JP4996601B2 - 真空ベーンポンプ - Google Patents
真空ベーンポンプ Download PDFInfo
- Publication number
- JP4996601B2 JP4996601B2 JP2008519915A JP2008519915A JP4996601B2 JP 4996601 B2 JP4996601 B2 JP 4996601B2 JP 2008519915 A JP2008519915 A JP 2008519915A JP 2008519915 A JP2008519915 A JP 2008519915A JP 4996601 B2 JP4996601 B2 JP 4996601B2
- Authority
- JP
- Japan
- Prior art keywords
- vane pump
- chamber
- oil
- compensation
- passage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
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Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
- F04C29/02—Lubrication; Lubricant separation
- F04C29/028—Means for improving or restricting lubricant flow
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/30—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members
- F04C18/34—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members
- F04C18/344—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members with vanes reciprocating with respect to the inner member
- F04C18/3441—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members with vanes reciprocating with respect to the inner member the inner and outer member being in contact along one line or continuous surface substantially parallel to the axis of rotation
- F04C18/3442—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members with vanes reciprocating with respect to the inner member the inner and outer member being in contact along one line or continuous surface substantially parallel to the axis of rotation the surfaces of the inner and outer member, forming the inlet and outlet opening
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C27/00—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
- F04C27/02—Liquid sealing for high-vacuum pumps or for compressors
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/30—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members
- F04C18/34—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members
- F04C18/344—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members with vanes reciprocating with respect to the inner member
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
- F04C28/06—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for stopping, starting, idling or no-load operation
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
- F04C29/12—Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet
- F04C29/124—Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet with inlet and outlet valves specially adapted for rotary or oscillating piston pumps
- F04C29/126—Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet with inlet and outlet valves specially adapted for rotary or oscillating piston pumps of the non-return type
- F04C29/128—Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet with inlet and outlet valves specially adapted for rotary or oscillating piston pumps of the non-return type of the elastic type, e.g. reed valves
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2220/00—Application
- F04C2220/10—Vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
- F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
- F04C28/28—Safety arrangements; Monitoring
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Applications Or Details Of Rotary Compressors (AREA)
- Rotary Pumps (AREA)
Description
Claims (9)
- 真空ベーンポンプであって、
サクション室(12)を有するケーシング(10)と、
サクション室(12)内に偏心的に配置されたロータ(14)と、
ロータ(14)に摺動可能に接続されたベーン(18)と、
オイル室(32)と、
サクション室(12)とオイル室(32)とに結合された吐出通路(30)と、
