JP6066472B2 - Heat-resistant glass cylinder stack structure with flange, heat-resistant glass container with flange, and manufacturing method thereof - Google Patents

Description

  The present invention relates to a flanged heat-resistant glass cylinder stack structure, a flanged heat-resistant glass container, particularly a large-sized flanged heat-resistant glass container, a manufacturing method thereof, and a heat-resistant glass member bonding structure and its manufacture. In particular, the present invention relates to a flanged heat-resistant glass container suitably used as a large heat-resistant glass container used when heat-treating a large substrate such as a solar cell or an organic EL, and a method for producing the same.

  Conventional large heat-resistant glass containers have mainly used quartz glass (Patent Document 1), but in the case of a large heat-resistant glass container with a flange, a quartz glass member is overlapped at the flange portion. It was possible to adjust the length arbitrarily. However, when the flanges are stacked and welded, the flanges are thick and welding by flame processing is very difficult and often cracks during processing, resulting in poor productivity due to hand gaps. In addition, it is necessary to anneal after welding, and in order to produce a large large heat-resistant glass container, a large annealing furnace is required, and there is a limit to the production equipment when a large annealing furnace is introduced. It was.

  Furthermore, recently, the increase in the size of solar cells and organic EL substrates has been accelerated, and the size of large heat-resistant glass containers for heat treatment has been demanded. Unfortunately, as described above, the production of large heat-resistant glass containers, such as large quartz glass containers, has reached its limit.

  In addition, when the diameter is large, the tolerance of the outer shape and the thickness is getting worse, and in the current flame processing welding, when the size is 500 mm or more, the length tolerance is about ± 50 mm, the flatness is about ± 5 mm, In addition, the gas sealability could not be sufficiently secured on the weld surface.

  If these dimensional tolerances are poor, the oxygen concentration in the atmosphere cannot be controlled. Particularly in the process of manufacturing a large-diameter organic EL TV, the organic EL may be deteriorated by oxygen, or the organic EL substrate and the back surface. There is a problem in that the quality of the epoxy resin that bonds the cap plate deteriorates, and a gap is generated at the time of bonding.

  Furthermore, recently, the temperature of the process has been lowered, and glass other than quartz glass, such as high silicate glass, Pyrex (registered trademark), Vycor (registered trademark), Tempax (registered trademark), Neoceram (registered trademark), Neolex, The use of Firelight (registered trademark) is being considered, or partial use has begun.

No. 7-14194 Special table 2008-511527 gazette

  The present invention relates to a flanged heat-resistant glass cylinder stack structure having excellent dimensional accuracy, a flanged heat-resistant glass container, particularly a large-sized flanged heat-resistant glass container, a manufacturing method thereof, and heat-resistant glass member adhesion The object of the present invention is to provide a structure and a method for manufacturing the same, and in particular, a heat-resistant glass container with a flange that is suitably used as a large heat-resistant glass container used when heat-treating a large substrate such as a solar cell or an organic EL. And it aims at providing the manufacturing method. Furthermore, it aims at providing the manufacturing method of the heat resistant glass container with a flange which can manufacture easily the heat resistant glass container with a flange which can be enlarged, and the heat resistant glass container with a flange which can be enlarged. .

In order to achieve the above object, the present inventors have conducted extensive research on a method for manufacturing a heat-resistant glass container with a flange. As a result, the flange portion having a groove portion is a slurry adhesive mainly composed of SiO ₂ fine particles. The present invention has been completed by finding that a large heat-resistant glass container can be easily produced by bonding with the above. Moreover, it confirmed that the large sized heat-resistant glass container obtained with the manufacturing method of this invention had the outstanding dimensional accuracy.

The manufacturing method of the flanged heat-resistant glass cylinder stack structure according to the present invention includes a pair of flanged heat-resistant glass cylinders having a flange portion at least at one end and a pair of flanged heat-resistant glass cylinders facing each other. A manufacturing method of a flanged heat-resistant glass cylinder stack structure manufactured by abutting and bonding the opposing surfaces of the opposing flange portions,
(A) preparing a plurality of flanged heat-resistant glass cylinders having grooves on all or some of the flange surfaces that are opposed to the flange portion;
(B) a step of setting the plurality of flanged heat-resistant glass cylinders to face each other so that at least one of the mutually opposing flange surfaces has a groove;
(C) The plurality of the set heat-resistant glass cylinders with flanges are filled in the groove portions in a state where at least one of the facing flange surfaces is opposed to each other so as to have the groove portions. Forming a flanged heat-resistant glass tube stack bonded body by bonding with a slurry-like adhesive mainly composed of SiO ₂ fine particles;
(D) the conjugate was heated at 5 00 ° C. or higher, a step of adhering the flange portions of the joined flanged heat resistant glass cylinder and flanged heat resistant glass cylinder stack structure ,
Only contains, characterized in that the SiO ₂ fine particles are silica glass particles.

  By repeating the steps (A) to (D), a structure in which three or more flanged heat-resistant glass cylinders are stacked can be manufactured, and the steps (A) to (C) are repeated. First, a joined body in which three or more heat-resistant glass cylinders with flanges are stacked is formed, and this joined body is heated, that is, by performing the step (D), three or more heat treatments are performed by a single heat treatment. A structure in which heat-resistant glass cylinders with flanges are stacked can also be manufactured.

In the step (C), after the set plurality of flanged heat-resistant glass cylinders are brought into contact with each other so that at least one of the opposing flange faces has a groove, in a sandwiched state. And a flanged heat-resistant glass tube stack bonded body by injecting a slurry-like adhesive mainly composed of SiO ₂ fine particles into the groove portion from the groove opening portion opened on the side surface of the opposing flange portion. It is preferable to form so as to form

Further, in the step (C), the plurality of set heat-resistant glass cylinders with flanges are opposed to each other in the vertical direction, the flange surface located below has a groove portion, and the flange surface located above is a groove portion. A slurry-like adhesive mainly composed of SiO ₂ fine particles is injected into the groove portion of the lower flange surface, and the upper flange surface is then applied to the lower flange surface. It is also possible to constitute so as to form a heat-resistant glass tube stack bonded body with abutment and a flange.

As the slurry adhesive mainly composed of SiO ₂ fine particles, the viscosity of the slurry adhesive is 3000 mPa · s or more when measured with a B-type viscometer at 30 rpm and 23 ° C. Some are preferred.

  It is preferable that the step (C) is performed at room temperature and the step (D) is performed at 500 ° C. or higher.

  As the flanged heat-resistant glass, quartz glass is preferably used. Moreover, it is preferable that the width of the groove part formed in the said flange surface is half or less of a flange surface, and a number is two or more.

The 1st aspect of the manufacturing method of the heat resistant glass container with a flange of this invention is a heat resistant glass cylinder stack structure with a flange manufactured in the manufacturing method of the heat resistant glass cylinder stack structure with a flange of this invention, or A method of manufacturing a heat-resistant glass container with a flange from a heat-resistant glass tube stack with a flange formed as an intermediate product,
(A) Heat-resistant glass cylinder stack structure or joined body with flange, and heat-resistant glass cylinder stack with flange having a shape that closes the opening of the heat-resistant glass cylinder stack-joint with flange Providing a heat-resistant glass lid having a flat surface without forming a groove or forming a groove on a surface facing the opening of the structure or joined body; and
(B) At least one of the flange surface of the flanged heat-resistant glass cylinder stacking structure or joined body facing each other or the end surface where the flange portion does not exist and the facing surface of the heat-resistant glass lid body have a groove portion. A step of setting the two to face each other,
(C) Flange surface or flange facing the flange surface of the heat-resistant glass cylinder stacking structure or joined body set as described above or an end surface where no flange portion exists and the opposing surface of the heat-resistant glass lid In a state where at least one of the end surface where the portion does not exist and the cover-facing surface are in contact with each other so as to have a groove portion, a slurry-like composition mainly composed of SiO ₂ fine particles filled in the groove portion Bonding with an adhesive to form a flanged heat-resistant glass container assembly,
; (D) a flanged heat resistant glass container assembly was heated at 5 00 ° C. or higher, flanged heat by adhering the flanged heat resistant glass cylinder stacked structure or assembly and the heat-resistant glass lid A process of making a glass container;
Only contains, characterized in that the SiO ₂ fine particles are silica glass particles.

  When the above-mentioned flanged heat-resistant glass cylinder stack structure is used, the above-described steps (A) to (D) are repeated to produce a structure in which three or more flanged heat-resistant glass cylinders are stacked. The heat resistant glass container having a structure in which three or more flanged heat resistant glass cylinders are stacked can be produced by performing the steps (a) to (d) on the stacked structure.

  Moreover, when using the said heat-resistant glass cylinder stacked | jointed assembly with a flange, the above-mentioned process of (A)-(C) was repeated, and the joined body which accumulated the 3 or more heat-resistant glass cylinder with a flange was carried out. First, a heat-resistant glass container having a structure in which three or more flanged heat-resistant glass cylinders are stacked is manufactured by performing the steps (a) to (d) on the stacked joined body. be able to.

