JPH1190301A - Surface plate with suction mechanism - Google Patents

Abstract

PROBLEM TO BE SOLVED: To make it possible to easily and surely adsorb and hold works, such as substrates, by freely rotatably fitting adsorbers formed with adsorption holes into a plane parallel with a work loading surface and disposing negative pressure transmitting means for transmitting a negative pressure to the adsorption holes of the adsorbers. SOLUTION: A step motor 24 is arranged on the base of a circular recessed part 14 via a gasket for leak prevention consisting of rubber or Teflon (R). The output shaft of the step motor 24 is formed to a hollow shape opened at the top end and the bottom end. The bottom end thereof is communicated with a bottom hole 26 and the top end thereof supports the adsorbers 18 and is communicated with the adsorption holes 16 via communication holes formed in the adsorbers 18 so that the negative pressure introduced into the bottom hole 26 may be transmitted to the adsorption holes 16. As a result, the sure adsorption of the works of plural kinds of sizes is made possible without forming the many adsorption holes on the work loading surface.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a surface plate with a suction mechanism suitable for holding a substrate or the like when applying a coating liquid discharged from a nozzle to a substrate such as a plasma display panel.

[0002]

2. Description of the Related Art A plasma display panel, which is a gas discharge panel, has a large number of cells as a minute discharge space sandwiched between two substrates, and emits light by discharging each cell.
The fluorescent material is caused to emit light by the generated ultraviolet light, so that pixels of a predetermined color are formed.

[0003] Barriers are provided between the minute cells to prevent light crosstalk (crosstalk) between the cells and to keep the distance between the substrates constant.

In a plasma display panel, in order to make the discharge space as large as possible and obtain high-luminance light,
The barrier is required to be vertically cut, narrow and high. In particular, for a high-definition display, a height of 100
A barrier having a high aspect ratio such as 30 to 50 μm in width is required for μm.

As a method of forming a barrier in a plasma display panel as described above, the present applicant has applied a single coating to only a required area, and has a required thickness, a small surface unevenness, and a peripheral portion. Japanese Patent Application Laid-Open No. 9-9213 discloses a nozzle coating method and apparatus capable of obtaining a coating surface having a uniform film thickness.
No. 4 proposed.

According to the present invention, a coating liquid is discharged from a nozzle tip at a lower end of a coating liquid container while being separated from a flat coating surface of an object to be coated, and the coating liquid is discharged to the coating surface from the nozzle tip. In parallel, the nozzle is relatively moved, and the coating liquid is applied in a line on the application surface, and is sequentially repeated so that a part of the next application line in the width direction overlaps the previous application line in the width direction. A coating surface is formed by applying the coating solution.

In the above-described nozzle coating apparatus, a substrate to be coated is required to have a high flatness at the time of coating. Therefore, for example, as shown in FIG. Surface plate 2 made of granite or the like with adsorption holes 1 formed
Above, the substrate is sucked and held by the negative pressure so that its flatness is maintained at a high level.

Reference numeral 3 in FIG. 7 denotes a pilot hole for a suction hole drilled from the back side of the platen 2 to introduce a negative pressure into the suction hole 1.

[0009]

The platen 2 as described above
For example, when the substrate 4 for a plasma display panel is to be sucked, as shown in FIG. It is desirable to adsorb.

However, when the sizes of the substrates are different, there is a case where a substrate of a size which is not expected after the production of the platen 2 is attracted. For example, as shown by reference numeral 4A in FIG. 7, if the substrate is slightly larger than the substrate 4 and if the substrate 4A is not sucked by the suction hole 1 at the inner position from the four corners, the outer portion of the suction hole 1 and particularly the four corners Warpage is likely to occur in the part.

In such a case, a large number of suction holes 1 may be formed in the surface plate 2 in advance. In this case, a large diameter suction hole preparation hole 3 is formed for each suction hole 1. Therefore, there is a problem in that the rigidity of the base 2 is reduced and the flatness is reduced.

Further, if a large number of suction holes 1 are provided in the surface plate 2, it is necessary to change the suction holes for applying a negative pressure according to the size of the substrate. For this reason, a large number of pipes are required, and furthermore, the operation for switching each pipe is complicated, which causes an operation error.

The present invention has been made in view of the above-mentioned conventional problems, and does not reduce the rigidity of the platen by forming a large number of suction holes. An object of the present invention is to provide a surface plate with a suction mechanism that can easily and reliably suction and hold a work such as a substrate without requiring an operation of an arrangement and a switching valve.

[0014]

According to a first aspect of the present invention, there is provided a surface plate with a suction mechanism having a plurality of suction holes for suction-fixing a work by negative pressure on a work mounting surface. A plurality of circular concave portions are formed on the work mounting surface, and a thickness of the circular concave portion is equal to or less than the depth of the circular concave portion. The suction body having the suction hole formed therein is rotatably fitted in a plane parallel to the work mounting surface, and negative pressure transmitting means for transmitting a negative pressure to the suction hole of the suction body is provided. The above object is achieved by a surface plate with an adsorption mechanism characterized by the following.