オイル室(32)からサクション室(12)への媒体の逆流を遮断するための、オイル室(32)と吐出通路(30)との間に配置された弁装置(38)と、
大気圧の空気が存在する領域と吐出通路(30)とに接続された補償通路(50)とを有し、
補償通路(50)は、部分的にカバーされた溝として、ケーシング(10)のフランジ(34)に形成されていることを特徴とする、真空ベーンポンプ。 - 補償通路(50)がオイル室(32)の空気室(54)に接続されている、請求項1記載の真空ベーンポンプ。
- 補償通路(50)が弁装置(38)の領域で吐出通路(30)に接続されている、請求項1又は2記載の真空ベーンポンプ。
- 補償通路(50)は、垂直方向に沿って延びるように形成されている、請求項1から3までのいずれか1項記載の真空ベーンポンプ。
- 吐出通路(30)は、水平方向に沿って延びるように形成されている、請求項1から4までのいずれか1項記載の真空ベーンポンプ。
- 弁装置が、弾性的に変形可能な弁舌片(38)を有しており、該弁舌片が補償通路(50)を形成するために付加的に溝をカバーしている、請求項1から5までのいずれか1項記載の真空ベーンポンプ。
- 補償通路(50)が複数設けられている、請求項1から6までのいずれか1項記載の真空ベーンポンプ。
- 複数の補償通路(50)は、大気に接続された通路入口開口(52)で互いに接続されている、請求項7記載の真空ベーンポンプ。
- 吐出通路(30)を閉鎖する弁装置(38)が、吐出通路(30)の領域でオイル浴(42)内に配置されている、請求項1から8までのいずれか1項記載の真空ベーンポンプ。
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102005031718A DE102005031718A1 (de) | 2005-07-07 | 2005-07-07 | Vakuum-Drehschieberpumpe |
| DE102005031718.9 | 2005-07-07 | ||
| PCT/EP2006/063748 WO2007006666A1 (de) | 2005-07-07 | 2006-06-30 | Vakuum-drehschieberpumpe |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2008545096A JP2008545096A (ja) | 2008-12-11 |
| JP4996601B2 true JP4996601B2 (ja) | 2012-08-08 |
Family
ID=36942562
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2008519915A Active JP4996601B2 (ja) | 2005-07-07 | 2006-06-30 | 真空ベーンポンプ |
Country Status (7)
| Country | Link |
|---|---|
| US (2) | US8469684B2 (ja) |
| EP (1) | EP1899608B1 (ja) |
| JP (1) | JP4996601B2 (ja) |
| KR (1) | KR101291228B1 (ja) |
| CN (1) | CN101203677B (ja) |
| DE (1) | DE102005031718A1 (ja) |
| WO (1) | WO2007006666A1 (ja) |
Families Citing this family (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5158212B2 (ja) * | 2008-12-26 | 2013-03-06 | 日立化成株式会社 | ポジ型感光性樹脂組成物、レジストパターンの製造方法、半導体装置及び電子デバイス |
| IT1393277B1 (it) * | 2009-03-17 | 2012-04-12 | Vhit Spa | Pompa per vuoto rotativa con un dispositivo di disaccoppiamento dal motore di azionamento |
| DE102010051610B4 (de) | 2009-11-24 | 2023-10-26 | Hanon Systems Efp Deutschland Gmbh | Vakuumpumpe |
| JP2012167590A (ja) * | 2011-02-14 | 2012-09-06 | Nabtesco Automotive Corp | ケーシングの製造方法及び真空ポンプ |
| DE202012002883U1 (de) * | 2012-03-22 | 2013-06-25 | Oerlikon Leybold Vacuum Gmbh | Vakuum-Drehschieberpumpe |
| DE202012002882U1 (de) | 2012-03-22 | 2013-06-25 | Oerlikon Leybold Vacuum Gmbh | Vakuum-Drehschieberpumpe |
| DE202012002881U1 (de) * | 2012-03-22 | 2013-06-25 | Oerlikon Leybold Vacuum Gmbh | Vakuum-Drehschieberpumpe |
| CN103061820B (zh) * | 2012-12-27 | 2013-12-04 | 潍坊天瑞重工凿岩机械有限公司 | 具有内置式供油器的气动滑片式钻机 |
| DE102013200410B4 (de) * | 2013-01-14 | 2017-12-07 | Schwäbische Hüttenwerke Automotive GmbH | Gaspumpe mit Druckentlastung zur Reduzierung des Anfahrdrehmoments |
| GB2533621B (en) | 2014-12-23 | 2019-04-17 | Edwards Ltd | Rotary screw vacuum pumps |
| CN105526171A (zh) * | 2016-02-05 | 2016-04-27 | 无锡明治泵业有限公司 | 一种汽车真空泵降低泵腔内积油量的结构 |
| CN105526174A (zh) * | 2016-02-05 | 2016-04-27 | 无锡明治泵业有限公司 | 一种用于降低真空泵泵腔内积油量的机构 |
| IT201700115881A1 (it) * | 2017-10-13 | 2019-04-13 | D V P Vacuum Tech S P A | Pompa per il vuoto lubrificata |
| CN112963349A (zh) * | 2021-01-22 | 2021-06-15 | 淄博真空泵厂有限公司 | 新型水环真空机组 |
| JP7052101B1 (ja) * | 2021-01-27 | 2022-04-11 | 株式会社アルバック | 真空ポンプ及び真空ポンプの復圧方法 |
| AU2022482243A1 (en) | 2022-10-10 | 2025-02-27 | Busch Produktions Gmbh | Improved sliding vane rotary pump |
Family Cites Families (26)
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| US3053439A (en) * | 1957-07-24 | 1962-09-11 | Leybolds Nachfolger E | Rotary vacuum pump |
| US3040973A (en) * | 1958-12-02 | 1962-06-26 | Prec Scient Company | Vacuum pump |
