FR3061607B1 - Dispositif optoelectronique a diodes electroluminescentes - Google Patents
Dispositif optoelectronique a diodes electroluminescentes Download PDFInfo
- Publication number
- FR3061607B1 FR3061607B1 FR1663507A FR1663507A FR3061607B1 FR 3061607 B1 FR3061607 B1 FR 3061607B1 FR 1663507 A FR1663507 A FR 1663507A FR 1663507 A FR1663507 A FR 1663507A FR 3061607 B1 FR3061607 B1 FR 3061607B1
- Authority
- FR
- France
- Prior art keywords
- light emitting
- shell
- semiconductor element
- optoelectronic device
- emitting diodes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 230000005693 optoelectronics Effects 0.000 title abstract 2
- 230000005855 radiation Effects 0.000 abstract 3
- 239000004065 semiconductor Substances 0.000 abstract 3
- 102000002151 Microfilament Proteins Human genes 0.000 abstract 1
- 108010040897 Microfilament Proteins Proteins 0.000 abstract 1
- 239000011248 coating agent Substances 0.000 abstract 1
- 238000000576 coating method Methods 0.000 abstract 1
- 210000003632 microfilament Anatomy 0.000 abstract 1
- 239000002070 nanowire Substances 0.000 abstract 1
- 230000003287 optical effect Effects 0.000 abstract 1
- 238000005086 pumping Methods 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H29/00—Integrated devices, or assemblies of multiple devices, comprising at least one light-emitting semiconductor element covered by group H10H20/00
- H10H29/10—Integrated devices comprising at least one light-emitting semiconductor component covered by group H10H20/00
- H10H29/14—Integrated devices comprising at least one light-emitting semiconductor component covered by group H10H20/00 comprising multiple light-emitting semiconductor components
- H10H29/142—Two-dimensional arrangements, e.g. asymmetric LED layout
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/80—Constructional details
- H10H20/81—Bodies
- H10H20/813—Bodies having a plurality of light-emitting regions, e.g. multi-junction LEDs or light-emitting devices having photoluminescent regions within the bodies
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/80—Constructional details
- H10H20/81—Bodies
- H10H20/817—Bodies characterised by the crystal structures or orientations, e.g. polycrystalline, amorphous or porous
- H10H20/818—Bodies characterised by the crystal structures or orientations, e.g. polycrystalline, amorphous or porous within the light-emitting regions
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/80—Constructional details
- H10H20/81—Bodies
- H10H20/819—Bodies characterised by their shape, e.g. curved or truncated substrates
- H10H20/821—Bodies characterised by their shape, e.g. curved or truncated substrates of the light-emitting regions, e.g. non-planar junctions
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/80—Constructional details
- H10H20/85—Packages
- H10H20/851—Wavelength conversion means
- H10H20/8511—Wavelength conversion means characterised by their material, e.g. binder
- H10H20/8512—Wavelength conversion materials
- H10H20/8513—Wavelength conversion materials having two or more wavelength conversion materials
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/80—Constructional details
- H10H20/85—Packages
- H10H20/851—Wavelength conversion means
- H10H20/8514—Wavelength conversion means characterised by their shape, e.g. plate or foil