In the step (c), the flanged surface of the set flanged heat-resistant glass cylinder stacked structure or joined body or the end surface where the flange portion does not exist and the opposed surface of the heat-resistant glass lid are opposed to each other. At least one of the flange surface or the end surface where the flange portion does not exist and the cover-facing surface are opposed to each other so as to have a groove portion, and then contact each other in a sandwiched state. It is preferable that a flanged heat-resistant glass container assembly is formed by injecting a slurry-like adhesive mainly composed of SiO ₂ fine particles into the groove portion from the groove opening opening on the side surface. It is.

Further, in the step (c), the set heat-resistant glass cylinder stacked structure with flange or the joined body and the heat-resistant glass lid are opposed to each other in the vertical direction, and the flange surface (or flange portion) located below The end surface where the surface does not exist) or the cover-facing surface has a groove portion, and the cover-facing surface or flange surface located above (or the end surface where the flange portion does not exist) is a flat surface without a groove portion, A slurry-like adhesive mainly composed of SiO ₂ fine particles is injected into the lower flange surface (or the end surface where the flange portion does not exist) or the groove portion of the cover-facing surface, and then the upper cover-facing surface. A heat-resistant glass container with a flange is obtained by abutting and joining a surface or flange surface (or an end surface without a flange portion) to the lower flange surface (or an end surface without a flange portion) or a cover-facing surface. It can also be configured to form a vessel assembly.

A second aspect of the method for producing a flanged heat-resistant glass container according to the present invention is a method for producing a flanged heat-resistant glass container from the flanged heat-resistant glass cylinder stack structure,
(I) preparing a heat-resistant glass cylinder stack structure with the flange and a heat-resistant glass lid having a shape that closes an opening of the heat-resistant glass cylinder stack structure with the flange;
(Ii) a step of setting the flange surface of the flanged heat-resistant glass cylinder stacking structure facing each other or the end surface where the flange portion does not exist and the facing surface of the heat-resistant glass lid to face each other;
(Iii) a flanged heat-resistant glass cylinder stacked structure, and a flanged heat-resistant glass container by welding a flange surface or an end surface on which no flange portion exists and a facing surface of the heat-resistant glass lid; And a process of
It is characterized by including.

The third aspect of the method for producing a heat-resistant glass container with a flange according to the present invention is the heat-resistant glass container main body with a flange part in which one end side opening is closed with a lid and the other end side opening is provided with a flange part. And one or a plurality of flanged heat-resistant glass cylinders having at least one flange at one end thereof are manufactured by abutting and bonding the opposing surfaces of the flanges facing each other and bonding them together. A manufacturing method of
(1) Prepare the flanged heat-resistant glass container main body and one or a plurality of flanged heat-resistant glass cylinders so as to have a groove on all or part of the flange surface that faces the flange. Process,
(2) The flanged heat-resistant glass container body and the one or more flanged heat-resistant glass cylinders are opposed to each other so that at least one of the mutually opposing flange surfaces has a groove. The process of setting to
(3) The set heat-resistant glass container body with a flange portion and one or a plurality of flanged heat-resistant glass cylinders face each other so that at least one of the flange surfaces has a groove portion. A step of forming a flanged heat-resistant glass container assembly by bonding with a slurry-like adhesive mainly composed of SiO ₂ fine particles filled in the groove in a state of being in contact with each other;
(4) a step wherein the joined body was heated at 5 00 ° C. or higher, by bonding the flange portions of the joined flanged heat resistant glass container assembly and flanged heat resistant glass container,
Only contains, characterized in that the SiO ₂ fine particles are silica glass particles.

The flanged heat-resistant glass cylinder stack structure of the present invention is a flanged heat-resistant glass cylinder stack structure manufactured by the flanged heat-resistant glass cylinder stack structure,
SiO ₂ particles in a groove formed on the opposing surface portions of the flange portions facing the pair of flanged heat resistant glass cylinder which faces each other a plurality of flanged heat resistant glass tube having a flange portion on at least one end portion filling the slurry adhesives based on, among flanged heat resistant glass tube body have a contact bonded and thermally bonded structure through the adhesive, the SiO ₂ fine particles of quartz glass and wherein the Oh Rukoto of fine particles.

The 1st aspect of the heat resistant glass container with a flange of this invention is a heat resistant glass container with a flange manufactured by the 1st aspect of the manufacturing method of the heat resistant glass container with a flange of this invention,
Heat-resistant glass tube stack structure or joined body with flange having flange on end side, and heat-resistant glass lid having a shape that closes the opening of heat-resistant glass tube stack structure or joined body with flange A flanged heat-resistant glass cylinder stack structure or a flange-facing surface on the end side of the joined body or an end surface where no flange portion exists and the heat-resistant glass lid body facing each other A groove formed in at least one of the surfaces is filled with a slurry-like adhesive mainly composed of SiO ₂ fine particles, and a flanged heat-resistant glass cylinder stacked structure or joined body and heat-resistant glass are interposed through the adhesive. lid have a contact bonded and thermally bonded structure, the SiO ₂ particles, characterized in Oh Rukoto quartz glass particles.

The second aspect of the heat-resistant glass container with flange of the present invention is a heat-resistant glass container with flange manufactured by the second aspect of the method for manufacturing a heat-resistant glass container with flange of the present invention,
The flanged heat-resistant glass cylinder stack structure and the flanged heat-resistant glass cylinder stack structure and a heat-resistant glass lid having a shape that closes the opening of the flanged heat-resistant glass cylinder stack structure, the flanged heat-resistant glass cylinders facing each other It has the structure where the end surface where the flange surface or flange part of a heat-resistant glass cylinder stacking structure does not exist, and the opposing surface of a heat-resistant glass cover body were welded.

A third aspect of the heat-resistant glass container with flange according to the present invention is the heat-resistant glass container with flange manufactured according to the third aspect of the method for manufacturing the heat-resistant glass container with flange according to the present invention,
A heat-resistant glass container body with a flange portion in which an opening at one end is closed with a heat-resistant glass lid and a flange is provided at the opening at the other end, and one or more heat-resistant glass cylinders with flanges; The flanged heat-resistant glass container body and one or more flanged heat-resistant glass cylinders face each other so that at least one of the flange faces has a groove. In a state of contact, the groove is filled with a slurry-like adhesive mainly composed of SiO ₂ fine particles, and the heat-resistant glass container body with the flange portion and one or more heat-resistant with flanges are interposed through the adhesive. and a sexual glass cylindrical body have a contact bonded and thermally bonded structure, the SiO ₂ particles, characterized in Oh Rukoto quartz glass particles.

  In the heat-resistant glass container with flange and the manufacturing method thereof according to the present invention, the flange portion on the opening side of the heat-resistant glass cylinder stack structure with flange or the bonded body closed by the heat-resistant glass lid is not an essential configuration. In addition, a configuration in which the heat-resistant glass lid is directly bonded or welded to the end face on the opening side can be employed without the installation of the flange part. In addition, in the description of the embodiments and examples shown below, the configuration in which the heat-resistant glass lid is provided via the flange portion will be described, and the configuration in which the heat-resistant glass lid is directly attached to the end surface on the opening side. The description is omitted to avoid redundancy.

The method for producing a heat-resistant glass member adhesion structure according to the present invention is a method for producing a heat-resistant glass member adhesion structure in which the opposing surfaces of a pair of heat-resistant glass members are abutted and bonded,
(A) preparing a pair of heat resistant glass members having grooves on both or one of the opposing surfaces of the heat resistant glass member;
(B) a step of setting the pair of heat resistant glass members to face each other such that at least one of the surfaces of the heat resistant glass members facing each other has a groove;
(C) Mainly the SiO ₂ fine particles filled in the groove portions in a state where the set pair of heat-resistant glass members are in contact with each other so that at least one of the opposing surfaces has the groove portions. Bonding with a slurry adhesive as a component to form a heat-resistant glass member assembly,
(D) a step wherein the heat-resistant glass member assembly is heated at 5 00 ° C. or higher temperatures, the heat-resistant glass member bonded structure by bonding said pair of heat-resistant glass members together,
Only contains, characterized in that the SiO ₂ fine particles are silica glass particles.

In the step (c), the pair of heat-resistant glass members that have been set are brought into contact with each other so that at least one of the opposing faces has a groove portion and held in a sandwiched state, and then face each other. A heat-resistant glass member assembly is formed by injecting a slurry-like adhesive mainly composed of SiO ₂ fine particles into the groove portion from the groove opening portion that opens on the side surface of the heat-resistant glass member. Is preferred.

