KR20070121761A - 게이트형 가스 센서 - Google Patents
게이트형 가스 센서 Download PDFInfo
- Publication number
- KR20070121761A KR20070121761A KR1020077023791A KR20077023791A KR20070121761A KR 20070121761 A KR20070121761 A KR 20070121761A KR 1020077023791 A KR1020077023791 A KR 1020077023791A KR 20077023791 A KR20077023791 A KR 20077023791A KR 20070121761 A KR20070121761 A KR 20070121761A
- Authority
- KR
- South Korea
- Prior art keywords
- sensor
- semiconductor layer
- contact
- gas
- metal oxide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 claims abstract description 81
- 229910002091 carbon monoxide Inorganic materials 0.000 claims abstract description 81
- 229910044991 metal oxide Inorganic materials 0.000 claims abstract description 76
- 150000004706 metal oxides Chemical class 0.000 claims abstract description 76
- 239000004065 semiconductor Substances 0.000 claims abstract description 73
- 239000012491 analyte Substances 0.000 claims abstract description 37
- 239000010409 thin film Substances 0.000 claims abstract description 33
- 238000000034 method Methods 0.000 claims description 98
- 239000002105 nanoparticle Substances 0.000 claims description 40
- 239000000758 substrate Substances 0.000 claims description 34
- 230000008859 change Effects 0.000 claims description 33
- 230000027756 respiratory electron transport chain Effects 0.000 claims description 26
- 229910052751 metal Inorganic materials 0.000 claims description 25
- 239000002184 metal Substances 0.000 claims description 25
- 238000006243 chemical reaction Methods 0.000 claims description 20
- 238000001514 detection method Methods 0.000 claims description 19
- 230000035945 sensitivity Effects 0.000 claims description 18
- 239000000463 material Substances 0.000 claims description 17
- 230000004888 barrier function Effects 0.000 claims description 16
- 229910000476 molybdenum oxide Inorganic materials 0.000 claims description 16
- PQQKPALAQIIWST-UHFFFAOYSA-N oxomolybdenum Chemical compound [Mo]=O PQQKPALAQIIWST-UHFFFAOYSA-N 0.000 claims description 16
- 150000001875 compounds Chemical class 0.000 claims description 15
- 238000000151 deposition Methods 0.000 claims description 14
- 230000006870 function Effects 0.000 claims description 11
- 230000008021 deposition Effects 0.000 claims description 9
- 238000004544 sputter deposition Methods 0.000 claims description 5
- 239000012212 insulator Substances 0.000 claims description 4
- 150000002739 metals Chemical class 0.000 claims description 4
- 238000012876 topography Methods 0.000 claims description 4
- 239000002019 doping agent Substances 0.000 claims description 3
- 229910052723 transition metal Inorganic materials 0.000 claims description 3
- 150000003624 transition metals Chemical class 0.000 claims description 3
- 238000004070 electrodeposition Methods 0.000 claims description 2
- 230000001737 promoting effect Effects 0.000 claims description 2
- 239000000203 mixture Substances 0.000 claims 5
- 230000009466 transformation Effects 0.000 claims 4
- 238000000137 annealing Methods 0.000 claims 2
- 239000002243 precursor Substances 0.000 claims 2
- 230000005855 radiation Effects 0.000 claims 2
- 206010073306 Exposure to radiation Diseases 0.000 claims 1
- 238000003487 electrochemical reaction Methods 0.000 claims 1
- 238000004776 molecular orbital Methods 0.000 claims 1
- 239000007789 gas Substances 0.000 description 50
- 230000004044 response Effects 0.000 description 23
- 239000010408 film Substances 0.000 description 18
- 230000003647 oxidation Effects 0.000 description 16
- 238000007254 oxidation reaction Methods 0.000 description 16
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 13
- 239000001301 oxygen Substances 0.000 description 13
- 229910052760 oxygen Inorganic materials 0.000 description 13
- 238000004519 manufacturing process Methods 0.000 description 10
- 238000013459 approach Methods 0.000 description 9
- 239000000126 substance Substances 0.000 description 9
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 8
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 7
- 229910052750 molybdenum Inorganic materials 0.000 description 7
