JP2003002768A - Ceramic member, joined body and container for vacuum switch - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a ceramic member, a joined body and a container for a vacuum switch which stably ensure high joining strength. SOLUTION: A joined body 7 is formed by joining an alumina-base ceramic member 1 and a metallic member 3 made of kovar with a brazing filler metal 5 made of silver brazing. The ceramic member 1 is obtained by forming a molybdenum-base metallized layer 11 on a ceramic substrate 9 which is a sintered compact made of alumina, and a plating layer 13 consisting of Ni is formed on the metallizing layer 11. The ceramic member 1 and the metallic member 3 are joined and integrated by joining the plating layer 13 and the metallic member 3 with the brazing filler metal 5.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention can be used in various applications such as ceramic substrates, envelopes, semiconductor packages, and the like. For example, a ceramic member in which metal and ceramic or ceramics are joined by metallization,
The present invention relates to a bonded body and a vacuum switch container.

[0002]

2. Description of the Related Art A refractory metal method (Mo--Mn method; Telefunken method) has been known as a method for metallizing the surface of a ceramic substrate which is a fired body. According to the Telefunken method, a metalizing ink is prepared by adding a bonding aid such as Mn powder, Ti powder, and a glass component (SiO ₂ ) to a powder of a refractory metal such as W or Mo and mixing it with an organic binder. A method of coating and baking on a ceramic substrate (baking method).

Many methods have been developed based on the Telefunken method for the purpose of improving the adhesive strength of the metal layer (metallized layer). For example, JP-A-56
-96794 and the like disclose techniques for defining the composition of the metallizing paste for forming the metallizing layer, and JP-A-59-132194 and the like disclose the metal powder in the metallizing paste. Techniques for defining the particle size, firing temperature, etc. are disclosed.

[0004]

However, although the above-mentioned conventional technique has an effect of improving the bonding strength of the bonded body through the metallized layer, it is not always sufficient. In other words, in practice, even if the composition, particle size, firing temperature, etc. of the metallizing paste are specified, it is not always possible to obtain a product having stable and high bonding strength.

For example, when a vacuum switch container is manufactured by using a bonded body formed by the above-mentioned conventional technique, the bonding strength may vary, so that a product having insufficient airtightness is generated. In some cases, further improvement was desired. The present invention has been made to solve the above problems, and an object of the present invention is to provide a ceramic member, a bonded body, and a vacuum switch container that can stably obtain high bonding strength.

[0006]

[MEANS FOR SOLVING THE PROBLEMS] The formation of a metallized layer on a ceramic and the structure of the metallized layer in the bonding via the metallized layer are composed of a fired body of metal particles having a three-dimensional network structure and a glass component filled in the voids. Has been formed.

It is considered that the strength of the metallized layer (bonding strength) is influenced by the degree of sintering of the metal component itself and the anchor effect of the glass component fused with the ceramic base material and diffused between the metal particles. Therefore, even if the particle size and composition of the material at the time of the metallizing paste are specified, the structure in the metallizing layer is not always constant depending on the conditions of the steps such as printing, drying, firing, plating and brazing.

That is, since the structure of the metallized layer after firing is in an appropriate range, the bonding between the ceramic / metallized layer, the strength of the metallized layer itself, the bonding between the metallized / metal layers (plating layer, brazing material layer), etc. In all, the optimum state is achieved, and the bonding strength of the ceramic member via the metallized layer is high and stable.

The present invention is obtained by the above-mentioned findings. Each claim will be described below. (1) The invention of claim 1 is (ceramic fired body).
In a ceramic member in which a metallized layer is formed on a ceramic substrate, a portion (specific portion) where the area occupancy rate of the metal component is 45 to 75% in a measurement range of 10 μm square of the cross section of the metallized layer (after firing), The gist is a ceramic member characterized by being 80% or more of all metallized layers.