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/80—Constructional details
- H10H20/85—Packages
- H10H20/852—Encapsulations
- H10H20/854—Encapsulations characterised by their material, e.g. epoxy or silicone resins
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
- H10D62/10—Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
- H10D62/117—Shapes of semiconductor bodies
- H10D62/118—Nanostructure semiconductor bodies
- H10D62/119—Nanowire, nanosheet or nanotube semiconductor bodies
- H10D62/122—Nanowire, nanosheet or nanotube semiconductor bodies oriented at angles to substrates, e.g. perpendicular to substrates
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
- H10D62/80—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials
- H10D62/81—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials of structures exhibiting quantum-confinement effects, e.g. single quantum wells; of structures having periodic or quasi-periodic potential variation
- H10D62/812—Single quantum well structures
- H10D62/813—Quantum wire structures
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
- H10D62/80—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials
- H10D62/81—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials of structures exhibiting quantum-confinement effects, e.g. single quantum wells; of structures having periodic or quasi-periodic potential variation
- H10D62/815—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials of structures exhibiting quantum-confinement effects, e.g. single quantum wells; of structures having periodic or quasi-periodic potential variation of structures having periodic or quasi-periodic potential variation, e.g. superlattices or multiple quantum wells [MQW]
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/01—Manufacture or treatment
- H10H20/036—Manufacture or treatment of packages
- H10H20/0361—Manufacture or treatment of packages of wavelength conversion means
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/01—Manufacture or treatment
- H10H20/036—Manufacture or treatment of packages
- H10H20/0362—Manufacture or treatment of packages of encapsulations
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/10—OLEDs or polymer light-emitting diodes [PLED]
- H10K50/11—OLEDs or polymer light-emitting diodes [PLED] characterised by the electroluminescent [EL] layers
- H10K50/115—OLEDs or polymer light-emitting diodes [PLED] characterised by the electroluminescent [EL] layers comprising active inorganic nanostructures, e.g. luminescent quantum dots
Landscapes
- Led Device Packages (AREA)
- Led Devices (AREA)
- Optical Filters (AREA)
Abstract
L'invention concerne un dispositif optoélectronique (5) comprenant des diodes électroluminescentes (LED), chaque diode électroluminescente comprenant un élément semiconducteur (22) correspondant à un nanofil, un microfil, et/ou une structure pyramidale de taille nanométrique ou micrométrique, et une coque (24) recouvrant au moins partiellement l'élément semiconducteur et adapté à émettre un rayonnement, et, pour chaque diode électroluminescente, un revêtement photoluminescent (28R, 28G, 28B) comprenant un puits quantique unique, des puits quantiques multiples ou une hétérostructure, recouvrant au moins en partie la coque et en contact avec la coque ou avec l'élément semiconducteur et adapté à convertir par pompage optique le rayonnement émis par la coque en un autre rayonnement.
