JP6947471B2 - ガス濃度計測装置 - Google Patents
ガス濃度計測装置 Download PDFInfo
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- JP6947471B2 JP6947471B2 JP2016060038A JP2016060038A JP6947471B2 JP 6947471 B2 JP6947471 B2 JP 6947471B2 JP 2016060038 A JP2016060038 A JP 2016060038A JP 2016060038 A JP2016060038 A JP 2016060038A JP 6947471 B2 JP6947471 B2 JP 6947471B2
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N21/03—Cuvette constructions
- G01N21/05—Flow-through cuvettes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/85—Investigating moving fluids or granular solids
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N21/03—Cuvette constructions
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N21/15—Preventing contamination of the components of the optical system or obstruction of the light path
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
- G01N21/3504—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing gases, e.g. multi-gas analysis
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N21/03—Cuvette constructions
- G01N21/05—Flow-through cuvettes
- G01N2021/052—Tubular type; cavity type; multireflective
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N21/15—Preventing contamination of the components of the optical system or obstruction of the light path
- G01N2021/151—Gas blown
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/85—Investigating moving fluids or granular solids
- G01N2021/8578—Gaseous flow
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- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Description
I1=I0×exp(−ε×N×L) … (1)
(I0:透過前のレーザ光強度、I1:透過後のレーザ光強度、ε:モル吸光係数、N:測定対象のモル濃度、L:透過光路長)
Pf=(K1×Sf)/(R22/R12)2 …(2)
(K1:定数)
2 計測管路(計測セル)
3 発光部
4 受光部
5 ガス供給管路
6 ガス排出管路
7 主管
8 入射管(枝管)
9 出射管(枝管)
10 光軸調整部
11 パージガスガイド管
12 光軸調整部
13 パージガスガイド管
15 パージガス源
16 パージ流量調整部
17 ガス管路
18 ガス管路
19 ガス導入口
20 ガス導入口
21 ガス入口部
22 ガス出口部
23 計測部
30 ガス流量計
31 ガス流量計
32 計測制御部
Claims (2)
- 筒型の計測管路を挟んで発光部及び受光部が対向して配置され、前記発光部からの照射光が前記計測管路内を透過して前記受光部で受光されることで、前記計測管路内を通過する計測対象ガスの濃度を測定するガス濃度計測装置であって、
前記発光部及び前記受光部における光学系にパージガスを導入させるガイド管が、前記計測管路の側壁に連結して、互いに対向する位置で計測対象ガスの流れ方向に直交させて配置されており、
前記計測管路は、ガス供給口から計測対象ガス流れ方向下流側に向かって広がるテーパー状のガス入口部を有するとともに、前記ガス入口部より計測対象ガス流れ方向下流側に、内径を一定として筒状の計測部を備えており、該計測部に、直管形状の前記ガイド管が直交するように設置されており、
前記ガイド管に供給されるパージガスの流量は、短径部分となるガス流入口の断面積に対する長径部分となる前記計測部の断面積の比率と前記計測管路に流入するガス流速とに基づいて算出され、前記計測管路に流入するガスの流速変化を検出し、この流速量変化に応じたパージガス流量に調整する、
ガス濃度計測装置。 - 前記計測対象ガスが赤外領域の光を吸収する特性を有する気体であり、
前記発光部及び前記受光部は、前記計測管路を挟んで対称となる位置に設けられている、
請求項1に記載のガス濃度計測装置。
Priority Applications (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2016060038A JP6947471B2 (ja) | 2016-03-24 | 2016-03-24 | ガス濃度計測装置 |
| PCT/JP2017/008798 WO2017163841A1 (ja) | 2016-03-24 | 2017-03-06 | ガス濃度計測装置 |
| EP17769886.7A EP3435068A1 (en) | 2016-03-24 | 2017-03-06 | Gas concentration measurement device |
| KR1020187011588A KR102196822B1 (ko) | 2016-03-24 | 2017-03-06 | 가스 농도 계측 장치 |
| CN201780014818.0A CN108780039A (zh) | 2016-03-24 | 2017-03-06 | 气体浓度测量装置 |
| US16/087,461 US10598601B2 (en) | 2016-03-24 | 2017-03-06 | Gas concentration measuring device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2016060038A JP6947471B2 (ja) | 2016-03-24 | 2016-03-24 | ガス濃度計測装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2017173152A JP2017173152A (ja) | 2017-09-28 |
| JP6947471B2 true JP6947471B2 (ja) | 2021-10-13 |
Family
ID=59900169
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2016060038A Active JP6947471B2 (ja) | 2016-03-24 | 2016-03-24 | ガス濃度計測装置 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US10598601B2 (ja) |