| DE1123076B (de) | 1959-04-18 | 1962-02-01 | Leybolds Nachfolger E | Rotierende mechanische Vakuumpumpe |
| US3326456A (en) * | 1965-09-13 | 1967-06-20 | Prec Scient Company | Check valve for a vacuum pump |
| US3301474A (en) * | 1965-09-24 | 1967-01-31 | Bendix Balzers Vacuum Inc | Oil sealed mechanical rotary vacuum pump |
| GB1140452A (en) * | 1966-03-16 | 1969-01-22 | Edwards High Vacuum Int Ltd | Improvements relating to liquid sealed mechanical vacuum pumps |
| JPS4910005B1 (ja) * | 1969-01-20 | 1974-03-07 | ||
| JPS4911645B1 (ja) * | 1969-09-22 | 1974-03-19 | ||
| US3782868A (en) * | 1971-11-26 | 1974-01-01 | Componetrol | Rotary vane pump |
| NL173343C (nl) | 1972-03-29 | 1984-01-02 | Philips Nv | Inrichting voor het uitlezen van een schijfvormige registratiedrager met in optische vorm gecodeerde beeld-en/of geluidssignalen. |
| JPS5343209Y2 (ja) | 1973-10-26 | 1978-10-18 | ||
| DE2401177A1 (de) * | 1974-01-11 | 1975-07-24 | Pfeiffer Vakuumtechnik | Vorrichtung zur geraeuschdaempfung bei drehschieberpumpen |
| FR2383335A1 (fr) * | 1977-03-08 | 1978-10-06 | Leybold Heraeus Sogev | Pompe mecanique a joint d'huile |
| JPS5343209U (ja) * | 1977-09-01 | 1978-04-13 | ||
| JPS5676186U (ja) | 1979-11-17 | 1981-06-22 | ||
| JPS57172482A (en) * | 1981-04-17 | 1982-10-23 | Hitachi Ltd | Image position detecting system |
| DE3616515A1 (de) * | 1986-05-16 | 1987-11-19 | Mugioiu Dipl Ing Ioan | Drehschiebervakuumpumpe |
| DE4016014C2 (de) * | 1989-06-01 | 1998-02-19 | Barmag Barmer Maschf | Flügelzellen-Vakuumpumpe |
| DE3933047A1 (de) * | 1989-10-04 | 1991-04-11 | Barmag Barmer Maschf | Fluegelzellen-vakuumpumpe |
| DE19961317C1 (de) * | 1999-12-18 | 2001-06-28 | Bayerische Motoren Werke Ag | Vakuumpumpe, insbesondere Flügelzellenvakuumpumpe |
| DE10147324A1 (de) * | 2000-10-11 | 2002-05-23 | Luk Automobiltech Gmbh & Co Kg | Vakuumpumpe für einen Servoantrieb in einem Kraftfahrzeug |
| JP2002349458A (ja) | 2001-05-22 | 2002-12-04 | Matsushita Electric Ind Co Ltd | 密閉型スクロール圧縮機 |
| GB2380523A (en) | 2001-06-27 | 2003-04-09 | Luk Automobiltech Gmbh & Co Kg | Vacuum generator |
| WO2004024985A1 (ja) | 2002-09-11 | 2004-03-25 | Inspire Technology Resource Management Corporation | 無電解メッキ液、及びこれを用いた無電解メッキ方法及び無電解メッキ被処理物 |
| AU2003287863A1 (en) | 2002-11-13 | 2004-06-03 | Luk Automobiltechnik Gmbh And Co. Kg | Vacuum pump |
| CN2688932Y (zh) * | 2004-01-18 | 2005-03-30 | 吴允叔 | 旋转式防回油真空/压气两用泵 |
-
2005
- 2005-07-07 DE DE102005031718A patent/DE102005031718A1/de not_active Ceased
-
2006
- 2006-06-30 US US11/988,408 patent/US8469684B2/en active Active
- 2006-06-30 CN CN2006800224665A patent/CN101203677B/zh active Active
- 2006-06-30 KR KR1020077030305A patent/KR101291228B1/ko active Active
- 2006-06-30 WO PCT/EP2006/063748 patent/WO2007006666A1/de not_active Ceased
- 2006-06-30 JP JP2008519915A patent/JP4996601B2/ja active Active
- 2006-06-30 EP EP06763998A patent/EP1899608B1/de active Active
-
2013
- 2013-05-23 US US13/900,843 patent/US9017051B2/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| US9017051B2 (en) | 2015-04-28 |
| EP1899608B1 (de) | 2011-10-19 |
| US20130251578A1 (en) | 2013-09-26 |
| KR20080024149A (ko) | 2008-03-17 |
| WO2007006666A1 (de) | 2007-01-18 |
| JP2008545096A (ja) | 2008-12-11 |
| US8469684B2 (en) | 2013-06-25 |
| US20090297376A1 (en) | 2009-12-03 |
| DE102005031718A1 (de) | 2007-01-18 |
| KR101291228B1 (ko) | 2013-07-31 |
| EP1899608A1 (de) | 2008-03-19 |
| CN101203677B (zh) | 2011-04-06 |
| CN101203677A (zh) | 2008-06-18 |
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