In the present invention, since the specific portion in the measuring range of 10 μm square occupies 80% or more of the whole,
A stable and high bonding strength can be realized. Therefore, there is little variation in products using this ceramic member. That is,
In the measurement range described above, the area occupancy of the metal component is 4
If it is less than 5%, the adhesion strength with the plating layer or the brazing material layer formed on the metallized layer (for joining with other members) is insufficient, and the strength of the metallized layer itself is insufficient. On the other hand, if it exceeds 75%, the metal portion is too much, and the bonding strength between the ceramic and the metallized layer decreases. Moreover, if the specific portion is less than 80% of the whole,
There is a large variation in composition, and, for example, a bonding failure is likely to occur starting from an inappropriate portion (having an excessively small amount of metal).

Therefore, in the present invention, by providing a structure that satisfies the above-mentioned conditions, for example, when a ceramic member is joined with another member to produce a product, the variation in the joining strength (and hence the product) is small, It is possible to prevent a decrease in airtightness due to a decrease in bonding strength.

Further, according to the present invention, since the causal relationship between the metallized structure after firing and the bonding strength can be quantitatively shown, it can be used as a standard for manufacturing a bonded body having stable and high bonding strength. be able to. The metallized layer may have an average thickness in the range of 3 to 50 μm.
If there is a portion having a size of 5 μm or more, the metal component is easily dispersed and the prescribed area occupancy is easily obtained, which is preferable.

Examples of the material forming the metallized layer include refractory metals such as molybdenum and tungsten. (2) According to the invention of claim 2, in a ceramic member in which a metallized layer is formed on a ceramic substrate (which is a fired body), the area of the metal component in the measurement range of 5 μm square of the cross section of the metallized layer (after firing). Occupancy rate is 20 to 90
% (Specific part) is 80% of the total metallized layer
The gist is a ceramic member characterized by the above.

In the present invention, the area occupancy of the metal component in the measurement range of 5 μm square is 20 to 90%, and the specific portion thereof is 80% or more of the whole, so that stable and high bonding strength is realized. it can. Therefore, there is little variation in products using this ceramic member.

That is, when the area occupancy of the metal component is less than 20% in the above-mentioned measurement range, the metal layer and the plating layer or the brazing material layer formed on the metallized layer (for joining with other members) are used. The adhesion strength is insufficient, and the strength of the metallized layer itself is insufficient. On the other hand, when it exceeds 90%, there are too many metal parts to lower the bonding strength between the ceramic and the metallized layer. Moreover, the specific part is the whole 8
If it is less than 0%, the composition varies widely, and, for example, a bonding failure is likely to occur from an inappropriate portion (having an excessively small amount of metal) as a starting point.

Therefore, in the present invention, by providing a structure that satisfies the above-mentioned conditions, for example, when a ceramic member is joined with another member to manufacture a product, there is little variation in the bonding strength (and therefore the product), It is possible to prevent a decrease in airtightness due to a decrease in bonding strength.

Further, according to the present invention, since the causal relationship between the metallized structure after firing and the bonding strength can be quantitatively shown, it is used as a standard for manufacturing a bonded body having stable and high bonding strength. be able to. The metallized layer may have an average thickness in the range of 3 to 50 μm.
If there is a portion having a size of 5 μm or more, the metal component is easily dispersed and the prescribed area occupancy is easily obtained, which is preferable.

Further, examples of the material forming the metallized layer include refractory metals such as molybdenum and tungsten. Here, the relationship between the inventions of claim 1 and claim 2 will be described. In contrast to the invention of claim 1, the invention of claim 2 means that more metal components are dispersed. Further, the more stable the metal component is, the more stable the strength is. Therefore, the invention of claim 2 can realize the more stable strength.

That is, the more microscopically, the dispersion of the metal component becomes more non-uniform than it seems, so the numerical value in the appropriate range is widened, but this dispersion in the microscopic field affects the substantial strength. is there. (3) The invention of claim 3 is a gist of a bonded body characterized in that a metal member is bonded to the ceramic member according to claim 1 or 2 via the metallization layer and the brazing material layer. .

The present invention shows a joined body in which a metal member is joined to the ceramic member having the above structure. Since this bonded body has stable and high bonding strength, there is little variation in the airtightness of the product using this bonded body, which is suitable.

That is, in the conventional bonded body, it was difficult to realize sufficiently stable and high bonding strength, but according to the present invention, it is possible to realize high and stable bonding strength, which is excellent. The product can be manufactured. Note that examples of the material forming the brazing material layer include Ag, Cu, Au, Ni, Cd, and compounds thereof.