| EP (1) | EP3435068A1 (ja) |
| JP (1) | JP6947471B2 (ja) |
| KR (1) | KR102196822B1 (ja) |
| CN (1) | CN108780039A (ja) |
| WO (1) | WO2017163841A1 (ja) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6924665B2 (ja) * | 2017-10-04 | 2021-08-25 | 東邦チタニウム株式会社 | ガス濃度測定システム |
| KR102074727B1 (ko) * | 2017-12-18 | 2020-02-07 | 주식회사 포스코 | 가스 농도 측정 장치 |
| KR102113028B1 (ko) * | 2018-10-05 | 2020-05-20 | 재단법인 포항산업과학연구원 | 가스 분석 장치 |
| KR102222298B1 (ko) * | 2019-01-03 | 2021-03-04 | 주식회사 리트코 | 미립자 측정이 가능한 시스템 |
| CN114963003A (zh) * | 2021-02-19 | 2022-08-30 | 中国科学院微电子研究所 | 一种用于半导体制造的供气系统及供气方法 |
| CN113654757B (zh) * | 2021-08-27 | 2022-10-28 | 中国科学技术大学 | 一种模拟喷管中高超声速凝结过程的装置及诊断方法 |
| KR102530591B1 (ko) * | 2022-12-06 | 2023-05-09 | 주식회사 사람과안전건설화재에너지연구원 | 화재 시험 장치 |
Family Cites Families (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS566056B2 (ja) | 1973-02-12 | 1981-02-09 | ||
| JPH056527Y2 (ja) * | 1987-01-12 | 1993-02-19 | ||
| EP0370248A1 (de) * | 1988-11-22 | 1990-05-30 | Robert Bosch Gmbh | Vorrichtung zur Messung der Partikelbelastung im Rauch- oder Abgas eines Verbrennungsprozesses |
| JPH03154852A (ja) * | 1989-11-13 | 1991-07-02 | Nippon Soken Inc | スモーク濃度測定装置 |
| JP2557035Y2 (ja) * | 1991-06-26 | 1997-12-08 | 株式会社堀場製作所 | ガス分析計 |
| JP4384331B2 (ja) * | 1999-07-15 | 2009-12-16 | 新日本製鐵株式会社 | 流通性に優れる赤外線吸収分析計用測定セル及び赤外線吸収分析装置 |
| GB2396023A (en) * | 2002-10-05 | 2004-06-09 | Oxford Lasers Ltd | Imaging system with purging device to prevent adhesion of particles |
| DE10309604A1 (de) | 2003-03-05 | 2004-09-23 | Siemens Ag | Absorptionsgas-Sensor |
| DE102004028420B3 (de) * | 2004-06-04 | 2006-02-09 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Vorrichtung und Verfahren zur optischen Detektion von in Abgasen chemischer Prozesse enthaltenen Stoffen |
| US7803338B2 (en) * | 2005-06-21 | 2010-09-28 | Exonmobil Research And Engineering Company | Method and apparatus for combination catalyst for reduction of NOx in combustion products |
| JP2007285721A (ja) * | 2006-04-12 | 2007-11-01 | Toyota Motor Corp | 校正装置 |
| JP5357506B2 (ja) * | 2008-10-29 | 2013-12-04 | 三菱重工業株式会社 | 濃度測定方法および装置 |
| CN102062726B (zh) | 2009-11-11 | 2012-04-11 | 中国科学院半导体研究所 | 汽车尾气氮氧化物监测光纤传感器 |
| JP5606056B2 (ja) * | 2009-12-17 | 2014-10-15 | 三菱重工業株式会社 | ガス計測セル及びこれを用いたガス濃度計測装置 |
| JP5523908B2 (ja) * | 2010-04-13 | 2014-06-18 | 三菱重工業株式会社 | 流量測定装置及び流速測定装置 |
| CN201697876U (zh) * | 2010-07-03 | 2011-01-05 | 聚光科技(杭州)股份有限公司 | 气体的在位测量装置 |
| EP2610607B1 (en) * | 2011-12-27 | 2019-10-30 | HORIBA, Ltd. | Gas analyzing apparatus |
| JP6210195B2 (ja) * | 2013-06-12 | 2017-10-11 | 富士電機株式会社 | レーザ式酸素ガス分析計 |
-
2016
- 2016-03-24 JP JP2016060038A patent/JP6947471B2/ja active Active
-
2017
- 2017-03-06 US US16/087,461 patent/US10598601B2/en not_active Expired - Fee Related
- 2017-03-06 EP EP17769886.7A patent/EP3435068A1/en not_active Withdrawn
- 2017-03-06 KR KR1020187011588A patent/KR102196822B1/ko active Active
- 2017-03-06 CN CN201780014818.0A patent/CN108780039A/zh active Pending
- 2017-03-06 WO PCT/JP2017/008798 patent/WO2017163841A1/ja not_active Ceased
Also Published As
| Publication number | Publication date |
|---|---|
| CN108780039A (zh) | 2018-11-09 |
| EP3435068A4 (en) | 2019-01-30 |
| JP2017173152A (ja) | 2017-09-28 |
| KR102196822B1 (ko) | 2020-12-30 |
| WO2017163841A1 (ja) | 2017-09-28 |
| EP3435068A1 (en) | 2019-01-30 |
| KR20180059513A (ko) | 2018-06-04 |
| US10598601B2 (en) | 2020-03-24 |
| US20190094148A1 (en) | 2019-03-28 |
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