radiation of the sample under conditions of total external reflection, a flat X-ray waveguide-resonator (RWR) [4] is used, which has the highest radiation flux density from known excitation sources (except for synchrotron radiation and sources with a rotating anode) [5]. In order to take full advantage of this advantage of the PRVR and to eliminate the negative effects associated with the divergence of the exciting radiation flux outside the resonator waveguide (after exiting the resonator waveguide), the analyzed object is located (introduced) directly into the resonator waveguide field parallel to the direction of propagation of the exciting radiation flux . This is done using a sample holder located independently of the waveguide-resonator reflectors, but introducing the sample (the analyzed sample) into the exciting radiation stream strictly parallel to the direction of flow propagation, and, accordingly, the waveguide-resonator reflectors. Moreover, the sample holder has, in addition to the possibility of translational motion, the possibility of a controlled inclination relative to the radiation flux at small angles (within 0.2 angular degrees). By varying the angle of inclination of the sample using a proportional or scintillation detector, it is possible to study the spatial distribution of the intensity of the X-ray flux reflected from the surface of the sample and thereby diagnose the structural characteristics of the surface of the analyzed object.

A semiconductor detector is located opposite the sample holder, detecting fluorescence radiation from the sample, initiated by the flow of exciting radiation under conditions of total external reflection, because the flux of this radiation propagates parallel to the surface of the sample and its angle of incidence on the surface of the sample is obviously less than the critical angle of air defense (Θ _K ). To form the necessary energy spectrum of primary radiation in order to increase the excitation efficiency of a certain group of elements, the radiation of the X-ray tube is filtered by a set of filters depending on the analyzed group of elements and excitation conditions [6].

The proposed design differs from the prototype, built on the basis of a slotted X-ray collimator, using a flat X-ray waveguide-resonator, i.e. the waveguide-resonant shaper of the secondary X-ray fluorescence excitation flux of the object under study with a nanoscale width of the gap (in the size range of 7-80 nm), which is a fundamental achievement from a physical point of view, because provides a flux density of exciting radiation 1000 times greater in comparison with the flows formed by slot-hole devices of micron sizes. The effect of the resonant propagation of the x-ray flux occurs when the gap width is less than half the coherence length of this radiation. In this case, the appearance of a uniform interference field of a standing wave is realized in the entire space of the PRVR slot gap [7]. The main difference between the use of a waveguide-resonant X-ray flux shaper for X-ray air defense and the nearest analogue equipped with a slot-width shaper of micron width is a significantly higher radiation density of the generated excitation flux, which provides a sharp decrease in the detection limit of impurity elements in the studied samples (samples).

An additional distinctive feature of the proposed device is the presence of sealed x-ray transparent windows (primary radiation filter at the inlet and the lavsan film at the output), limiting the effect of varying humidity of the external atmosphere on the parameters of the formed flow, since the gap gap in the open form is a convenient object for moisture penetration due to capillary effect.

An important difference from the prototype is the selected method of introducing the test sample into the flow of exciting radiation. In the prototype, samples in the form of a droplet are applied to one of the removable plates forming the gap. Then the plates and the entire device as a whole are assembled. It is clear that the prototype is not an analytical instrument, but only a research device. In addition, when the layer thickness of the substance remaining after the droplet dries, more than 0.15 μm, the condition of total external reflection is violated and an X-ray fluorescence spectrum corresponding to the standard measurement geometry is obtained. Therefore, in the prototype, the set of analyzed objects is limited to thin films (less than 0.15 microns) or solutions giving a precipitate of a substance with a thickness of not more than 0.15 microns.

In the proposed device, the sample is introduced into the flow of exciting radiation through an opening in one of the plates forming the waveguide-resonator, and the analyte is located on an independent sample holder. Therefore, the sample can be of any thickness, and its secondary X-ray fluorescence corresponding to the conditions of total external reflection occurs when the surface layer of the sample enters the flow of exciting radiation and closes the surface of one of the plates of the resonator waveguide. This makes it possible to analyze not only dry thin residues and thin films up to 0.15 mm thick, as in the prototype, but also massive samples with one polished surface for analysis. No calculated distances for the location of the sample in the field of the resonator waveguide are superimposed, because the effect of total external reflection is achieved at any point in the field of the resonator waveguide due to the parallel location of the sample surface in the direction of flow propagation in the PRVR gap gap. An additional advantage of the proposed device is that the sample holder with the sample can be tilted at a small angle not exceeding the critical air defense angle (about 0.1 deg.) With respect to the direction of propagation of the flow of exciting radiation in the resonator waveguide. This increases the intensity of X-ray fluorescence radiation of the sample by 5-7 times and at the same time provides the opportunity to conduct structural studies of the surface of the samples.