(4) In the invention of claim 4, another ceramic member (usually a ceramic substrate) is bonded to the ceramic member of claim 1 or 2 through the metallization layer and the brazing material layer. The gist is a bonded body characterized by the above. The present invention shows a joined body in which another ceramic member is joined to the ceramic member having the above-described structure.

Since this joined body has a stable and high joining strength, there is little variation in the airtightness of the product using this joined body, which is suitable. The material forming the brazing material layer is, for example, Ag, Cu, Au, Ni or C.
d, and their compounds.

(5) The invention according to claim 5 provides the joined body according to claim 3 or 4, characterized in that a plated layer is provided between the metallized layer and the brazing material layer. .
In the present invention, since the plating layer is provided between the metallized layer and the brazing material layer, the bonding strength between the metallized layer and the brazing material layer is increased, and thus the bonding strength between the ceramic member and the metal member, or the ceramic material. The joining strength between the members is improved.

Examples of the material forming the plating layer include Ni, Cu, Au, Ag and Pd. (6) The invention according to claim 6 provides a vacuum switch container characterized by comprising the joined body according to any one of claims 3 to 5.

The present invention is a vacuum switch container using the above-mentioned bonded body. The vacuum switch container is a vacuum container (for example, an insulating valve) that houses the vacuum switch, and a vacuum switch (electric circuit switch) can be formed by disposing electrodes and the like in the vacuum container. . The vacuum switch is particularly suitable for opening and closing high voltage and large current.

[0027]

BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, an example (embodiment) of an embodiment of a ceramic member, a bonded body, and a vacuum switch container of the present invention will be described with reference to the drawings. (Embodiment 1) Here, a joined body of a ceramic member and a metal member will be described as an example.

A) As schematically shown in FIG. 1, in this embodiment, a ceramic member 1 containing alumina as a main component and a metal member 3 made of Kovar are joined by a brazing material 5 made of silver braze. The joined body 7 is formed. More specifically, the ceramic member 1 is such that a metallized layer 11 containing molybdenum as a main component is formed on a ceramic base material 9 which is a sintered body made of alumina, and Ni is formed on the metallized layer 11.
A plated layer 13 made of is formed. Then, the plating layer 13 and the metal member 3 are joined by the brazing material 5, so that the ceramic member 1 and the metal member 3 are joined and integrated.

B) Next, a method of manufacturing a cylindrical test piece as an example of the joined body 7 will be described together with a method of manufacturing a ceramic member. First, Mo powder having an average particle diameter of 1 μm: 71% by volume, M
n powder: 9% by volume, SiO ₂ powder: 18% by volume, TiH ₂ powder:
2% by volume was mixed with 30% by volume of ethyl cellulose dissolved in a solvent to prepare a metallized paste.

Next, the metallizing paste was applied to the surface of a ceramic substrate 9 made of alumina (for example, 92% by weight of alumina) having a thickness of about 12 μm. That is, as shown in FIG.
A metallizing paste was applied to the surface (upper end surface in FIG. 2) of a cylindrical ceramic substrate 9 having a size of mm × thickness 5 mm × length 90 mm.

Next, the ceramic base material 9 coated with the metallizing paste is placed in a furnace and put in a wet atmosphere (dew point 40 ° C.) of H ₂ / N ₂ (1: 1) gas atmosphere, for example, 1350 to 1400. Firing was performed at a firing temperature of ° C. As a result, the ceramic member 1 provided with the (fired) metallized layer 11 on the surface of the ceramic substrate 9 was obtained.

Next, the surface (metallized surface) of the metallized layer 11 was plated with Ni by electrolytic plating to form a plated layer 13 having a thickness of 1 to 5 μm. After that, H ₂
The plating layer 13 was baked (sintering) at a temperature of 830 ° C. in the atmosphere. Next, as shown in FIG. 2, five brazing metal members 3 made of Kovar (Fe—Ni—Co) were brazed to the upper end surface of the ceramic member 1.

