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EP2791618A4 - Non-contact surface characterization using modulated illumination - Google Patents

Non-contact surface characterization using modulated illumination

Info

Publication number
EP2791618A4
EP2791618A4 EP11879165.6A EP11879165A EP2791618A4 EP 2791618 A4 EP2791618 A4 EP 2791618A4 EP 11879165 A EP11879165 A EP 11879165A EP 2791618 A4 EP2791618 A4 EP 2791618A4
Authority
EP
European Patent Office
Prior art keywords
contact surface
modulated illumination
surface characterization
characterization
modulated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP11879165.6A
Other languages
German (de)
French (fr)
Other versions
EP2791618A2 (en
Inventor
De Lega Xavier M Colonna
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Zygo Corp
Original Assignee
Zygo Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Zygo Corp filed Critical Zygo Corp
Publication of EP2791618A2 publication Critical patent/EP2791618A2/en
Publication of EP2791618A4 publication Critical patent/EP2791618A4/en
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G01B11/2518—Projection by scanning of the object
    • G01B11/2527—Projection by scanning of the object with phase change by in-plane movement of the patern

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Microscoopes, Condenser (AREA)
EP11879165.6A 2011-12-12 2011-12-12 Non-contact surface characterization using modulated illumination Withdrawn EP2791618A4 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/US2011/064417 WO2013105922A2 (en) 2011-12-12 2011-12-12 Non-contact surface characterization using modulated illumination

Publications (2)

Publication Number Publication Date
EP2791618A2 EP2791618A2 (en) 2014-10-22
EP2791618A4 true EP2791618A4 (en) 2015-07-29

Family

ID=48782047

Family Applications (1)

Application Number Title Priority Date Filing Date
EP11879165.6A Withdrawn EP2791618A4 (en) 2011-12-12 2011-12-12 Non-contact surface characterization using modulated illumination

Country Status (3)

Country Link
EP (1) EP2791618A4 (en)
JP (1) JP2015505039A (en)
WO (1) WO2013105922A2 (en)

Families Citing this family (11)

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US9962244B2 (en) 2013-02-13 2018-05-08 3Shape A/S Focus scanning apparatus recording color
DE102013218231A1 (en) * 2013-09-11 2015-03-12 Sirona Dental Systems Gmbh Optical system for generating a time-varying pattern for a confocal microscope
JP6542355B2 (en) * 2014-08-15 2019-07-10 ザイゴ コーポレーションＺｙｇｏ Ｃｏｒｐｏｒａｔｉｏｎ Optical evaluation of lenses and lens molds
TWI702732B (en) * 2014-10-20 2020-08-21 加拿大商奧羅拉太陽能技術（加拿大）有限公司 Mapping of measurement data to production tool location and batch or time of processing
DE102015209402A1 (en) * 2015-05-22 2016-11-24 Sirona Dental Systems Gmbh Device for optical 3D measurement of an object
KR101677585B1 (en) * 2015-05-27 2016-11-18 선문대학교 산학협력단 3-D Shape Mesuring Apparatus Using Multi Frequency light Source For High Speed Foucs Position Movement
JP6627871B2 (en) 2015-06-08 2020-01-08 株式会社ニコン Structured illumination microscope system, method and program
US10445894B2 (en) * 2016-05-11 2019-10-15 Mitutoyo Corporation Non-contact 3D measuring system
AU2018346758B2 (en) * 2017-10-06 2022-11-03 Visie Inc. Generation of one or more edges of luminosity to form three-dimensional models of objects
CN112804513B (en) * 2021-01-05 2023-02-17 暨南大学 A light field camera and imaging method
TW202509451A (en) * 2022-10-14 2025-03-01 美商賽博光學股份有限公司 Synchronous modulate, gate and integrate 3d sensor

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1471327A2 (en) * 2003-03-31 2004-10-27 Mitutoyo Corporation Method and apparatus for non-contact three-dimensional surface measurement
US20090103103A1 (en) * 2007-10-18 2009-04-23 Mht Optic Research Ag Device for tomographic scanning objects
US20110287387A1 (en) * 2009-04-16 2011-11-24 Carestream Health, Inc. System and method for detecting tooth cracks

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JPS5837507U (en) * 1981-09-08 1983-03-11 株式会社リコー Curvature tester
AU2035597A (en) * 1996-03-22 1997-10-17 Loughborough University Innovations Limited Method and apparatus for measuring shape of objects
JP3616999B2 (en) * 2001-12-04 2005-02-02 レーザーテック株式会社 Confocal microscope
JP2006276561A (en) * 2005-03-30 2006-10-12 Hamamatsu Univ School Of Medicine Biological objective lens in fiber confocal microscope
JP5018076B2 (en) * 2006-12-22 2012-09-05 ソニー株式会社 Stereolithography apparatus and stereolithography method
WO2008151266A2 (en) * 2007-06-05 2008-12-11 Zygo Corporation Interferometry for determining characteristics of an object surface, with spatially coherent illumination
US8310532B2 (en) * 2008-06-05 2012-11-13 Trustees Of Boston University System and method for producing an optically sectioned image using both structured and uniform illumination
US7978346B1 (en) * 2009-02-18 2011-07-12 University Of Central Florida Research Foundation, Inc. Methods and systems for realizing high resolution three-dimensional optical imaging
AU2010262191B2 (en) * 2009-06-17 2015-04-23 3Shape A/S Focus scanning apparatus
KR101080382B1 (en) * 2009-09-15 2011-11-04 광주과학기술원 Confocal laser scanning microscope
EP2492634B1 (en) * 2009-10-19 2017-05-10 Nippon Steel & Sumitomo Metal Corporation Method of measuring flatness of sheet and method of manufacturing steel sheet using same
EP2327956B1 (en) * 2009-11-20 2014-01-22 Mitutoyo Corporation Method and apparatus for determining the height of a number of spatial positions on a sample

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1471327A2 (en) * 2003-03-31 2004-10-27 Mitutoyo Corporation Method and apparatus for non-contact three-dimensional surface measurement
US20090103103A1 (en) * 2007-10-18 2009-04-23 Mht Optic Research Ag Device for tomographic scanning objects
US20110287387A1 (en) * 2009-04-16 2011-11-24 Carestream Health, Inc. System and method for detecting tooth cracks

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
ISHIHARA M ET AL: "THREE-DIMENSIONAL SURFACE MEASUREMENT USING GRATING PROJECTION METHOD BY DETECTING PHASE AND CONTRAST", PROCEEDINGS OF SPIE, S P I E - INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING, US, vol. 3740, 1 January 1999 (1999-01-01), pages 114 - 117, XP000913843, ISSN: 0277-786X, DOI: 10.1117/12.347778 *
KLAUS KÖRNER ET AL: "One-grating projection for absolute three-dimensional profiling", OPTICAL ENGINEERING, SOC. OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS, BELLINGHAM, vol. 40, no. 8, 1 August 2001 (2001-08-01), pages 1653 - 1660, XP002505180, ISSN: 0091-3286, DOI: 10.1117/1.1385509 *

Also Published As

Publication number Publication date
JP2015505039A (en) 2015-02-16
WO2013105922A2 (en) 2013-07-18
WO2013105922A3 (en) 2013-09-19
EP2791618A2 (en) 2014-10-22

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Legal Events

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A4 Supplementary search report drawn up and despatched

Effective date: 20150626

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