In the proposed device, the alignment of the resonator waveguide relative to the focus of the emitter is extremely simple: moving the PRVR with quote screws in the direction perpendicular to the axis of the resonator waveguide, we achieve the maximum intensity recorded by the detector of the beam passing through the nanoscale slit gap of the PRVR, and, conversely, in the prototype, install the slot device relative to the radiation source is a complex and lengthy procedure, because the angular location of the slit device relative to the radiation source provides a mode of total external reflection on the sample attached to the wall of one of the slit plates.

In the claimed device, the input x-ray filter allows you to form the spectral composition of the exciting radiation, optimal for the excitation of the elements present in the sample. At the same time, the filter and the sealed film on the output side of the device ensure the stability of measurements over time under any changes in operating conditions. In the prototype, there is no primary radiation filtering.

We found that the device described above makes it possible to obtain significantly lower detection limits (10 ^-12 g - 10 ^-14 g) than the prototype (10 ^-11 g).

The combination of features is necessary for the formation of an intense, with a small divergence, plane-parallel beam of x-ray radiation propagated in the field of the resonator waveguide, and for introducing the analyzed surface into this beam parallel to the direction of its propagation with an accuracy higher (less) than the critical angle of air defense of the exciting radiation beam on the analyzed surface, which allows to ensure the mode of total external reflection upon excitation of x-ray fluorescence radiation on the surface of the samples . An important circumstance is that the analyzed sample (sample) is introduced into the beam in a controlled manner. This control is carried out according to three indications: 1) the sample holder, 2) the change in the intensity of the beam passing through the resonator waveguide and detected by the detector, 3) the appearance of the XRD spectrum of the air defense from the surface of the sample recorded by the SPD through the hole in the second plate.

Thus, due to the distinguishing feature of the invention, a technical result is achieved, namely, a decrease in the detection limit of trace impurities in the test material by increasing the radiation flux density, exciting x-ray fluorescence radiation of the sample (sample); the exclusion of uncontrolled criteria for the location of the sample (sample) and the entire slot device relative to the focus of the x-ray emitter; simplification of instrument settings; the controlled introduction of the analyzed sample (s) into the flow of exciting radiation, as well as the expansion of functionality that allows you to perform studies of x-ray structural characteristics of the analyzed surface. In addition, the restrictions on the thickness of the analyzed sample (s) are removed, while the analyzed object can be massive and irregular in shape with one flat surface.

Brief Description of the Drawings

In FIG. 1 presents an x-ray optical diagram of the device.

In FIG. 2 presents a spectrum of tap water obtained using the claimed device.

The implementation of the invention

The device of FIG. 1 includes an x-ray source 1, which is an x-ray tube 1 with a point or an extended focus, a primary radiation filter 2, a waveguide-resonator 3 with a nanoscale slit gap measuring from 7 to 80 nm, formed by two reflectors 4, with a built-in a waveguide-resonator with a sample holder 5 with a sample (breakdown) 6 fixed on it and movable in guides 7, and a semiconductor detector 8 with a collimator 9 located opposite the sample holder 5 and detecting fluorescence chenie from sample stream exciting radiation initiated under conditions of total external reflection. The output of the waveguide-resonator 3 is protected from moisture and dust by an Mylar film 10 of a thickness of 1-3 μm. Behind the waveguide-resonator 3 there is a detector 11 (proportional or scintillation) for detecting radiation passing through the waveguide-resonator located on the same axis as the x-ray source 1 and the waveguide-resonator 3 for its optimal adjustment with respect to the x-ray flux. To limit the intensity of the radiation flux detected by the detector 11, a diaphragm 12 is installed in front of it. To adjust the waveguide-resonator 3 relative to the radiation source 1, the waveguide-resonator 3 is equipped with a microscrew system that ensures its movement with one translational and two rotational degrees of freedom, the detector 11 has a smooth reference movement in the direction perpendicular to the axis of the resonator waveguide. The sample holder 5 has up and down movements and a rotation in the drawing plane along the radius to tilt the plane of the sample relative to the exciting radiation flux. In front of the input window of the waveguide-resonator 3, there is a primary radiation filter 2, which forms the energy spectrum of the flow generated by the x-ray source 1 in an optimal way to excite a particular group of elements taking into account the material of the x-ray tube anode and accelerating voltage [6, 7]. The primary radiation filters 2 are located on a disk containing five replaceable filters and a free slot for transmitting primary radiation without filtering. At the same time, the filter 2 protects the inner space of the waveguide-resonator 3 from atmospheric moisture and dust. On the other hand, the output of the waveguide-resonator 3 is protected from moisture and dust by a lavsan film 10 of a thickness of 1-3 μm.

