KR20160021681A - Spatial cleanliness retaining device - Google Patents

Abstract

Provided is a spatial cleanliness retaining device which reduces use of a sealing material, which can cause organic contamination, and can make a clean area of a simple dual structure having low volume appendages. The spatial cleanliness retaining device comprises: an inner box; an outer box; and a blower.

Description

[0001] SPACIAL CLEANLINESS RETAINING DEVICE [0002]

The present invention eliminates dust, air pollutants, germs, viruses, and the like that are available in clean space or medical fields where dust, chemicals, etc. necessary for precise instruments for electronic industry, And more particularly, to a space clearance supporting apparatus that provides a clean space.

In order to keep the atmosphere cleanliness of a limited small space high, clean bench and clean booth type equipped dust filter is widely used. As the dust filter, HEPA filter using pleats structure filter is common, but ULPA If it is necessary to remove acid, alkali and organic substances in this space atmosphere, it is necessary to clean the dust filter to the wind side, clean bench equipped with chemical filters for alkali or organic materials, clean booth type Is used.

With the advancement of technology, there has been a very high demand for clarity on dust and cleanliness on chemicals. For example, in the semiconductor industry in the best corner, the US federal standard for dust requires Class 1 or Class 10. In addition, there are hundreds of thousands of classes of dust in the general atmosphere. Since it is economically problematic in terms of construction cost and repair, it is often the case that clean spaces required in a clean room of about class 1000 are constructed of clean bench and clean booth types of Class 1 in many cases. Even if the acidic or alkaline ions in the internal clean space are exposed to 0.1 ppb or less and the silicon wafer is exposed for 48 hours, the bench or booth is equipped with each of the chemical filters described above, and is easily generated in the clean room. It is possible to make the adhesion of organic substances such as dioctyl phthalate (DOP) and siloxane to 1 ng / cm 2 or less.

In the field of medical treatment, patients such as acute leukemia and immunodeficiency who have decreased resistance to infectious diseases may become serious due to infection of resident bacteria or virus which is usually harmless, that is, observation of meteorological observation. For these patients, it is ideal to nurse in a clean room using HEPA filters. However, this environment is borrowed from facilities, and generally only used in areas where there is a high risk of infection, such as the operating room. However, if there is an aseptic environment that can be easily installed in the rotation of a bed of an ambulance or a hospital, it is highly desirable to have a weather observation infectious disease desk.

In addition to these germs and viruses, dust that is harmful to health caused by smoke generated from factories and automobiles is floating in the air. It also contains air pollutants that are harmful to the respiratory system, such as NO, NO2, NOx, SOx, etc., and ozone of photochemical smog components, and it afflicts many pollution disease patients.

If a very clean space with regard to both dust and chemical substances as described above is called an ultra-clean space, in order to support the cleanliness of such a space, a kind of clean bench for storing the super- It has been empirically known that it is not satisfactory unless it is installed in a clean room environment, that is, a double clean space support structure. Class This class of clean When the bench type is installed, the intrusion of very little environmental atmosphere can not be blocked, and it is practically impossible to support the super clean space.

In addition, it is often necessary to transport small devices and parts, etc. in a general environment so as not to contaminate them with dust or chemicals, but usually they are sealed and transported in a clean plastic container together with a clean atmosphere. This seal requires a rubber seal with good performance, but silicone resin is the best. However, from now on, siloxanes are emitted, and the added material becomes outgas from the plastic itself, causing organic contamination of the transported product in the space inside the container. Such contamination may be related to the analysis of semiconducting, for example, transport of wafers or organic trace elements in the environment, for example, when the sample is sent, the sealing time may be detrimental even in several hours. In the case where the sealing time is prolonged for a long time, or when the sealing material is repeatedly used, there is a possibility that the gaseous impurities such as acid molecules or alkaline earth ions may flow into the sealing material even if the sealing material prevents the penetration of dust.

To basically avoid them, the container may be said to have the same structure as the above-mentioned clean bench with a chemical filter.

However, when a few chemical filter modules are used, it is not practical to use a double structure as described above in order to secure the internal cleanliness and the size of the attachment to the clean space.

In addition, the above-described silicone resin material is a structural material necessary for a clean room or a clean bench type. In the case of LSI factories, the siloxane outgases generated from these are susceptible to contamination of exposed silicon surfaces. The equipment of chemical filters does not directly affect the impurities generated in the clean space.

In addition, in the field of medical care, it is required that aseptic environment can be easily installed in the rotation of a hospital or an ambulance bed as described above, but it has not been known to respond to this conventionally.