In the step (c), the pair of heat-resistant glass members that have been set are opposed to each other in the vertical direction, and a facing surface of the heat-resistant glass member located below has a groove portion and is located above the heat-resistant glass member located above. The opposing surface is a flat surface without having a groove, and a slurry-like adhesive mainly composed of SiO ₂ fine particles is injected into the groove on the opposing surface of the lower heat-resistant glass member, and then the upper heat-resistant glass member is heated. The opposing surface of the heat-resistant glass member may be abutted and bonded to the opposing surface of the lower heat-resistant glass member to form a heat-resistant glass member assembly.

The heat-resistant glass member adhesion structure of the present invention is a heat-resistant glass member adhesion structure produced by the method for producing a heat-resistant glass member adhesion structure of the present invention,
Slurry adhesives mainly composed of SiO ₂ fine particles are filled in grooves formed on opposing surface portions of a pair of opposing heat resistant glass members, and the heat resistant glass members are applied to each other through the adhesive. the contact bonded and bonded structures possess, the SiO ₂ particles, characterized in Oh Rukoto quartz glass particles.

  According to the present invention, a flanged heat-resistant glass cylinder stack structure having excellent dimensional accuracy, a flanged heat-resistant glass container, particularly a large flanged heat-resistant glass container, a manufacturing method thereof, and heat resistance Heat-resistant glass with flange that can be used as a large-sized heat-resistant glass container that can be used to heat-treat large substrates such as solar cells and organic EL, can provide a glass member-bonded structure and a method for producing the same A container and a manufacturing method thereof can be provided. In addition, it has a remarkable effect that it can provide a heat-resistant glass container with a flange, particularly a quartz glass container, which has excellent dimensional accuracy and can be enlarged. Furthermore, according to the present invention, there is provided a manufacturing method capable of easily manufacturing a large heat-resistant glass container, for example, a heat-resistant glass rectangular container, having excellent dimensional accuracy and excellent gas sealing property even in the case of a large-sized container. There is a great effect that you can.

It is side explanatory drawing which shows one embodiment of the heat resistant glass cylinder laminated structure with a flange of this invention. FIG. 2 is a perspective explanatory view of a main part of FIG. 1. It is side explanatory drawing which shows other embodiment of the heat resistant glass cylinder laminated structure with a flange of this invention. FIG. 4 is an explanatory perspective view of a main part of FIG. 3. (A) (b) (c) is a top view explanatory drawing which shows three examples of the shape of a groove part. It is side explanatory drawing which shows one embodiment of the heat resistant glass container with a flange of this invention. It is side explanatory drawing which shows other embodiment of the heat resistant glass container with a flange of this invention. It is side explanatory drawing which shows another embodiment of the heat resistant glass container with a flange of this invention. It is perspective explanatory drawing which shows an example of the heat-resistant glass square container with a flange of this invention. It is a perspective explanatory view showing an example of a heat-resistant glass round container with a flange of the present invention. It is a flowchart which shows the process order of the manufacturing method of the heat resistant glass cylinder laminated structure with a flange of this invention. It is a flowchart which shows an example of the process order of the 1st aspect of the manufacturing method of the heat resistant glass container with a flange of this invention. It is a flowchart which shows an example of the process order of the 2nd aspect of the manufacturing method of the heat resistant glass container with a flange of this invention. It is a flowchart which shows an example of the process order of the 3rd aspect of the manufacturing method of the heat resistant glass container with a flange of this invention. It is side explanatory drawing which shows another embodiment of the heat resistant glass container with a flange of this invention. It is perspective explanatory drawing which shows an example of the heat resistant glass member adhesion structure of this invention. It is perspective explanatory drawing which shows the other example of the heat resistant glass member adhesion structure of this invention. It is a flowchart which shows an example of the process order of the manufacturing method of the heat resistant glass member adhesion structure of this invention.

  DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiments of the present invention will be described below with reference to the accompanying drawings. However, the illustrated examples are illustrative only, and various modifications can be made without departing from the technical idea of the present invention. .

As shown in FIGS. 1 to 2, the flanged heat-resistant glass cylinder stack structure 16 of the present invention has a plurality of (in the illustrated example) having flange portions 10 a and 10 b at least at one end (both ends in the illustrated example). Groove portions 18a and 18b are formed on both or one (both in the illustrated example) of the opposing surfaces 14a and 14b of the flange portions 10a and 10b of the flanged heat-resistant glass cylinders 12a and 12b. groove portion 18a, by filling the slurry-like adhesive 20 mainly composed of SiO ₂ particles, contacts joined by bonding a flanged heat resistant glass cylinder 12a, 12b via the adhesive 20 to 18b It is manufactured. The flanged heat-resistant glass cylinders 12a and 12b are manufactured by stacking a plurality (two or more). However, for convenience of explanation, in the illustrated example, two flanged heat-resistant glass cylinders 12a and 12b are provided. The case of stacking is shown.

  Furthermore, the manufacturing method of the heat-resistant glass cylinder laminated structure with a flange is demonstrated with the flowchart shown in FIG. First, a plurality of flanged heat-resistant glass cylinders 12a and 12b having groove portions 18a and 18b on all or a part of flange surfaces 14a and 14b that are opposed to the flange portions 10a and 10b are prepared (step 100). . The flange portions 10a and 10b are bonded (for example, bonded by a method described in Patent Document 2) or welded to the heat-resistant glass tube base portions 11a and 11b. The groove portions 18a and 18b are formed by known means such as machining.

  Then, at least one of the mutually opposing flange surfaces 14a, 14b has a groove portion (in the example of FIG. 1, three groove portions 18a, 18b are formed on the flange surfaces 14a, 14b, respectively). A plurality of flanged heat-resistant glass cylinders 12a and 12b are set to face each other (step 102).

The flange surfaces 14a and 14b facing each other of the plurality of flanged heat-resistant glass cylinders 12a and 12b are configured to have grooves (in the example of FIG. 1, each of the flange surfaces 14a and 14b). 3 grooves 18a and 18b are formed on each other) and bonded with a slurry-like adhesive 20 whose main component is SiO ₂ fine particles filled in the grooves 18a and 18b. The stacked joined body 16a is formed (step 104). In this state, the slurry-like adhesive mainly composed of SiO ₂ fine particles is left to dry for about one night until it is dried.

  This joining step is preferably performed at room temperature. The flanged heat-resistant glass tube stack assembly 16a and the flanged heat-resistant glass tube stack structure 16 mean that the former is in a state before heating, and the latter is subjected to heat treatment as will be described later. However, since they are shown in the same shape in the drawings, in FIG. 1, the lead-out line of the flanged heat-resistant glass cylinder stack joint 16 a is a virtual line, and the flanged heat-resistant glass cylinder stack structure 16. The leader lines are indicated by solid lines to distinguish them.

In the step 104, various methods are conceivable as a method for filling the grooves 18a and 18b with the slurry-like adhesive 20 mainly composed of SiO ₂ fine particles. For example, as shown in FIGS. Further, the plurality of flanged heat-resistant glass cylinders 12a, 12b set in contact with each other so that at least one of the flange surfaces 14a, 14b facing each other has a groove (for example, After the flange portion is abutted and fixed with a clamp or the like), SiO ₂ fine particles are mainly contained in the groove portions 18a and 18b from the groove opening portions 19a and 19b opened on the side surfaces of the opposed flange portions 10a and 10b. It is preferable to form the stacked bonded body 16a by injecting the slurry-like adhesive 20 to be bonded.

In addition, as another method for filling the grooves 18a and 18b with the slurry-like adhesive 20 mainly composed of SiO ₂ fine particles in the step 104, for example, as shown in FIGS. The plurality of flanged heat-resistant glass cylinders 12a and 12b face each other in the vertical direction, the flange surface 14a located below has a groove 18a, and the flange surface 14b located above is flat without having a groove. The slurry-like adhesive 20 mainly composed of SiO ₂ fine particles is injected into the groove portion 18a of the lower flange surface 14a, and then the upper flange surface 14b is applied to the lower flange surface 14a. It is also possible to configure so as to form a stacked joined body 16a by abutting and joining. 3 to 4 show a configuration in which the flange surface 14b remains a flat surface without forming a groove portion, but the other components are the same as those in FIGS. Are illustrated using the same reference numerals. 3 to 4 has an advantage that the adhesive can be filled and injected without passing through the groove openings 19a and 19b.

  Finally, after leaving the joined body 16a to stand for about one night and drying (remove the clamp if attached), the joined body 16a is set in a firing furnace, and the temperature is 100 ° C. or higher. And the flange portions 10a, 10b of the pair of heat-resistant glass cylinders 12a, 12b with a pair of flanges are bonded together to form a stacked structure 16 (step 106).

  Quartz glass is preferable as the material of the heat-resistant glass cylinders 12a and 12b. In the case of quartz glass, it is heated at 500 ° C. or higher, preferably 1000 ° C. or higher and 1400 ° C. or lower in a firing furnace. When the material of the heat-resistant glass cylinders 12a and 12b is high silicate glass, Pyrex (registered trademark), Vycor (registered trademark), Tempax (registered trademark), Neoceram (registered trademark), Firelight (registered trademark) It is suitable to heat at 200 ° C. or higher, preferably 400 ° C. or higher and 500 ° C. or lower.

