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EP2791618A4 - Caractérisation de surface sans contact utilisant un éclairage modulé - Google Patents

Caractérisation de surface sans contact utilisant un éclairage modulé

Info

Publication number
EP2791618A4
EP2791618A4 EP11879165.6A EP11879165A EP2791618A4 EP 2791618 A4 EP2791618 A4 EP 2791618A4 EP 11879165 A EP11879165 A EP 11879165A EP 2791618 A4 EP2791618 A4 EP 2791618A4
Authority
EP
European Patent Office
Prior art keywords
contact surface
modulated illumination
surface characterization
characterization
modulated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP11879165.6A
Other languages
German (de)
English (en)
Other versions
EP2791618A2 (fr
Inventor
De Lega Xavier M Colonna
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Zygo Corp
Original Assignee
Zygo Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Zygo Corp filed Critical Zygo Corp
Publication of EP2791618A2 publication Critical patent/EP2791618A2/fr
Publication of EP2791618A4 publication Critical patent/EP2791618A4/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G01B11/2518—Projection by scanning of the object
    • G01B11/2527—Projection by scanning of the object with phase change by in-plane movement of the patern

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Microscoopes, Condenser (AREA)
EP11879165.6A 2011-12-12 2011-12-12 Caractérisation de surface sans contact utilisant un éclairage modulé Withdrawn EP2791618A4 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/US2011/064417 WO2013105922A2 (fr) 2011-12-12 2011-12-12 Caractérisation de surface sans contact utilisant un éclairage modulé

Publications (2)

Publication Number Publication Date
EP2791618A2 EP2791618A2 (fr) 2014-10-22
EP2791618A4 true EP2791618A4 (fr) 2015-07-29

Family

ID=48782047

Family Applications (1)

Application Number Title Priority Date Filing Date
EP11879165.6A Withdrawn EP2791618A4 (fr) 2011-12-12 2011-12-12 Caractérisation de surface sans contact utilisant un éclairage modulé

Country Status (3)

Country Link
EP (1) EP2791618A4 (fr)
JP (1) JP2015505039A (fr)
WO (1) WO2013105922A2 (fr)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014125037A1 (fr) 2013-02-13 2014-08-21 3Shape A/S Couleur d'enregistrement d'appareil de balayage à focalisation
DE102013218231A1 (de) * 2013-09-11 2015-03-12 Sirona Dental Systems Gmbh Optisches System zur Erzeugung eines sich zeitlich ändernden Musters für ein Konfokalmikroskop
CN106796160B (zh) * 2014-08-15 2021-01-12 齐戈股份有限公司 透镜和透镜模具的光学评价
TWI702732B (zh) * 2014-10-20 2020-08-21 加拿大商奧羅拉太陽能技術（加拿大）有限公司 量測資料對生產工具位置及處理批次或時間的映射
DE102015209402A1 (de) * 2015-05-22 2016-11-24 Sirona Dental Systems Gmbh Vorrichtung zur optischen 3D-Vermessung eines Objekts
KR101677585B1 (ko) * 2015-05-27 2016-11-18 선문대학교 산학협력단 고속 초점위치 이동을 위해 다중파장 광원을 이용하는 3차원 형상 측정장치
JP6627871B2 (ja) * 2015-06-08 2020-01-08 株式会社ニコン 構造化照明顕微鏡システム、方法及びプログラム
US10445894B2 (en) * 2016-05-11 2019-10-15 Mitutoyo Corporation Non-contact 3D measuring system
JP7086330B2 (ja) * 2017-10-06 2022-06-20 アドバンスド スキャナーズ，インコーポレイテッド 物体の三次元モデルを形成するための１つ又は複数の光度エッジの生成
CN112804513B (zh) * 2021-01-05 2023-02-17 暨南大学 一种光场相机及成像方法
TW202509451A (zh) * 2022-10-14 2025-03-01 美商賽博光學股份有限公司 同步調變、選通和積分三維感測器

