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EP3454367A4 - Module semi-conducteur - Google Patents

Module semi-conducteur Download PDF

Info

Publication number
EP3454367A4
EP3454367A4 EP17885013.7A EP17885013A EP3454367A4 EP 3454367 A4 EP3454367 A4 EP 3454367A4 EP 17885013 A EP17885013 A EP 17885013A EP 3454367 A4 EP3454367 A4 EP 3454367A4
Authority
EP
European Patent Office
Prior art keywords
semiconductor module
semiconductor
module
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP17885013.7A
Other languages
German (de)
English (en)
Other versions
EP3454367B1 (fr
EP3454367A1 (fr
Inventor
Akio Kitamura
Shinichiro Adachi
Nobuhide ARAI
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Electric Co Ltd
Original Assignee
Fuji Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Electric Co Ltd filed Critical Fuji Electric Co Ltd
Publication of EP3454367A1 publication Critical patent/EP3454367A1/fr
Publication of EP3454367A4 publication Critical patent/EP3454367A4/fr
Application granted granted Critical
Publication of EP3454367B1 publication Critical patent/EP3454367B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/34Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/46Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements involving the transfer of heat by flowing fluids
    • H01L23/473Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements involving the transfer of heat by flowing fluids by flowing liquids
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/34Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/36Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
    • H01L23/373Cooling facilitated by selection of materials for the device or materials for thermal expansion adaptation, e.g. carbon
    • H01L23/3735Laminates or multilayers, e.g. direct bond copper ceramic substrates
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/52Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
    • H01L23/522Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
    • H01L23/532Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body characterised by the materials
    • H01L23/53204Conductive materials
    • H01L23/53209Conductive materials based on metals, e.g. alloys, metal silicides
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L25/00Assemblies consisting of a plurality of semiconductor or other solid state devices
    • H01L25/03Assemblies consisting of a plurality of semiconductor or other solid state devices all the devices being of a type provided for in a single subclass of subclasses H10B, H10D, H10F, H10H, H10K or H10N, e.g. assemblies of rectifier diodes
    • H01L25/04Assemblies consisting of a plurality of semiconductor or other solid state devices all the devices being of a type provided for in a single subclass of subclasses H10B, H10D, H10F, H10H, H10K or H10N, e.g. assemblies of rectifier diodes the devices not having separate containers
    • H01L25/07Assemblies consisting of a plurality of semiconductor or other solid state devices all the devices being of a type provided for in a single subclass of subclasses H10B, H10D, H10F, H10H, H10K or H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group subclass H10D
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L25/00Assemblies consisting of a plurality of semiconductor or other solid state devices
    • H01L25/18Assemblies consisting of a plurality of semiconductor or other solid state devices the devices being of the types provided for in two or more different main groups of the same subclass of H10B, H10D, H10F, H10H, H10K or H10N
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/40Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of at least one component covered by groups H10D12/00 or H10D30/00 with at least one component covered by groups H10D10/00 or H10D18/00, e.g. integration of IGFETs with BJTs
    • H10D84/401Combinations of FETs or IGBTs with BJTs
    • H10D84/403Combinations of FETs or IGBTs with BJTs and with one or more of diodes, resistors or capacitors

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Materials Engineering (AREA)
  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
EP17885013.7A 2016-12-20 2017-11-01 Module semi-conducteur Active EP3454367B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2016246597 2016-12-20
PCT/JP2017/039642 WO2018116653A1 (fr) 2016-12-20 2017-11-01 Module semi-conducteur

Publications (3)

Publication Number Publication Date
EP3454367A1 EP3454367A1 (fr) 2019-03-13
EP3454367A4 true EP3454367A4 (fr) 2019-07-17
EP3454367B1 EP3454367B1 (fr) 2021-08-25

Family

ID=62626211

Family Applications (1)

Application Number Title Priority Date Filing Date
EP17885013.7A Active EP3454367B1 (fr) 2016-12-20 2017-11-01 Module semi-conducteur

Country Status (5)

Country Link
US (1) US10756001B2 (fr)
EP (1) EP3454367B1 (fr)
JP (1) JP6645590B2 (fr)
CN (1) CN109219880B (fr)
WO (1) WO2018116653A1 (fr)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7086512B2 (ja) * 2019-07-05 2022-06-20 三菱電機株式会社 サーボアンプ
JP7459539B2 (ja) * 2020-02-07 2024-04-02 富士電機株式会社 半導体装置
JP7291290B2 (ja) * 2020-03-31 2023-06-14 マレリ株式会社 冷却装置
JP7347404B2 (ja) * 2020-11-30 2023-09-20 株式会社デンソー 電力変換装置
JP6984778B1 (ja) * 2021-05-20 2021-12-22 富士電機株式会社 冷却装置および冷却装置を備える半導体装置
JP2023023518A (ja) * 2021-08-05 2023-02-16 日本電産株式会社 液冷ジャケット、および冷却装置
JP2023154856A (ja) * 2022-04-08 2023-10-20 ニデック株式会社 液冷ジャケット、および冷却装置
JP7747596B2 (ja) * 2022-09-05 2025-10-01 フタバ産業株式会社 冷却器