The present invention can reduce the use of such a sealing material as much as possible while providing a clean space of a double structure as described above with a simple structure with a small amount of an appendage and a space cleanliness which can easily provide an ultra clean space or an aseptic environment And to provide a supporting device.

According to the present invention, there is provided a filter module comprising: a filter module support having a filter module and a filter module support, the filter module having an inner side wall formed by a lower portion of the filter module support, An outer shell and an outer ceiling plate integrally formed at the upper ends of the outer wall and having a lower portion open to allow a space for air to flow between the periphery of the filter module support and the inner wall And a blower for blowing air from above to the filter module, wherein when the device is placed on the floor, the space is cleaned by the air cleaner, The air flowing in the space flows from the space between the inner wall and the outer wall to the space between the inner wall and the outer wall. The gaps are here is to be formed this way to the air to an elevated outlet, marine w air is not clean space of the second-wall structure, characterized in that which is to be sent to the filter module also circular device that can be provided.

According to the present invention, in addition to the above-described configuration, the present invention has the above-mentioned structure, and furthermore, the above-mentioned structure has a bottom member fixedly or detachably connected to the bottom of the outer wall of the external surface, A space clearance support device is also provided.

In addition, according to the present invention, the above-mentioned space cleanliness degree supporting device capable of opening or closing all or a part of one side of the inner side wall and opening / closing or excluding all or a part of the outer side wall corresponding to that side / RTI >

In the present invention, the above-mentioned foreign matter can be freely or removably attached to the carrier of the transportation means, so that the above-mentioned middle box can be freely loaded and unloaded in the overseas phase.

Further, according to the present invention, there is provided a space cleanliness supporting apparatus in which a box-like clean booth having a wall surface having an opening by equipping an air shower and an air filter is closely attached to the opening of the outside wall so as to substantially coincide with the opening.

It is preferable that the above-mentioned filter module has a filter for removing fine particles on the wind direction side and a filter on the side where a plurality of chemical substances removing follicles are repeatedly blown up.

Further, according to the present invention, there is provided an aggregate target space cleanliness degree support apparatus in which a plurality of the above space cleanliness degree support apparatuses are integrally connected.

According to the spatial clearance supporting apparatus of the present invention, it is possible to provide a space cleanliness impurity and a super clean space having a very small amount of germs and viruses, as required, in a general environment including special chemical environments It can be formed easily and its clearness can be surely sustained for a necessary period.

The apparatus of the present invention, which forms an integral lid by opening both the outer box and the inner bottom, is suitable when the clean space is usually small. It is effective to support clearness only by covering the article requiring super clean environment. The cover of the present invention only achieves the purpose of super clean storage by covering the cassette containing the wafer only, and there is no problem even if there is a slight leakage in the cross section of the cover outer box. Therefore, there is almost no risk of rusting, chemical emission, or contamination by outgas from the material, which is difficult to avoid in the conventional plastic case when the contents are taken in and out. What can be taken out from a clean environment container only by climbing the lid is that the wafer cassette loading in the automatic manufacturing line is cleaned and simplified.

Such a plastic case is also used as a transportation container, but it can avoid contamination as in the case of storage, even if it is an ultra clean transportation container, in combination with a lower member that externally senses the lid of the present invention. The apparatus of the present invention of the closed air circulation system is very effective in the case of storage and transportation in a super clean state with respect to apparatus, parts and materials which do not become a source of pollutants.

The apparatus of the present invention in which the bottom of the outer box becomes a closed bottom is suitable for the case where the required clean space is large, that is, about the clean booth. The analytical room or laboratory is in the general environment, and the environment of the class is only a few hundred thousand if the cleaning is careful. The double-walled clean booth according to the present invention uses the air shower sub-chamber to easily provide a super clean working place even in such an environment. In addition, an aseptic environment can be easily formed around a patient's bed in a hospital or the like.

In this apparatus, when a bubble part containing system is used as a chemical filter, a space element is good, and the height of the trauma can be made low enough to enter a normal room. In addition, if there is a substance that you want to remove, especially in the environment of analysis or experiment, you can choose suitable follicles and contribute to background reduction of analysis and experiment. The ion exchange follicles can be regenerated when they deteriorate. Such advantages are that the follicle area becomes smaller with the addition method, and the defects in which the filter life is shortened can be sufficiently compensated.

The clean booth type device according to the present invention is a clean booth type device in which the outer surface is made of a carrier of a van-type truck (track), and a clean moving device in a clean room of the factory is super cleanly transported, It is possible to carry out the clean return of the door. In addition, the patient can be moved in the aseptic environment, for example, from the home or the accident site to the hospital and between hospitals.