Specifically, a silver brazing material (BAg-8) 5 is provided between the plating layer 13 and the five metal members 3 (for example, a cylindrical Kovar member having an outer diameter of φ2.5 and a length of 100 mm). By arranging the foils respectively and heating and cooling at a predetermined brazing temperature, the ceramic member 1 and the metal member 3 were brazed and joined to complete the joined body 7.

C) Next, an example of an experiment conducted to confirm the effect of this embodiment will be described. (i) Method for Manufacturing Test Piece of Bonded Body First, a bonded body (test piece) within the scope of the present invention was manufactured by the manufacturing method of the above-described example.

That is, the ceramic members of Sample Nos. 2 and 3 were manufactured by changing the firing conditions in the manufacturing process of manufacturing the joined body by the manufacturing processes of 1 to 3 described above. Specifically, the firing temperature rising rate was set to 2 ° C./min, and firing was performed at a peak temperature of 1350 ° C. for 45 minutes to manufacture a ceramic member of Sample No. 2. Also, at the same firing temperature increase rate, firing was performed for 45 minutes at a peak temperature of 1400 ° C.
An o.3 ceramic member was produced.

As a comparative example outside the scope of the present invention, Mo powder having an average particle diameter of 2.5 μm: 67% by volume, Mn powder:
8% by volume, SiO ₂ powder: 23% by volume, TiH ₂ powder: 2% by volume, and ethyl cellulose dissolved in a solvent: 30 external volume%
And were mixed to produce a metallized paste.

This was printed and fired in the same manner as in the above-mentioned example to manufacture the ceramic member of sample No. 1. However, the firing temperature rising rate was 4 ° C./min, and the peak temperature was 1380 ° C.
Baking for 5 minutes. Further, as another comparative example outside the scope of the present invention, a metallizing paste was produced, printed and fired in the same manner as in the above-mentioned examples to produce a ceramic member of sample No. 4. However, the firing temperature rising rate was 2 ° C./min, and the firing was performed at a peak temperature of 1420 ° C. for 90 minutes.

Next, with respect to each ceramic member manufactured as described above, by the manufacturing steps described above and
The metal member was joined and the joined body of sample No. 1-4 was manufactured. (ii) Experimental Method / Strength Test The bonding strength of the metal member was measured with respect to the bonded body of the test piece.

Specifically, as shown in FIG. 3, the upper end surface of the joined body is held by the jig 21, and in this state, the upper portions of the metal members are chucked by the holding members 23 one by one, and the holding members are held. 23 was pulled upward at a speed of 0.5 mm / min. Then, at this time, the strength until the metal member was peeled off (bonding strength) was measured by an autograph manufactured by Shimadzu Corporation. The measurement results are shown in Table 1 below.

Observation of Bonded Part Next, the test pieces of Sample Nos. 1 to 4 were cut out so as to include the bonded part, and the cut out part was molded with a thermoplastic resin to prepare a sample having a mirror surface section.

The mirror cross section of this sample was magnified and photographed with a metallurgical microscope, and the image was binarized in color to obtain 10
The area ratio (area occupancy of the metal component) between the metal part and the glass part in the μm square (Sample Nos. 1 to 4) was measured. Then, the area occupancy rate of the metal component was measured at a total of 10 arbitrary locations. The results are shown in Table 1 below.

[0042]

[Table 1]

As is apparent from Table 1, the test pieces of Sample Nos. 2 and 3 in the range of the present invention, that is, the area occupancy of the metal component in the measuring range of 10 μm square of the cross section of the metallized layer is 45 to 75. % Of the total metallized layer has a high bonding strength, and
It can be seen that the bonding strength is uniform.

On the other hand, the test pieces of the sample Nos. 1 and 4 of the comparative example are not preferable because there are places where the bonding strength is low. (iii) Further, the ceramic members of Sample Nos. 6 and 7 were manufactured as bonded bodies (test pieces) within the scope of the present invention in the same manner as in the above-mentioned (i) method for manufacturing a bonded test piece.

Specifically, sample N was fired at a peak temperature of 1350 ° C. for 45 minutes at a firing rate of 2 ° C./min.
A ceramic member of o.6 was manufactured. Also, at the same firing temperature increase rate, firing is performed at a peak temperature of 1400 ° C. for 45 minutes,
A ceramic member of Sample No. 7 was manufactured.