Priority Applications (8)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR1663507A FR3061607B1 (fr) | 2016-12-29 | 2016-12-29 | Dispositif optoelectronique a diodes electroluminescentes |
| EP17822342.6A EP3563419B1 (fr) | 2016-12-29 | 2017-12-28 | Dispositif optoélectronique à diodes électroluminescentes et procédé de sa fabrication |
| JP2019535778A JP6872618B2 (ja) | 2016-12-29 | 2017-12-28 | 発光ダイオードを備えた光電子デバイス |
| CN201780086496.0A CN110301047B (zh) | 2016-12-29 | 2017-12-28 | 具有发光二极管的光电设备 |
| PCT/EP2017/084781 WO2018122358A1 (fr) | 2016-12-29 | 2017-12-28 | Dispositif optoélectronique à diodes électroluminescentes |
| TW106146180A TWI745518B (zh) | 2016-12-29 | 2017-12-28 | 具有發光二極體的光電裝置及其製造方法 |
| KR1020197021963A KR102501822B1 (ko) | 2016-12-29 | 2017-12-28 | 발광다이오드를 구비한 광전자장치 |
| US16/474,017 US10916579B2 (en) | 2016-12-29 | 2017-12-28 | Optoelectronic device with light-emitting diodes |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR1663507 | 2016-12-29 | ||
| FR1663507A FR3061607B1 (fr) | 2016-12-29 | 2016-12-29 | Dispositif optoelectronique a diodes electroluminescentes |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| FR3061607A1 FR3061607A1 (fr) | 2018-07-06 |
| FR3061607B1 true FR3061607B1 (fr) | 2019-05-31 |
Family
ID=59253561
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| FR1663507A Expired - Fee Related FR3061607B1 (fr) | 2016-12-29 | 2016-12-29 | Dispositif optoelectronique a diodes electroluminescentes |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US10916579B2 (fr) |
| EP (1) | EP3563419B1 (fr) |
| JP (1) | JP6872618B2 (fr) |
| KR (1) | KR102501822B1 (fr) |
| CN (1) | CN110301047B (fr) |
| FR (1) | FR3061607B1 (fr) |
| TW (1) | TWI745518B (fr) |
| WO (1) | WO2018122358A1 (fr) |
Families Citing this family (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR3061605B1 (fr) * | 2016-12-29 | 2019-05-31 | Aledia | Dispositif optoélectronique à diodes électroluminescentes |
| FR3096509B1 (fr) * | 2019-05-20 | 2021-05-28 | Aledia | Dispositif optoelectronique avec diodes electroluminescentes dont une zone dopee integre une portion externe a base d’aluminium et de nitrure de galium |
| US11462659B2 (en) * | 2019-09-10 | 2022-10-04 | Koito Manufacturing Co., Ltd. | Semiconductor light emitting device and manufacturing method of semiconductor light emitting device |
| FR3101730B1 (fr) * | 2019-10-08 | 2021-10-15 | Aledia | Procede de fabrication d'un dispositif optoelectronique |
| KR102730149B1 (ko) * | 2019-12-23 | 2024-11-15 | 루미레즈 엘엘씨 | Iii-질화물 다중 파장 led 어레이들 |
| US11404473B2 (en) | 2019-12-23 | 2022-08-02 | Lumileds Llc | III-nitride multi-wavelength LED arrays |
| US11923398B2 (en) | 2019-12-23 | 2024-03-05 | Lumileds Llc | III-nitride multi-wavelength LED arrays |
| FR3111236A1 (fr) * | 2020-06-03 | 2021-12-10 | Aledia | Dispositif électronique pour capture ou émission d’une grandeur physique et procédé de fabrication |
| KR20210156624A (ko) | 2020-06-18 | 2021-12-27 | 삼성전자주식회사 | 나노 막대 발광 소자 및 그 제조 방법 |
| FR3114682B1 (fr) * | 2020-09-29 | 2023-05-19 | Aledia | Dispositif optoelectronique a diodes electroluminescentes a affichage couleur |