Further, the clean booth type apparatus according to the present invention can be moved to a vehicle like a house trailer in a state in which the clean booth type apparatus can be operated. The apparatus can be applied to an apparatus in which the present invention is cleaned by connecting a plurality of such apparatuses.

A factory using such a clean room can be constructed in a short period of time, and it can be moved as needed. If it can be applied to a specific process in an LSI manufacturing line, a device having excellent mobility, flexibility, and economy can be manufactured have.

BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a perspective view showing an example of a double-wall lid type spatial clearance supporting apparatus of the present invention. Fig.
Fig. 2 is a cross-sectional view of the device shown in Fig. 1 when the filter module mounting portion is terminated. Fig.
Figure 3 is a simplified representation of the longitudinal section of the device shown in Figure 1;
4 is a perspective view showing an example of a large space cleanliness supporting apparatus having a double-wall structure according to the present invention.
Fig. 5 is a vertical sectional view schematically showing the configuration of a cleanliness supporting apparatus of the present invention having a total room for gang-making and dumping of an operator into the apparatus of the present invention. Fig.
FIG. 6 is a plan view schematically illustrating the construction of a clean room constructed by connecting three large-sized double-walled clean booths as an example of the present invention. FIG.
Fig. 7 is a vertical cross-sectional view along the line AA in Fig. 6 of the device shown in Fig. 6;

The spatial clearance support device of the present invention is characterized in that the clean space obtained by the filter is formed in a box while the lower portion is opened, and the external surface surrounding the inner surface forms a double wall, The gap becomes the circulation path of the air and the filter action is returned, and the air rising in the gap of the double wall becomes the buffer for the internal cleanliness. Therefore, the spatial clearance supporting apparatus of the present invention can make the inside of the interior of the room an ultra-clean space even in a general atmospheric environment of several millions of classes.

The apparatus according to the present invention comprises a box and an outer casing (hereinafter, also referred to as a double-wall cover casing) while the lower casing is opened and a bottom having a closed bottom of the outer casing (hereinafter also referred to as a double- Divided.

[Double wall type] The double wall type device needs to be precisely processed as closely as possible between the floor and the floor even if it is placed on the floor only. The leakage of very little air is preferable in that the internal pressure of the apparatus is adjusted. In addition, even if only a small amount of foreign matter or dust from the outside world leaks, the intruding material rises on the double wall surface and is removed by the filter. A double wall lid type apparatus is a system in which the cleanliness support space of the present invention is small in size, that is, the size from a cassette storing about 25 pieces of silicon wafers to a clean area of a small clean bench In order to use this bench in the general environment, a worker box similar to that of the previous room may be connected, but it is convenient to say that it is a glove box type. It is possible to equip work gloves through the middle wall.

This small-sized device for wafer cassettes is a double-wall type device which is made so that the lower surface of the trauma is on one plane since it is lightweight even when the box and the trauma are fitted to the box while the filter and the blower are equipped. It is possible to accomplish the object simply by putting on the article to be cleanly supported. It is preferable that the wafer cassette transport mechanism in the automatic manufacturing line can be supported purely by lifting and lowering the lid in terms of simplification and demagnetization.

The filter module used for this is usually a small filter module which is cut into a circular shape or a square shape and is used for dust, organic matter, cationic, anion filter paper or fowl element It is enough to repeat. Since the filter paper for dust on the side where the wind is blowing surely blocks the oscillation from the chemical filter, strict airtightness to the inner surface is required. A commercially available dust element usually produces an organic material outgassing pattern. In a small apparatus, a low flow rate is often used, but the influence of outgas becomes strong, and therefore, a fluororesin PTFE filter paper is preferable. The organic element is activated by the activated carbon follicle

For the ion and for the anion, the activated carbon fleeces of the ion exchange fuzzy or impregnated fuze are respectively used. These filter media are well known to those skilled in the art. In the case of manufacturing a double wall type compact device, materials such as inner side walls, outer walls, floor coverings and the like are preferably plastic materials with little organic outgassing. For example, hard vinyl chloride and polycarbonate may be used. Among them, polycarbonate .

[Two-walled, clean container type] In this embodiment, a low square member of a square is provided, which can be fixedly installed at the bottom of the outer wall of the external surface, or can be fitted in a manner that can be freely inserted and removed with a small clearance. Even if a very strong vibration is applied, the effect of leakage from the outside world can be neglected. When the blower is operated by a battery, a movable space cleanliness supporting device can be provided.