An example of the structure of the flanged heat-resistant glass cylinder stack structure 16 according to the present invention will be described with reference to FIGS. 1 and 2. In FIG. 1, the groove portions 18a and 18b formed in the heat-resistant glass flanges 10a and 10b are filled with a slurry-like adhesive 20 mainly composed of SiO ₂ (specifically, poured), and the flange portion 10a in a contact state. 10b is initially joined to form a heat-resistant glass tube stack joint 16a with a flange, and the joined body 16a is further heated to strengthen the heat-resistant glass flange portions 10a and 10b via the adhesive 20. It becomes the heat-resistant glass cylinder stacking structure 16 with a flange adhere | attached on.

3 and 4, another example of the structure of the flanged heat-resistant glass cylinder stack structure 16 of the present invention will be described. 3, (pouring specifically) into the groove 18a formed in the heat-resistant glass flange 10a filled with the slurry-like adhesive 20 mainly composed of SiO _2, the abutment flange 10a, 10b are initially Are joined to form a heat-resistant glass cylinder stack joint 16a with a flange, and the joint 16a is further heated to firmly adhere the heat-resistant glass flange portions 10a and 10b via the adhesive 20. A heat-resistant glass cylinder stack structure 16 with a flange is formed.

In the slurry adhesive mainly composed of SiO ₂ fine particles, the SiO ₂ fine particles are preferably amorphous SiO ₂ fine particles, and specifically, high silica or quartz glass fine particles are preferred.

The particle diameter of the SiO ₂ fine particles is preferably 500 μm or less, more preferably 100 μm or less, and it is particularly preferable that the fine particles are dissolved in a solvent with a particle size distribution that controls the particle diameter to achieve closest packing. The high silicic acid or quartz glass fine particles can be adjusted by pulverizing the glass material and making the particle sizes uniform.

The solvent used in the adhesive is not particularly limited as long as it can dissolve SiO ₂ fine particles to obtain a slurry-like adhesive. For example, pure water, alcohol, and other high-purity chemicals (for example, Si An alkoxide) may be selected. For example, when high silicic acid or quartz glass fine particles are dissolved in pure water, the adhesive becomes a slurry with white turbid viscosity.

  Although there is no restriction | limiting in particular regarding the characteristic of the said adhesive agent, when viscosity is too small, an adhesive agent will flow by drying when it adhere | attaches, and it cannot use industrially. If the viscosity is too large, it becomes difficult to handle the adhesive.

  Therefore, the viscosity of the adhesive is preferably 3000 mPa · s or more, preferably about 4000 to 15000 mPa · s when measured with a B-type viscometer at 30 rpm and 23 ° C. preferable.

The solid content of the slurry-like adhesive mainly composed of the SiO ₂ fine particles is preferably 65% or more, more preferably 80% or more, and further preferably 83% or more.

As the slurry-like adhesive mainly composed of the SiO ₂ fine particles, for example, an aqueous slurry containing amorphous SiO ₂ particles described in Patent Document 2 is suitable.

Moreover, what is necessary is just to increase the number of the groove parts formed in a flange surface in order to raise the adhesive strength of flanges. Further, the shape of the groove is not particularly limited, and the shape may be arbitrarily determined. Basically, any shape can be used as long as a slurry adhesive containing SiO ₂ fine particles as a main component can be poured into the flange surface. In addition, the grooves can be machined by forming a program at a normal machining center and grinding, and the shape of the grooves can be arbitrarily designed by the program.

The shape of the groove formed on the flange surface is not particularly limited, but any shape can be used as long as the slurry-like adhesive mainly composed of SiO ₂ fine particles can be filled or injected into the groove. I do not care. Three examples of the shape of the groove 18a formed on the flange surface 14a are shown in FIGS. 5 (a), 5 (b), and 5 (c) as examples of usable groove shapes. Also, the end face of the flange portion of a heat-resistant glass plate such as a quartz glass plate so that the solvent can be efficiently evaporated from the slurry-like adhesive in the process of drying and firing the slurry-like adhesive mainly composed of SiO ₂ fine particles. It is preferable to design the shape of the groove portion so that the number of groove opening portions formed in is increased as much as possible.

As a material of the heat-resistant glass material used for the heat-resistant glass cylinder and the heat-resistant glass container with a flange to be described later, known heat-resistant glass can be used, and there is no particular limitation, but 20 ° C. to 700 ° C. A glass having a thermal expansion coefficient in the range of 1 × 10 ⁻⁷ to 1 × 10 ⁻⁵ (K ⁻¹ ) is preferable, and specifically, a doped or non-doped silicate glass containing 85% by mass or more of SiO _2. Is preferred. Examples of the silicate glass include high silicate glass, Pyrex (registered trademark), Vycor (registered trademark), Tempax (registered trademark), Neoceram (registered trademark), Neolex, Philite (registered trademark), and quartz glass. High heat resistant glass such as quartz glass is preferable, and quartz glass is more preferable.

  There is no restriction | limiting in particular in the shape of the said heat resistant glass material, What is necessary is just to select suitably according to the shape of the heat resistant glass cylinder with a flange, and the shape of the heat resistant glass container with a flange mentioned later. There is no restriction | limiting in particular about the manufacturing method of the said heat resistant glass material, It can obtain by a well-known method. For example, when using a heat-resistant glass plate, it can be obtained by, for example, slicing from a block-shaped lump or molding at a high temperature.

  The shape dimensions of the heat-resistant glass cylinder with flange used in the present invention shown in FIGS. 1 and 3 will be described. The flange portions 10a and 10b of the heat-resistant glass cylinders 12a and 12b with flanges have a width of 20 mm, a thickness of 20 mm and a length of 50 cm or more. The flange portions 10a and 10b have a width of 5 to 10 mm and a depth of 5 to 10 mm. When two or more grooves 18a and 18b are formed on one side and the flanges are combined, it is preferable that the slurry adhesive 20 is poured into the grooves 18a and 18b. At this time, the shape of the grooves 18a and 18b may be a straight line or a curved line.

  Then, the 1st aspect of the manufacturing method of the heat resistant glass container with a flange of this invention is demonstrated. The 1st aspect of the manufacturing method of the heat resistant glass container with a flange of this invention is a heat resistant glass cylinder stack structure with a flange manufactured in the manufacturing method of the heat resistant glass cylinder stack structure with a flange of this invention, or It is a method of manufacturing the heat-resistant glass container 30 with a flange as shown in FIG. 6 or FIG. 7 from the heat-resistant glass cylinder laminated joint with a flange formed as an intermediate formation. Since the flanged heat-resistant glass container 30 is classified into a square heat-resistant glass container and a round heat-resistant glass container, the rectangular heat-resistant glass container is shown in FIG. 9 and FIG. 30 and the shape of the round heat-resistant glass container 30 are shown.

FIG. 9 is a perspective explanatory view showing the square heat-resistant glass container 30. The square heat resistant glass container 30 includes a flanged heat resistant glass cylinder 12a having flange portions 10a and 10a, a flanged heat resistant glass cylinder 12b having flange portions 10b and 10b, and a flange having flange portions 10c and 10c. The three heat-resistant glass cylinders with flanges of the attached heat-resistant glass cylinder 12c are stacked, and the heat-resistant glass lid body 22 is placed on the upper surface of the uppermost flange part 12c, and the respective groove parts 18a, 18b, 18c, slurry, respectively via an adhesive 20 of the flanged heat resistant glass cylinder consisting mainly of SiO ₂ particles filled in 34, 36 12 a to 12 c, bonding and bonding a heat-resistant glass lid 22 to each other It is made.

FIG. 10 is a perspective explanatory view showing the round heat-resistant glass container 30. The round heat resistant glass container 30 includes a flanged heat resistant glass cylinder 12a having flange portions 10a and 10a, a flanged heat resistant glass cylinder 12b having flange portions 10b and 10b, and a flange having flange portions 10c and 10c. Three heat-resistant glass cylinders with flanges of the heat-resistant glass cylinder 12c with a stack are stacked, and a heat-resistant glass lid body 22 is placed on the upper surface of the uppermost flange part 10c, and the grooves 18a, 18b, 18c, slurry, respectively via an adhesive 20 of the flanged heat resistant glass cylinder consisting mainly of SiO ₂ particles filled in 34, 36 12 a to 12 c, bonding and bonding a heat-resistant glass lid 22 to each other It is made. In FIG. 10, the same members as those in FIG. 9 are illustrated using the same reference numerals.