The device shown in FIG. 1, works as follows. The x-ray beam from the focus of the x-ray tube 1 (point or linear) through the window of the x-ray tube, passing through one of the filters 2 located on the filter disk of the primary radiation (or without a filter through an empty slot), enters the nanoscale slot of the waveguide-resonator 3, formed two flat polished reflectors 4. The beam propagates along the slit of the waveguide-resonator 3 with virtually no absorption. For this, the distance between the plates must satisfy the “coherence condition”, i.e. should be less than half the coherence length of the transported radiation. The intensity of the radiation transmitted through the waveguide-resonator is detected by the detector 11, which has the possibility of rotational movement along the radius around the focal point of the x-ray tube. In order for the radiation passing through the waveguide-resonator not to overload the detector, a diaphragm 12 is installed in front of it. First we describe the process of adjusting the device. Moving the focus of the tube 1 relative to the slit of the waveguide-resonator 3 in the direction perpendicular to the axis of the slit, and tilting the waveguide-resonator with shifts and detecting with the detector 11 the intensity of the radiation transmitted through the waveguide-resonator, we find the absolute maximum intensity of the radiation beam passing through the waveguide-resonator. This position corresponds to the full adjustment of the focus of the x-ray tube relative to the slit of the waveguide-resonator, and in the case of a linear focus, the vertical line of focus of the focus line of the tube 1 and the slit of the waveguide-resonator 3. Next, we introduce the test sample (sample) 6, mounted on the sample holder 5 into the hole in the lower reflex plate of the waveguide-resonator to the position when this sample (sample) closes its surface in the reflex plate and closes the field of the x-ray flow propagating in the gap olnovoda-resonator 3. This closure geometrically corresponds to the position when the surface of the sample (sample) would be parallel to the wall of the cavity waveguide. This process is controlled as a first approximation by the position sensor of the sample holder 5, secondly, by the change in the intensity of the transmitted radiation according to the readings of the detector 11 and, thirdly, by the appearance of the spectrum of fluorescence radiation from the surface of the analyzed sample detected by the semiconductor detector 8. In order to the sample (sample) when moving in the slot field of the waveguide-resonator 3 did not accidentally damage the window of the detector 8, it is protected by a collimator 9, the diameter of which is much smaller than the diameter (size) of the sample (sample) 6. For Mechanical Protection protection and for protection against dust and moisture rear part of the slit-waveguide resonator 3 is protected by the Mylar film 10, a thickness of 1-3 microns.

раз, т.е. приблизительно в 30 раз, что и подтверждается экспериментальными результатами, - в прототипе предел обнаружения по меди и железу составляет приблизительно 10^-11 г, а в предлагаемом устройстве предел обнаружения для элементов, указанных в описании прототипа (медь, железо), составляет 4*10^-13 г (Фиг. 2 - спектр двух капель водопроводной воды с содержанием железа 1,848 мг/л).Compared with the prototype, the proposed device has a radiation flux density of 1000 times higher than that of the prototype, which allows you to get the fluorescence radiation intensity from a sample with the same element concentration 1000 times greater than in the prototype. This reduces the detection limit in $$\sqrt{1000}$$

times i.e. approximately 30 times, which is confirmed by experimental results, in the prototype the detection limit for copper and iron is approximately 10 ^-11 g, and in the proposed device, the detection limit for the elements specified in the description of the prototype (copper, iron) is 4 * 10 ^-13 g (Fig. 2 - spectrum of two drops of tap water with an iron content of 1.848 mg / l).

Literature.

1. Prospectus of the company Bruker AXS "S2 Picofokh". http://www.bruker.com/fileadmin/user_upload/8-PDF-Docs/X-rayDiffraction_ElementalAnalysis/TXRF/Brochures/bro_s2_picofox _en_rev3-2_lowres.pdf.

2. USSR Author's Certificate No. 1831109, publ. 03/10/1996.

3. RF patent No. 2315981, publ. 01/27/2008.

4. V.K. Egorov, E.V. Egorov, Planar waveguide-resonator: new device for X-Ray Optics, X-Ray Spectrometry v. 33, 2004, p.p. 360-371.