In the apparatus of the low-member-fixed structure, the scale of the clean booth to such an extent as to accommodate the small apparatus and the operator who operates it is suitable, and a relatively large clean space becomes large-sized object. Since the trauma is closed to the bottom, an opening is required on the corresponding side of the inner side wall and the outer side wall for the carrying-in and carrying-out of the apparatus and the entry and exit of the operator. This opening is achieved by making the front or a part of the wall detachable or by providing a door or window which can be opened and closed at a part of the wall. During the super clean operation or the super clean operation in the interior, the opening is closed normally. A slight leak is required at the closing of the outer wall opening to keep the air in the device at the required pressure. Leak is undesirable in closing the inner wall opening.

The filter module is configured to provide a dust removing filter and a chemical removing filter (chemical filter) disposed on the blowing side thereof. The filter module may be provided with two types of filters in one module, and two types of modules corresponding to the respective filters may be arranged in a cascade arrangement.

As a filter for dust removal on the wind direction side, a pleated commercial HEPA or ULPA filter is used, and a small number of organic outgas is selected and used.

As the chemical filter module, for example, it is preferable that the pleated filter or the pleated filter is formed by repeating fibrils of different collection performance as shown in Japanese Patent Laid-Open Nos. 7-204439 and 7-24246. The order in which the filter medium is laid is usually an activated carbon follicle for organic matters, anion exchange follicles for cationic ions, an activated carbon fountain for acid-impregnated activated carbon, and anion exchange fibrils for anionic ions, Or an alkaline additive activated carbon follicle is used. In this case, one module is equipped with all of the collecting performance of these modules, which makes it compact. The chemical contaminants in the air which are the target of removal of the air filter, that is, the chemical contaminants in the air harmful to the semiconductor process, are selected from the group consisting of acidic gases such as HF, HCl, and H2SO4, alkaline gases such as NH3 and amine, Organic compounds such as dioctyl phthalate (DOP), butylhydroxytoluene (BHT), hexamethyldisilazane, siloxanes, phosphoric acid esters, etc. To remove all of these, three kinds of follicles are required .

The small volume as the chemical filter may be a small portion of the trauma to the present invention, so that not only the space element but also the performance is preferable. The element follicles for spreading may be the same as those in the case of the above double-wall lid type.

In the case of a large-sized apparatus, the inner side wall is preferably a plastic material with little organic outgassing, and a hard vinyl chloride resin or a polycarbonate resin is exemplified. Polycarbonate is a typical resin considering the resin price. For example, stainless steel or aluminum, and painted with a small amount of organic outgassing, for example, urea-based paint.

When we work in closed air circulation system such as large double wall clean container type apparatus, introduction of fresh outside air is necessary from viewpoint of health of worker. The temperature and humidity of the behavior clean room are controlled by cooling and drying of the outdoor air, if necessary, so that the required amount of exhaust gas must be discharged in response to the introduction of outside air. For example, an exhaust pipe provided with an air blower capable of controlling the amount of exhausted air on the way of opening the exhaust port while being pushed down to the lower part of the grating. .

In order for an operator to enter the interior of the interior through an opening in a double wall, an auxiliary auxiliary clean booth (hereinafter referred to as an all-room booth) for cleaning the worker's work is required. In the prior art, an entrance was provided in an exit and a clean room from outside in the actual booth, and the wall having the entrance of the latter was brought into close contact with the outer surface of the outer wall having the doorway of the present invention apparatus, And then enters the booth at the entrance of the boundary between the booth and the clean booth, which is the clean booth. After entering the booth at the entry / exit stage, In order to prevent the flow of the descending air from being extremely disturbed, the upper end of the gap of the wall with the entrance is temporarily fixed by the damper .

In this class of space cleaner support system, acidic ions such as Cl and SO ₄ and NH ₃ were all below the detection limit of 0.02 ppb when the inner air flow rate of the inner air was 0.4 m / sec, even in the general air atmosphere of several millions of classes. When the silicon wafer immediately after the heat treatment was allowed to stand for 24 hours, the amount of organic carbon adsorbed on this surface was 1 × 10 ¹³ atoms / cm ² or less. For the dust, cleanliness according to the performance of the ULPA filter is obtained.