  Furthermore, the first aspect of the method for manufacturing a flanged heat-resistant glass container of the present invention will be described with reference to a side view of the heat-resistant glass container 30 shown in FIG. 6 and a flowchart shown in FIG. In the method for manufacturing a heat-resistant glass container with flange according to the present invention, the heat-resistant glass tube stack with flange or intermediate structure manufactured in the method for manufacturing a heat-resistant glass tube stack with flange according to the present invention described above. The flanged heat-resistant glass tube stack 30 is manufactured using the flanged heat-resistant glass tube stack assembly, and the flanged heat-resistant glass tube stack structure 16 and the flanged heat-resistant glass are manufactured. Since the cylindrical body stack joined body 16a can be used together in the same procedure, unless it becomes another procedure in order to avoid redundancy, it will be displayed and explained in parallel.

  First, the flanged heat-resistant glass cylinder stack structure 16 or joined body 16a (opened in both the upper and lower directions as shown) and the heat-resistant glass lid 22 are prepared (step 200). The lid 22 has a shape that closes one open port (open port on the upper side in the example of FIG. 6) 24 of the heat-resistant glass tube stack structure 16 or the joined body 16a with the flange, and the open body. A groove portion is formed on the cover-facing surface 32 facing the flange surface 28 of the flange portion 26 at the uppermost end portion on the mouth 24 side, or a flat surface is formed without forming the groove portion (in the example of FIG. A groove 34 is formed, and a groove 36 is formed on the lid body surface 32).

  Next, at least one of the flange surface 28 of the flanged heat-resistant glass cylinder stack structure 16 or the joined body 16a and the opposing surface 32 of the heat-resistant glass lid 22 facing each other has a groove (FIG. 6). In this example, grooves are formed in both of them) (step 202).

The flange surface 28 and the cover body facing each other between the flange surface 28 at the uppermost end of the set heat-resistant glass cylinder stack structure 16 or the joined body 16a with the flange and the facing surface 32 of the heat-resistant glass cover body 22 are opposed to each other. At least one of the surfaces 32 is filled in the grooves 34 and 36 in a state of being in contact with each other so as to have a groove (in the example of FIG. 6, the grooves 34 and 36 are formed on both sides). joined in a slurry-type adhesive 20 mainly composed of SiO ₂ particles to form a flanged heat resistant glass container assembly 30a (step 204).

  Finally, the joined body 30a is heated at a temperature of 100 ° C. or more, and the flanged heat-resistant glass cylinder stack structure 16 or the joined body 16a and the heat-resistant glass lid body 22 are bonded to each other to form a flanged heat-resistant glass container. 30 (step 206). In the illustrated example of FIG. 6, the flanged heat-resistant glass container assembly 30a and the flanged heat-resistant glass container 30 are shown in the same shape, so that the former leader line is a virtual line and the latter leader line is a solid line. Differentiated.

In the step 204, as shown in FIG. 6, the flanged surface 28 of the heat-resistant glass cylinder stacking structure 16 or the joined body 16a and the opposed surface 32 of the heat-resistant glass lid 22 are set relative to each other. After facing each other so that at least one of the facing flange surface 28 and the lid-facing surface 32 has a groove portion (groove portions 34 and 36 are formed in the example of FIG. 6) opposite each other in a sandwiched state. The flange flange 26 and the flange 22 are joined by injecting slurry-like adhesive 20 mainly composed of SiO ₂ fine particles into the groove portions from the opposed flange portions 26 and groove opening portions 34a and 36a opened on the side surfaces of the lid body 22. It is preferable that the attached heat-resistant glass container assembly 30a be formed.

Further, in the step 204, as shown in FIG. 7, the set heat-resistant glass cylinder stacked structure 16 with flange or the joined body 16a and the heat-resistant glass lid body 22 are opposed to each other in the vertical direction, The flange surface 28 or the cover body facing surface 32 located on the side has a groove (in the example of FIG. 7, the flange surface 28 has a groove 34), and the cover body facing surface or the flange surface located above is flat without a groove. (In the example of FIG. 7, the groove facing surface 32 is not formed with a groove and remains flat), and the lower flange surface or the groove of the lid facing surface (the flange surface 28 in the example of FIG. 7). The slurry-like adhesive 20 mainly composed of SiO ₂ fine particles is injected into the groove portion 34), and then the upper cover body facing surface or the flange surface (the cover body 22 in the example of FIG. 7) is placed on the lower side. Flange surface or lid pair It can also be configured so as to form a flanged heat-resistant glass container assembly by abutting and joining to the facing surface (flange surface 28 in the example of FIG. 7). In FIG. 7, the same members as those in FIG. 6 are denoted by the same reference numerals.

  When the flanged heat-resistant glass cylinder stack structure 16 is used, a structure in which three or more flanged heat-resistant glass cylinders are stacked is manufactured by repeating steps 100 to 106 shown in FIG. The heat resistant glass container having a structure in which three or more flanged heat resistant glass cylinders are stacked can be manufactured by performing steps 200 to 206 in FIG. 12 on the stacked structure.

  When the flanged heat-resistant glass cylinder stacked joint 16a is used, a joined body in which three or more flanged heat-resistant glass cylinders are stacked by repeating the steps 100 to 104 shown in FIG. The heat-resistant glass container having a structure in which three or more flanged heat-resistant glass cylinders are stacked can be manufactured by performing steps 200 to 206 in FIG.

Note that the slurry adhesives based on material or SiO ₂ fine particles of heat-resistant glass material used for flanged heat resistant glass container 30, producing a flanged heat resistant glass cylinder stack structure described above Since those used in the above can be used in the same manner, the description thereof will be omitted.

  Further, a second embodiment of the method for manufacturing a heat-resistant glass container with a flange according to the present invention will be described with reference to a side view of the heat-resistant glass container 30 shown in FIG. 8 and a flowchart shown in FIG. In the manufacturing method of the heat-resistant glass container with flange of the present invention, the heat-resistant glass tube stack structure with flange 16 manufactured in the manufacturing method of the heat-resistant glass tube stack structure with flange of the present invention described above is used. The flanged heat-resistant glass container 30 is manufactured by welding the heat-resistant glass lid body 22.

  First, the flanged heat-resistant glass cylinder stack structure 16 and the heat-resistant glass lid body 22 having a shape for closing the opening 24 of the flanged heat-resistant glass cylinder stack structure 16 are prepared (step 210). ).

Next, the flange surface 28 of the flanged heat-resistant glass cylinder stacked structure 16 facing each other and the facing surface 32 of the heat-resistant glass lid 22 are set to face each other (step 212).

  Finally, the flanged surface 28 of the heat-resistant glass cylinder stack structure 16 with flange and the opposed surface 32 of the heat-resistant glass lid 22 are welded to form a flanged heat-resistant glass container 30 (step 214). ).

As shown in FIGS. 1 and 3, the flanged heat-resistant glass cylinder stack structure 16 of the present invention includes a plurality of flanged heat-resistant glass cylinders 12a and 12b having flange portions 10a and 10b at least at one end. a pair of flanged heat resistant glass cylinder 12a which faces each other pieces, 12b opposite the flange portion 10a, 10b of the opposing surface portions 14a, 14b which is formed in the groove 18a, the main component of SiO ₂ fine particles 18b The slurry-like adhesive 20 is filled, and the flanged heat-resistant glass cylinders 12a and 12b are abutted and joined to each other through the adhesive 20 and are heat-bonded.

As shown in FIGS. 6 and 7, the first embodiment of the flanged heat-resistant glass container 30 includes a flanged heat-resistant glass cylinder stack structure 16 having a flange portion 10b on the end side, or a joint. The flanged heat-resistant glass cylinder stack structure 16 or the heat-resistant glass lid body 22 having a shape for closing the opening 24 of the joined body 16a, and the flanged heat-resistant glass facing each other. Grooves formed on at least one of the opposing surface of the flange portion 10b on the end side of the cylinder stack structure 16 or the joined body 16a and the opposing surface of the heat-resistant glass lid body 22 (in FIG. 6, the groove portions 34 and 36 are provided on both sides). In FIG. 7, an example in which the groove portion 34 is formed only in the flange portion 10b is filled with the slurry-like adhesive 20 mainly composed of SiO ₂ fine particles. Then, the flanged heat-resistant glass cylinder stack structure 16 or joined body 16a and the heat-resistant glass lid body 22 are brought into contact with each other and heat-bonded.

  As shown in FIG. 8, the second embodiment of the flanged heat-resistant glass container 30 includes the flanged heat-resistant glass cylinder stack structure 16 and the flanged heat-resistant glass cylinder stack structure. The heat-resistant glass lid body 22 has a shape that closes the 16 open ports 24, and the flange surface 28 of the flanged heat-resistant glass cylinder stacking structure 16 facing each other and the heat-resistant glass lid body 22 are opposed to each other. The surface 32 has a welded W structure.