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20010014029A1 (en) * 2000-02-16 2001-08-16 Osamu Suzuki Power inverter
US20120250253A1 (en) * 2010-01-08 2012-10-04 Toyota Jidosha Kabushiki Kaisha Semiconductor module
WO2013118869A1 (fr) * 2012-02-09 2013-08-15 日産自動車株式会社 Dispositif de refroidissement de semiconducteurs
US20140091453A1 (en) * 2012-10-02 2014-04-03 Kabushiki Kaisha Toyota Jidoshokki Cooling device and semiconductor device
WO2016194158A1 (fr) * 2015-06-03 2016-12-08 三菱電機株式会社 Refroidisseur à refroidissement par liquide, et procédé de fabrication d'ailette de radiateur dans un refroidisseur à refroidissement par liquide

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3982180B2 (ja) * 2000-02-16 2007-09-26 株式会社日立製作所 電力変換装置
JP2002141164A (ja) 2000-10-31 2002-05-17 Miyaden Co Ltd 大電力高周波誘導加熱用トランジスタインバータ装置
JP2003188326A (ja) * 2001-12-20 2003-07-04 Hitachi Ltd 冷却装置付電気機器
JP4789813B2 (ja) 2007-01-11 2011-10-12 トヨタ自動車株式会社 半導体素子の冷却構造
JP4777264B2 (ja) * 2007-01-11 2011-09-21 株式会社ティラド フィンタイプ液冷ヒートシンク
JP4920071B2 (ja) * 2009-11-12 2012-04-18 株式会社日本自動車部品総合研究所 半導体素子の冷却装置
JP5900506B2 (ja) * 2011-10-12 2016-04-06 富士電機株式会社 半導体モジュール用冷却器及び半導体モジュール
JP2013197483A (ja) * 2012-03-22 2013-09-30 Ihi Corp 冷却装置
JP6026808B2 (ja) 2012-08-03 2016-11-16 株式会社ティラド 積層型ヒートシンクのコア
CN104247009A (zh) * 2012-09-19 2014-12-24 富士电机株式会社 半导体装置以及半导体装置的制造方法
WO2014168913A1 (fr) * 2013-04-08 2014-10-16 Nuodb, Inc. Système de gestion de bases de données à hibernation et éclatement de bases de données
CN105408997B (zh) * 2013-09-04 2018-05-08 三菱电机株式会社 半导体模块以及逆变器装置
JP2015073012A (ja) * 2013-10-03 2015-04-16 富士電機株式会社 半導体装置
US10214109B2 (en) * 2013-11-28 2019-02-26 Fuji Electric Co., Ltd. Method for manufacturing cooler for semiconductor-module, cooler for semiconductor-module, semiconductor-module and electrically-driven vehicle

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20010014029A1 (en) * 2000-02-16 2001-08-16 Osamu Suzuki Power inverter
US20120250253A1 (en) * 2010-01-08 2012-10-04 Toyota Jidosha Kabushiki Kaisha Semiconductor module
WO2013118869A1 (fr) * 2012-02-09 2013-08-15 日産自動車株式会社 Dispositif de refroidissement de semiconducteurs
US20140091453A1 (en) * 2012-10-02 2014-04-03 Kabushiki Kaisha Toyota Jidoshokki Cooling device and semiconductor device
WO2016194158A1 (fr) * 2015-06-03 2016-12-08 三菱電機株式会社 Refroidisseur à refroidissement par liquide, et procédé de fabrication d'ailette de radiateur dans un refroidisseur à refroidissement par liquide
EP3306659A1 (fr) * 2015-06-03 2018-04-11 Mitsubishi Electric Corporation Refroidisseur à refroidissement par liquide, et procédé de fabrication d'ailette de radiateur dans un refroidisseur à refroidissement par liquide

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of WO2018116653A1 *

Also Published As

Publication number Publication date
EP3454367B1 (fr) 2021-08-25
CN109219880B (zh) 2022-06-14
JPWO2018116653A1 (ja) 2019-04-04
US10756001B2 (en) 2020-08-25
WO2018116653A1 (fr) 2018-06-28
JP6645590B2 (ja) 2020-02-14
CN109219880A (zh) 2019-01-15
EP3454367A1 (fr) 2019-03-13
US20190148265A1 (en) 2019-05-16

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