In the two-walled clean container type device in which the bottom of the outer box is closed, as an embodiment thereof, the outer shape of the outer box is fixedly or detachably mounted on a load carrier of a truck, So that it becomes movable. Even when traveling in a general environment, the above-mentioned structure in which the cargo desired to be transported in a clean environment is housed is satisfactorily satisfactory in cleanliness during traveling. At this time, it is preferable that the box is freely movable in and out of the trauma. The filter is stored in the inside of the compartment inside the clean room of the dispatching station, and the filter is moved by extension cord with the extension cord to the outside of the platform while the general environment is moving. Clean transportation is accomplished by moving to the clean room where the sea is transported as after driving.

Therefore, the space clearance supporting device of the present invention can be transported to a state where it can be started soon, and it is easy to tow-move a large-sized clean booth type like a house trailer to a vehicle.

In addition, it is also possible to construct a clean room by connecting a plurality of external traces to such a large-sized space clean-up support apparatus, and to construct a clean room of a clean room size in a short period of time in accordance with necessity, However, the manufacturing process using the clean room is preferably continued once the operation is started. Therefore, it is necessary to use a chemical filter with a long life. The filter module to be installed on the inner side preferably has a large element area and a good space factor - and uses a pleated filter having anion, cation, . The traces of the individual devices are fixed on a sturdy rail and connected. On the rail, it is necessary to use a dedicated bogie to use the separate guide rail. Except for the side wall of the connecting portion between the booths, the bottom plate member is inserted into the gap between the levels of the grating for the worker to work or the level of the grating to put the ceiling plate member on the side wall gap of the lower level of the filter, The super clean air in the clean room created by the connection is circulated through the grating to the double wall surface gap surrounding the clean room and from the blower to the filter. The spatial cleansing of the technology is also performed in a collective space where the air circulation purification such as the supporting device is integrated.

When it becomes clean room scale, it is used for multipurpose, and it should be able to use pure water, medicine liquid, gas and so on in general.

The utility room of each booth is located under the rail, and it is easy to standardize to carry out piping through floor and grating, and it is suitable for quick start and demolition. Do.

A description will be given of a case in which the space clearance support device of the present invention can be used as a means for providing a clean space for medical use, particularly a sterile environment.

In general, airborne microorganisms adhere to suspended particles, so dust-removing filters such as HEPA filters are used for sterilization. However, when intermittently operated, microbes propagate on the wind side of the filter element, Element is leaked. Therefore, in one embodiment of the present invention, at least the filter on the side where the dust-removing filter blows the germicidal foil is provided on the wind-blowing side. More specifically, when equipped with a chemical filter containing a bubble part, a woven cloth of an antibacterial force, for example, a copper wire, is used as a wire net for attachment. have.

As a more specific preferable example, a three-part activated charcoal fibril is used as the fibrillar filter, one sterilizing agent such as an amphoteric surfactant is added for sterilization, one oxidizer such as potassium permanganate and alkali is added (SOx), acidic gas, and the like, and the remaining one is used as it is for the trapping of organic substances and ozone. Examples of the oxidizing agent for collecting NO and SOx include halogens ) Is also effective, and for the impregnation of alkali, it may be dried by using an aqueous solution of dilute soda or an aqueous solution of dilute potassium. Combination of HEPA and one chemical filter module arranged on the wind side, It is possible to substantially cope with such a problem. [0030] By equipping them with the double-walled cover structure of the present invention, It is possible to provide a safe and comfortable space for the patient during the recreation. In this case, since the difficult removal rate required by the electronic industry is not required, the pre-fabric method using a simple aluminum material such as assembly is sufficient .

When the blower is directly connected to the upper part of the filter and integrated with the so-called FFU (filter fan unit) system, the noise is uncomfortable to the patient and is not suitable for a long term use. Therefore, the blower is located outside the outer wall, In this case, a heat exchanger for air conditioning is attached to the vicinity of the blower.

When a low-pressure mercury lamp with a main wavelength of 184.9 nm is emitted immediately after the HEPA filter under the HEPA filter to emit light, ozone is generated, and physicians and nurses in the inner ear can sterilize the incoming bacteria in about one hour. In addition, most of the ozone reached is decomposed when a low-pressure mercury lamp with a main wavelength of 253.7 nm is inserted into a part of the blowing tube to be sucked in. After the ozone disinfection in the internal ozone is finished, the low pressure mercury lamp This is because the strong decomposition action of the mercury lamp in the blowing tube and the slightly ozone are completely captured by the activated carbon follicles. The 253.7 nm mercury lamp has a strong disinfection function Therefore, it is possible to make sterilized bacteria in the outside air entering from the lower end of the trauma to harmlessly sterilize the follicles if it is lit at all times.