5. X-Ray Spectrometry, Recent Technological Advances (Edited by K. Tsuji, J. Injuk, R. Van Grieken), Willey, Chichester, 2004, 603p.

6. Lukyanchenko E.M., Gryaznov A.Yu. On the filtering efficiency of primary and secondary radiation in energy dispersive analysis, XVI Ural Conference on Spectroscopy, Novouralsk, September 9-12, 2003, p. 87.

7. Lukyanchenko EM, Gryaznov A.Yu. Modeling the spectrum of primary x-ray radiation in energy dispersive x-ray spectral analysis // Izv. SPbGETU "LETI" Ser. Solid state physics and electronics. 2003. Issue. 1, p. 10-14.

8. V.K. Egorov, E.K. Egorov, Properties and features of a plane x-ray waveguide-resonator, Photonics, No. 5, 2009, p. 22-28.

Claims (20)

1. Device for x-ray fluorescence analysis of the studied material, containing a source of primary x-ray radiation, an excitation flow shaper, a sample holder with a sample of the studied material placed inside the excitation flow shaper parallel to the direction of propagation of this flow, and an x-ray fluorescence detector located opposite the sample holder with the sample, excitation flow shaper is a flat X-ray waveguide resonator with a gap between refl nanoscale magnitudes, while the distance between the reflectors is not more than half the coherence length of the x-ray radiation constituting the excitation flux, and the shaper has an opening for introducing the studied material into the sample flow so that its surface under investigation lies in the plane of the reflector opposite the x-ray fluorescence detector, and a radiation detection detector located at the output of the waveguide-resonator, configured to align the device VA relative to the source of primary radiation, characterized in that the sample holder is arranged to move independently of the resonator waveguide in a direction perpendicular to the direction of propagation of the excitation radiation flux, while the radiation detection detector is configured to detect radiation transmitted through the resonator waveguide and control input sample into the flow of exciting radiation. 2. The device according to claim 1, characterized in that the waveguide-resonator is composite. 3. The device according to p. 1, characterized in that the waveguide-resonator is made with the possibility of adjusting the width of the gap gap by a piezo positioning device. 4. The device according to claim 1, characterized in that it further comprises a flow concentrator located in front of the resonator waveguide. 5. The device according to p. 4, characterized in that the flow concentrator is made integral with the waveguide-resonator. 6. The device according to claim 1, characterized in that the primary radiation source is a point source. 7. The device according to claim 1, characterized in that the primary radiation source is a linear source. 8. The device according to p. 1, characterized in that the source of primary radiation is an extended source. 9. The device according to p. 1, characterized in that the sample holder is placed on an independent stem. 10. The device according to claim 1, characterized in that it further comprises a system for mechanically controlling the introduction of the sample into the flow of exciting radiation according to the position of the sample holder, a system for monitoring the intensity of radiation transmitted through the waveguide-resonator, and a semiconductor spectrum monitoring system for the X-ray fluorescence radiation from the sample detector. 11. The device according to p. 1, characterized in that the sample holder is made with the possibility of adjustable inclination relative to the axis perpendicular to the direction of propagation of the flow of exciting radiation. 12. The device according to p. 11, characterized in that it is additionally equipped with a goniometric device for tilting the sample. 13. The device according to p. 11, characterized in that the mechanical control system includes a reading device that determines the position of the sample holder, and is a micrometer screw. 14. The device according to p. 11, characterized in that the control system for the intensity of the radiation transmitted through the waveguide-resonator contains a detector for recording radiation transmitted through the waveguide-resonator with a registration system. 15. The device according to p. 11, characterized in that the control system for the spectrum of x-ray fluorescence radiation contains a semiconductor detector with a recording system. 16. The device according to p. 1, characterized in that it contains a set of primary radiation filters located at the input of the resonator waveguide. 17. The device according to p. 1, characterized in that it contains x-ray dust and moisture-proof film located at the output of the waveguide-resonator. 18. The device according to claim 1, characterized in that the X-ray fluorescence detector in the plane of the upper reflector is equipped with a collimator to increase the contrast of the recorded X-ray fluorescence and to protect the detector from damage by the sample. 19. The device according to claim 1, characterized in that the detector for detecting radiation transmitted through the waveguide-resonator is configured to move in a direction perpendicular to the axis of the waveguide-resonator. 20. The device according to p. 19, characterized in that it is additionally equipped with a goniometric device for the movement of the detector for detecting radiation transmitted through the waveguide-resonator.

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