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FR3118175B1 - Procede d’inspection d’une surface d’un objet - Google Patents

Procede d’inspection d’une surface d’un objet Download PDF

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Publication number
FR3118175B1
FR3118175B1 FR2013633A FR2013633A FR3118175B1 FR 3118175 B1 FR3118175 B1 FR 3118175B1 FR 2013633 A FR2013633 A FR 2013633A FR 2013633 A FR2013633 A FR 2013633A FR 3118175 B1 FR3118175 B1 FR 3118175B1
Authority
FR
France
Prior art keywords
chromatic
intercepting
depth
image sensor
onto
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR2013633A
Other languages
English (en)
Other versions
FR3118175A1 (fr
Inventor
Tristan Combier
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Unity Semiconductor SAS
Original Assignee
Unity Semiconductor SAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Unity Semiconductor SAS filed Critical Unity Semiconductor SAS
Priority to FR2013633A priority Critical patent/FR3118175B1/fr
Priority to PCT/FR2021/052091 priority patent/WO2022129721A1/fr
Publication of FR3118175A1 publication Critical patent/FR3118175A1/fr
Application granted granted Critical
Publication of FR3118175B1 publication Critical patent/FR3118175B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/9501—Semiconductor wafers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2210/00—Aspects not specifically covered by any group under G01B, e.g. of wheel alignment, caliper-like sensors
    • G01B2210/50—Using chromatic effects to achieve wavelength-dependent depth resolution
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G01N2021/8845—Multiple wavelengths of illumination or detection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G01N2021/95638—Inspecting patterns on the surface of objects for PCB's
    • G01N2021/95661—Inspecting patterns on the surface of objects for PCB's for leads, e.g. position, curvature
    • G01N2021/95669—Inspecting patterns on the surface of objects for PCB's for leads, e.g. position, curvature for solder coating, coverage

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

L’invention concerne un procédé mettant en œuvre un dispositif d’inspection (1) d’une surface (S) d’un objet. Le dispositif comprend une source de lumière polychromatique (20) pour projeter un faisceau d’inspection sur la surface (S); un masque confocal (6a, 6b) interceptant le faisceau d’inspection et un faisceau réfléchi par la surface, présentant une pluralité d’ouvertures de filtrage chromatique; un système chromatique (3) étalant spatialement la focalisation du faisceau d’inspection selon des plans de focalisation le long d’un axe optique (AO) dans une profondeur de champ, interceptant le faisceau réfléchi pour le projeter sur un plan de détection (P) conjugué des plans de focalisation; un support mobile (4) pour positionner la surface (S) dans la profondeur de champ; un capteur d’image à intégration temporisée (5) synchronisé au déplacement de la surface, le capteur d’image (5) comprenant une matrice de photodétecteurs disposée dans le plan de détection (P), les ouvertures de filtrage chromatique du masque confocal éclairant une partie des photodétecteurs. Fig . 1
FR2013633A 2020-12-18 2020-12-18 Procede d’inspection d’une surface d’un objet Active FR3118175B1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
FR2013633A FR3118175B1 (fr) 2020-12-18 2020-12-18 Procede d’inspection d’une surface d’un objet
PCT/FR2021/052091 WO2022129721A1 (fr) 2020-12-18 2021-11-25 Procede d'inspection d'une surface d'un objet

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR2013633A FR3118175B1 (fr) 2020-12-18 2020-12-18 Procede d’inspection d’une surface d’un objet
FR2013633 2020-12-18

Publications (2)

Publication Number Publication Date
FR3118175A1 FR3118175A1 (fr) 2022-06-24
FR3118175B1 true FR3118175B1 (fr) 2025-05-30

Family

ID=74871572

Family Applications (1)

Application Number Title Priority Date Filing Date
FR2013633A Active FR3118175B1 (fr) 2020-12-18 2020-12-18 Procede d’inspection d’une surface d’un objet

Country Status (2)

Country Link
FR (1) FR3118175B1 (fr)
WO (1) WO2022129721A1 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2025008656A1 (fr) * 2023-07-06 2025-01-09 Unity Semiconductor Dispositif d'inspection de substrats

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19713362A1 (de) * 1997-03-29 1998-10-01 Zeiss Carl Jena Gmbh Konfokale mikroskopische Anordnung
GB0802478D0 (en) 2008-02-11 2008-03-19 Cmosis Nv Tiem delay integration in imaging device
FR2942533B1 (fr) 2009-02-25 2011-06-24 Altatech Semiconductor Dispositif et procede d'inspection de plaquettes semi-conductrices
TWI434022B (zh) * 2011-11-29 2014-04-11 Univ Nat Taipei Technology 彩色共焦顯微系統及其訊號處理方法
WO2016092348A1 (fr) * 2014-12-09 2016-06-16 Asentys Sas Dispositif optique integre de mesure sans contact d'altitudes et d'epaisseurs.
EP3222964B1 (fr) 2016-03-25 2020-01-15 Fogale Nanotech Dispositif et procédé confocal chromatique pour l'inspection 2d/3d d'un objet tel qu'une plaquette
EP3222965B1 (fr) * 2016-03-25 2020-01-15 Fogale Nanotech Dispositif et procédé confocal chromatique avec résolution spatiale variable pour l'inspection en 2d/3d d'un objet tel qu'une plaquette
US10317344B2 (en) * 2016-09-07 2019-06-11 Kla-Tencor Corporation Speed enhancement of chromatic confocal metrology
EP3431918B1 (fr) * 2017-07-20 2021-03-31 Fogale Nanotech Capteur confocal multicanal et procédé associé permettant d'inspecter un échantillon

Also Published As

Publication number Publication date
WO2022129721A1 (fr) 2022-06-23
FR3118175A1 (fr) 2022-06-24

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