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FR2733854B1 - Dispositif de focalisation/dispersion de rayons x et procede de production de celui-ci - Google Patents

Dispositif de focalisation/dispersion de rayons x et procede de production de celui-ci

Info

Publication number
FR2733854B1
FR2733854B1 FR9603392A FR9603392A FR2733854B1 FR 2733854 B1 FR2733854 B1 FR 2733854B1 FR 9603392 A FR9603392 A FR 9603392A FR 9603392 A FR9603392 A FR 9603392A FR 2733854 B1 FR2733854 B1 FR 2733854B1
Authority
FR
France
Prior art keywords
producing
same
dispersion device
ray focusing
focusing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR9603392A
Other languages
English (en)
Other versions
FR2733854A1 (fr
Inventor
Masaki Koike
Isao Suzuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Publication of FR2733854A1 publication Critical patent/FR2733854A1/fr
Application granted granted Critical
Publication of FR2733854B1 publication Critical patent/FR2733854B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K7/00—Gamma- or X-ray microscopes
    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
    • G21K1/06—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diffraction, refraction or reflection, e.g. monochromators
    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K2201/00—Arrangements for handling radiation or particles
    • G21K2201/06—Arrangements for handling radiation or particles using diffractive, refractive or reflecting elements
    • G21K2201/067—Construction details

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
FR9603392A 1995-03-23 1996-03-19 Dispositif de focalisation/dispersion de rayons x et procede de production de celui-ci Expired - Fee Related FR2733854B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7063670A JP2690036B2 (ja) 1995-03-23 1995-03-23 Ｘ線分光集光素子

Publications (2)

Publication Number Publication Date
FR2733854A1 FR2733854A1 (fr) 1996-11-08
FR2733854B1 true FR2733854B1 (fr) 1998-05-15

Family

ID=13236028

Family Applications (1)

Application Number Title Priority Date Filing Date
FR9603392A Expired - Fee Related FR2733854B1 (fr) 1995-03-23 1996-03-19 Dispositif de focalisation/dispersion de rayons x et procede de production de celui-ci

Country Status (3)

Country Link
US (1) US5719915A (fr)
JP (1) JP2690036B2 (fr)
FR (1) FR2733854B1 (fr)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1125898A (ja) * 1997-05-08 1999-01-29 Hitachi Ltd 電子顕微鏡の分解能評価方法および分解能評価用試料
US6259764B1 (en) * 1999-07-16 2001-07-10 Agere Systems Guardian Corp. Zone plates for X-rays
FR2814548B1 (fr) * 2000-09-26 2003-02-21 Jobin Yvon S A Procede optique de diffraction de la lumiere, systeme optique et dispositif correspondants
DE10319269A1 (de) * 2003-04-25 2004-11-25 Carl Zeiss Sms Gmbh Abbildungssystem für ein, auf extrem ultravioletter (EUV) Strahlung basierendem Mikroskop
US7780893B2 (en) * 2006-04-03 2010-08-24 Molecular Imprints, Inc. Method of concurrently patterning a substrate having a plurality of fields and a plurality of alignment marks
JP5245749B2 (ja) * 2008-11-19 2013-07-24 住友電気工業株式会社 位相板および位相板製造方法
DE102010010937A1 (de) * 2009-10-26 2011-04-28 MAX-PLANCK-Gesellschaft zur Förderung der Wissenschaften e.V. Verfahren und Vorrichtung zur Herstellung einer Fresnel-Zonenplatte
EP2823489A2 (fr) 2012-03-08 2015-01-14 Max-Planck-Gesellschaft zur Förderung der Wissenschaften Procédé de production de plaque à zone de fresnel destinée à des applications de rayonnement à haute énergie

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2679474A (en) * 1949-12-31 1954-05-25 Pajes Wolf Szmul Process of making optical zone plates
US4243398A (en) * 1978-02-09 1981-01-06 Nippon Electric Co., Ltd. Method of producing dielectric diffraction gratings or dielectric multilayer interference filters
JPS5849841B2 (ja) * 1980-12-23 1983-11-07 株式会社東芝 フレネルゾ−ンプレ−トの製造方法
JPS6281602A (ja) * 1985-10-07 1987-04-15 Ulvac Corp Ｘ線用フレネルレンズの製造方法
JPH0289000A (ja) * 1988-09-27 1990-03-29 Ulvac Corp 積層型ｘ線フレネルゾーンプレート

Also Published As

Publication number Publication date
FR2733854A1 (fr) 1996-11-08
US5719915A (en) 1998-02-17
JPH08262197A (ja) 1996-10-11
JP2690036B2 (ja) 1997-12-10

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Legal Events

Date Code Title Description
ST Notification of lapse

Effective date: 20101130