  In the above description of the embodiment of the heat-resistant glass container with flange and the manufacturing method thereof according to the present invention, the heat-resistant glass cylinder stack structure 16 with flange or the joined body 16a closed by the heat-resistant glass lid 22 is used. The flange portion on the open port 24 side is not an essential configuration, and a configuration in which the heat-resistant glass lid body is directly bonded or welded to the end surface on the open port side without the installation of the flange portion may be adopted. it can. In the description of the embodiment and the illustrated example described above, the configuration in which the heat-resistant glass lid is provided via the flange portion is described, and the configuration in which the heat-resistant glass lid is directly attached to the end surface on the opening side. The explanation is omitted for the sake of simplicity.

  In the production of the heat-resistant glass container with flange according to the present invention, the heat-resistant glass with flange portion is formed by closing the opening at one end of the heat-resistant glass cylinder with flange with a lid and providing a flange at the opening at the other end. A glass container main body is manufactured in advance, and a flanged heat resistant glass container main body can be manufactured using the flanged heat resistant glass container main body, which will be described below with reference to FIGS. FIG. 14 is a flowchart showing an example of the process sequence of the third aspect of the method for manufacturing a flanged heat-resistant glass container of the present invention, and FIG. 15 shows still another embodiment of the flanged heat-resistant glass container of the present invention. FIG.

  As shown in FIG. 14, the third aspect of the method for manufacturing a heat-resistant glass container with a flange according to the present invention is such that one end-side opening 24a is closed with a heat-resistant glass lid 22 and the other end-side opening 24b is flanged. Flange portions 10a, 10b facing each other between a heat-resistant glass container body 13 with a flange portion provided with a portion 10a and one or a plurality of flanged heat-resistant glass cylinders 12b having a flange portion 10b at one end. It is a manufacturing method of the heat resistant glass container 30 with a flange manufactured by abutting joining and adhering the opposing surfaces 14a and 14b. FIG. 14 shows the case where the flanged heat-resistant glass cylinder 12b is attached to the heat-resistant glass container body 13 with the flange, but the flanged heat-resistant glass cylinder 12b is further sequentially joined with the flanged heat-resistant glass cylinder 12b. It is also possible to attach. In addition, what is necessary is just to attach the heat resistant glass cover body 22 to the end part surface of the one end side open port of the heat resistant glass container main body 13 with a flange part by joining adhesion or welding beforehand. In FIG. 14, the same components as those in FIG. 1 are denoted by the same reference numerals, and the description thereof is omitted.

The 3rd aspect of the manufacturing method of the heat resistant glass container with a flange of this invention is demonstrated with FIG.14 and FIG.15.
First, the heat-resistant glass container main body 13 with the flange portion and one or a plurality of flanges so as to have the groove portions 18a, 18b on all or a part of the flange surfaces 14a, 14b which are opposed surfaces of the flange portions 10a, 10b. The attached heat-resistant glass cylinder 12b is prepared (step 220).

  Subsequently, the flanged heat-resistant glass container body 13 and the one or more flanged heat-resistant glass cylinders so that at least one of the mutually opposing flange surfaces 14a, 14b has groove portions 18a, 18b. 12b is set so as to face each other (step 222).

Further, at least one of the flange surfaces 14a and 14b where the set heat-resistant glass container body 13 with a flange portion and one or a plurality of flanged heat-resistant glass cylinders 12b face each other is a groove portion 18a or 18b. The flanged heat-resistant glass container assembly 30a is bonded with a slurry-like adhesive 20 mainly composed of SiO ₂ fine particles filled in the grooves 18a and 18b in a state of being in contact with each other so as to have a flange. Form (step 224).

  Finally, the joined body 30a is heated at a temperature of 100 ° C. or higher, and the flange portions 10a and 10b of the joined flanged heat-resistant glass container joined body 30a are bonded to form a flanged heat-resistant glass container 30. (Step 226).

As shown in FIG. 14, the third aspect 30 of the heat-resistant glass container with flange according to the present invention is such that one end side opening 24 a of the heat-resistant glass cylinder 12 a with flange is closed with a heat-resistant glass lid 22. It has a heat-resistant glass container body 13 with a flange portion in which a flange portion 10a is provided at the other end side opening 24b, and one or a plurality of heat-resistant glass cylinders 12b with flanges. The flanged heat-resistant glass container body 13 and one or a plurality of flanged heat-resistant glass cylinders 12b are opposed to each other so that at least one of the flange surfaces 14a, 14b has groove portions 18a, 18b. groove portion 18a in a state where the direction and by contact, filling the slurry-like adhesive 20 mainly composed of SiO ₂ fine particles 18b. The flanged heat-resistant glass container body 13 and one or a plurality of flanged heat-resistant glass cylinders 12b are brought into contact with each other via the adhesive 20 and are heat-bonded to form a flanged heat-resistant glass container 30. It will be.

The method of adhering heat-resistant glass members to each other by filling the groove portion used in the present invention with a slurry-like adhesive mainly composed of SiO ₂ fine particles can be applied in various ways. A method for bonding glass members will be described with reference to FIGS.

FIG. 16 is an explanatory side view showing an example of the heat-resistant glass member bonding structure of the present invention. As shown in FIG. 16, the SiO ₂ fine particles filled in the grooves 50 and 52 formed on one or both (both in the illustrated example) of the opposing surfaces 46 and 48 of the pair of heat-resistant glass members 42 and 44 are mainly used. The pair of heat-resistant glass members 42 and 44 are bonded by the slurry-like adhesive 20 as a component to form the heat-resistant glass member bonding structure 40. FIG. 17 is an explanatory side view showing another example of the heat-resistant glass member bonding structure of the present invention. FIG. 17 shows an example in which the groove 50 is formed only in the heat-resistant glass member 42.

  FIG. 18 is a flowchart showing the process sequence of the method for producing a heat-resistant glass member bonding structure of the present invention. A pair of heat-resistant glass members 42 and 42 having groove portions 50 and 52 on both or one surface (both in the illustrated example of FIG. 16) to be opposed surfaces 46 and 48 of the heat-resistant glass members 42 and 44 are prepared ( Step 300).

  Next, the pair of heat-resistant glass members 42 so that at least one of the surfaces 46 and 48 of the heat-resistant glass members 42 and 44 facing each other (both in the illustrated example of FIG. 16) has the groove portions 50 and 52. , 44 are set so as to face each other (step 302).

At least one of the surfaces 46, 48 facing each other (the both in the illustrated example of FIG. 16) of the pair of heat-resistant glass members 42, 44 set to face each other so as to have grooves 50, 52. In this state, the heat-resistant glass member bonded body 40a (in FIG. 16, with the heat-resistant glass member bonded structure 40) is bonded with the slurry-like adhesive 20 mainly composed of SiO ₂ fine particles filled in the grooves 50 and 52. Since it has the same shape, it is indicated by reference numeral 40a, and its leader line is a virtual line) (step 304).

  Finally, the heat-resistant glass member bonded body 40a is heated at a temperature of 100 ° C. or higher, and the pair of heat-resistant glass members are bonded together to form the heat-resistant glass member bonded structure 40 (Step 306).

The following method may be applied as a specific method of filling the slurry-like adhesive 20 mainly composed of the SiO ₂ fine particles. In the step 304, the pair of heat-resistant glass members 42 and 44 that are set are opposed to each other so that at least one (both in the illustrated example of FIG. 16) of the opposed surfaces has the groove portions 50 and 52. After contacting in a sandwiched state, a slurry-like composition mainly composed of SiO ₂ fine particles is formed in the groove portions 50, 52 from the groove opening portions 50a, 52a that open to the side surfaces of the opposing heat-resistant glass members 42, 44. It is preferable to join by injecting the adhesive 20 to form the heat-resistant glass member joined body 40a.

In the step 304, as shown in FIG. 17, the set pair of heat-resistant glass members 42 and 44 face each other in the vertical direction, and the facing surface 46 of the heat-resistant glass member 42 located below is The facing surface 48 of the heat-resistant glass member located above and having the groove portion 50 is a flat surface without any groove portion, and SiO ₂ fine particles are mainly contained in the groove portion 50 of the facing surface 46 of the heat-resistant glass member 42 on the lower side. The slurry-like adhesive 20 as a component is injected, and then the opposing surface 48 of the upper heat-resistant glass member 44 is brought into contact with and joined to the opposing surface 46 of the lower heat-resistant glass member 42. The joined body 40a may be formed.

Note that the slurry adhesives based on material or SiO ₂ fine particles of heat-resistant glass material used for the heat-resistant glass member bonded structure 40, the flanged heat resistant glass cylinder stack structure described above Since what is used in manufacture can be used similarly, description for the second time is abbreviate | omitted.

In the present invention, a heat-resistant glass cylinder stack structure, a heat-resistant glass container, and a heat-resistant glass member adhesion structure are manufactured using a slurry-like adhesive mainly composed of SiO ₂ fine particles. The expansion and contraction due to the thermal expansion of the heat-resistant glass structure and the heat-resistant glass container can be reduced. Moreover, in the heat resistant glass container of this invention, since the divided heat resistant glass cylinder with a flange can be adhere | attached and assembled via a flange part, there exists an advantage which can manufacture a heat resistant glass container compactly.