| US11631786B2 (en) | 2020-11-12 | 2023-04-18 | Lumileds Llc | III-nitride multi-wavelength LED arrays with etch stop layer |
| FR3118291B1 (fr) * | 2020-12-17 | 2023-04-14 | Aledia | Dispositif optoélectronique à diodes électroluminescentes tridimensionnelles de type axial |
| JP7638489B2 (ja) * | 2021-02-01 | 2025-03-04 | 豊田合成株式会社 | 半導体素子および半導体素子の製造方法 |
| JP7612518B2 (ja) * | 2021-05-27 | 2025-01-14 | 株式会社小糸製作所 | 半導体発光素子および半導体発光素子の製造方法 |
| FR3125921B1 (fr) * | 2021-07-30 | 2023-07-07 | Commissariat Energie Atomique | Procédé de fabrication d’un dispositif optoélectronique comportant une étape de réalisation d’une couche mince conductrice de manière conforme et continue par dépôt directif |
| KR102453545B1 (ko) | 2021-11-30 | 2022-10-12 | 전남대학교산학협력단 | 나노막대를 포함하는 나노막대 발광 구조물, 발광소자 및 그 제조방법, 그의 패키지 및 이를 포함하는 조명장치 |
| CN117995652A (zh) | 2022-11-01 | 2024-05-07 | 苏州晶湛半导体有限公司 | 一种半导体结构 |
| TWI828466B (zh) * | 2022-12-08 | 2024-01-01 | 台亞半導體股份有限公司 | 光電二極體結構 |
| KR20250021886A (ko) * | 2023-08-07 | 2025-02-14 | 삼성전자주식회사 | 나노 막대 발광 소자 및 그 제조 방법, 및 나노 막대 발광 소자를 포함하는 디스플레이 장치 |
Family Cites Families (32)
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| US6096496A (en) * | 1997-06-19 | 2000-08-01 | Frankel; Robert D. | Supports incorporating vertical cavity emitting lasers and tracking apparatus for use in combinatorial synthesis |
| KR101008294B1 (ko) * | 2001-03-30 | 2011-01-13 | 더 리전트 오브 더 유니버시티 오브 캘리포니아 | 나노구조체 및 나노와이어의 제조 방법 및 그로부터 제조되는 디바이스 |
| KR100593264B1 (ko) * | 2003-06-26 | 2006-06-26 | 학교법인 포항공과대학교 | p-타입 반도체 박막과 n-타입 산화아연(ZnO)계나노막대의 이종접합 구조체, 이의 제법 및 이를 이용한소자 |
| US7662706B2 (en) * | 2003-11-26 | 2010-02-16 | Qunano Ab | Nanostructures formed of branched nanowhiskers and methods of producing the same |
| WO2007001098A1 (fr) * | 2005-06-25 | 2007-01-04 | Seoul Opto Device Co., Ltd. | Nanostructure comprenant un puits quantique à base de nitrure et diode électroluminescente l'utilisant |
| US7465954B2 (en) * | 2006-04-28 | 2008-12-16 | Hewlett-Packard Development Company, L.P. | Nanowire devices and systems, light-emitting nanowires, and methods of precisely positioning nanoparticles |
| KR100872281B1 (ko) * | 2006-12-15 | 2008-12-05 | 삼성전기주식회사 | 나노와이어 구조체를 이용한 반도체 발광소자 및 그제조방법 |
| US8426224B2 (en) * | 2006-12-18 | 2013-04-23 | The Regents Of The University Of California | Nanowire array-based light emitting diodes and lasers |
| JP5453105B2 (ja) * | 2006-12-22 | 2014-03-26 | クナノ アーベー | ナノ構造のled及びデバイス |
| US8525954B2 (en) * | 2007-06-27 | 2013-09-03 | General Electric Company | Three-dimensional display article |
| JP2010537408A (ja) * | 2007-08-14 | 2010-12-02 | ナイテック インコーポレイテッド | マイクロピクセル紫外発光ダイオード |
| US20100180950A1 (en) * | 2008-11-14 | 2010-07-22 | University Of Connecticut | Low-temperature surface doping/alloying/coating of large scale semiconductor nanowire arrays |
| KR101603777B1 (ko) * | 2009-04-16 | 2016-03-15 | 삼성전자주식회사 | 백색 발광 다이오드 |
| US9112085B2 (en) * | 2009-11-30 | 2015-08-18 | The Royal Institution For The Advancement Of Learning/Mcgill University | High efficiency broadband semiconductor nanowire devices |
| US8565281B2 (en) * | 2009-12-07 | 2013-10-22 | The Royal Institute For The Advancement Of Learning/Mcgill University | Method of pumping quantum dots |
| TWI401826B (zh) * | 2009-12-10 | 2013-07-11 | Walsin Lihwa Corp | 增益出光的發光裝置和其方法 |