According to a second aspect of the present invention, the suction hole of the suction body may be closed by a stopper whose upper end is lower than the work mounting surface.

Further, the circular recess is formed at a position below the suction hole in the base of the platen body, coaxially with a prepared hole formed from the back side thereof, and having a diameter smaller than that of the prepared hole. May be formed with a large inner diameter.

Further, as in claim 4, the adsorbing body is disposed in the circular recess together with a motor for rotating the adsorbing body, and the rotation direction of the adsorbing body in the circular recess is controlled by controlling the motor. May be freely positioned.

In the present invention, the suction hole is provided eccentrically on the rotatable suction body on the work mounting surface, and the position of the suction hole can be changed by making the suction body rotatable. Thus, works having different sizes can be reliably held by suction without providing a large number of suction holes.

[0019]

Embodiments of the present invention will be described below in detail with reference to the drawings.

As shown in FIG. 1, a surface plate 10 with a suction mechanism according to an embodiment of the present invention has six circular recesses 14 formed on a work mounting surface 12 thereof. In the circular concave portion 14, adsorbers 18 </ b> A to 18 </ b> F each of which is a disc-shaped member and has one adsorbing hole 16 formed at a position eccentric from the center of the circle are parallel to the workpiece mounting surface 12. And is rotatably fitted in the suction holes 16 of each suction body.
The negative pressure from the negative pressure source 20 can be selectively transmitted through the negative pressure line 22.

As shown in FIG.
8 (the adsorbents 18A to 18F are collectively referred to as adsorbents 18A to 18F).
Step motor 2 is provided in circular recess 14.
4 and, in the mounted state, the upper surface of the adsorbent 18 is flush with the work mounting surface 12 or the work mounting surface 12
Slightly lower than the position.

Reference numeral 26 in FIG.
The pilot hole is a drilled hole from the A side. The upper end of the pilot hole 26 communicates with the circular recess 14, and the lower end of the pilot hole 26 is connected to the negative pressure pipeline 22. The inner diameter of the circular recess 14 is larger than the inner diameter of the pilot hole 26.

The step motor 24 is disposed on the bottom surface 14A of the circular recess 14 via a leak-proof packing 28 made of rubber or Teflon (trademark). The output shaft 25 of the step motor 24 has a hollow shape with an upper end and a lower end opened. The lower end communicates with the pilot hole 26, and the upper end supports the adsorbent 18 and is formed in the adsorbent 18. The suction hole 16 is communicated with the suction hole 16 through the communication hole 16A so that the negative pressure introduced into the pilot hole 26 can be transmitted to the suction hole 16.

As shown in FIGS. 1 and 2, each pilot hole 2
6 is connected to a negative pressure line 22 via valves 30A to 30F. By selectively opening and closing these valves 30A to 30F, the negative pressure applied to the suction hole 16 can be turned on and off. ing.

As shown in FIG. 3, these valves 30A to 30F are controlled on / off by a control device 32. The control device 32 controls the step motors 24A to 24F for changing the rotation angles of the adsorbers 18A to 18F. The valve 34 for turning on / off the supply of pressure and the negative pressure source 20 can be controlled.

The work mounting surface 1 of the platen 10 with the suction mechanism
For example, when a workpiece 36 made of a substrate is attracted to the workpiece 2, when the workpiece 36 is of a standard size, as shown by a solid line in FIG. Adsorbers 18A, 18 at four corners
The suction holes 16 of B, 18E, and 18F are set at positions below the four corners of the work 36.

On the other hand, when adsorbing a work 36A slightly larger than the work 36, the controller 32 controls each of the stepping motors 24A to 24F so that the adsorbent 1
The suction holes 16 of 8A to 18F are set by being rotated by about 180 ° so that they are located outside the outline of the work 36 and inside the outline of the work 36A.

Reference numeral 17 in FIG. 1 denotes a fixed suction hole formed at the center of the work mounting surface 12. A negative pressure must always be applied to the fixed suction hole 17 irrespective of the size of the work, so that its position does not need to be changed.

For example, in the case of a work 36B having an area about half of that of the standard-sized work 36, in FIG.
The negative pressure applied to the suction holes 16 of the four adsorbers 18E and 18F is turned off, and a negative pressure is applied only to the suction holes 16 of the remaining four adsorbers 18A to 18D.
Is set to adsorb.

Here, the amount of eccentricity of the suction hole 16 with respect to the circular center of each of the suction bodies 18A to 18F is selected according to the dimensional difference between the expected maximum size and minimum size work and the standard size work 36. I do. In this case, the suction hole 1
The larger the amount of eccentricity of 6, the more the work of various sizes can be sucked.

In the surface plate 10 with the suction mechanism,
Originally, the circular concave portion 14 is provided so as to communicate with the prepared hole 26 formed from the back surface 11A side of the platen body 11 corresponding to each of the suction holes, so that a large number of suction holes and the corresponding prepared holes are formed. In this case, the strength of the platen body 11 does not decrease.

Further, since the number of the suction holes 16 is substantially the same as in the conventional case, the negative pressure control system for applying a negative pressure to the suction holes is not complicated.