On the other hand, as a comparative example outside the scope of the present invention, a ceramic member of sample No. 5 was manufactured in the same manner as described above. However, the firing temperature rising rate is 4 ° C./min, and the peak temperature is 1
It was baked at 380 ° C. for 45 minutes. As yet another comparative example,
A ceramic member of Sample No. 8 was manufactured in the same manner as above. However, the firing temperature rising rate was 2 ° C./min, and the firing was performed at a peak temperature of 1420 ° C. for 90 minutes.

Then, in the same manner as described above, the metal members were joined to the respective ceramic members to manufacture the joined bodies of Sample Nos. 5-8. Next, the strength test and the observation of the joint portion were performed in the same manner as the (ii) experimental method. In addition, the area ratio (area occupancy of the metal component) between the metal portion and the glass portion in a square of 5 μm (Sample Nos. 5 to 8) was measured here.

Then, the area occupancy of the metal component was measured at a total of 10 locations at arbitrary locations. The results are shown in Table 2 below.

[0049]

[Table 2]

Further, as is apparent from Table 2, the test piece of Sample Nos. 6 and 7 in the range of the present invention, that is, the area occupancy of the metal component in the measurement range of 5 μm square of the cross section of the metallized layer is 20 to 20. The 90% portion is 80% or more of the total metallized layer and has a high bonding strength.
It can be seen that the bonding strength is uniform.

On the other hand, the test pieces of the sample Nos. 5 and 8 of the comparative example are not preferable because there are places where the bonding strength is low. As described above, the bonded body within the scope of the present invention is suitable because it has a high and stable bonding strength. In addition, since the causal relationship between the metallized structure after firing and the bonding strength can be quantitatively obtained by the structure of the bonded body of the present invention, the standard for producing a bonded body having a stable and high bonding strength And the effect of contributing to the improvement of the manufacturing method. (Embodiment 2) Next, Embodiment 2 will be described, but the description of the same parts as those in Embodiment 1 will be omitted.

Here, a bonded body in which ceramic members are bonded together will be taken as an example. a) As schematically shown in FIG. 4, in the present embodiment, a first ceramic member 31 made of alumina and a second ceramic member 33 made of alumina similar to the first ceramic member 31 are joined by a brazing material 35 to form a joined body 37. Are formed.

More specifically, the first ceramic member 31 is
A first metallization layer 41 on the first ceramic substrate 39.
Is formed, and the first metallized layer 41 is formed.
A first plating layer 43 is formed on the top by Ni plating. On the other hand, the second ceramic member 33 is obtained by forming the second metallization layer 47 on the second ceramic base material 45, and N is formed on the second metallization layer 47.
The second plating layer 49 is formed by i plating.
Then, the first plating layer 43 and the second plating layer 49 are joined by the brazing material 35, so that the first ceramic member 31 and the second ceramic member 33 are joined and integrated.

B) Next, a method for manufacturing this joined body will be described. As described in Example 1 above (contents omitted below are the same as in Example 1 above), a metallizing paste was manufactured using the powder of the metallizing paste component.

Next, the metallizing paste
Of the ceramic base material 39 and the second ceramic base material 45. Next, the first and second ceramic base materials 39 and 45 coated with the metallizing paste are placed in a furnace, respectively.
Firing was performed at a temperature of 350 to 1400 ° C. to obtain first and second ceramic members 31 and 33.

Next, the first and second metallization layers 41, 4
Ni plating is applied to the surface of No. 7, and the first and second plating layers 4
3,49 were formed. Next, a silver brazing material 35 is arranged between both plating layers 43 and 49, and brazing is performed to bond both ceramic members 31 and 33.
Were joined and integrated to complete a joined body 37.

The joined body 3 of this embodiment is the ceramic member 3
Although 1 and 33 are bonded together, this embodiment also has an advantage that a bonded body 3 having stable and high bonding strength can be obtained. (Third Embodiment) Next, a third embodiment will be described, but the description of the same parts as those in the first and second embodiments will be omitted.