- 239000011733 molybdenum Substances 0.000 description 7
- JKQOBWVOAYFWKG-UHFFFAOYSA-N molybdenum trioxide Chemical compound O=[Mo](=O)=O JKQOBWVOAYFWKG-UHFFFAOYSA-N 0.000 description 7
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 6
- 230000008901 benefit Effects 0.000 description 6
- 238000013461 design Methods 0.000 description 6
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 5
- 230000005284 excitation Effects 0.000 description 5
- 238000012544 monitoring process Methods 0.000 description 5
- 238000000206 photolithography Methods 0.000 description 5
- 230000008569 process Effects 0.000 description 5
- 238000006557 surface reaction Methods 0.000 description 5
- 108010003320 Carboxyhemoglobin Proteins 0.000 description 4
- QXYJCZRRLLQGCR-UHFFFAOYSA-N dioxomolybdenum Chemical compound O=[Mo]=O QXYJCZRRLLQGCR-UHFFFAOYSA-N 0.000 description 4
- 238000009826 distribution Methods 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 4
- 230000010354 integration Effects 0.000 description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 3
- 206010021143 Hypoxia Diseases 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 230000003321 amplification Effects 0.000 description 3
- 229910002092 carbon dioxide Inorganic materials 0.000 description 3
- 239000001569 carbon dioxide Substances 0.000 description 3
- 238000011161 development Methods 0.000 description 3
- 230000018109 developmental process Effects 0.000 description 3
- 238000005566 electron beam evaporation Methods 0.000 description 3
- 230000005669 field effect Effects 0.000 description 3
- 229910002804 graphite Inorganic materials 0.000 description 3
- 239000010439 graphite Substances 0.000 description 3
- 230000006872 improvement Effects 0.000 description 3
- 239000012528 membrane Substances 0.000 description 3
- 238000003199 nucleic acid amplification method Methods 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 238000012552 review Methods 0.000 description 3
- 229910052814 silicon oxide Inorganic materials 0.000 description 3
- 206010019233 Headaches Diseases 0.000 description 2
- 208000005374 Poisoning Diseases 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 229910006404 SnO 2 Inorganic materials 0.000 description 2
- 239000008280 blood Substances 0.000 description 2
- 210000004369 blood Anatomy 0.000 description 2
- 239000000969 carrier Substances 0.000 description 2
- 239000011651 chromium Substances 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000007613 environmental effect Effects 0.000 description 2
- 231100000869 headache Toxicity 0.000 description 2
- 230000007954 hypoxia Effects 0.000 description 2
- 239000006194 liquid suspension Substances 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 239000002082 metal nanoparticle Substances 0.000 description 2
- 238000001465 metallisation Methods 0.000 description 2
- 239000002086 nanomaterial Substances 0.000 description 2
- 239000002070 nanowire Substances 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 230000037361 pathway Effects 0.000 description 2
- 231100000572 poisoning Toxicity 0.000 description 2
- 230000000607 poisoning effect Effects 0.000 description 2
- 230000009257 reactivity Effects 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 238000001179 sorption measurement Methods 0.000 description 2
- 238000002207 thermal evaporation Methods 0.000 description 2
- 229910001887 tin oxide Inorganic materials 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- 239000011787 zinc oxide Substances 0.000 description 2
- MGWGWNFMUOTEHG-UHFFFAOYSA-N 4-(3,5-dimethylphenyl)-1,3-thiazol-2-amine Chemical compound CC1=CC(C)=CC(C=2N=C(N)SC=2)=C1 MGWGWNFMUOTEHG-UHFFFAOYSA-N 0.000 description 1
- 241000270730 Alligator mississippiensis Species 0.000 description 1
- 208000001408 Carbon monoxide poisoning Diseases 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 239000004593 Epoxy Substances 0.000 description 1
- 108010054147 Hemoglobins Proteins 0.000 description 1
- 102000001554 Hemoglobins Human genes 0.000 description 1
- 208000003443 Unconsciousness Diseases 0.000 description 1