In the example of the above embodiment, each adsorbent 1
Although only one suction hole 16 is provided for each of 8A to 18F, a plurality of suction holes 16 may be provided.

In this case, for example, as shown in FIG.
A plurality of suction holes 40A to 40I having different amounts of eccentricity are formed from the circular center of the suction body 38, and each of the suction holes 40A to 40I is formed.
A female screw 41 is formed in I, and a male screw 42 is screwed into a suction hole to which a negative pressure is not applied to be used.

Therefore, if the diameter of the suction body 38 is made large in advance, it is possible to suction a work in a wider range.

In FIG. 4, the suction holes 40A to 40I
Are spirally arranged on the adsorbing body 38, but may be an adsorbing body 46 in which a large number of suction holes 44 are provided on virtual circles having different radii as shown in FIG. 5, for example.

In the case of this adsorbent 46, a plurality of adsorption holes 4
The work can be sucked by 4A to 44C.

Step motor 24 and adsorbent 18
Is fixedly attached to the bottom surface 14A of the circular concave portion 14 through a leak-preventing packing 28. In this configuration, the rotation mechanism constituted by the step motor 24 and the adsorbent 18 has looseness. At this time, the upper end of the adsorbent 18 may protrude from the work mounting surface 12 and hinder accurate suction of the work.

In such a case, as shown in FIG. 6, the step motor 24 is connected to the bottom surface of the circular recess 14 via a leak-preventing packing 48 which can be elastically deformed in the depth direction of the circular recess 14. It is good to attach to 14A. Reference numeral 49 in FIG. 6 is a stopper that is disposed between the step motor 24 and the bottom surface 14A and that suppresses downward deformation of the step motor 24 beyond a certain level.

When a negative pressure is introduced into the pilot hole 26, the stepping motor 24 and the adsorbent 18 are sucked downward in FIG. The stopper 49 is set so that the upper surface (adsorbing surface) of the adsorbing member 18 is located at a position relative to the work mounting surface 12 or slightly below it.

In the above embodiment, the step motor 24 has a configuration in which the output shaft 25 rotates. However, the present invention is not limited to this. The casing (drum) integrated with the adsorbent 18 may be fixed to the board body 11 side so as to rotate.

In the above embodiment, the angular position of the adsorbent in the rotation direction is changed by the motor.
This may be changed manually.

[0043]

As described above, the present invention has an excellent effect that a plurality of types of workpieces can be reliably sucked without forming a large number of suction holes on the workpiece mounting surface. Have.

[Brief description of the drawings]

FIG. 1 is a perspective view including a partial block diagram showing a surface plate with a suction mechanism according to an embodiment of the present invention.

FIG. 2 is an enlarged sectional view showing a main part of the surface plate with the suction mechanism.

FIG. 3 is a block diagram showing a control system of the surface plate with the suction mechanism.

FIG. 4 is a perspective view showing a modification of the adsorbent used in the surface plate with the adsorption mechanism.

FIG. 5 is a plan view showing another modification of the adsorbent.

FIG. 6 is a sectional view similar to FIG. 2, showing a main part of a surface plate with a suction mechanism according to another embodiment of the present invention;

FIG. 7 is a plan view showing a conventional surface plate with a suction mechanism.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 10 ... Surface plate with an adsorption mechanism 11 ... Surface plate main body 11A ... Back surface 12 ... Work mounting surface 14 ... Circular recessed part 16 ... Suction hole 18, 18A-18F, 38, 40 ... Adsorbent 20 ... Negative pressure source 22 ... Negative pressure tube Road 24, (24A to 24F) Step motor 26 Prepared hole 32 Control device 36, 36A, 36B Work 40A to 40I, 44A to 44C Suction hole

Claims (4)

[Claims] 1. A platen with a suction mechanism having a plurality of suction holes for suction-fixing a work by negative pressure on the work mounting surface, wherein a plurality of circular concave portions are formed on the work mounting surface.
An adsorber, which is a disc-shaped member having a thickness equal to or less than the depth of the circular recess and having at least one suction hole formed at a position eccentric from the center of the circular recess, is mounted on the workpiece mounting portion. A platen with a suction mechanism, characterized in that the platen is fitted rotatably in a plane parallel to the mounting surface and is provided with negative pressure transmitting means for transmitting a negative pressure to a suction hole of the suction body. 2. A platen with a suction mechanism according to claim 1, wherein said suction hole in said suction body is freely closed by a stopper whose upper end is lower than said work mounting surface. 3. The hole according to claim 1, wherein the circular recess is formed at a position below the suction hole, coaxially with a pilot hole drilled from the back side of the platen body, and having a diameter smaller than that of the pilot hole. A platen with a suction mechanism characterized by having a large inner diameter. 4. The adsorbent according to claim 1, 2 or 3, wherein the adsorbent is arranged in the circular recess together with a motor for rotating the adsorber, and the motor is controlled to rotate the adsorbent in the circular recess. A surface plate with a suction mechanism characterized in that it can be freely positioned in any direction.