The present embodiment is an example in which the bonded body composed of the ceramic member and the metal member as in the first embodiment is used for a vacuum switch. That is, the vacuum switch of the present embodiment is a high load switch which is suitable for switching a high voltage and a large current by incorporating electrodes and the like in the vacuum switch container.

More specifically, as shown in FIG. 5, the vacuum load switch 100 comprises a vacuum switch container (insulation valve) 101.
And first and second end covers 102, 103 attached to cover the end of the insulating valve 101, and the first end cover 102.
A fixed electrode 104 mounted on the second end cover 103 and a movable electrode 105 slidably arranged on the second end cover 103.
The contact point 106 is composed of 05.

The insulation valve 101 is formed of a ceramic base material of 92% by weight of alumina, and has a substantially cylindrical shape having an inner diameter of 80 mm × a wall thickness of about 5 mm × a length of 100 mm. Also,
The insulating valve 101 includes a straight body portion 110 having a constant inner diameter and a convex portion 112 that is provided in the middle of the inner peripheral wall 111 so as to project inward and be circumferentially provided. Further, a glaze layer 115 is provided on the outer peripheral surface of the insulating valve 101.

The first and second end lids 102 and 103 are formed of a disk-shaped Kovar (Fe-Ni-Co) plate, and have holes 121 for fixing the fixed electrode 104 and the guide 131 at their central portions. 132 is provided. This guide 131
Are provided so that the movable shaft 151 of the movable electrode 105 can easily slide.

The fixed electrode 104 has a fixed shaft 141 fixed to the hole 121 at its tip, and the insulating valve 10 at its tip.
The electrode 142 has a circular ring shape and is projected into the inside 1. The movable electrode 105 has a rear end serving as a movable shaft 151 that slides in the guide 131 and a front end that is the electrode 1 on the fixed electrode 104 side.
The electrode 152 is in contact with 42. The movable electrode 105 includes a bellows-shaped metal bellows 153 provided between the movable shaft 151 near the electrode 152 and the second end cover 103.
Thus, the opening / closing operation can be performed in the vacuum holding state.

The metal bellows 153 is surrounded by a bellows cover 154, and the electrodes 142, 152 are closed when the current is opened and closed.
The metal vapor generated from (that is, the contactors 143 and 155 at the tips thereof) is prevented from being directly touched. The contact 106
Is the contactor 14 with which the electrodes 142, 152 are brought into contact with each other.
High-melting-point tungsten-based sintered metal is used for 3, 155, and has a structure that is hard to be welded by the generated vacuum arc.

An arc shield 161 is arranged so as to surround the contact 106. This arc shield 161
Is the inner peripheral wall 111 of the insulating valve 101.
In order to prevent the insulation from being deteriorated by being attached to the convex portion 112 of the insulation valve 101, it is joined by brazing.

That is, in the high load switch 100 of the present embodiment, the arc shield 161 which is a metal member is attached to the convex portion 112 of the insulating valve 101 which is a ceramic member, similarly to the joined body of the first embodiment. They are joined by brazing with the material 162. Specifically, as schematically shown in FIG. 6, a metallized layer 171 is formed at the tip of the convex portion 112 of the insulating valve 101, and a plated layer 173 is formed on the metallized layer 171 by Ni plating. The plated layer 173 and the arc shield 161 are joined by brazing with the brazing material 162.

As a result, it is possible to realize the insulating valve 101 (and thus the high load switch 100) having a high joint strength. Further, in this embodiment, the brazing material, the plating layer, and the metallization layer (not shown) are arranged in this order between the insulating valve 101 and the end caps 102 and 103 from the end caps 102 and 103 side. As a result, the insulating valve 101 and the end caps 102 and 103 are joined together with high strength to ensure airtightness. (Fourth Embodiment) Next, a fourth embodiment will be described, but the description of the same portions as those in the third embodiment will be omitted.

This embodiment is an example in which a joined body made of a ceramic member and a metal member is used for a vacuum switch as in the third embodiment, but the structures of the arc shield and the insulation valve are different. As shown schematically in FIG. 7, the vacuum switch (high load switch) 200 of the present embodiment includes an upper insulation valve 201 and a lower insulation valve 20 that constitute a vacuum switch container.
3, the metal connection member 205 made of oxygen-free copper
Is brazed, and the arc shield 207 is brazed and joined to the tip side of the connecting member 205.

