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EP3050118A1 - Procédé de fabrication d'une cellule solaire - Google Patents

Procédé de fabrication d'une cellule solaire

Info

Publication number
EP3050118A1
EP3050118A1 EP14776652.1A EP14776652A EP3050118A1 EP 3050118 A1 EP3050118 A1 EP 3050118A1 EP 14776652 A EP14776652 A EP 14776652A EP 3050118 A1 EP3050118 A1 EP 3050118A1
Authority
EP
European Patent Office
Prior art keywords
dopant
layer
solar cell
diffusion barrier
diffusion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP14776652.1A
Other languages
German (de)
English (en)
Inventor
Tim Boescke
Daniel Kania
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ion Beam Services SA
Original Assignee
Ion Beam Services SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ion Beam Services SA filed Critical Ion Beam Services SA
Publication of EP3050118A1 publication Critical patent/EP3050118A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F10/00—Individual photovoltaic cells, e.g. solar cells
    • H10F10/10—Individual photovoltaic cells, e.g. solar cells having potential barriers
    • H10F10/14—Photovoltaic cells having only PN homojunction potential barriers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F10/00—Individual photovoltaic cells, e.g. solar cells
    • H10F10/10—Individual photovoltaic cells, e.g. solar cells having potential barriers
    • H10F10/14—Photovoltaic cells having only PN homojunction potential barriers
    • H10F10/146—Back-junction photovoltaic cells, e.g. having interdigitated base-emitter regions on the back side
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F10/00—Individual photovoltaic cells, e.g. solar cells
    • H10F10/10—Individual photovoltaic cells, e.g. solar cells having potential barriers
    • H10F10/14—Photovoltaic cells having only PN homojunction potential barriers
    • H10F10/148—Double-emitter photovoltaic cells, e.g. bifacial photovoltaic cells
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F71/00—Manufacture or treatment of devices covered by this subclass
    • H10F71/121—The active layers comprising only Group IV materials
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F71/00—Manufacture or treatment of devices covered by this subclass
    • H10F71/128—Annealing
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F71/00—Manufacture or treatment of devices covered by this subclass
    • H10F71/129—Passivating
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00—Constructional details of devices covered by this subclass
    • H10F77/10—Semiconductor bodies
    • H10F77/16—Material structures, e.g. crystalline structures, film structures or crystal plane orientations
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00—Constructional details of devices covered by this subclass
    • H10F77/30—Coatings
    • H10F77/306—Coatings for devices having potential barriers
    • H10F77/311—Coatings for devices having potential barriers for photovoltaic cells
    • H10F77/315—Coatings for devices having potential barriers for photovoltaic cells the coatings being antireflective or having enhancing optical properties
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00—Constructional details of devices covered by this subclass
    • H10F77/70—Surface textures, e.g. pyramid structures
    • H10F77/703—Surface textures, e.g. pyramid structures of the semiconductor bodies, e.g. textured active layers
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy
    • Y02E10/547—Monocrystalline silicon PV cells
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product