| WO2011090863A1 (fr) * | 2010-01-19 | 2011-07-28 | Eastman Kodak Company | Nano-films semi-conducteurs à structure âme-enveloppe ii-vi |
| US8377729B2 (en) * | 2010-01-19 | 2013-02-19 | Eastman Kodak Company | Forming II-VI core-shell semiconductor nanowires |
| WO2011090963A2 (fr) * | 2010-01-21 | 2011-07-28 | Cornell University | Transformation de structure cristalline d'oxyde complexe de pérovskite en célite induite par une couche de getter pauvre en oxygène |
| US8879598B2 (en) * | 2011-08-11 | 2014-11-04 | Sensor Electronic Technology, Inc. | Emitting device with compositional and doping inhomogeneities in semiconductor layers |
| KR20130106690A (ko) * | 2012-03-20 | 2013-09-30 | 삼성전자주식회사 | 백색 발광 다이오드 |
| JP6382792B2 (ja) * | 2012-03-30 | 2018-08-29 | コーニンクレッカ フィリップス エヌ ヴェKoninklijke Philips N.V. | 発光デバイス及び波長変換材料を含む光学キャビティ |
| EP2898547A4 (fr) * | 2012-09-18 | 2016-04-27 | Glo Ab | Structure optoélectronique de taille nanopyramidale et son procédé de fabrication |
| US9537044B2 (en) | 2012-10-26 | 2017-01-03 | Aledia | Optoelectric device and method for manufacturing the same |
| KR101603207B1 (ko) * | 2013-01-29 | 2016-03-14 | 삼성전자주식회사 | 나노구조 반도체 발광소자 제조방법 |
| WO2014159036A1 (fr) * | 2013-03-14 | 2014-10-02 | The Government Of The United States Of America As Represented By The Secretary Of The Navy | Dispositif électroluminescent sur un substrat de mousse métallique |
| FR3011383B1 (fr) * | 2013-09-30 | 2017-05-26 | Commissariat Energie Atomique | Procede de fabrication de dispositifs optoelectroniques a diodes electroluminescentes |
| DE102013114466A1 (de) * | 2013-12-19 | 2015-06-25 | Osram Gmbh | Optoelektronisches Halbleiterbauteil und Verfahren zur Herstellung eines optoelektronischen Halbleiterbauteils |
| KR102188499B1 (ko) * | 2014-07-11 | 2020-12-09 | 삼성전자주식회사 | 나노구조 반도체 발광소자 |
| KR102237129B1 (ko) * | 2014-09-23 | 2021-04-08 | 엘지이노텍 주식회사 | 발광 소자 |
| FR3041152B1 (fr) * | 2015-09-10 | 2018-07-27 | Aledia | Dispositif electroluminescent a capteur de lumiere integre |
| FR3041153B1 (fr) * | 2015-09-10 | 2018-07-27 | Aledia | Dispositif electroluminescent a capteur de lumiere integre |
-
2016
- 2016-12-29 FR FR1663507A patent/FR3061607B1/fr not_active Expired - Fee Related
-
2017
- 2017-12-28 WO PCT/EP2017/084781 patent/WO2018122358A1/fr not_active Ceased
- 2017-12-28 KR KR1020197021963A patent/KR102501822B1/ko active Active
- 2017-12-28 US US16/474,017 patent/US10916579B2/en active Active
- 2017-12-28 TW TW106146180A patent/TWI745518B/zh active
- 2017-12-28 EP EP17822342.6A patent/EP3563419B1/fr active Active
- 2017-12-28 CN CN201780086496.0A patent/CN110301047B/zh active Active
- 2017-12-28 JP JP2019535778A patent/JP6872618B2/ja active Active
Also Published As
| Publication number | Publication date |
|---|---|
| EP3563419B1 (fr) | 2021-03-03 |
| TW201839969A (zh) | 2018-11-01 |
| KR20190099055A (ko) | 2019-08-23 |
| CN110301047B (zh) | 2023-04-28 |
| CN110301047A (zh) | 2019-10-01 |
| FR3061607A1 (fr) | 2018-07-06 |
| JP2020504449A (ja) | 2020-02-06 |
| EP3563419A1 (fr) | 2019-11-06 |
| KR102501822B1 (ko) | 2023-02-20 |
| TWI745518B (zh) | 2021-11-11 |
| US10916579B2 (en) | 2021-02-09 |
| US20190319066A1 (en) | 2019-10-17 |
| WO2018122358A1 (fr) | 2018-07-05 |
| JP6872618B2 (ja) | 2021-05-19 |
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