- 230000004913 activation Effects 0.000 description 1
- 238000001994 activation Methods 0.000 description 1
- 230000032683 aging Effects 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 239000010953 base metal Substances 0.000 description 1
- 238000005266 casting Methods 0.000 description 1
- 238000006555 catalytic reaction Methods 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000012512 characterization method Methods 0.000 description 1
- 239000013626 chemical specie Substances 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 238000000970 chrono-amperometry Methods 0.000 description 1
- 238000004769 chrono-potentiometry Methods 0.000 description 1
- 239000011370 conductive nanoparticle Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000001186 cumulative effect Effects 0.000 description 1
- 238000000835 electrochemical detection Methods 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 238000007429 general method Methods 0.000 description 1
- 238000003306 harvesting Methods 0.000 description 1
- 230000001146 hypoxic effect Effects 0.000 description 1
- 238000011065 in-situ storage Methods 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 238000001755 magnetron sputter deposition Methods 0.000 description 1
- 238000001883 metal evaporation Methods 0.000 description 1
- 239000002923 metal particle Substances 0.000 description 1
- 238000001000 micrograph Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012806 monitoring device Methods 0.000 description 1
- 239000002077 nanosphere Substances 0.000 description 1
- JCXJVPUVTGWSNB-UHFFFAOYSA-N nitrogen dioxide Inorganic materials O=[N]=O JCXJVPUVTGWSNB-UHFFFAOYSA-N 0.000 description 1
- 230000006911 nucleation Effects 0.000 description 1
- 238000010899 nucleation Methods 0.000 description 1
- 230000009965 odorless effect Effects 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 238000000053 physical method Methods 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 239000002574 poison Substances 0.000 description 1
- 231100000614 poison Toxicity 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 150000003254 radicals Chemical group 0.000 description 1
- 230000008929 regeneration Effects 0.000 description 1
- 238000011069 regeneration method Methods 0.000 description 1
- 230000004043 responsiveness Effects 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- 229930195734 saturated hydrocarbon Natural products 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000008279 sol Substances 0.000 description 1
- 238000010129 solution processing Methods 0.000 description 1
- 241000894007 species Species 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 208000024891 symptom Diseases 0.000 description 1
- 230000009967 tasteless effect Effects 0.000 description 1
- 238000007725 thermal activation Methods 0.000 description 1
- 239000002341 toxic gas Substances 0.000 description 1
- 238000006276 transfer reaction Methods 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
- G01N27/403—Cells and electrode assemblies
- G01N27/414—Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
- G01N27/403—Cells and electrode assemblies
- G01N27/414—Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS
- G01N27/4141—Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS specially adapted for gases
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82B—NANOSTRUCTURES FORMED BY MANIPULATION OF INDIVIDUAL ATOMS, MOLECULES, OR LIMITED COLLECTIONS OF ATOMS OR MOLECULES AS DISCRETE UNITS; MANUFACTURE OR TREATMENT THEREOF
- B82B1/00—Nanostructures formed by manipulation of individual atoms or molecules, or limited collections of atoms or molecules as discrete units
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N10/00—Thermoelectric devices comprising a junction of dissimilar materials, i.e. devices exhibiting Seebeck or Peltier effects
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Physics & Mathematics (AREA)
- General Health & Medical Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- Molecular Biology (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Crystallography & Structural Chemistry (AREA)