Definitions

  • the invention relates to a method for producing a solar cell made of crystalline semiconductor material, wherein in a first surface of a semiconductor substrate, a first doping region by thermal diffusion of a first dopant and in the second surface of the semiconductor substrate, a second doping region with a second
  • Crystalline silicon solar cells have also recently undergone significant new developments, such as the solar cells of the o. G. Type (especially the so-called n-PERT solar cells) count.
  • a prominent example is bifacial n-type solar cells with a boron-doped emitter on the front and a phosphor-doped back surface field (BSF) on the back of the cell.
  • BSF back surface field
  • the invention provides a method having the features of claim 1.
  • Advantageous developments of the inventive concept are the subject of the dependent claims.
  • the invention adopts a hybrid approach in which only the phosphorus-doped regions (or, more generally, second dopant regions) are prepared by ion implantation and in boron doping (or more generally doping with the first dopant) are based on established approaches such as gas phase diffusion or doping glasses becomes. in the
  • a covering layer which acts primarily as a diffusion barrier layer is formed on that surface in which the second doping regions have been formed, in order to prevent and at least severely impede diffusion of the first dopant there.
  • the efficient implementation entails a number of problems, the solution of which, based on the above-mentioned concept, ultimately leads to the implementation of the invention which is optimal from a world viewpoint.
  • the preferred process sequence of the present invention is characterized in that the thermal budget of boron diffusion (or diffusion of the first dopant) is used simultaneously to activate the implanted phosphor region (or more generally, the dopant deposit layer of the second dopant).
  • a key feature is that after phosphorus ion implantation and before boron diffusion, a multifunctional covering layer on the phosphorus phor Scheme is deposited.
  • the cover layer has at least the property of serving as an (in) diffusion barrier for the first dopant (eg boron) and thus preventing it from penetrating into the dopant end deposit layer of the second dopant (especially phosphorus).
  • the cover layer has further properties / functions:
  • It can act as a (diffusion) diffusion barrier for phosphorus (or more generally, the second dopant).
  • Antimony-containing group in particular phosphorus.
  • the dopant combination boron / phosphorus which has been mentioned in detail several times above, is of great practical importance with a view to younger, more effectively increasing solar cell developments.
  • the proposed method can be carried out as a method for producing a bilaterally contacted solar cell with front-side emitter or a solar cell with rear-side emitter or a MWT (metal wrap-through) solar cell or an IBC (Interdigitad Back Contact) solar cell.
  • the first impurity region may be formed as an emitter region in the front surface of an n-type silicon substrate and the second impurity region may be formed as a back surface field in the back surface of the n-type silicon substrate.
  • the doping profile of the second doping region relative to that of the first doping region is flatter and / or characterized by a higher surface concentration of the second dopant compared to the first dopant.
  • the method is configured such that the formation of the first doping region comprises coating the first and optionally second surfaces with a glass containing the first dopant or providing the first dopant in the gaseous state in a process atmosphere.
  • FIGURE shows a schematic cross-sectional representation in the solar cell according to the invention.
  • the single figure shows schematically in a cross-sectional representation a solar cell 1 with an n-type crystalline silicon substrate 3 and a pyramid-like structured first (front) surface 3a and second (rear) surface 3b.
  • a first doping region (emitter region) 5 is formed in the first surface 3a.
  • a flat back surface field 7 is formed by phosphor implantation and subsequent annealing / activation as a second doping region.
  • a dense silicon nitride layer or SiN-containing double layer 9a or 9b is deposited as antireflection layer in each case.
  • the backside silicon nitride film 9b is a film formed in the back surface 3b after phosphorus implantation but formed in the semiconductor substrate before a step of boron diffusion and left there after a thermal diffusion step.
  • the antireflection layer may be supplemented by an additional partial layer of an oxide (such as silicon oxide), which improves the passivation properties of the layer, but is not shown in the figure.
  • an oxide such as silicon oxide
  • the sequence of manufacture of this solar cell includes the below-mentioned process modules in this order, each process module consisting of one or more process steps.
  • Process module 1 Texturing of the wafer
  • the wafer can be planarized on the back side.
  • several methods are prior art and not relevant to the explanation of the invention.
  • Process module 2 Formation of the dopant deposit layer (Phosphor implantation) Phosphorus is implanted in the back of the cell (eg one dose
  • the sheet resistance of the phosphor layer after annealing (step 4) is 10-300 ohms / square, preferably 30-120 ohms / square. In an extended embodiment, the
  • Implantation selectively, so that the dose is higher below the metallization.
  • the implantation may be masked such that an undoped area of 50-1000 ⁇ m width is created between the wafer edge and phosphorus doping in order to ensure electrical isolation between the BSF and the emitter.
  • the wafer may optionally be cleaned to remove unwanted phosphor residue and contamination. This can be done in one embodiment by a wet chemical process with one or more steps in water, dilute HF, HN0 3 or H 2 0 2 / HCI. In another embodiment, the purification can be carried out by a plasma process with a hydrogen, oxygen and / or fluorine-containing atmosphere.
  • Process module 3 Generation of the diffusion barrier layer
  • the cover layer (diffusion barrier layer) on the second substrate surface prevents boron from diffusing into it and is impermeable to oxygen. Furthermore, it is intended to ensure a good passivation, as well as to act as an antireflection coating in the use of the bifacial solar cell.
  • the thickness of the Layer is between 1 nm and 250 nm, preferably 30-80 nm.
  • the cap layer is deposited by a PECVD process with a process chemistry of one or more gases of the group SiH 4 , N 2 , NH 3 , H 2 , Ar.
  • the cover layer with other methods, such. As LPCVD, APCVD or PVD are applied.
  • a layer stack in which a Si0 2 , Al 2 O 3 , TiO or SiON layer is introduced between silicon and SiN, which layer can improve the electrical passivating shafts. (0.5-50 nm, preferably 5 nm)
  • a layer of amorphous or polycrystalline silicon can additionally be introduced into the layer stack. (0.5-30 nm, preferably 20 nm).
  • Process module 4 boron diffusion and at the same time phosphor activation
  • the boron diffusion is carried out by a furnace process in which the wafer is first covered with boron glass in a boron-containing atmosphere.
  • Common procursors are BBr 3 and BCI 3 , further process gases N 2 and 0 2 .
  • a drive-in step takes place in situ in an inert or oxygen-containing atmosphere.
  • document and Eintreib Kunststoffe are at least partially in
  • Another possibility is the deposition of a boron glass on the front of the cell (eg by APCVD or PECVD) and subsequent driving in a separate process step.
  • the Bordiffusions Council is mainly characterized by the sheet resistance, which is in particular between 30 and 200 ohms / sq, preferably at 45-100 ohms / sq.
  • the boron diffusion simultaneously causes the annealing and activation of the phosphorus-doped region.
  • the phosphorus also diffuses deeper into the substrate, but through the process with the multifunctional layer slower than the boron.
  • the depths of the diffusion regions are between 30 nm and 2500 nm, preferably 400-1000 nm, the depth of the boron preferably being greater than that of the phosphor.
  • Process module 5 front side passivation
  • Embodiment is not relevant to the invention.
  • the boron glass possibly formed in the process module 4 may have to be removed from the front side, which according to the state of the art can be done with a dilute HF solution.
  • Process Module 6 Optional Additional Backside Passivation If the diffusion barrier layer formed in process module 3 does not simultaneously act as electrical passivation of the cell backside, it must be removed and replaced with an additional passivation layer. Removal of the topcoat may be accomplished by an extended RF step along with the boron glass removal in step 5.
  • an SiO / SiN or SiN layer can be used.
  • Process module 7 metallization
  • the metallization can be done by industry standard methods and is not relevant to the invention.
  • the front side metallization is usually done with a silver grid.
  • the backside metallization is also carried out with a silver grid or a full-surface aluminum metallization with local contacts, which z. B. by laser ablation and PVD is produced.