  Moreover, since the divided heat-resistant glass cylinder with a flange can be assembled via the flange portion, there is an advantage that dimensional accuracy, verticality, etc. can be adjusted by the flange portion.

  Furthermore, transporting a large heat-resistant glass container requires a lot of work, but this flanged heat-resistant glass cylinder is used in a place where it is actually used using a divided flanged heat-resistant glass cylinder. By stacking and assembling and firing a heat-resistant glass container assembly made from a heat-resistant glass tube stack assembly with flanges at that location to produce a heat-resistant glass container, the cost of transportation can be reduced. Great effect is achieved.

  EXAMPLES Hereinafter, although an Example demonstrates this invention concretely, this invention is not limited to the following Example.

Example 1
Prepare fine powder of quartz glass, prepare fine particles of 1 μm or less, intermediate particles of 5-10 μm, large particles of 50-100 μm, mix at a ratio that makes closest packing, dissolve this in pure water, A slurry-like adhesive mainly composed of SiO ₂ fine particles was prepared. The amount of water was about 10%, and the viscosity of the adhesive at a rotation speed of 30 rpm with a B-type viscometer at room temperature (23 ° C.) was 6500 mPa · sec.

  Further, two grooves having a width of 5 mm and a depth of 5 mm as shown in FIG. 2 were formed on a quartz glass plate having a width of 50 mm, a length of 150 mm, and a thickness of 20 mm. The grooves were set so that the grooves were not at the same position, and the prepared slurry adhesive was poured into the grooves. The two quartz glass plates were bonded together and dried overnight to form a quartz glass plate joined body, and this joined body was heated at 1200 ° C. for 1 hour. An end portion of the bonded quartz glass plate in which the two quartz glass plates were bonded was cut to a thickness of 5 mm, and a three-point bending test was performed in accordance with a JAS1 class single plate lamination test.

  The sample was placed on two support rods placed at a fulcrum distance of 30 mm, and placed so that the surface of the sample was the upper surface and perpendicular to the center of the span. A load was applied on the effective length of the weight bar at a load speed of 0.5 mm / min, and the load resistance was measured at room temperature. As a result, it was confirmed that the bonded quartz glass plate bonded with the obtained adhesive had a sufficient load resistance performance.

(Examples 2 to 4)
Grooves were respectively formed in the three quartz glass plates similar to Example 1 with the geometric patterns shown in FIGS. 5A, 5B, and 5C (FIG. 5A: Example 2 and FIG. b): Example 3, FIG. 5 (c): Example 4), slurry-like adhesive mainly composed of SiO ₂ fine particles as in Example 1 was injected into each groove, and then the groove was provided. A quartz glass plate joined body was dried and dried overnight with two quartz glass plates bonded together to form a quartz glass plate joined body. They were then heated at 600 ° C. The end was cut 5 mm in the same manner as in Example 1. A three-point bending test was performed on these samples in the same manner as in Example 1. As a result, it was confirmed that each of the bonded quartz glass plates bonded with the obtained adhesive had a sufficient load resistance performance.

(Example 5)
Eight quartz glass plates having a size of 1000 mm × 500 mm × thickness 7 mm were prepared, and two square glass-like quartz glass cylinders were prepared using four each of these plates. A flange portion having a width of 50 mm, a thickness of 20 mm, and a length of 1000 mm was welded to the lower four sides of the rectangular quartz glass cylinder. Twenty grooves having a width of 10 mm, a depth of 5 mm, and a length of 40 mm were formed in the flange portion at a pitch of 50 mm.

These groove portions were formed so as to alternate between the upper and lower flanges, and the flange portions were overlapped. A slurry-like adhesive mainly composed of SiO ₂ fine particles as in Example 1 was poured into the groove portion of the flange portion on one side of the four-side flange portion and dried overnight. After that, the square cylindrical quartz glass cylinder was rotated 90 degrees, and a slurry adhesive mainly composed of SiO ₂ fine particles was poured into the groove portion of the next flange portion and dried overnight. By repeating this, a slurry-like adhesive mainly composed of SiO ₂ fine particles is poured into the grooves of all the flange portions facing each other of the two quartz glass cylinders, and the flange portions are joined to each other to thereby produce two quartz glasses. A cylindrical stacked assembly was produced.

  Then, this quartz glass cylinder stack joined body was heated at 1200 ° C., and the adhesive was baked to produce a quartz glass cylinder stack structure. A quartz glass plate (lid body) having a size of 1000 mm × 1000 mm × thickness 7 mm was welded to the upper end portion of the quartz glass cylinder stacked structure to produce a flanged square quartz glass container.

  In this square quartz glass container, the heat treatment process of the substrate of the organic EL lighting was performed, but since the atmosphere was able to reduce moisture, the illuminance of the organic EL lighting was reduced without causing deterioration of the organic EL components. It was possible to maintain.

(Example 6)
Two sheets of Neoceram (registered trademark) 50 mm wide, 150 mm long and 8 mm thick are prepared, and a groove of 10 mm wide, 3 mm deep and 150 mm long is formed on the surface of this neoceram (registered trademark) at intervals of 10 mm. In this groove, a slurry-like adhesive mainly composed of SiO ₂ fine particles was poured, dried overnight, and then heated at 500 ° C. The two sheets were bonded with sufficient strength.

(Example 7)
Five quartz glass tubes having an outer diameter of 700 mm, a thickness of 8 mm, and a length of 500 mm were prepared. Above and below each quartz glass tube, a quartz glass flange having an outer diameter of 800 mm, an inner diameter of 700 mm, and a wall thickness of 20 mm was formed by depositing a quartz glass member on the outer periphery of the glass tube and then grinding it. In this flange portion, a groove portion having a width of 10 mm, a depth of 10 mm, and a length of 30 mm is formed at an interval of 20 degrees in the diameter direction toward the center of the circle, and the two glass tubes are vertically moved so that the groove portions do not overlap. The flange was fixed with a clamp. The groove was filled with a slurry-like adhesive mainly composed of SiO ₂ fine particles from the back with a syringe and dried overnight. Thereafter, only the flange portion was heated at a temperature of 600 ° C. Thereafter, the next quartz glass tube was overlapped with the flange portion of the bonded quartz glass tube at the flange portion, and quartz glass slurry was injected into the groove portion formed in the flange portion with a syringe.

This operation was repeated, and all the five quartz glass tubes were joined together to form a quartz glass tube stack assembly having an outer diameter of 700 mm and a length of 2500 mm. Finally, a slurry-like adhesive mainly composed of SiO ₂ fine particles is injected into the groove on the upper surface of the flange portion at the uppermost end of the quartz glass tube stacked joint, and the thickness of the flange portion at the uppermost end is 10 mm thick. A quartz glass plate was placed and joined to produce a flanged round quartz glass container joined body. This round quartz glass container joined body was heated at 1200 ° C., and the adhesive was baked to produce a round quartz glass container having an adhesive structure.

(Comparative Example 1)
An attempt was made to weld two quartz glass plates having a width of 50 mm, a length of 150 mm, and a wall thickness of 20 mm. However, the wall was thick and cracked during welding. A sample was cut out from a portion where no cracks occurred, and a three-point bending test was performed in the same manner as in Example 1. However, because the welding was not firmly performed, the plates easily separated from the welding surface. It was.

(Comparative Example 2)
Two sheets of quartz glass having a width of 50 mm, a length of 150 mm, and a thickness of 20 mm are prepared. A gap of 3 mm width is formed on the two sheets of quartz glass, and a slurry-like adhesive mainly composed of SiO ₂ fine particles is formed in the gap. The agent was injected. The laminated quartz glass plate was heated to 1200 ° C., but the quartz glass plate was detached during the process.

10a, 10b, 10c, 26: heat-resistant glass flange, 11a, 11b: heat-resistant glass cylinder base, 12a, 12b, 12c: heat-resistant glass cylinder, 13: heat-resistant glass container body with flange, 14a, 14b, 28: flange facing surface, 16: heat-resistant glass tube stack structure with flange, 16a: heat-resistant glass tube stack assembly with flange, 18a, 18b, 18c: groove, 19a, 19b: groove opening, 20: Adhesive, 22: Heat resistant glass lid, 24, 24a, 24b: Open port, 30: Heat resistant glass container, 30a: Heat resistant glass container joined body, 32: Cover body facing surface, 34, 36: Groove , 34a, 36a: groove opening, 40: heat resistant glass member bonded structure, 40a: heat resistant glass member bonded body, 42, 44: heat resistant glass member, 46, 48 : Facing surface, 50a, 52a: groove opening, 50, 52: groove, W: welding.