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1471327A2 (fr) * 2003-03-31 2004-10-27 Mitutoyo Corporation Procédé et appareil pour la mesure sans contact de surfaces trois dimensionelles
US20090103103A1 (en) * 2007-10-18 2009-04-23 Mht Optic Research Ag Device for tomographic scanning objects
US20110287387A1 (en) * 2009-04-16 2011-11-24 Carestream Health, Inc. System and method for detecting tooth cracks

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5837507U (ja) * 1981-09-08 1983-03-11 株式会社リコー 曲面度検査器
DK0888522T3 (da) * 1996-03-22 2001-08-27 Univ Loughborough Fremgangsmåde og apparatur til måling af formen af genstande
JP3616999B2 (ja) * 2001-12-04 2005-02-02 レーザーテック株式会社 コンフォーカル顕微鏡
JP2006276561A (ja) * 2005-03-30 2006-10-12 Hamamatsu Univ School Of Medicine ファイバ共焦点顕微鏡における生体用対物レンズ
JP5018076B2 (ja) * 2006-12-22 2012-09-05 ソニー株式会社 光造形装置及び光造形方法
WO2008151266A2 (fr) * 2007-06-05 2008-12-11 Zygo Corporation Interférométrie pour déterminer des caractéristiques de la surface d'un objet à l'aide d'un éclairage spatialement cohérent
WO2009149178A1 (fr) * 2008-06-05 2009-12-10 Trustees Of Boston University Système et procédé pour produire une image à section optique utilisant à la fois un éclairage structuré et un éclairage uniforme
US7978346B1 (en) * 2009-02-18 2011-07-12 University Of Central Florida Research Foundation, Inc. Methods and systems for realizing high resolution three-dimensional optical imaging
WO2010145669A1 (fr) * 2009-06-17 2010-12-23 3Shape A/S Appareil d'exploration à focalisation
KR101080382B1 (ko) * 2009-09-15 2011-11-04 광주과학기술원 공초점 레이저 주사 현미경
JP4666272B1 (ja) * 2009-10-19 2011-04-06 住友金属工業株式会社 板材の平坦度測定方法及びこれを用いた鋼板の製造方法
EP2327956B1 (fr) * 2009-11-20 2014-01-22 Mitutoyo Corporation Procédé et appareil pour déterminer la hauteur d'un nombre de positions spatiales sur un échantillon

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1471327A2 (fr) * 2003-03-31 2004-10-27 Mitutoyo Corporation Procédé et appareil pour la mesure sans contact de surfaces trois dimensionelles
US20090103103A1 (en) * 2007-10-18 2009-04-23 Mht Optic Research Ag Device for tomographic scanning objects
US20110287387A1 (en) * 2009-04-16 2011-11-24 Carestream Health, Inc. System and method for detecting tooth cracks

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
ISHIHARA M ET AL: "THREE-DIMENSIONAL SURFACE MEASUREMENT USING GRATING PROJECTION METHOD BY DETECTING PHASE AND CONTRAST", PROCEEDINGS OF SPIE, S P I E - INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING, US, vol. 3740, 1 January 1999 (1999-01-01), pages 114 - 117, XP000913843, ISSN: 0277-786X, DOI: 10.1117/12.347778 *
KLAUS KÖRNER ET AL: "One-grating projection for absolute three-dimensional profiling", OPTICAL ENGINEERING, SOC. OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS, BELLINGHAM, vol. 40, no. 8, 1 August 2001 (2001-08-01), pages 1653 - 1660, XP002505180, ISSN: 0091-3286, DOI: 10.1117/1.1385509 *

Also Published As

Publication number Publication date
WO2013105922A2 (fr) 2013-07-18
EP2791618A2 (fr) 2014-10-22
JP2015505039A (ja) 2015-02-16
WO2013105922A3 (fr) 2013-09-19

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Legal Events

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PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

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Effective date: 20150626

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