This concept of clean rooms can be effectively applied to vehicles that transport and prevent a patient's meteorological observation infection. The risk of passing through an enormous number of air pollution environments is inevitable, as there may be a lot of roads and factory districts in traffic. In such a vehicle, the effect of the double-walled structure of the apparatus of the present invention can be expected. In this case, the HEPA filter with a blower installed on the ceiling is used as a double-walled structure in which a case of a so-called van with a sealed baggage compartment is taken as an outer contour against the box while the floor is being gratified. We install hinged door on inner wall facing to this because we think. The patient's bed is equipped with the necessary medical equipment in the inside of the inside. When the box itself is carried out to the outside while attaching the Ohguruma ring to the inside, and it is made in structure to be able to move, , And it becomes possible to move it.

According to the technology, it is possible to purify the interior by double wall method, so that the structure of this vehicle can be produced. In the case of the analysis of ultrapure harmful components of the environment, this component is generally extremely unstable and at risk of deterioration with time. Therefore, it is necessary to prepare a chemical analysis sample by adding chemical pretreatment immediately at the sampling site.

In such a chemical pretreatment chamber, the clean clean room of the present invention is optimal, and the background of the analytical value can be reduced, the sensitivity can be improved, and high reliability can be achieved. Since it is desirable to carry out such a treatment with a small ultrapure water producing apparatus or a refining apparatus for high purity gas, the movement of the two connection trains of the clean room trailer and the utility trailer may be favorable.

In this embodiment, evaluation of cleanliness in the apparatus is required. Dust was measured with a standard laser scattering dust counter. The super clean environment at this stage is Class 1 with a size of 0.16μm. For the anions such as SO ₄ and Cl and NH ₃ , the water is analyzed by ion chromatography using a sampling method in which sample air is bubbled into ultrapure water filled in a quartz glass impeller and the water is absorbed. From these results, The concentration of air in the air was requested in ppb. In an ultra clean environment at this stage, their anions and cations are less than 0.05 ppb. The evaluation of organic material contamination was based on the property that a thermally oxidized silicon surface has strong chemical activity and easily adsorbs organic impurities in an environmental atmosphere. The analysis of the silicon surface adsorbed organic matter required an absolute amount of organic carbon atoms by the charged particle activation analysis method described in ANALYTICAL CHEMISTRY, Vol. 71, No. 16, page 3551-3557. It is known that the adsorbed organic carbon is not more than 1 × 10 ¹³ atoms / cm ² even if the wafer immediately after the thermal oxidation is exposed for 24 hours in a highly clean clean bench as an organic material that is effectively working. The reduction of bacteria and bacteria was confirmed by biological indicator by culture.

The following evaluation of cleanliness is performed by the above-mentioned technique.

[Example 1]

(2-wall cover-type) second clean room inside almost every area of the dust point, but to obtain sufficient purity, wafer process harmful DOP or alkaline substance, such as organic matter and ammonia, such as siloxane in and Cl or SO ₄ for LSI Are generally more concentrated than in the general environment. Since the main source is the process unit in a clean room, there is a place where the cleanliness of such impurities is remarkable and bad locally. This embodiment relates to a space cleanliness supporting apparatus suitable for the case where a wafer entering a cassette is placed in a particularly high area of chemical contamination and is described with reference to Fig.

This space clearance support device consists of a double-walled cover composed of a box and an outer surface while the floor is free, and the cover is placed over the cassette 11 of the 6 inch wafers 10 placed on a flat plate- It is possible to support it.

This inner phase is formed by the filter module support 2 with the filter module 1 sandwiched therebetween. The filter module is provided with a blower 9 blowing on the filter. Since this embodiment is a cleanliness supporting device for a 6-inch wafer, the filter module support is made 19 cm x 19 cm and 20 cm deep by an inward-facing polycarbonate plate in an in-line method. The bottom of the sidewall is a gap 12 where the downward air can start blowing sideways, and the pit 12 with a depth of 5 mm is rushing except for the four corners.

The outer box is made of a polycarbonate plate, which is made of a roof ceiling plate 8 rather than a side wall (outer wall) 7. The shape and dimensions of the inner wall and the outer wall of the inner wall 4 are all approximately 10 mm and the ceiling plate is covered with a slight clearance space between the blower 9 and the lower end of the side wall 7 is coplanar It is made.

The lid of the double-wall structure is formed by joining the box with the pillars 13 so that the box is obscured as shown in Fig. 1 while the box is placed on the flat plate. The electric outlet 14 for operating the blower 9 is installed .