Claims (10)

Manufactured by abutting, bonding, and bonding a plurality of flanged heat-resistant glass cylinders having a flange part at least at one end to the opposed surfaces of a pair of flanged heat-resistant glass cylinders facing each other. A method of manufacturing a heat-resistant glass cylinder stack structure with a flange,
(A) preparing a plurality of flanged heat-resistant glass cylinders having grooves on all or some of the flange surfaces that are opposed to the flange portion;
(B) a step of setting the plurality of flanged heat-resistant glass cylinders to face each other so that at least one of the mutually opposing flange surfaces has a groove;
(C) The plurality of the set heat-resistant glass cylinders with flanges are filled in the groove portions in a state where at least one of the facing flange surfaces is opposed to each other so as to have the groove portions. Forming a flanged heat-resistant glass tube stack bonded body by bonding with a slurry-like adhesive mainly composed of SiO ₂ fine particles;
(D) the conjugate was heated at 5 00 ° C. or higher, a step of adhering the flange portions of the joined flanged heat resistant glass cylinder and flanged heat resistant glass cylinder stack structure ,
Unrealized method of flanged heat resistant glass cylinder stack structure, wherein the SiO ₂ fine particles are silica glass fine particles. A method for producing a heat-resistant glass container with a flange from a heat-resistant glass cylinder stack structure with flanges or a flanged heat-resistant glass cylinder stack assembly formed as an intermediate product manufactured in the production method according to claim 1. Because
(A) Heat-resistant glass cylinder stacked structure or joined body with flange, and heat-resistant glass with flange having a shape that closes an opening of the heat-resistant glass cylinder stacked structure or joined body with flange A step of preparing a heat-resistant glass lid having a flat surface without forming a groove on the surface facing the opening of the cylindrical stack structure or the joined body; or
(B) At least one of the flange surface of the flanged heat-resistant glass cylinder stacking structure or joined body facing each other or the end surface where the flange portion does not exist and the facing surface of the heat-resistant glass lid body have a groove portion. A step of setting the two to face each other,
(C) Flange surface or flange facing the flange surface of the heat-resistant glass cylinder stacking structure or joined body set as described above or an end surface where no flange portion exists and the opposing surface of the heat-resistant glass lid In a state where at least one of the end surface where the portion does not exist and the cover-facing surface are in contact with each other so as to have a groove portion, a slurry-like composition mainly composed of SiO ₂ fine particles filled in the groove portion Bonding with an adhesive to form a flanged heat-resistant glass container assembly,
; (D) a flanged heat resistant glass container assembly was heated at 5 00 ° C. or higher, flanged heat by adhering the flanged heat resistant glass cylinder stacked structure or assembly and the heat-resistant glass lid A process of making a glass container;
Unrealized method of flanged heat resistant glass container, wherein the SiO ₂ fine particles are silica glass fine particles. A method for producing a flanged heat-resistant glass container from a flanged heat-resistant glass cylinder stacked structure produced by the production method according to claim 1,
(I) preparing a heat-resistant glass cylinder stack structure with the flange and a heat-resistant glass lid having a shape that closes an opening of the heat-resistant glass cylinder stack structure with the flange;
(Ii) a step of setting the flange surface of the flanged heat-resistant glass cylinder stacking structure facing each other or the end surface where the flange portion does not exist and the facing surface of the heat-resistant glass lid to face each other;
(Iii) a flanged heat-resistant glass cylinder stacked structure, and a flanged heat-resistant glass container by welding a flange surface or an end surface on which no flange portion exists and a facing surface of the heat-resistant glass lid; And a process of
The manufacturing method of the heat resistant glass container with a flange characterized by including this. A heat-resistant glass cylinder stack structure with a flange manufactured by the manufacturing method according to claim 1,
SiO ₂ particles in a groove formed on the opposing surface portions of the flange portions facing the pair of flanged heat resistant glass cylinder which faces each other a plurality of flanged heat resistant glass tube having a flange portion on at least one end portion filling the slurry adhesives based on, among flanged heat resistant glass tube body have a contact bonded and thermally bonded structure through the adhesive, the SiO ₂ fine particles of quartz glass A heat-resistant glass cylinder stacked structure with a flange characterized by being fine particles . A flanged heat-resistant glass container manufactured by the manufacturing method according to claim 2,
Heat-resistant glass tube stack structure or joined body with flange having flange on end side, and heat-resistant glass lid having a shape that closes the opening of heat-resistant glass tube stack structure or joined body with flange A flanged heat-resistant glass cylinder stack structure or a flange-facing surface on the end side of the joined body or an end surface where no flange portion exists and the heat-resistant glass lid body facing each other A groove formed in at least one of the surfaces is filled with a slurry-like adhesive mainly composed of SiO ₂ fine particles, and a flanged heat-resistant glass cylinder stacked structure or joined body and heat-resistant glass are interposed through the adhesive. lid have a contact bonded and thermally bonded structure, flanged heat resistant glass container, wherein the SiO ₂ fine particles are silica glass particles. A flanged heat-resistant glass container manufactured by the manufacturing method according to claim 3,
The flanged heat-resistant glass cylinder stack structure and the flanged heat-resistant glass cylinder stack structure and a heat-resistant glass lid having a shape that closes the opening of the flanged heat-resistant glass cylinder stack structure, the flanged heat-resistant glass cylinders facing each other A flanged heat-resistant glass container having a structure in which a flange surface of a heat-resistant glass cylinder stack structure or an end surface where no flange portion is present is welded to a facing surface of a heat-resistant glass lid. One of a heat-resistant glass container body with a flange portion in which the opening on one end side is closed with a lid and a flange portion is provided on the opening on the other end side, and a heat-resistant glass cylinder with a flange having a flange portion on at least one end portion Or a method for manufacturing a heat-resistant glass container with a flange manufactured by abutting and bonding the opposing surfaces of the flange portions opposed to each other,
(1) Prepare the flanged heat-resistant glass container main body and one or a plurality of flanged heat-resistant glass cylinders so as to have a groove on all or part of the flange surface that faces the flange. Process,
(2) The flanged heat-resistant glass container body and the one or more flanged heat-resistant glass cylinders are opposed to each other so that at least one of the mutually opposing flange surfaces has a groove. The process of setting to
(3) The set heat-resistant glass container body with a flange portion and one or a plurality of flanged heat-resistant glass cylinders face each other so that at least one of the flange surfaces has a groove portion. A step of forming a flanged heat-resistant glass container assembly by bonding with a slurry-like adhesive mainly composed of SiO ₂ fine particles filled in the groove in a state of being in contact with each other;
(4) a step wherein the joined body was heated at 5 00 ° C. or higher, by bonding the flange portions of the joined flanged heat resistant glass container assembly and flanged heat resistant glass container,
Unrealized method of flanged heat resistant glass container, wherein the SiO ₂ fine particles are silica glass fine particles. A flanged heat-resistant glass container manufactured by the manufacturing method according to claim 7,
It has a heat-resistant glass container body with a flange portion in which an opening at one end is closed with a lid and a flange is provided at the opening at the other end, and one or more heat-resistant glass cylinders with flanges. The flanged heat-resistant glass container body and one or a plurality of flanged heat-resistant glass cylinders are opposed to each other so that at least one of the flange surfaces has a groove. In this state, the groove is filled with a slurry-like adhesive mainly composed of SiO ₂ fine particles, and the flanged heat-resistant glass container body and one or more heat-resistant glass cylinders with flanges are interposed through the adhesive. body and will have a contact bonded and thermally bonded structure, flanged heat resistant glass container, wherein the SiO ₂ fine particles are silica glass particles. A method for manufacturing a heat-resistant glass member bonding structure that abuts and bonds the opposing surfaces of a pair of heat-resistant glass members,
(A) preparing a pair of heat resistant glass members having grooves on both or one of the opposing surfaces of the heat resistant glass member;
(B) a step of setting the pair of heat resistant glass members to face each other such that at least one of the surfaces of the heat resistant glass members facing each other has a groove;
(C) Mainly the SiO ₂ fine particles filled in the groove portions in a state where the set pair of heat-resistant glass members are in contact with each other so that at least one of the opposing surfaces has the groove portions. Bonding with a slurry adhesive as a component to form a heat-resistant glass member assembly,
(D) a step wherein the heat-resistant glass member assembly is heated at 5 00 ° C. or higher temperatures, the heat-resistant glass member bonded structure by bonding said pair of heat-resistant glass members together,
Only including, a manufacturing method of heat resistant glass component bonding structure, wherein the SiO ₂ fine particles are silica glass particles. A heat-resistant glass member adhesion structure produced by the production method according to claim 9,
Slurry adhesives mainly composed of SiO ₂ fine particles are filled in grooves formed on opposing surface portions of a pair of opposing heat resistant glass members, and the heat resistant glass members are applied to each other through the adhesive. is contact bonded and the bonding structure possess heat resistance glass component bonding structure, wherein the SiO ₂ fine particles are silica glass particles.

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