Landscapes

  • Photovoltaic Devices (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Sustainable Development (AREA)
  • Engineering & Computer Science (AREA)
  • Sustainable Energy (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)

Abstract

La présente invention concerne un procédé de fabrication d'une cellule solaire (1) à partir d'un matériau semi-conducteur cristallin. Dans une première surface (3a) d'un substrat semi-conducteur (3) est formée une première zone de dopage (5) par diffusion thermique d'un premier dopant, et dans la seconde surface (3b) du substrat semi-conducteur est formée une seconde zone de dopage (7) par implantation ionique et par implantation thermique d'un second dopant.
EP14776652.1A 2013-09-27 2014-09-26 Procédé de fabrication d'une cellule solaire Withdrawn EP3050118A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102013219603.2A DE102013219603A1 (de) 2013-09-27 2013-09-27 Verfahren zur Herstellung einer Solarzelle
PCT/EP2014/070613 WO2015044342A1 (fr) 2013-09-27 2014-09-26 Procédé de fabrication d'une cellule solaire

Publications (1)

Publication Number Publication Date
EP3050118A1 true EP3050118A1 (fr) 2016-08-03

Family

ID=51626040

Family Applications (1)

Application Number Title Priority Date Filing Date
EP14776652.1A Withdrawn EP3050118A1 (fr) 2013-09-27 2014-09-26 Procédé de fabrication d'une cellule solaire

Country Status (6)

Country Link
US (1) US20160240724A1 (fr)
EP (1) EP3050118A1 (fr)
KR (1) KR20160061409A (fr)
CN (1) CN105723520A (fr)
DE (1) DE102013219603A1 (fr)
WO (1) WO2015044342A1 (fr)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11075316B2 (en) 2015-10-25 2021-07-27 Solaround Ltd. Method of bifacial cell fabrication
CN109311738A (zh) * 2016-06-13 2019-02-05 康宁股份有限公司 耐刮擦且光学透明的材料和制品
CN107256898B (zh) * 2017-05-18 2018-08-03 广东爱旭科技股份有限公司 管式perc双面太阳能电池及其制备方法和专用设备
CN109301031B (zh) * 2018-09-12 2021-08-31 江苏林洋光伏科技有限公司 N型双面电池的制作方法
WO2020240544A1 (fr) * 2019-05-29 2020-12-03 Solaround Ltd. Procédé de fabrication de cellule photovoltaïque bifaciale

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Also Published As

Publication number Publication date
KR20160061409A (ko) 2016-05-31
US20160240724A1 (en) 2016-08-18
WO2015044342A1 (fr) 2015-04-02
CN105723520A (zh) 2016-06-29
DE102013219603A1 (de) 2015-04-02

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