The filter module 1 is attached to the inner film filter module support 2 so that the cross section thereof is shown in FIG. 2, and is internally threaded. The outer wall of the filter module 1 is cut with a cylindrical cut wall 15 and circular filter elements 16, 17, Lt; / RTI > 16 is a fluorine resin PTFE pore size of 0.1 μm for dust, and it can be widened to the ceiling of the box while there is no leaking by a tightening ring 22 whose periphery is thread-cut with fluorine resin O-ring 21. 17 is activated carbon follicles, 18 is ion-exchange fibrils for cations, and 19 is ion-exchange fibrils for anions. These three are stacked on top of the filter element for the dust, and the lid 20 is screwed and sealed. A small blower 9, specially manufactured as shown in Fig. 3, is fitted on the lid.

When the lid is placed on the floor 6 having a flat surface, the downward air cleaned through the filter by the operation of the blower is made into the clean space 3 inside the inside of the inside, the hole 12 formed by the four cavities 12 in the lower side of the inside wall, The clearance 6 is inverted by the outer wall to rise the clearance between the outer side wall and the inner side wall and return to the blower 9 by the roof ceiling plate 8 to circulate the clean air. As a result of the leakage of contaminated air from the environment, the amount of penetration is small, while the sidewall gap rises and the filter is cleaned, so the circulation system for this purification is not a closed system in a strict sense. There is a characteristic that there is no characteristic, and the contamination from the material itself and the problem that the packing rushes out on the occasion of the supply and the receipt of goods supply are unleaded .

Phase 6 was made into a flat plate of polycarbonate of 40 cm square and a fluorocarbon tube for air analysis sampling was spilled about 10 cm at the center, And the cleanliness of the space 3. The floor was moved to an environment contaminated with HCl so that HCl was 30 ppb and the air in the space 3 was operated for 2 hours by the fluorine resin tube The concentration of HCl in the space 3 was 2.5 ppb, and the concentration of HCl in the space 3 was 2.5 ppb. When the flow rate was adjusted to 5 L / min (flow rate: 0.5 cm / sec) The HCl concentration in the space 3 was 0.05 ppb, and the amount of 0.1 ppb or less required for the super clean space was satisfactorily satisfied.

The flooring was transferred to a general environment with an NH3 concentration of 25 ppb, and sampling and analysis were carried out as described above. At the air flow rate of 5 L, space 3 was only 3.1 ppb cleaned, but at 12.5 L per minute, 0.07 ppb Cleanliness was maintained and maintained.

In addition, an excessive current is caused to flow through the vinyl chloride-coated wire to create an environment in which the outgas of the DOP is intentionally generated, and a cassette 11 having a silicon wafer immediately after thermal oxidation is placed on a floor 6 of polycarbonate of 40 cm square, The surface carbon concentration was (4 to 7) × 10 12 atoms / cm 2, and the amount of organic carbon adsorbed on the wafer was calculated by the following equation: It has been found that the cleanliness of the space 3 can obtain and maintain sufficiently high cleanliness with respect to organic pollution.

[Example 2]

(Double-walled clean container) Even though the case of the silicon wafer which is sealed and stored in the plastic wafer case is used, the organic wafer is contaminated with outgas from a small amount of case material Therefore, in order to transmit a high-sensitivity analysis of a minute amount of organic matter remaining on a cleaned wafer to a remote analysis site, a metal wafer case must be used. In this case, the wafer is contaminated with metal, In this embodiment, an apparatus for supporting and transporting the inner space cleanliness for storing wafers is described to analyze an extremely small amount of surface contaminants using the above embodiment .

The floor 6 of the embodiment 1 is made to be the outer shape of a quadrangular tree such as 23 shown in the sectional view of Figure 3 so that the outer side 25 of the outer wall of the double wall lid is fitted to the inner side 24 of the box, A double wall lid and an outer wall 23. In this embodiment, the blower 9 is located outside the roof ceiling plate.

The wafer used for evaluating the degree of cleanliness support has an analysis result of Na, Fe, and Al of 2 × 10 ⁹ atoms / cm ² or less, a surface organic carbon concentration of 7 × 10 ¹² atoms / cm ² or less , And the dust count to 0.16 μm is 10 or less on a 6-inch wafer.

The wafer 10 of the same lot in this cleaning was placed in the cassette 11, and the outer surface 23 was externally exposed to the bottom of the double-walled cover in which the cassette and the wafer were fixed by the cassette fixing frame 27 dedicated to the cushion member 26 made of polyethylene.