- Nanotechnology (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US66328605P | 2005-03-18 | 2005-03-18 | |
| US60/663,286 | 2005-03-18 | ||
| US37579106A | 2006-03-15 | 2006-03-15 | |
| US11/375,791 | 2006-03-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| KR20070121761A true KR20070121761A (ko) | 2007-12-27 |
Family
ID=37024411
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020077023791A Withdrawn KR20070121761A (ko) | 2005-03-18 | 2006-03-17 | 게이트형 가스 센서 |
Country Status (5)
| Country | Link |
|---|---|
| EP (1) | EP1864122A2 (fr) |
| KR (1) | KR20070121761A (fr) |
| CA (1) | CA2599374A1 (fr) |
| TW (1) | TW200706863A (fr) |
| WO (1) | WO2006102064A2 (fr) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20140066967A (ko) * | 2010-10-28 | 2014-06-03 | 오를리콘 트레이딩 아크티엔게젤샤프트, 트뤼프바흐 | Pvd를 이용한 몰리브덴 일산화물 레어어 및 그의 생산 |
| US10203313B2 (en) | 2014-02-18 | 2019-02-12 | Industry-Academic Cooperation Foundation, Yonsei University | Hydrogen sensor and sensor circuit |
Families Citing this family (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7454295B2 (en) | 1998-12-17 | 2008-11-18 | The Watereye Corporation | Anti-terrorism water quality monitoring system |
| US8958917B2 (en) | 1998-12-17 | 2015-02-17 | Hach Company | Method and system for remote monitoring of fluid quality and treatment |
| US9056783B2 (en) | 1998-12-17 | 2015-06-16 | Hach Company | System for monitoring discharges into a waste water collection system |
| US8920619B2 (en) | 2003-03-19 | 2014-12-30 | Hach Company | Carbon nanotube sensor |
| KR100890193B1 (ko) * | 2007-07-10 | 2009-03-25 | 한국기계연구원 | 전압 조절 방식을 이용한 가스 센서의 감도 개선 방법 |
| GB2498522B (en) * | 2012-01-16 | 2014-03-12 | Efficience Marketing | A chemical species sensor and a method for detecting a chemical species |
| TWI566409B (zh) * | 2014-08-26 | 2017-01-11 | 元太科技工業股份有限公司 | 電晶體及其製作方法 |
| US9678030B2 (en) * | 2014-12-30 | 2017-06-13 | General Electricity Company | Materials and sensors for detecting gaseous agents |
| EP3820366B1 (fr) | 2018-07-10 | 2023-12-27 | Readout, Inc. | Dispositif de détection d'analyte dans l'haleine |
| US11375920B2 (en) | 2018-07-10 | 2022-07-05 | Readout, Inc. | Multi-sensor breath analyte detection device |
| WO2020037264A1 (fr) * | 2018-08-17 | 2020-02-20 | Life Technologies Corporation | Procédé de formation de capteurs d'ions |
| CN111380926B (zh) * | 2018-12-28 | 2023-05-26 | 鸿富锦精密工业（深圳）有限公司 | 气体感测器及其制备方法 |
| US20240229217A9 (en) * | 2021-02-24 | 2024-07-11 | Imec Vzw | A method for etching molybdenum |
| CN117191885B (zh) * | 2023-08-22 | 2024-06-04 | 天津大学 | 超快响应室温石墨烯基二氧化氮传感器 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20030059342A1 (en) * | 2001-09-26 | 2003-03-27 | Elkind Jerome L. | Pocket analyser |
-
2006
- 2006-03-17 KR KR1020077023791A patent/KR20070121761A/ko not_active Withdrawn
- 2006-03-17 TW TW095109215A patent/TW200706863A/zh unknown
- 2006-03-17 EP EP06738717A patent/EP1864122A2/fr not_active Withdrawn
- 2006-03-17 CA CA002599374A patent/CA2599374A1/fr not_active Abandoned
- 2006-03-17 WO PCT/US2006/009686 patent/WO2006102064A2/fr not_active Ceased
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20140066967A (ko) * | 2010-10-28 | 2014-06-03 | 오를리콘 트레이딩 아크티엔게젤샤프트, 트뤼프바흐 | Pvd를 이용한 몰리브덴 일산화물 레어어 및 그의 생산 |
| US10203313B2 (en) | 2014-02-18 | 2019-02-12 | Industry-Academic Cooperation Foundation, Yonsei University | Hydrogen sensor and sensor circuit |
Also Published As
| Publication number | Publication date |
|---|---|
| EP1864122A2 (fr) | 2007-12-12 |
| WO2006102064B1 (fr) | 2007-06-21 |
| WO2006102064A2 (fr) | 2006-09-28 |
| TW200706863A (en) | 2007-02-16 |
| WO2006102064A3 (fr) | 2007-04-19 |
| CA2599374A1 (fr) | 2006-09-28 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PA0105 | International application |
Patent event date: 20071017 Patent event code: PA01051R01D Comment text: International Patent Application |
|
| PG1501 | Laying open of application | ||
| PC1203 | Withdrawal of no request for examination | ||
| WITN | Application deemed withdrawn, e.g. because no request for examination was filed or no examination fee was paid |