In particular, metallized layers 211 and 213 are respectively formed on the portions (fixing portions 209) where the upper insulating valve 201 and the lower insulating valve 203 are fixed to the connecting member 205 by the same method as in the first embodiment. Plated layers 215 and 217 are formed on the metallized layers 211 and 213 by Ni plating, respectively.

The plated layers 215 and 217 and the connecting member 205 are joined by brazing materials 219 and 221 respectively, so that both insulating valves 201 and 203 are joined.
And the connection member 205 are joined and integrated. The same glaze layers 223 and 225 as those in the third embodiment are formed on the outer peripheral surfaces of the insulating valves 201 and 203, respectively.

The same effect as that of the third embodiment can be obtained by this embodiment. Further, in this embodiment, the upper insulation valve 2
01 and the connection member 205, a metallization layer 211,
The plating layer 215 and the brazing material 219 are provided, and the metallization layer 213, the plating layer 217, and the brazing material 221 are provided between the lower insulating valve 203 and the connecting member 205, and thereby the upper insulating valve 201 and Connection member 20
5 and the lower insulating valve 203 are firmly connected, and high airtightness can be secured.

Between the upper insulation valve 201 and the lower insulation valve 203 and the respective end covers, as in the third embodiment, from the end cover side, a brazing material, a plating layer and a metallized layer (not shown). ) Are arranged in this order, whereby high strength bonding and airtightness are ensured.

It is needless to say that the present invention is not limited to the above-mentioned embodiments and can be carried out in various modes without departing from the gist of the present invention.

[Brief description of drawings]

FIG. 1 is an explanatory view showing a main part of a joined body of Example 1 in a cutaway manner.

FIG. 2 is a perspective view showing a joined body of Example 1.

FIG. 3 is an explanatory diagram showing a method for measuring the bonding strength of the bonded body of Example 1.

FIG. 4 is an explanatory view showing a main part of a joined body of Example 2 in a cutaway manner.

FIG. 5 is an explanatory view showing a vacuum switch of a third embodiment in a broken manner.

FIG. 6 is an explanatory view showing a main part of a vacuum switch according to a third embodiment in a broken manner.

FIG. 7 is an explanatory view showing a main part of a vacuum switch according to a fourth embodiment in a broken manner.

[Explanation of symbols]

1 ... Ceramic member 3 ... Metal member 5, 35, 162, 219, 221 ... Raw material 7, 37 ... Joined body 9 ... Ceramic substrate 11 ... Metallized layer 13 ... Plating layer 31 ... First ceramic member 33 ... Second ceramic member 39 ... First ceramic substrate 41 ... First metallized layer 45 ... Second ceramic base material 47 ... Second metallized layer 161, 207 ... Arc shield 101 ... Insulation valve 100, 200 ... Vacuum switch (high load switch) 171, 211, 213 ... Metallized layer 201 ... Top insulation valve 203 ... Lower insulation valve 205 ... Connection member

Claims (6)

[Claims] 1. In a ceramic member having a metallized layer formed on a ceramic substrate, a portion of the metallized layer having an area occupancy rate of 45 to 75% in a measurement range of 10 μm square on the cross section of the metallized layer is the entire metallized layer. Ceramic member characterized by being 80% or more. 2. A ceramic member in which a metallized layer is formed on a ceramic substrate, wherein a portion in which a metal component has an area occupancy rate of 20 to 90% in a measurement range of 5 μm square of a cross section of the metallized layer,
80% or more of the total metallized layer is a ceramic member. 3. A joined body, wherein a metal member is joined to the ceramic member according to claim 1 or 2 through the metallization layer and the brazing material layer. 4. A joined body, wherein another ceramic member is joined to the ceramic member according to claim 1 or 2 through the metallization layer and the brazing material layer. 5. Between the metallization layer and the brazing material layer,
The said claim 3 or 4 characterized by including the plating layer.
The joined body according to. 6. A vacuum switch container comprising the joined body according to any one of claims 3 to 5.