This was housed in a cooler box, and the blower 9 was operated on the load carrier of the truck (track) for 24 hours using the power source of the vehicle so that the downflow rate of the air was 15 L / min. As a result of analysis of Na, Fe and Al, there was no meaningful difference in the surface organic carbon concentration and the number of fine particles on the surface immediately after the cleaning.

1 filter module
2 inner box filter module support
3 Inner Inner Inner Clean Space
4 inner side wall
5 Bottom of inner side wall
6 Covering Flooring
7 Outer wall
8 Outer box ceiling plate
9 blower
10 Silicon wafer
12 Clearance at the bottom of the side wall
13 Outer box combined landing
16 Dust filter element
17 activated carbon fiber
18 Cation exchange foil
19 Anion Exchange Foam
23 Square wooden box
28 outer wall opening
29 inner sidewall opening
30 Grating
31 ULPA filter
32 wave type bubble filter
33 Clean booth in all rooms
34 Wave filter bubble filter
35 ULPA filter
36 blower
37 Entrance / exit openings in general rooms
38 Opening and Closing Openings in Clean Room
39 casters
40 air shower spout
41 Grating
42 damper
43 Outdoor introduction
44 Exhaust pipe
45 blower
46 Filters for thin negative ions
47 Thin Films for Cations
48 Thin Activated Carbon Filter
49 ULPA filter
50 Ceiling Plate Member
51 bottom plate material
52 rails
53 Rail base
54 Pure water introduction pipe
55 gas introduction pipe
56 Water pipe
57 Exhaust gas for hazardous gases
58 External introduction pipe
59 air exhaust pipe
60 air shower room
61 clean booth in all rooms
62 Sliding door for entrance
65 Sliding door for entrance
66 Sliding door for entrance
67 blower
68 blowing pipe
69 Low pressure mercury lamp
70 Heat exchanger
71 Beds for patients
72 Low pressure mercury lamp for ozone generation
73 HEPA filter
74 Wave type bubble filter
75 Clean room entrance 75
76 hukou
77 Rear door
78 Huqiu
79 FFU
80 Grating
81 Oguruma ring

Claims (10)

A filter module support 2 equipped with a filter module 1 having a filter and a filter module support 2 integrated with the filter module support 2 to form a space 3 through which the descending air having passed through the filter flows, And an outer ceiling plate (8) integrated at the upper ends of the outer wall (7) and the outer wall (7), the lower portion being open and the filter An outer surface provided to enclose the detoxification box such that a space for air flow is provided between the periphery of the module support body 2 and the inner sidewall 4 and an air blower for blowing air from above to the filter module 1 9. A space cleanliness support apparatus comprising:
The lower end (5) of the inner wall is formed with air flowing in the space (3) when the device is placed on the floor (6) at the bottom between the inner wall A space for allowing the air to flow out is formed in the channel space, and the air thus flowed out is raised, and the sea air is transferred to the filter module 1 for circulation. .
The apparatus according to claim 1, further comprising a lower member fixedly or detachably connected to the bottom of the outer wall (7) of the external surface so as to function as the bottom.
The apparatus according to claim 2, wherein all or part of one side of the inner side wall can be opened or closed, and all or a part of the outer side wall corresponding to the side can be opened or closed.
4. The apparatus according to claim 3, wherein the outer box is removably or fixedly mounted on a load carrier of the transportation means, so that the inner box can be loaded and unloaded freely in the oversea.
4. The space cleanliness supporting device according to claim 3, wherein the box-shaped clean booth having a wall surface having an opening by equipping the air shower and the air filter is closely attached to the opening of the outer wall so as to substantially conform to the opening.
The apparatus according to claim 1, wherein the filter module (1) replaces a filter for removing particulates on the wind direction side and a plurality of chemical substances removing follicles to clean the filter on the side where the blowing wind blows.
The apparatus according to claim 1, characterized in that the filter module (1) has a filter for removing particulates on the wind direction side and a filter on the side for blowing at least the germicidal filter.
[7] The filter according to claim 7, wherein the wind-blowing side filter comprises at least an activated carbon follicle to which a sterilizing agent is added, an activated carbon follicle in which an oxidizing agent and an alkali are added, and an activated carbon fossil (an organic substance or ozone trapping) Spatial cleanliness support device.
The space cleanliness supporting device according to claim 1, wherein a low-pressure mercury lamp having a main wavelength of 253.7 nm is provided at a windward side of the filter module toward the air flow.
The apparatus according to claim 3, wherein the plurality of spatial clearance supporting devices are integrally connected to each other.

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