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FR3118175B1 - METHOD FOR INSPECTING THE SURFACE OF AN OBJECT - Google Patents

METHOD FOR INSPECTING THE SURFACE OF AN OBJECT Download PDF

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Publication number
FR3118175B1
FR3118175B1 FR2013633A FR2013633A FR3118175B1 FR 3118175 B1 FR3118175 B1 FR 3118175B1 FR 2013633 A FR2013633 A FR 2013633A FR 2013633 A FR2013633 A FR 2013633A FR 3118175 B1 FR3118175 B1 FR 3118175B1
Authority
FR
France
Prior art keywords
chromatic
intercepting
depth
image sensor
onto
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR2013633A
Other languages
French (fr)
Other versions
FR3118175A1 (en
Inventor
Tristan Combier
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Unity Semiconductor SAS
Original Assignee
Unity Semiconductor SAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Unity Semiconductor SAS filed Critical Unity Semiconductor SAS
Priority to FR2013633A priority Critical patent/FR3118175B1/en
Priority to PCT/FR2021/052091 priority patent/WO2022129721A1/en
Publication of FR3118175A1 publication Critical patent/FR3118175A1/en
Application granted granted Critical
Publication of FR3118175B1 publication Critical patent/FR3118175B1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/9501—Semiconductor wafers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2210/00—Aspects not specifically covered by any group under G01B, e.g. of wheel alignment, caliper-like sensors
    • G01B2210/50—Using chromatic effects to achieve wavelength-dependent depth resolution
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G01N2021/8845—Multiple wavelengths of illumination or detection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G01N2021/95638—Inspecting patterns on the surface of objects for PCB's
    • G01N2021/95661—Inspecting patterns on the surface of objects for PCB's for leads, e.g. position, curvature
    • G01N2021/95669—Inspecting patterns on the surface of objects for PCB's for leads, e.g. position, curvature for solder coating, coverage

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

L’invention concerne un procédé mettant en œuvre un dispositif d’inspection (1) d’une surface (S) d’un objet. Le dispositif comprend une source de lumière polychromatique (20) pour projeter un faisceau d’inspection sur la surface (S); un masque confocal (6a, 6b) interceptant le faisceau d’inspection et un faisceau réfléchi par la surface, présentant une pluralité d’ouvertures de filtrage chromatique; un système chromatique (3) étalant spatialement la focalisation du faisceau d’inspection selon des plans de focalisation le long d’un axe optique (AO) dans une profondeur de champ, interceptant le faisceau réfléchi pour le projeter sur un plan de détection (P) conjugué des plans de focalisation; un support mobile (4) pour positionner la surface (S) dans la profondeur de champ; un capteur d’image à intégration temporisée (5) synchronisé au déplacement de la surface, le capteur d’image (5) comprenant une matrice de photodétecteurs disposée dans le plan de détection (P), les ouvertures de filtrage chromatique du masque confocal éclairant une partie des photodétecteurs. Fig . 1The invention relates to a method using a device (1) for inspecting a surface (S) of an object. The device comprises a polychromatic light source (20) for projecting an inspection beam onto the surface (S); a confocal mask (6a, 6b) intercepting the inspection beam and a beam reflected by the surface, having a plurality of chromatic filtering apertures; a chromatic system (3) spatially spreading the focus of the inspection beam according to focusing planes along an optical axis (AO) in a depth of field, intercepting the reflected beam to project it onto a detection plane (P) conjugate of the focusing planes; a movable support (4) for positioning the surface (S) in the depth of field; a time-integrated image sensor (5) synchronized to the movement of the surface, the image sensor (5) comprising a matrix of photodetectors arranged in the detection plane (P), the chromatic filtering apertures of the confocal mask illuminating a part of the photodetectors. Fig. 1

FR2013633A 2020-12-18 2020-12-18 METHOD FOR INSPECTING THE SURFACE OF AN OBJECT Active FR3118175B1 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
FR2013633A FR3118175B1 (en) 2020-12-18 2020-12-18 METHOD FOR INSPECTING THE SURFACE OF AN OBJECT
PCT/FR2021/052091 WO2022129721A1 (en) 2020-12-18 2021-11-25 Method for inspecting a surface of an object

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR2013633A FR3118175B1 (en) 2020-12-18 2020-12-18 METHOD FOR INSPECTING THE SURFACE OF AN OBJECT
FR2013633 2020-12-18

Publications (2)

Publication Number Publication Date
FR3118175A1 FR3118175A1 (en) 2022-06-24
FR3118175B1 true FR3118175B1 (en) 2025-05-30

Family

ID=74871572

Family Applications (1)

Application Number Title Priority Date Filing Date
FR2013633A Active FR3118175B1 (en) 2020-12-18 2020-12-18 METHOD FOR INSPECTING THE SURFACE OF AN OBJECT

Country Status (2)

Country Link
FR (1) FR3118175B1 (en)
WO (1) WO2022129721A1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2025008656A1 (en) * 2023-07-06 2025-01-09 Unity Semiconductor Device for inspecting substrates

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19713362A1 (en) * 1997-03-29 1998-10-01 Zeiss Carl Jena Gmbh Confocal microscopic arrangement
GB0802478D0 (en) 2008-02-11 2008-03-19 Cmosis Nv Tiem delay integration in imaging device
FR2942533B1 (en) 2009-02-25 2011-06-24 Altatech Semiconductor DEVICE AND METHOD FOR INSPECTING SEMICONDUCTOR WAFERS
TWI434022B (en) * 2011-11-29 2014-04-11 Univ Nat Taipei Technology Chromatic confocal microscope system and signal process method of the same
US10591279B2 (en) * 2014-12-09 2020-03-17 Asentys Sas Integrated optical device for contactless measurement of altitudes and thicknesses
EP3222964B1 (en) 2016-03-25 2020-01-15 Fogale Nanotech Chromatic confocal device and method for 2d/3d inspection of an object such as a wafer
EP3222965B1 (en) * 2016-03-25 2020-01-15 Fogale Nanotech Chromatic confocal device and method for 2d/3d inspection of an object such as a wafer with variable spatial resolution
US10317344B2 (en) * 2016-09-07 2019-06-11 Kla-Tencor Corporation Speed enhancement of chromatic confocal metrology
EP3431918B1 (en) * 2017-07-20 2021-03-31 Fogale Nanotech Multichannel confocal sensor and related method for inspecting a sample

Also Published As

Publication number Publication date
FR3118175A1 (en) 2022-06-24
WO2022129721A1 (en) 2022-06-23

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